JP6955900B2 - Processing equipment - Google Patents

Description

The present invention relates to a processing apparatus for carrying out and processing a plate-shaped work from a cassette.

In processing equipment such as cutting equipment and grinding equipment, plate-shaped workpieces to be processed are housed in a cassette in a shelf shape, and the plate-shaped workpieces are carried out one by one from the cassette, transported to a holding table, and held. The plate-shaped work held on the table is processed.

When the plate-shaped work is carried out from the cassette, the grip portion that grips the plate-shaped work is inserted through the opening of the cassette, and the unnecessary portion of the outer peripheral edge of the plate-shaped work is gripped and the grip portion is retracted from the cassette (. For example, see Patent Document 1). Here, the unnecessary portion is, for example, a portion where the device is not formed when the plate-shaped workpiece is a semiconductor wafer, and even if it is scratched by gripping, the quality of the device is not affected.

Japanese Unexamined Patent Publication No. 2014-75500

However, when there is no unnecessary portion on the outer peripheral edge of the plate-shaped work, it is difficult to carry it out from the cassette without damaging the plate-shaped work because there is no portion that can be gripped.

The present invention considers such a problem, and an object of the present invention is to enable the plate-shaped work to be carried out from the cassette without being damaged even when there is no unnecessary portion on the outer peripheral edge of the plate-shaped work. do.

In order to solve the above problems, the processing apparatus of the present invention includes a cassette stage on which a cassette containing a plurality of plate-shaped workpieces is placed in a shelf shape, a holding table for holding the plate-shaped workpieces, and storage in the cassette. A processing device including a carrying-in means for carrying the plate-shaped work to the holding table and a processing means for processing the plate-shaped work held by the holding table, and the processing device raises and lowers the cassette stage. The cassette includes a cassette elevator to be operated and a temporary table arranged adjacent to the cassette stage, and the cassette has a side wall facing a support shelf that supports a plate-shaped work in a shelf shape and an upper end of the side wall. A top plate connecting the above, a bottom plate connecting the lower ends of the side walls, a front first opening for carrying out the plate-shaped work supported by the support shelf, and a plate-shaped work supported by the support shelf. The carry-in means is provided with a second opening that can be accessed from the rear, and the carry-in means is a first carry-in that carries a plate-shaped work housed in the cassette placed on the cassette stage into the temporary storage table. A means and a second carry-in means for carrying the plate-shaped work temporarily placed on the temporary storage table into the holding table are provided. In the first carry-in means, the cassette elevator sets the cassette stage. A push portion that enters through the second opening of the cassette and pushes the outer peripheral edge of the plate-shaped work with respect to the plate-shaped work located at the same height as the temporary table by raising and lowering, and the push portion. A first moving means for moving from the second opening toward the first opening is provided , and the cassette stage mounts at least two of the cassettes side by side with the first opening of the cassette. The temporary table can be placed and selectively positioned in either the first opening of one of the two cassettes mounted on the cassette stage and the first opening of the other. The push portion is selectively located at a position facing either the second opening of one of the two cassettes mounted on the cassette stage and the second opening of the other. The second carrying-in means can be positioned, and the second carrying-in means has a holding portion that sucks and holds the plate-shaped work temporarily placed on the temporary placing table, and moves the holding portion from the temporary placing table to the holding table. A second means of transportation is provided.

In the processing apparatus of the present invention, the processing means is a cutting means in which a disk-shaped cutting blade is rotatably mounted, and the upper surface of the plate-shaped work is partitioned by a planned division line cut by the cutting blade. Rutotomoni protective tape on the lower surface are adhered, the holding table, a plate-shaped workpiece sucking and holding via the protective tape is divided by causing cut the tip of the cutting blade to-holding Mamoru tape The carrying-out means is provided with a carrying-out means for carrying out the plate-shaped work from the holding table and a receiving means for receiving the plate-shaped work carried out by the carrying-out means, and the carrying-out means cuts the tip of the cutting blade to the protective tape. It is preferable to include a suction holding portion that sucks and holds the plate-shaped work that has been crowded and divided by utilizing the Bernoulli effect, and a third moving means that moves the suction holding portion from the holding table to the receiving means. ..

