JP6943566B2 - レーザ装置及び波形制御方法 - Google Patents
レーザ装置及び波形制御方法 Download PDFInfo
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/1601—Solid materials characterised by an active (lasing) ion
- H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
- H01S3/1611—Solid materials characterised by an active (lasing) ion rare earth neodymium
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/1601—Solid materials characterised by an active (lasing) ion
- H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/163—Solid materials characterised by a crystal matrix
- H01S3/164—Solid materials characterised by a crystal matrix garnet
- H01S3/1643—YAG
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2316—Cascaded amplifiers
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2375—Hybrid lasers
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- H01S2301/00—Functional characteristics
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0078—Frequency filtering
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06754—Fibre amplifiers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/17—Solid materials amorphous, e.g. glass
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
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Description
[レーザ装置の概略及び全体構成]
[レーザ装置の動作]
[波形制御の具体例]
[変形例]
Claims (10)
- 光増幅部への種光を出力する出力部を備えたレーザ装置であって、
前記出力部は、前記光増幅部の利得範囲内となる複数の波長を含む光を前記種光として出力する光源部と、前記光源部から出力される前記種光の強度時間波形を制御する種光制御部とを有し、
前記光源部は、前記光増幅部の利得のピークから遠い波長の光によって時間的に先に伝搬する成分が構成され、且つ前記光増幅部の利得のピークに近い波長の光によって時間的に後に伝搬する成分が構成される光を前記種光として出力する、レーザ装置。 - 前記出力部から出力される前記種光の強度を増幅させる前記光増幅部を更に備える、請求項1記載のレーザ装置。
- 前記光源部は、前記種光に含まれる各波長の光をそれぞれ出力する複数の光源と、前記複数の光源から出力された光を合波して前記種光を生成する一又は複数の合波部とによって構成されている、請求項1又は2記載のレーザ装置。
- 前記光源は、半導体レーザであり、
前記種光制御部は、前記半導体レーザの温度を制御する温度制御素子を含む、請求項3記載のレーザ装置。 - 前記光源は、固体レーザであり、
前記種光制御部は、前記固体レーザの共振器を構成する出力ミラーを含む、請求項3記載のレーザ装置。 - 前記光源は、ファイバレーザであり、
前記種光制御部は、前記ファイバレーザの共振器を構成する回折格子を含む、請求項3記載のレーザ装置。 - 前記光源は、注入同期型Qスイッチレーザであり、
前記種光制御部は、前記注入同期型Qスイッチレーザの発振に用いる種レーザの温度を制御する温度制御素子を含む、請求項3記載のレーザ装置。 - 前記光源部は、前記種光に含まれる複数の波長の光を出力する単一の光源によって構成されている、請求項1又は2記載のレーザ装置。
- 前記光源は、モード同期レーザであり、
前記種光制御部は、前記モード同期レーザの発振スペクトルの一部を取り出すバンドパスフィルタを含む、請求項8記載のレーザ装置。 - 光増幅部への種光の波形を制御する波形制御方法であって、
前記光増幅部の利得範囲内となる複数の波長を含む光を前記種光として出力する出力ステップと、
前記種光の強度時間波形を制御する制御ステップと、を備え、
前記出力ステップでは、前記光増幅部の利得のピークから遠い波長の光によって時間的に先に伝搬する成分が構成され、且つ前記光増幅部の利得のピークに近い波長の光によって時間的に後に伝搬する成分が構成される光を前記種光として出力する、波形制御方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2016244434A JP6943566B2 (ja) | 2016-12-16 | 2016-12-16 | レーザ装置及び波形制御方法 |
CN201780077070.9A CN110073558B (zh) | 2016-12-16 | 2017-11-21 | 激光装置和波形控制方法 |
US16/469,300 US11424591B2 (en) | 2016-12-16 | 2017-11-21 | Laser device and method for controlling waveform |
EP17879695.9A EP3557704B1 (en) | 2016-12-16 | 2017-11-21 | Laser device and method for controlling waveform |
KR1020197007260A KR102338206B1 (ko) | 2016-12-16 | 2017-11-21 | 레이저 장치 및 파형 제어 방법 |
PCT/JP2017/041874 WO2018110222A1 (ja) | 2016-12-16 | 2017-11-21 | レーザ装置及び波形制御方法 |
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JP2018098449A JP2018098449A (ja) | 2018-06-21 |
JP6943566B2 true JP6943566B2 (ja) | 2021-10-06 |
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US (1) | US11424591B2 (ja) |
EP (1) | EP3557704B1 (ja) |
JP (1) | JP6943566B2 (ja) |
KR (1) | KR102338206B1 (ja) |
CN (1) | CN110073558B (ja) |
WO (1) | WO2018110222A1 (ja) |
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WO2019012642A1 (ja) * | 2017-07-13 | 2019-01-17 | ギガフォトン株式会社 | レーザシステム |
JP2020053423A (ja) * | 2018-09-21 | 2020-04-02 | 浜松ホトニクス株式会社 | レーザ装置及びレーザ波形制御方法 |
JP7368129B2 (ja) * | 2019-07-18 | 2023-10-24 | 浜松ホトニクス株式会社 | レーザ装置及びレーザ光生成方法 |
JPWO2021054401A1 (ja) * | 2019-09-19 | 2021-03-25 | ||
CN111048981A (zh) * | 2019-12-23 | 2020-04-21 | 苏州长光华芯光电技术有限公司 | 一种脉冲激光放大的预补偿控制方法及系统 |
JP7421951B2 (ja) * | 2020-02-26 | 2024-01-25 | 浜松ホトニクス株式会社 | レーザ加工装置及びレーザ加工方法 |
CN113708199A (zh) * | 2021-08-11 | 2021-11-26 | 光惠(上海)激光科技有限公司 | 一种无水冷多模式选择光纤激光器系统 |
CN113708209A (zh) * | 2021-08-29 | 2021-11-26 | 光惠(上海)激光科技有限公司 | 一种变频温控光纤激光器系统 |
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- 2017-11-21 CN CN201780077070.9A patent/CN110073558B/zh active Active
- 2017-11-21 EP EP17879695.9A patent/EP3557704B1/en active Active
- 2017-11-21 KR KR1020197007260A patent/KR102338206B1/ko active IP Right Grant
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US20200106237A1 (en) | 2020-04-02 |
KR102338206B1 (ko) | 2021-12-09 |
WO2018110222A1 (ja) | 2018-06-21 |
CN110073558A (zh) | 2019-07-30 |
US11424591B2 (en) | 2022-08-23 |
EP3557704B1 (en) | 2023-01-18 |
CN110073558B (zh) | 2022-01-07 |
EP3557704A1 (en) | 2019-10-23 |
KR20190093553A (ko) | 2019-08-09 |
JP2018098449A (ja) | 2018-06-21 |
EP3557704A4 (en) | 2020-08-19 |
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