JP6932378B2 - 発電素子および発電装置 - Google Patents
発電素子および発電装置 Download PDFInfo
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- JP6932378B2 JP6932378B2 JP2018081595A JP2018081595A JP6932378B2 JP 6932378 B2 JP6932378 B2 JP 6932378B2 JP 2018081595 A JP2018081595 A JP 2018081595A JP 2018081595 A JP2018081595 A JP 2018081595A JP 6932378 B2 JP6932378 B2 JP 6932378B2
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- 238000010248 power generation Methods 0.000 title claims description 347
- 238000006073 displacement reaction Methods 0.000 claims description 515
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- 238000012986 modification Methods 0.000 description 72
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- 239000011229 interlayer Substances 0.000 description 42
- 238000000034 method Methods 0.000 description 18
- 239000000758 substrate Substances 0.000 description 11
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- 239000004065 semiconductor Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
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- 238000005240 physical vapour deposition Methods 0.000 description 3
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- 238000004544 sputter deposition Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
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- 238000000206 photolithography Methods 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018081595A JP6932378B2 (ja) | 2017-04-05 | 2018-04-20 | 発電素子および発電装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017557004A JP6335400B1 (ja) | 2017-04-05 | 2017-04-05 | 発電素子および発電装置 |
| JP2018081595A JP6932378B2 (ja) | 2017-04-05 | 2018-04-20 | 発電素子および発電装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017557004A Division JP6335400B1 (ja) | 2017-04-05 | 2017-04-05 | 発電素子および発電装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018183049A JP2018183049A (ja) | 2018-11-15 |
| JP2018183049A5 JP2018183049A5 (enExample) | 2020-05-21 |
| JP6932378B2 true JP6932378B2 (ja) | 2021-09-08 |
Family
ID=64277255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018081595A Active JP6932378B2 (ja) | 2017-04-05 | 2018-04-20 | 発電素子および発電装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6932378B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7341463B2 (ja) * | 2019-09-02 | 2023-09-11 | 国立大学法人千葉大学 | 振動発電素子 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102007679A (zh) * | 2008-09-29 | 2011-04-06 | 松下电器产业株式会社 | 振动发电器、振动发电装置及搭载了振动发电装置的通信装置 |
| JP2010279106A (ja) * | 2009-05-26 | 2010-12-09 | Panasonic Electric Works Co Ltd | 静電誘導型発電装置 |
| JP2012044747A (ja) * | 2010-08-17 | 2012-03-01 | Seiko Epson Corp | 静電誘導発電デバイス |
| JP5969427B2 (ja) * | 2013-05-28 | 2016-08-17 | 日本電信電話株式会社 | 静電変換装置およびその製造方法 |
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2018
- 2018-04-20 JP JP2018081595A patent/JP6932378B2/ja active Active
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| Publication number | Publication date |
|---|---|
| JP2018183049A (ja) | 2018-11-15 |
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