In the processing apparatus according to the present invention, the carrying-in means for carrying the plate-shaped work stored in the cassette to the holding table is a first carrying-in means for carrying the plate-shaped work stored in the cassette to the temporary storage table, and the temporary loading means. A second carrying-in means for carrying the plate-shaped work temporarily placed on the placing table into the holding table is provided, and the first carrying-in means is for a plate-shaped work located at the same height as the temporary placing table. It is provided with a pushing portion that enters through a second opening at the rear of the cassette and pushes the outer peripheral edge thereof, and a first moving means that moves the pushing portion from the second opening toward the first opening at the front of the cassette. The second carrying-in means includes a holding portion for sucking and holding the plate-shaped work temporarily placed on the temporary placing table, and a second moving means for moving the holding portion from the temporary placing table to the holding table. By doing so, the plate-shaped work can be moved without gripping, so even if there is no unnecessary part on the outer peripheral edge of the plate-shaped work, the plate-shaped work can be taken out from the cassette and temporarily placed without damaging it. It can be moved to the retention table via the table.

Further, the unloading means for carrying out the plate-shaped work processed on the holding table moves the suction holding portion for sucking and holding the plate-shaped work by using the Bernoulli effect and the suction holding portion from the holding table to the receiving means. By providing the moving means of No. 3, the plate-shaped work can be held and moved in a non-contact manner, so that even if there is no unnecessary portion on the outer peripheral edge of the plate-shaped work, after processing. It can be carried out without damaging the plate-shaped work.

It is a perspective view which shows an example of a processing apparatus. It is a perspective view of the cassette, the cassette stage, the cassette elevator, the carrying means, the temporary setting table, and the temporary setting table moving means included in the processing apparatus. It is operation explanatory drawing of the carry-in means. It is a perspective view of the holding table, the carrying-out means and the receiving means provided in the processing apparatus.

The processing device 1 shown in FIG. 1 is a dividing device that divides the plate-shaped work W placed on the holding table 10 into individual devices by the processing means 20.

The upper surface of the plate-shaped work W is partitioned by a planned division line. A protective tape T is attached to the lower surface of the plate-shaped work W. The plate-shaped work W is a rectangular plate-shaped object formed by containing a substance exhibiting magnetism. Any material exhibiting magnetism that forms the plate-shaped work W may be used, and ferrite can be mentioned as an example.

The holding table 10 has a rectangular mounting surface 11, and sucks and holds the plate-shaped work W mounted on the mounting surface 11 via the protective tape T. Further, the processing means 20 is a cutting means including a disk-shaped cutting blade 21 that rotates around an axis in the indexing feed direction (Y direction).

At the center of the base 2 of the processing apparatus 1 in the Y direction, a processing feed means 30 for moving the holding table 10 in the processing feed direction (X direction) is provided. The machining feed means 30 is screwed into a ball screw 31 extending in the machining feed direction, a pair of guide rails 32 arranged parallel to the ball screw 31, a pulse motor 33 for rotating the ball screw 31, and the ball screw 31. A movable plate 34 having a nut and being guided by a guide rail 32 to move, and a columnar support portion 35 that rotatably supports the holding table 10 on the movable plate 34 around a vertical axis (Z axis). Have. When the pulse motor 33 rotates the ball screw 31, the movable plate 34 is guided by the guide rail 32 and moves in the machining feed direction, and the holding table 10 moves in the machining feed direction together with the movable plate 34. Further, the holding table 10 rotates around the vertical axis by operating a rotation mechanism (not shown) in the support portion 35.

The processing means 20 is supported by a gate-shaped column 3 provided on the base 2 via a processing means moving mechanism 40. The column 3 is provided in the vicinity of the −X side end of the base 2 so as to straddle the processing feed means 30. The column 3 has pillar portions 3a and 3b provided on both sides (−Y side and + Y side) of the processing feed means 30, and beam portions 3c spanned over the upper portions of both pillar portions 3a and 3b.

The processing means moving mechanism 40 has a Y direction moving mechanism 410 that moves the processing means 20 in the indexing feed direction (Y direction), and a Z direction moving mechanism 420 that moves the machining means 20 in the cutting feed direction (Z direction). ..

