JP6946381B2 - 太陽電池用蒸着装備及びこれを用いた蒸着方法 - Google Patents
太陽電池用蒸着装備及びこれを用いた蒸着方法 Download PDFInfo
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- JP6946381B2 JP6946381B2 JP2019135854A JP2019135854A JP6946381B2 JP 6946381 B2 JP6946381 B2 JP 6946381B2 JP 2019135854 A JP2019135854 A JP 2019135854A JP 2019135854 A JP2019135854 A JP 2019135854A JP 6946381 B2 JP6946381 B2 JP 6946381B2
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- vapor deposition
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- 238000000427 thin-film deposition Methods 0.000 title claims description 12
- 238000007736 thin film deposition technique Methods 0.000 title claims description 7
- 238000007740 vapor deposition Methods 0.000 claims description 236
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 184
- 229910052710 silicon Inorganic materials 0.000 claims description 184
- 239000010703 silicon Substances 0.000 claims description 184
- 239000012535 impurity Substances 0.000 claims description 181
- 235000012431 wafers Nutrition 0.000 claims description 151
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 131
- 229920005591 polysilicon Polymers 0.000 claims description 128
- 238000000034 method Methods 0.000 claims description 36
- 238000000151 deposition Methods 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000003213 activating effect Effects 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 254
- 239000004065 semiconductor Substances 0.000 description 44
- 239000000758 substrate Substances 0.000 description 40
- 238000002161 passivation Methods 0.000 description 23
- 239000010408 film Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 15
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 9
- 239000002019 doping agent Substances 0.000 description 9
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 229910017107 AlOx Inorganic materials 0.000 description 2
- 229910015845 BBr3 Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 229910020286 SiOxNy Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004873 anchoring Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910004012 SiCx Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
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Description
本発明は、韓国特許出願第10−2018−0086238号(出願日:2018年7月24日)、韓国特許出願第10−2018−0116437号(出願日:2018年9月28日)、及び韓国特許出願第10−2018−0116446号(出願日:2018年9月28日)に基づくパリ条約4条の優先権主張を伴ったものであり、当該韓国特許出願に開示された内容に基づくものである。参考のために、当該韓国特許出願の明細書及び図面の内容は本願明細書の一部に包摂されるものである。
〔発明の分野〕
本発明は、太陽電池用蒸着装備及びこれを用いた蒸着方法に関する。
〔本発明の一の態様〕
〔1〕 太陽電池用蒸着装備であって、
