JP6917233B2 - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
- Publication number
- JP6917233B2 JP6917233B2 JP2017143698A JP2017143698A JP6917233B2 JP 6917233 B2 JP6917233 B2 JP 6917233B2 JP 2017143698 A JP2017143698 A JP 2017143698A JP 2017143698 A JP2017143698 A JP 2017143698A JP 6917233 B2 JP6917233 B2 JP 6917233B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- wafer
- grinding
- chuck table
- inclination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02013—Grinding, lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
Description
(付記1)
ウエーハを回転可能に保持するチャックテーブルと、
該チャックテーブルに保持されたウエーハを研磨する研磨手段と、
各構成要素を駆動制御する制御部と、を少なくとも備えた加工装置であって、
該チャックテーブルは、該ウエーハを保持する保持面の中心を通る回転軸の傾きを調整する傾き調整手段を備え、
該制御部は、研磨対象となるウエーハの種別、及び、該研磨手段が備える研磨パッドの種別をそれぞれ組み合わせたパターンごとに、事前に実験に基づいて設定された該回転軸の傾きの規定値を記憶する記憶部と、
該ウエーハの種別及び該研磨パッドの種別が選択された場合に、
該傾き調整手段を駆動させ、該研磨手段の下に位置する該チャックテーブルの該回転軸の傾きを、該当するパターンに応じた規定値に調整する演算処理部とを備えることを特徴とする研磨装置。
2 装置本体
3 粗研削ユニット(研削手段)
3a スピンドル
3b 粗研削ホイール
4 仕上げ研削ユニット(研削手段)
4a スピンドル
4b 仕上げ研削ホイール
5 研磨ユニット(研磨手段)
5a スピンドル
5b 研磨パッド
5c 研磨マウント
7 加工液供給ユニット
8 ターンテーブル
9、9a、9b、9c、9d チャックテーブル
22 支持台
23 位置調整ユニット
23a 固定部
24 モータ
40 傾き調整機構(傾き調整手段)
91 保持面
91A 中心
91B 外周部
92 回転軸
100 制御装置(制御部)
101 演算処理部
102 記憶部
103 データベース
200 ウエーハ
201 裏面
202 表面
203 分割予定ライン
204 デバイス
205 保護部材
Claims (1)
- ウエーハを回転可能に保持するチャックテーブルと、
該ウエーハを研削する研削手段と、
該研削手段によって研削されたウエーハを研磨する研磨手段と、
該チャックテーブルを複数配設した回転可能なターンテーブルと、
各構成要素を駆動制御する制御部と、を少なくとも備える加工装置によって、該ウエーハを所定厚みまで薄化するウエーハの加工方法であって、
該チャックテーブルは、該ウエーハを保持する保持面と、
該保持面の中心を通る回転軸と、
該回転軸の傾きを調整する傾き調整手段と、を少なくとも備え、
該研磨手段に対する該回転軸の適切な傾きを規定値として設定する規定値設定ステップと、
該チャックテーブルに保持されたウエーハを該研削手段によって研削する研削ステップと、
該研削ステップにおいて研削されたウエーハを、該ターンテーブルを回転させて該研磨手段の下に位置づける研磨準備ステップと、
該制御部が該傾き調整手段を駆動させ、該研磨手段の下に位置する該チャックテーブルの該回転軸の傾きを該規定値に調整する回転軸調整ステップと、
該研磨手段によって該ウエーハを研磨する研磨ステップと、
を備え、
該規定値設定ステップにおいて、該回転軸の傾きの規定値は、研磨対象となるウエーハの種別、及び、該研磨手段が備える研磨パッドの種別をそれぞれ組み合わせたパターンごとに、事前に実験に基づいて設定されており、
該ウエーハの種別及び該研磨パッドの種別が選択されると、該回転軸調整ステップにおいて、制御部は、該回転軸の傾きを、該当するパターンに応じた規定値に調整することを特徴とするウエーハの加工方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017143698A JP6917233B2 (ja) | 2017-07-25 | 2017-07-25 | ウエーハの加工方法 |
KR1020180081296A KR102507675B1 (ko) | 2017-07-25 | 2018-07-12 | 웨이퍼의 가공 방법 |
CN201810794206.4A CN109290876B (zh) | 2017-07-25 | 2018-07-19 | 晶片的加工方法 |
TW107125158A TWI774805B (zh) | 2017-07-25 | 2018-07-20 | 晶圓加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017143698A JP6917233B2 (ja) | 2017-07-25 | 2017-07-25 | ウエーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019029374A JP2019029374A (ja) | 2019-02-21 |
JP6917233B2 true JP6917233B2 (ja) | 2021-08-11 |
Family
ID=65172588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017143698A Active JP6917233B2 (ja) | 2017-07-25 | 2017-07-25 | ウエーハの加工方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6917233B2 (ja) |