The Y-direction moving mechanism 410 includes a ball screw 411 extending in the indexing feed direction along the front surface (+ X side surface) of the beam portion 3c of the column 3, and a pair of guide rails arranged vertically in parallel with the ball screw 411. It has a 412, a pulse motor 413 that rotates the ball screw 411, and a horizontal moving plate 414 that has a nut screwed into the ball screw 411 and is guided by a guide rail 412 to move. When the pulse motor 413 rotates the ball screw 411, the horizontal moving plate 414 is guided by the guide rail 412 and moves in the indexing feed direction.

The Z-direction moving mechanism 420 includes a ball screw 421 extending in the vertical direction along the front surface (+ X side surface) of the horizontal moving plate 414, a pair of guide rails 422 arranged parallel to the ball screw 421, and a ball screw 421. It has a pulse motor 423 for rotating the ball screw 421 and a vertical moving plate 424 having a nut screwed into the ball screw 421 and being guided by a guide rail 422. When the pulse motor 423 rotates the ball screw 421, the vertical movement plate 424 is guided by the guide rail 422 and moves in the vertical direction.

The processing means 20 is supported by the lower end portion of the vertical moving plate 424. The processing means 20 moves in the indexing and feeding direction together with the horizontal moving plate 414, and moves in the vertical direction together with the vertically moving plate 424.

At both front and rear ends (+ Y side end and −Y side end) of the + X side end of the base 2 of the processing apparatus 1, a carry-in means 70 for carrying the plate-shaped work W into the holding table 10 and a carry-in means 70 after processing. A carry-out means 80 for carrying out the plate-shaped work W from the holding table 10 is provided. In this example, the carry-in means 70 is provided at the + Y side end of the base 2, and the carry-out means 80 is provided at the −Y side end of the base 2.

The processing feeding means 30 stops the holding table 10 at a predetermined position between the carrying-in means 70 and the carrying-out means 80 when the plate-shaped work W is carried in and out of the holding table 10, and the plate-shaped work W is processed. Occasionally, the holding table 10 is positioned below the machining means 20 and moved in the machining feed direction.

As shown in FIG. 2, in the vicinity of the carrying-in means 70, two cassettes 50 (50A, 50B, a cassette stage 57 on which the cassettes 50A, 50B are placed, a cassette elevator 58 for raising and lowering the cassette stage 57, and a cassette elevator 58, A temporary setting table 59 on which the plate-shaped workpieces carried out from the cassettes 50A and 50B are placed, and a temporary setting table moving means 60 for moving the temporary setting table 59 in the X direction are arranged.

Each of the cassettes 50A and 50B includes a pair of side walls 510 and 520 facing each other with support shelves 511 and 512 that support the plate-shaped work W in a shelf shape, and a top plate 530 connecting the upper ends of both side walls 510 and 520. A bottom plate 540 connecting the lower ends of both side walls 510 and 520, a first opening 51 opened forward (-Y side) for carrying out the plate-shaped work W supported by the support shelves 511 and 512, and a support shelf 511, It has a second opening 52 that allows the plate-shaped work W supported by 512 to be accessed from the rear (+ Y side). Both cassettes 50A and 50B are placed side by side in the X direction on the cassette stage 57.

The cassette stage 57 is a rectangular plate-shaped member that is long in the X direction. The cassette stage 57 is supported by the cassette elevator 58 so as to be able to move up and down.

The cassette elevator 58 includes a rectangular plate-shaped pillar member 581 that is long in the vertical direction, a ball screw 582 provided so as to penetrate the pillar member 581 up and down, and a pulse motor 583 that rotates the ball screw 582. The pillar member 581 is fixed to the base 2. When the pulse motor 583 rotates the ball screw 582, the cassette stage 57 is configured to move up and down along the pillar member 581.

The temporary placement table 59 has a rectangular mounting surface 591. The mounting surface 591 is provided with a first magnetized portion 592 and a second magnetized portion 593. The first magnetized portion 592 is composed of a magnet plate erected in the vicinity of the first side 59a, which is the side on the −X side of the temporary placement table 59. The second magnetized portion 593 is made of a magnet plate erected in the vicinity of the second side 59b, which is the side on the −Y side of the temporary storage table 59. The heights of the first magnetized portion 592 and the second magnetized portion 593 are set so as to project upward from the plate-shaped work W mounted on the mounting surface 591. The first magnetized portion 592 extends in the Y direction, and the second magnetized portion 593 extends in the X direction. In this example, the first magnetized portion 592 and the second magnetized portion 593 are integrally arranged in an L shape.

