JP6925770B2 - 膜形成装置及び膜形成方法 - Google Patents

膜形成装置及び膜形成方法 Download PDF

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Publication number
JP6925770B2
JP6925770B2 JP2019509612A JP2019509612A JP6925770B2 JP 6925770 B2 JP6925770 B2 JP 6925770B2 JP 2019509612 A JP2019509612 A JP 2019509612A JP 2019509612 A JP2019509612 A JP 2019509612A JP 6925770 B2 JP6925770 B2 JP 6925770B2
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JP
Japan
Prior art keywords
substrate
inkjet head
ink
film forming
heating means
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Active
Application number
JP2019509612A
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English (en)
Japanese (ja)
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JPWO2018180803A1 (ja
Inventor
礒 圭二
圭二 礒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Publication of JPWO2018180803A1 publication Critical patent/JPWO2018180803A1/ja
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Publication of JP6925770B2 publication Critical patent/JP6925770B2/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/26Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • B41J11/0021Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/02Ink jet characterised by the jet generation process generating a continuous ink jet
    • B41J2002/022Control methods or devices for continuous ink jet
JP2019509612A 2017-03-29 2018-03-20 膜形成装置及び膜形成方法 Active JP6925770B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017064872 2017-03-29
JP2017064872 2017-03-29
PCT/JP2018/011138 WO2018180803A1 (ja) 2017-03-29 2018-03-20 膜形成装置及び膜形成方法

Publications (2)

Publication Number Publication Date
JPWO2018180803A1 JPWO2018180803A1 (ja) 2020-02-06
JP6925770B2 true JP6925770B2 (ja) 2021-08-25

Family

ID=63675829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019509612A Active JP6925770B2 (ja) 2017-03-29 2018-03-20 膜形成装置及び膜形成方法

Country Status (5)

Country Link
JP (1) JP6925770B2 (zh)
KR (1) KR102433555B1 (zh)
CN (1) CN110446558B (zh)
TW (1) TWI724283B (zh)
WO (1) WO2018180803A1 (zh)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63109083A (ja) * 1986-10-28 1988-05-13 Seiko Epson Corp インクジエツト記録方法
AU2003217351B2 (en) * 2002-02-08 2007-01-04 Gerber Scientific Products, Inc. Method and apparatus for making signs having an adhesive
CN1209488C (zh) * 2003-06-27 2005-07-06 西北工业大学 用于薄膜制备的加热控温装置及使用方法
JP2005033049A (ja) * 2003-07-08 2005-02-03 Nec Toppan Circuit Solutions Inc プリント配線板の配線パターン形成方法及びプリント配線板の製造方法
TW200624479A (en) * 2004-12-09 2006-07-16 Fraunhofer Ges Forschung Film forming material and preparation of surface relief and optically anisotropic structures by irradiating a film of the said material
CN101341030A (zh) * 2005-12-22 2009-01-07 皇家飞利浦电子股份有限公司 用于将物质放置到基板上的喷墨设备,用于将物质放置到基板上的方法以及喷墨设备的使用
JP2008130764A (ja) * 2006-11-20 2008-06-05 Sharp Corp プリント配線板製造装置、プリント配線板、プリント配線板製造方法および電子機器
JP2008188983A (ja) 2006-12-25 2008-08-21 Seiko Epson Corp 紫外線照射装置および該紫外線照射装置を用いた記録装置、ならびに記録方法
US8398227B2 (en) * 2007-12-06 2013-03-19 National Institute Of Advanced Industrial Science And Technology Pattern drawing method and pattern drawing apparatus
WO2009139060A1 (ja) * 2008-05-15 2009-11-19 株式会社島津製作所 光マトリックスデバイスの製造方法および光マトリックスデバイスの製造装置
JP2010026507A (ja) * 2008-06-20 2010-02-04 Sharp Corp 局所加熱装置
JP5363257B2 (ja) * 2009-09-28 2013-12-11 富士フイルム株式会社 カラーフィルタ製造方法及びカラーフィルタ製造装置
WO2011155324A1 (ja) * 2010-06-08 2011-12-15 シャープ株式会社 インクジェット塗布装置
CN102646755A (zh) * 2012-04-23 2012-08-22 锦州新世纪石英(集团)有限公司 多晶硅薄膜电池片的生产工艺
CN102953033A (zh) * 2012-11-28 2013-03-06 中山市创科科研技术服务有限公司 一种激光蒸发镀膜装置
KR102294837B1 (ko) * 2013-08-16 2021-08-26 삼성전자주식회사 광학 부품을 제조하는 방법, 광학 부품, 및 그것을 포함하는 제품

Also Published As

Publication number Publication date
JPWO2018180803A1 (ja) 2020-02-06
TW201902583A (zh) 2019-01-16
TWI724283B (zh) 2021-04-11
KR20190132986A (ko) 2019-11-29
CN110446558B (zh) 2021-11-09
WO2018180803A1 (ja) 2018-10-04
CN110446558A (zh) 2019-11-12
KR102433555B1 (ko) 2022-08-17

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