JP6931311B2 - 異方性導電膜またはペーストを用いて高さの異なる複数のチップを可撓性基板上に同時に接着する方法 - Google Patents

異方性導電膜またはペーストを用いて高さの異なる複数のチップを可撓性基板上に同時に接着する方法 Download PDF

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JP6931311B2
JP6931311B2 JP2017193915A JP2017193915A JP6931311B2 JP 6931311 B2 JP6931311 B2 JP 6931311B2 JP 2017193915 A JP2017193915 A JP 2017193915A JP 2017193915 A JP2017193915 A JP 2017193915A JP 6931311 B2 JP6931311 B2 JP 6931311B2
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semiconductor chips
flexible substrate
pin
semiconductor chip
aca
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JP2018074148A (ja
JP2018074148A5 (enExample
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ブレント・エス・クルソー
ピン・メイ
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パロ アルト リサーチ センター インコーポレイテッド
パロ アルト リサーチ センター インコーポレイテッド
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    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Adhesives Or Adhesive Processes (AREA)
JP2017193915A 2016-10-24 2017-10-04 異方性導電膜またはペーストを用いて高さの異なる複数のチップを可撓性基板上に同時に接着する方法 Expired - Fee Related JP6931311B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/332,326 2016-10-24
US15/332,326 US10147702B2 (en) 2016-10-24 2016-10-24 Method for simultaneously bonding multiple chips of different heights on flexible substrates using anisotropic conductive film or paste

Publications (3)

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DE102015120156B4 (de) * 2015-11-20 2019-07-04 Semikron Elektronik Gmbh & Co. Kg Vorrichtung zur materialschlüssigen Verbindung von Verbindungspartnern eines Leistungselekronik-Bauteils und Verwendung einer solchen Vorrichtung
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Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5353498A (en) * 1993-02-08 1994-10-11 General Electric Company Method for fabricating an integrated circuit module
US5861678A (en) * 1997-12-23 1999-01-19 Micron Technology, Inc. Method and system for attaching semiconductor dice to substrates
JP2000150560A (ja) * 1998-11-13 2000-05-30 Seiko Epson Corp バンプ形成方法及びバンプ形成用ボンディングツール、半導体ウエーハ、半導体チップ及び半導体装置並びにこれらの製造方法、回路基板並びに電子機器
WO2000045430A1 (en) * 1999-01-29 2000-08-03 Matsushita Electric Industrial Co., Ltd. Electronic parts mounting method and device therefor
JP2002110744A (ja) * 2000-09-26 2002-04-12 Matsushita Electric Ind Co Ltd 半導体実装装置、および半導体実装方法
JP2002198395A (ja) * 2000-12-26 2002-07-12 Seiko Epson Corp 半導体装置及びその製造方法、回路基板並びに電子機器
JP4710205B2 (ja) 2001-09-06 2011-06-29 ソニー株式会社 フリップチップ実装方法
KR100604334B1 (ko) * 2003-11-25 2006-08-08 (주)케이나인 플립칩 패키징 공정에서 접합력이 향상된 플립칩 접합 방법
US20050282355A1 (en) * 2004-06-18 2005-12-22 Edwards David N High density bonding of electrical devices
JP4925669B2 (ja) 2006-01-13 2012-05-09 ソニーケミカル&インフォメーションデバイス株式会社 圧着装置及び実装方法
JP2007294607A (ja) * 2006-04-24 2007-11-08 Sony Chemical & Information Device Corp 押圧ヘッド及び押圧装置
KR100785493B1 (ko) * 2006-05-04 2007-12-13 한국과학기술원 접착제의 수분흡습을 방지하는 플립칩용 웨이퍼 레벨패키지 제조방법
US7884719B2 (en) * 2006-11-21 2011-02-08 Rcd Technology Inc. Radio frequency identification (RFID) tag lamination process
JP5285144B2 (ja) 2009-03-26 2013-09-11 シャープ株式会社 チップ部品実装構造、チップ部品実装方法および液晶表示装置
US8520399B2 (en) * 2010-10-29 2013-08-27 Palo Alto Research Center Incorporated Stretchable electronics modules and circuits
JP2013084790A (ja) * 2011-10-11 2013-05-09 Sharp Corp 熱圧着装置

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