The temporary storage table 59 is supported by the temporary storage table moving means 60 and is provided at a predetermined height position from the base 2. By raising and lowering the cassette stage 57 with respect to the temporary storage table 59, any plate-shaped work W held in a shelf shape on the cassettes 50A and 50B is positioned at the same height as the temporary storage table 59. You can do it.

The temporary table moving means 60 is provided adjacent to the cassette stage 57. The temporary table moving means 60 is a means for laterally moving (moving in the X direction) the temporary table 59 in front of the first opening 51 of one or the other of the cassettes 50A and 50B.

The temporary table moving means 60 includes a rectangular plate-shaped main body member 601 that is long in the X direction, a ball screw 602 that penetrates the main body member 601 in the X direction, and a pulse motor 603 that rotates the ball screw 602. The main body member 601 is provided at a predetermined height position from the base 2 via a support member (not shown). When the pulse motor 603 rotates the ball screw 602, the temporary table 59 moves laterally in the X direction. The movement range of the temporary storage table 59 is such that the mounting surface 591 of the temporary storage table 59 has a holding portion 721 described later from a position where the side surface on the + Y side of the temporary storage table 59 can just face the first opening 51 of the cassette 50A. It is set in the range up to the position (holding position) where it can just overlap with.

The carry-in means 70 was temporarily placed on the temporary storage table 59 and the first carry-in means 710 that carries the plate-shaped work W stored in the cassettes 50A and 50B placed on the cassette stage 57 into the temporary storage table 59. A second carrying-in means 720 for carrying the plate-shaped work W into the holding table 10 shown in FIG. 1 is provided.

The first carrying-in means 710 enters the cassettes 50A and 50B from the second opening 52 with respect to the plate-shaped work W located at the same height as the temporary storage table 59, and enters the outer peripheral edge of the plate-shaped work W through the second opening 52. A pushing portion 711 for pushing and a first moving means 712 for moving the pushing portion 711 from the second opening 52 toward the first opening 51 are provided.

The push portion 711 is provided at the tip end portion (−Y side end portion) of the arm member 713. The arm member 713 is a crank member whose two points are bent at right angles in opposite directions to each other. The base end portion (+ Y side end portion) of the arm member 713 is connected to the first moving means 712 via the support member 715.

The first moving means 712 includes a rod-shaped guide member 716 extending in the Y direction, a moving member 717 that moves horizontally along the guide member 716, and a drive mechanism (not shown) that moves the moving member 717. The guide member 716 is arranged on the −X side of the cassette stage 57, and is provided at a predetermined height position from the base 2 via a support member (not shown). A support member 715 is fixed to the moving member 717. The support member 715 is a rod-shaped member extending from the + X side surface of the moving member 717 to the + X side. A reversing portion 718 is provided at the tip end portion (+ X side end portion) of the support member 715. The base end portion of the arm member 713 is connected to the reversing portion 718. The reversing portion 718 has a reversing mechanism that reverses the arm member 713 from side to side around the Y axis. By reversing the arm member 713 from side to side, the reversing portion 718 switches the position of the pushing portion 711 to the position on the + X side indicated by the solid line or the position on the −X side indicated by the alternate long and short dash line. As a result, the push portion 711 is positioned in either of the two cassettes 50A and 50B. At this time, the height position of the push portion 711 coincides with the height position of the mounting surface 591 of the temporary placement table 59.

The second carrying-in means 720 moves the holding portion 721 for holding the plate-shaped work W temporarily placed on the temporary placing table 59 and the holding portion 721 from the temporary placing table 59 to the holding table 10 (see FIG. 1). The transportation means 722 of 2 is provided.