複数のシリコンウエハが垂直に配置される内部空間を備えたチャンバと、
シリコン蒸着ガスと不純物ガスが混合された混合ガスを前記複数のウェハの側面の方向に注入するための複数のシャワーノズルと、を備えてなる、太陽電池用蒸着装備。
〔2〕 前記複数のシャワーノズルは、前記複数のウェハの両側側部にそれぞれ形成されてなる、〔1〕に記載の太陽電池用蒸着装備。
〔3〕
前記複数のシャワーノズルのそれぞれは、前記混合ガスを注入するための複数のホールを備えてなる、〔2〕に記載の太陽電池用蒸着装備。
〔4〕
前記シリコン蒸着ガスと前記不純物ガスの流速量をそれぞれ制御して前記混合ガスを前記複数のシャワーノズル部に供給する流速量制御部を更に備えてなる、〔1〕〜〔3〕の何れか一項に記載の太陽電池用蒸着装備。
〔5〕 前記流速量制御部は、前記不純物ガスが混合されない前記蒸着ガスを選択的に前記複数のシャワーノズル部に供給する、〔4〕に記載の太陽電池用蒸着装備。
〔6〕 前記チャンバの内部空間は第1方向に長く形成され、
前記第1方向の前面側には、前記複数のシリコンウエハが出入りするドアが備えられ、
前記第1方向の後面側には、ガスが排気されるベント(vent)が備えられ、
前記複数のシャワーノズルは、前記混合ガスを噴射するホールを備え、
前記複数のシャワーノズルは、前記チャンバと前記複数のシリコンウエハの側面との間に位置する、〔1〕〜〔5〕の何れか一項に記載の太陽電池用蒸着装備。
〔7〕 前記複数のシャワーノズルのそれぞれは、前記チャンバの外部から内部に前記第1方向に長く延長され、前記混合ガスを供給する配管に接続され、
前記配管には、前記ホールが備えられておらず、
前記複数のシャワーノズルのそれぞれは、前記配管の先端に接続されて、前記複数のシリコンウエハを中心に前記チャンバの壁面に沿って前記第1方向と交差する第2方向に長く延長されてなる、〔6〕に記載の太陽電池用蒸着装備。
〔8〕 前記複数のシャワーノズルのそれぞれは、前記配管の先端から前記チャンバの壁面に沿って前記第2方向に丸い形を有し、前記複数のシャワーノズルのそれぞれの長さ方向に沿って前記複数のホールが離隔されて備えられてなる、〔7〕に記載の太陽電池用蒸着装備。
〔9〕 前記複数のホールの開口方向は、前記複数のシャワーノズルそれぞれの表面の内に、前記チャンバの内部空間の中心部の方向に備えられる、〔7〕又は〔8〕に記載の太陽電池用蒸着装備。
〔10〕 前記チャンバ内に配置され、前記第1方向に長く形成されたボートをさらに備えてなり、
前記複数のシリコンウエハは、前記ボートに前記第1方向に離隔されて前記第2方向に立てられた状態で配置されてなる、〔1〕〜〔9〕の何れか一項に記載の太陽電池用蒸着装備。
〔11〕 前記複数のシャワーノズルは、
前記ボートの中で、前記ドア側に隣接する前端部分に前記混合ガスを噴射する第1サブシャワーノズルと、
前記ボートの中央部分に前記混合ガスを噴射する第2サブシャワーノズルと、
前記ボートの内に、前記ベント側に隣接する後端部分に前記混合ガスを噴射する第3サブシャワーノズルとを備えてなる、〔1〕〜〔10〕の何れか一項に記載の太陽電池用蒸着装備。
〔12〕
太陽電池用蒸着装備を用いた蒸着方法であって、
太陽電池用蒸着装備のチャンバ内に複数のウェハを垂直に位置させる段階と、
シリコン蒸着ガスと不純物ガスが混合された混合ガスをシャワーノズルから前記複数のウェハの側面の方向に噴射して、不純物がドーピングされたポリシリコン層を前記複数のウェハに蒸着する段階と、を含んでなる、太陽電池用蒸着装備を用いた蒸着方法。
〔13〕 前記不純物ガスを除外した前記シリコン蒸着ガスのみ前記シャワーノズルから前記複数のウェハの側面の方向に噴射して、不純物がドーピングされないポリシリコン層を前記複数のウェハに蒸着する段階を更に含んでなる、〔12〕に記載の太陽電池用蒸着装備を用いた蒸着方法。
〔14〕 前記不純物がドーピングされたポリシリコン層の不純物を活性化させて前記不純物がドーピングされたポリシリコン層の不純物を前記不純物がドーピングされないポリシリコン層にドーピングする熱処理工程をさらに含んでなる、〔13〕に記載の太陽電池用蒸着装備を用いた蒸着方法。
〔15〕 前記不純物がドーピングされたポリシリコン層を蒸着する段階において、前記シリコン蒸着ガスと前記不純物ガスを適正な割合で混合するように流速量を調整して、前記シリコン蒸着ガスと前記不純物ガスを前記シャワーノズルに同時に供給する、〔13〕又は〔14〕に記載の太陽電池用蒸着装備を用いた蒸着方法。
〔16〕 前記不純物がドーピングされたポリシリコン層の蒸着温度は、前記不純物がドーピングされないポリシリコン層の蒸着温度より低い温度である、〔13〕〜〔15〕の何れか一項に記載の太陽電池用蒸着装備を用いた蒸着方法。
〔17〕 前記不純物がドーピングされたポリシリコン層の厚さは、前記不純物がドーピングされないポリシリコン層の厚さより薄い、〔13〕〜〔16〕の何れか一項に記載の太陽電池用蒸着装備を用いた蒸着方法。
〔18〕 太陽電池用蒸着装備を用いた蒸着方法であって、
太陽電池用蒸着装備のチャンバ内に複数のウェハを垂直に位置させる段階と、
シリコン蒸着ガスをシャワーノズルから前記複数のウェハの側面の方向に噴射して、不純物がドーピングされない第1ポリシリコン層を前記複数のウェハに蒸着する段階と、
シリコン蒸着ガスと不純物ガスが混合された混合ガスをシャワーノズルから前記複数のウェハの側面の方向に噴射して、不純物がドーピングされたポリシリコン層を前記複数のウェハの第1ポリシリコン層の上に蒸着する段階と、
シリコン蒸着ガスをシャワーノズルから前記複数のウェハの側面の方向に噴射して、不純物がドーピングされない第2ポリシリコン層を前記複数のウェハの不純物がドーピングされたポリシリコン層の上に蒸着する段階と、を含んでなる、太陽電池用蒸着装備を用いた蒸着方法。