The holding portion 721 has a suction portion (not shown) on the lower surface thereof, and sucks and holds the plate-shaped work W placed on the mounting surface 591 of the temporary placement table 59 from above.
The second moving means 722 includes a rectangular plate-shaped main body member 723 extending in the Y direction, a slide arm 724 that moves horizontally along the main body member 723, and a drive mechanism (not shown) that moves the slide arm 724. The main body member 723 is arranged on the −X side of the temporary table moving means 60, and is provided at a predetermined height position from the base 2 via a support member (not shown). The main body member 723 has a guide groove 723a that opens to the temporary table moving means 60 side (+ X side) and extends in the Y direction, and the base portion (-X side end portion) of the slide arm 724 slides in the guide groove 723a. It is connected as possible. The slide arm 724 is a plate-shaped member extending from the main body member 723 to the + X side. An elevating portion 726 is provided at the tip end portion + X side end portion of the slide arm 724. The elevating portion 726 has a columnar elevating member 727 extending downward from the tip end portion of the slide arm 724, and an elevating mechanism 728 for moving the elevating member 727 up and down. The holding portion 721 is fixed to the lower end portion of the elevating member 727. The elevating mechanism 728 moves the elevating member 727 up and down to move the holding portion 721 up and down, and a drive mechanism (not shown) moves the slide arm 724 to move the holding portion 721 in the left-right direction.

Next, the operation of carrying out the plate-shaped work W from the cassette 50 will be described with reference to FIGS. 3 (a) and 3 (b).
As shown in FIG. 3A, when the cassette elevator 58 raises and lowers the cassette stage 57, one plate-shaped work W held in a shelf shape on the cassette 50 is the same as the mounting surface 591 of the temporary table 59. Positioned at height. Further, the temporary table moving means 60 laterally moves the temporary table 59 in the X direction, so that the temporary table 59 is positioned in front of one of the two cassettes 50 (50A, 50B).

In the first carrying-in means 710 of the carrying-in means 70, the arm member 713 is turned upside down by the reversing portion 718, and the pushing portion 711 is positioned at a position facing the cassette 50 in which the temporary storage table 59 is positioned.
After that, the arm member 713 is moved forward (in the −Y direction) by the first moving means 712. The pushing portion 711 at the tip of the arm member 713 enters the cassette 50 through the second opening 52 and starts pushing the outer peripheral edge Wa of the plate-shaped work W. As the push portion 711 moves forward, the plate-shaped work W is pushed out from the first opening 51 onto the temporary storage table 59.

As shown in FIG. 3B, the arm member 713 moves to a position where the plate-shaped work W is brought into contact with the second magnetized portion 593 of the temporary placement table 59. As a result, the plate-shaped work W is placed on the temporary table 59. The plate-shaped work W is magnetized and positioned on the temporary placement table 59 by the first magnetized portion 592 (see FIG. 2) and the second magnetized portion 593.

As described above, the plate-shaped work W is carried out from the cassette 50 and placed on the temporary storage table 59.
After that, the temporary table 59 is laterally moved to the −X side, so that the plate-shaped work W is positioned at a position where it can be held by the holding portion 721.

The second transport means 720 of the carry-in means 70 shown in FIG. 2 moves the slide arm 724 to the + Y side and positions the holding portion 721 above the temporary storage table 59. After that, the holding portion 721 is lowered. Then, the plate-shaped work W placed on the temporary placement table 59 is sucked and held by the holding portion 721. After that, the holding portion 721 is raised and the slide arm 724 is moved to the −Y side to convey the plate-shaped work W above the holding table 10 (see FIG. 1). Then, the plate-shaped work W is placed on the holding table 10 by lowering the holding portion 721. After that, the second transport means 720 of the carry-in means 70 releases the suction holding of the plate-shaped work W by the holding portion 721 and raises the holding portion 721. Then, the holding portion 721 is made to stand by at the holding position for holding the plate-shaped work W to be carried in next.

As described above, the plate-shaped work W is carried into the holding table 10. Then, the Y-direction moving mechanism 410 shown in FIG. 1 positions the cutting blade 21 on the extension of the predetermined division schedule line in the X direction, and the Z-direction moving mechanism 420 positions the cutting blade 21 at a predetermined Z-direction position. By moving the holding table 10 holding the plate-shaped work W in the machining feed direction (X-axis direction), the cutting blade 21 of the machining means 20 performs cutting along the scheduled division line. At that time, the processing means 20 cuts the tip of the cutting blade 21 into the protective tape attached to the back surface of the plate-shaped work W. Subsequently, by moving the machining means 20 in the indexing feed direction (Y-axis direction) and then moving the holding table 10 in the machining feed direction (X-axis direction), cutting is performed along the next scheduled division line. In this way, the plate-shaped work W is cut a plurality of times in the first direction, and when cutting along all the planned division lines in the first direction is completed, the holding table 10 is rotated 90 degrees to perform the first cutting. Cutting along a plurality of planned division lines in the second direction is sequentially performed in the same direction as in the above direction. By this cutting process, the plate-shaped work W is divided into a plurality of devices. Since the protective tape is attached to the lower surface of the plate-shaped work W, the device does not fall apart even after the division, and the shape of the plate-shaped work W is maintained. After that, the processing feeding means 30 moves the holding table 10 between the carrying-in means 70 and the carrying-out means 80, and the carrying-out means 80 carries out the plate-shaped work W from the holding table 10.

As shown in FIG. 4, the carrying-out means 80 moves the suction holding portion 810 for holding the plate-shaped work W after cutting placed on the holding table 10 and the suction holding portion 810 from the holding table 10 to the receiving means 90. A third moving means 820 for moving is provided.

The suction holding portion 810 has a nozzle port (not shown) that ejects air radially along the lower surface, and the plate-shaped work W placed on the mounting surface 11 of the holding table 10 is not removed by utilizing the Bernoulli effect. Suction and hold from above by contact.

The third moving means 820 has a rectangular plate-shaped main body member 821 extending in the Y direction, a slide arm 822 that moves horizontally along the main body member 821, and a drive mechanism (not shown) that moves the slide arm 822. The main body member 821 has a guide groove 821a that opens to the + X side and extends in the left-right direction (Y direction), and the base portion (-X side end portion) of the slide arm 822 is slidably connected to the guide groove 821a. There is. The slide arm 822 is a plate-shaped member extending from the main body member 821 to the + X side. An elevating portion 823 is provided at the tip end portion (+ X side end portion) of the slide arm 822. The elevating portion 823 has a columnar elevating member 824 extending downward from the tip end portion of the slide arm 822, and an elevating mechanism 825 for moving the elevating member 824 up and down. The suction holding portion 810 is fixed to the lower end portion of the elevating member 824. The elevating mechanism 825 moves the elevating member 824 up and down (Z direction) to move the suction holding portion 810 up and down, and a drive mechanism (not shown) moves the slide arm 822 to move the suction holding portion 810 in the Y direction. do.

The receiving means 90 has a water tank 910 and a basket 920. The water tank 910 is a rectangular tank body. The water tank 910 contains an aqueous solution S containing a rust preventive agent. The basket 920 is a rectangular container made of a mesh plate. The basket 920 can be taken in and out of the water tank 910. Handles 921 are provided at two opposing positions on the upper edge of the basket 920.

When the plate-shaped work W is carried out from the holding table 10, the carrying-out means 80 moves the suction holding portion 810 above the holding table 10 located between the carrying-in means 70 and the carrying-out means 80, and then the suction holding portion 810 is carried out. Lower the 810. Then, the processed plate-shaped work W placed on the holding table 10 is sucked and held by the suction holding portion 810. After that, the suction holding portion 810 is raised and moved onto the water tank 910. Then, after the suction holding portion 810 is lowered to near the liquid level of the aqueous solution S, the holding of the plate-shaped work W by the suction holding portion 810 is released.

The plate-shaped work W released from being held by the suction holding portion 810 sinks in the aqueous solution S due to its own weight, and is housed in a basket 920 arranged in the water tank 910. When a predetermined number of plate-shaped works W are housed in the basket 920, the plate-shaped works W together with the basket 920 are taken out from the water tank 910.

As described above, in the processing apparatus 1 of the present embodiment, the carry-in means 70 for carrying the plate-shaped work W stored in the cassette 50 into the holding table 10 temporarily places the plate-shaped work W stored in the cassette 50. The first carry-in means 710 for carrying in the table 59 and the second carry-in means 720 for carrying the plate-shaped work W temporarily placed on the temporary storage table 59 into the holding table 10 are provided. The means 710 enters the plate-shaped work W located at the same height as the temporary table 10 through the second opening 52 at the rear of the cassette 50 and pushes the outer peripheral edge of the push portion 711 and the push portion 711. A first moving means 712 for moving from the opening 52 of 2 toward the first opening 51 in front of the cassette 50 is provided, and the second carrying-in means 720 has a plate shape temporarily placed on the temporary placing table 59. The plate-shaped work W is gripped by providing a holding portion 721 for sucking and holding the work W and a second moving means 722 for moving the holding portion 721 from the temporary placement table 59 to the holding table 10. Even if there is no unnecessary part on the outer peripheral edge of the plate-shaped work W, it can be moved out of the cassette 50 without damaging the plate-shaped work W, and then transferred to the holding table 10 via the temporary storage table 59. Can be carried in.