〔19〕 前記不純物がドーピングされたポリシリコン層の不純物を活性化させて前記不純物がドーピングされたポリシリコン層の不純物を前記第1ポリシリコン層及び第2ポリシリコン層にドーピングする熱処理工程を更に含んでなる、〔18〕に記載の太陽電池用蒸着装備を用いた蒸着方法。
〔20〕 前記複数のウェハそれぞれはボートに垂直に積載された状態で、チャンバにロードされる、〔18〕又は〔19〕に記載の太陽電池用蒸着装備を用いた蒸着方法。
ボロン(B)、アルミニウム(Al)、ガリウム(Ga)、インジウム(In)などの3族元素を挙げることができ、n型ドーパントとしては、りん(P)、砒素(As)、ビスマス(Bi)、アンチモン(Sb)などの5族元素を挙げることができる。しかし、本発明がこれに限定されるものではなく、様々なドーパントが第1または第2導電型ドーパントとして用いられることができる。
Claims (11)
- 太陽電池用蒸着装備であって、
水平方向に長く形成される内部空間を備えたチャンバと、
複数のシリコンウエハを運び、前記チャンバの内部空間に前記水平方向に配列され、前記複数のシリコンウエハを前記チャンバの内部空間に垂直に配置するボートと、
前記水平方向に伸びており、前記複数のシリコンウエハの第1側面に対向するように配置される少なくとも1つの第1配管と、
前記水平方向に伸びており、前記第1側面の反対側に位置する前記複数のシリコンウエハの第2側面に対向するように配置される少なくとも1つの第2配管と、
前記水平方向に沿って前記チャンバの前面側に位置し、前記ボートの出入りを可能にするドアと、
前記水平方向に沿って前記チャンバの後面側に位置し、ガスを排出するベントと、及び、
それぞれが前記少なくとも1つの第1配管の端部又は前記少なくとも1つの第2配管の端部に接続され、シリコン蒸着ガスと不純物ガスが混合された混合ガスを前記複数のシリコンウエハの前記第1側面又は前記第2側面の方向に注入するための複数のシャワーノズルと、を備えてなり、
前記複数のシャワーノズルは、それぞれ前記混合ガスを注入するための複数のホールを備え、
前記少なくとも1つの第1配管と、前記少なくとも1つの第2配管は、前記チャンバの外部から内部に前記水平方向に長く延長され、
前記少なくとも1つの第1配管と、前記少なくとも1つの第2配管は、互いに異なる複数のシリコンウエハのグループに前記混合ガスを注入するように配列され、
前記ドアと前記ベントは、前記水平方向に互いに対向するものである、太陽電池用蒸着装備。 - 前記シリコン蒸着ガスと前記不純物ガスの流速量をそれぞれ制御して前記混合ガスを前記複数のシャワーノズルに供給する流速量制御部を更に備えてなる、請求項1に記載の太陽電池用蒸着装備。
- 前記流速量制御部は、前記不純物ガスが混合されない前記シリコン蒸着ガスを選択的に前記複数のシャワーノズルに供給する、請求項2に記載の太陽電池用蒸着装備。
- 前記複数のシャワーノズルは、前記チャンバの壁面と前記複数のシリコンウエハの前記第1側面との間に位置し、並びに、前記チャンバの壁面と前記複数のシリコンウエハの前記第2側面との間に位置する、請求項1に記載の太陽電池用蒸着装備。
- 前記複数のシャワーノズルは、
前記ボートの中で、前記ドア側に隣接する前端部分に前記混合ガスを噴射する第1サブシャワーノズルと、
前記ボートの中央部分に前記混合ガスを噴射する第2サブシャワーノズルと、
前記ボートの内に、前記ベント側に隣接する後端部分に前記混合ガスを噴射する第3サブシャワーノズルと、を備えてなる、請求項1に記載の太陽電池用蒸着装備。 - 太陽電池用蒸着装備を用いた蒸着方法であって、
太陽電池用蒸着装備のチャンバ内に複数のシリコンウエハを垂直に位置させる段階と、
不純物を含む不純物ガスを除外したシリコン蒸着ガスのみ、複数のシャワーノズルから前記複数のシリコンウエハの側面の方向に噴射して、前記不純物がドーピングされない第1ポリシリコン層を前記複数のシリコンウエハに蒸着する段階と、
シリコン蒸着ガスと不純物ガスが混合された混合ガスを前記複数のシャワーノズルから前記複数のシリコンウエハの側面の方向に噴射して、前記不純物がドーピングされたポリシリコン層を前記不純物がドーピングされない第1ポリシリコン層の上に複数のウエハに蒸着する段階と、を含んでなる、太陽電池用蒸着装備を用いた蒸着方法。 - 前記不純物がドーピングされたポリシリコン層の不純物を活性化させて前記不純物がドーピングされたポリシリコン層の不純物を前記不純物がドーピングされない第1ポリシリコン層にドーピングする熱処理工程を更に含んでなる、請求項6に記載の太陽電池用蒸着装備を用いた蒸着方法。
- 前記不純物がドーピングされたポリシリコン層を蒸着する段階において、前記シリコン蒸着ガスと前記不純物ガスを適正な割合で混合するように流速量を調整して、前記シリコン蒸着ガスと前記不純物ガスを前記複数のシャワーノズルに同時に供給する、請求項6に記載の太陽電池用蒸着装備を用いた蒸着方法。
- 前記不純物がドーピングされたポリシリコン層の蒸着温度は、前記不純物がドーピングされない第1ポリシリコン層の蒸着温度より低い温度である、請求項6に記載の太陽電池用蒸着装備を用いた蒸着方法。
- 前記不純物がドーピングされたポリシリコン層の厚さは、前記不純物がドーピングされない第1ポリシリコン層の厚さより薄い、請求項6に記載の太陽電池用蒸着装備を用いた蒸着方法。
- 前記シリコン蒸着ガスを前記複数のシャワーノズルから前記複数のシリコンウエハの側面の方向に噴射して、不純物がドーピングされない第2ポリシリコン層を前記複数のウエハの不純物がドーピングされたポリシリコン層の上に蒸着する段階を更に含んでなる、請求項6に記載の太陽電池用蒸着装備を用いた蒸着方法。
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