Further, the unloading means 80 for carrying out the plate-shaped work W processed on the holding table 10 sucks and holds the plate-shaped work W by utilizing the Bernoulli effect, and the suction holding unit 810 holds the suction holding unit 810 as the holding table 10. By providing a third moving means 820 for moving from the receiving means 90 to the receiving means 90, even if there is a gap in the plate-shaped work W along the cutting line, the plate-shaped work is subjected to negative pressure due to the Bernoulli effect. Since W can be held and moved in a non-contact manner, even if there is no unnecessary portion on the outer peripheral edge of the plate-shaped work W, the processed plate-shaped work W can be carried out without being damaged. On the other hand, when the processed plate-shaped work W is suction-held by the vacuum suction method, air leaks occur due to the gap generated along the cutting line of the plate-shaped work W, so that sufficient suction-holding force is obtained. There is a high possibility that the plate-shaped work W will not be obtained and will be dropped and damaged during the carrying-out process.

Further, two cassettes 50A and 50B are placed on the cassette stage 57 by arranging the first openings 51 in the lateral direction (X direction), and the reversing portion 718 reverses the arm member 713 so that the pushing portion 711 is formed. By making the configuration positioned in the second opening 52 of either one of the two cassettes 50A and 50B, the plate-shaped work W housed in the two cassettes 50A and 50B is opened in the first opening by one push portion 711. It can be extruded from 51 onto the temporary storage table 59, and the configuration of the carrying-in means 70 can be simplified.

The temporary table 59 has a first magnetized portion 592 that magnetizes the first side 59a of the plate-shaped work W and a second magnetized portion 59b that magnetizes the second side 59b that is connected to the first side. A plate-shaped work W having a portion 593 and formed containing a substance exhibiting magnetism is magnetized and positioned on the first magnetized portion 592 and the second magnetized portion 593. Positioning of the plate-shaped work W on the temporary table 59 is possible with a simple configuration.

The plate-shaped work W is magnetized and positioned on the first magnetized portion 592 and the second magnetized portion 593, so that the temporary table 59 is in the process of laterally moving to the holding position by the holding portion 721. The work W can be prevented from being displaced, and the plate-shaped work W can be accurately positioned below the holding portion 721. By accurately positioning the plate-shaped work W below the holding portion 721, the plate-shaped work W placed on the temporary placement table 59 can be reliably held by the holding portion 721 and conveyed to the holding table 10.

The receiving means 90 for receiving the plate-shaped work W carried out by the carrying-out means 80 includes a water tank 910 containing an aqueous solution S containing a rust preventive agent, and the plate-shaped work W after cutting is subsided in the aqueous solution S. By adopting the housing structure, it is possible to prevent the plate-shaped work W from rusting after cutting.

The embodiment of the present invention is not limited to the above embodiment, and may be variously modified, replaced, or modified without departing from the spirit of the technical idea of the present invention.

For example, the processing device 1 of the present embodiment is a dividing device that cuts a plate-shaped work W, but the processing device of the present invention can be applied to a device other than the dividing device such as a polishing device.

In the present embodiment, two cassettes 50 (50A, 50B) are mounted on the cassette stage 57, but it is also possible to have a configuration in which three or more cassettes 50 are mounted.

In the present embodiment, the unloading means 80 includes a slide arm 822 that horizontally moves the suction holding portion 810 and an elevating portion 823 that moves the suction holding portion 810 up and down. , A multi-axis joint robot having a suction holding portion or the like can also be used.

In the present embodiment, the first magnetized portion 592 and the second magnetized portion 593 are arranged in an L shape with their ends close to each other, but the first magnetized portion 592 and the second magnetized portion 592 and the second. The magnetized portions 593 of the above may be arranged so that their ends are separated from each other. Further, at least one of the first magnetized portion 592 and the second magnetized portion 593 can be divided into a plurality of magnetized portions.

In the present embodiment, the receiving means 90 has a water tank 910 and a basket 920, but the basket 920 can be omitted.

1: Machining device 10: Holding table 11: Mounting surface 20: Machining means 21: Cutting blade 30: Machining feed means 31: Ball screw 32: Guide rail 33: Pulse motor 34: Movable plate 35: Support part 40: Machining means movement Mechanism 410: Y direction moving mechanism 411: Ball screw 412: Guide rail 413: Pulse motor 414: Horizontal moving plate 420: Z direction moving mechanism 421: Ball screw 422: Guide rail 423: Pulse motor 424: Vertical moving plate 50 (50A, 50B) ): Cassette 51: First opening 52: Second opening 511, 512: Support shelf 510, 520: Side wall 530: Top plate 540: Bottom plate 57: Cassette stage 58: Cassette elevator 581: Pillar member 582: Ball screw 583: Pulse motor 59: Temporary placement table 591: Mounting surface 592: First magnetically attached portion 593: Second magnetically attached portion 59a: First side 59b: Second side 60: Temporary placement table moving means 601: Main body Member 602: Ball screw 603: Pulse motor 70: Carry-in means 710: First carry-in means 711: Pushing part 712: First moving means 713: Arm member 716: Guide member 717: Moving member 718: Inverting part 720: Second 721: Holding unit 722: Second moving means 723: Main body member 724: Slide arm 726: Elevating part 727: Elevating member 728: Elevating mechanism 80: Carrying out means 810: Suction holding part 820: Third moving means 821: Main body member 822: Slide arm 823: Elevating part 824: Elevating member 825: Elevating mechanism 90: Receiving means 910: Water tank 920: Basket 9221: Handle part S: Aqueous solution T: Protective tape W: Plate-shaped work Wa: Outer peripheral edge

Claims (2)

A cassette stage on which a cassette containing a plurality of plate-shaped workpieces is placed in a shelf shape, a holding table for holding the plate-shaped workpieces, and a carrying means for carrying the plate-shaped workpieces stored in the cassette into the holding table. A processing device including a processing means for processing the plate-shaped work held by the holding table.
The processing apparatus includes a cassette elevator for raising and lowering the cassette stage, and a temporary storage table arranged adjacent to the cassette stage.
The cassette was supported by a side wall facing a support shelf that supports a plate-shaped work in a shelf shape, a top plate connecting the upper end of the side wall, a bottom plate connecting the lower end of the side wall, and the support shelf. comprising a first opening in the front for carrying out the plate-like work, and a second opening to allow access from the rear to the supported plate workpiece on said support shelf, and
The carry-in means includes a first carry-in means for carrying the plate-shaped work stored in the cassette placed on the cassette stage into the temporary storage table, and a plate-shaped work temporarily placed on the temporary storage table. A second loading means for loading the cassette into the holding table is provided.
The first carrying-in means allows the cassette elevator to move the cassette stage up and down to enter the plate-shaped work located at the same height as the temporary table through the second opening of the cassette. A push portion for pushing the outer peripheral edge of the work and a first moving means for moving the push portion from the second opening toward the first opening are provided.
The cassette stage can mount at least two cassettes side by side with the first opening of the cassette side by side.
The temporary table can be selectively positioned in either the first opening of one of the two cassettes mounted on the cassette stage and the first opening of the other.
The push portion can be selectively positioned at a position facing either the second opening of one of the two cassettes mounted on the cassette stage and the second opening of the other. can be,
The second carrying-in means includes a holding portion for sucking and holding the plate-shaped work temporarily placed on the temporary placing table, and a second moving means for moving the holding portion from the temporary placing table to the holding table. Processing equipment equipped with. The processing means is a cutting means in which a disk-shaped cutting blade is rotatably mounted.
The upper surface of the plate-shaped work is partitioned by a planned division line cut by the cutting blade, and a protective tape is attached to the lower surface.
The holding table sucks and holds the plate-shaped work through the protective tape.
Comprising a discharge means for the split plate workpiece unloading from the holding table by making cut the tip of the cutting blade to-holding Mamoru tape, a receiving means for receiving the plate workpiece該搬detection means is unloaded, the ,
The carrying-out means has a suction holding portion that sucks and holds the plate-shaped work obtained by cutting the tip of the cutting blade into the protective tape and dividing the plate-shaped work by utilizing the Bernoulli effect, and the suction holding portion from the holding table. The processing apparatus according to claim 1, further comprising a third transportation means for moving to the receiving means.

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