KR (1) | KR102507675B1 (ja) |
CN (1) | CN109290876B (ja) |
TW (1) | TWI774805B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7273568B2 (ja) * | 2019-03-19 | 2023-05-15 | 株式会社ディスコ | 加工装置 |
CN110116340A (zh) * | 2019-06-05 | 2019-08-13 | 湖南大合新材料有限公司 | 一种碲锌镉晶片的抛光工艺 |
JP7431048B2 (ja) * | 2020-01-27 | 2024-02-14 | 株式会社ディスコ | 加工装置、及び加工装置に用いる支持部 |
WO2021166668A1 (ja) * | 2020-02-17 | 2021-08-26 | 東京エレクトロン株式会社 | 加工方法及び加工装置 |
CN111823084B (zh) * | 2020-07-30 | 2021-11-26 | 华海清科(北京)科技有限公司 | 具有差动螺纹结构的磨削设备 |
CN111730430B (zh) * | 2020-07-30 | 2021-10-15 | 华海清科(北京)科技有限公司 | 具有可调节的吸盘转台的磨削设备 |
CN114454086B (zh) * | 2022-02-17 | 2023-04-07 | 北京通美晶体技术股份有限公司 | 一种GaAs晶片的加工工艺 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2636383B2 (ja) * | 1988-11-18 | 1997-07-30 | 富士通株式会社 | ウェーハの加工方法 |
JP3006249B2 (ja) * | 1991-12-24 | 2000-02-07 | 信越半導体株式会社 | 半導体ウェーハの研磨装置 |
JPH11309653A (ja) * | 1998-04-27 | 1999-11-09 | Tokyo Seimitsu Co Ltd | ウェーハの平面加工装置 |
KR101369828B1 (ko) * | 2006-12-28 | 2014-03-05 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 사파이어 기판 로트 |
JP2008258554A (ja) * | 2007-03-12 | 2008-10-23 | Disco Abrasive Syst Ltd | ウェーハの研削加工装置 |
JP2009246240A (ja) * | 2008-03-31 | 2009-10-22 | Tokyo Seimitsu Co Ltd | 半導体ウェーハ裏面の研削方法及びそれに用いる半導体ウェーハ裏面研削装置 |
DE102009030294B4 (de) * | 2009-06-24 | 2013-04-25 | Siltronic Ag | Verfahren zur Politur der Kante einer Halbleiterscheibe |
US8912095B2 (en) * | 2009-12-15 | 2014-12-16 | Osaka University | Polishing method, polishing apparatus and polishing tool |
JP2013004726A (ja) * | 2011-06-16 | 2013-01-07 | Disco Abrasive Syst Ltd | 板状物の加工方法 |
US9120194B2 (en) * | 2011-07-21 | 2015-09-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for wafer grinding |
JP5788304B2 (ja) | 2011-12-06 | 2015-09-30 | 株式会社ディスコ | 研削装置 |
JP6336772B2 (ja) * | 2014-02-14 | 2018-06-06 | 株式会社ディスコ | 研削研磨装置 |
JP6271339B2 (ja) * | 2014-05-26 | 2018-01-31 | 株式会社ディスコ | 研削研磨装置 |
-
2017
- 2017-07-25 JP JP2017143698A patent/JP6917233B2/ja active Active
-
2018
- 2018-07-12 KR KR1020180081296A patent/KR102507675B1/ko active IP Right Grant
- 2018-07-19 CN CN201810794206.4A patent/CN109290876B/zh active Active
- 2018-07-20 TW TW107125158A patent/TWI774805B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI774805B (zh) | 2022-08-21 |
CN109290876B (zh) | 2022-03-11 |
TW201909270A (zh) | 2019-03-01 |
KR102507675B1 (ko) | 2023-03-07 |
JP2019029374A (ja) | 2019-02-21 |
KR20190011677A (ko) | 2019-02-07 |
CN109290876A (zh) | 2019-02-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6917233B2 (ja) | ウエーハの加工方法 | |
JP2023017278A (ja) | 硬質ウェーハの研削方法 | |
JP7046573B2 (ja) | 被加工物の加工方法 | |
JP6877585B2 (ja) | 基板処理システム、基板処理方法及びコンピュータ記憶媒体 | |
JP2008258554A (ja) | ウェーハの研削加工装置 | |
JP2020175472A (ja) | 保持面形成方法 | |
JP6457275B2 (ja) | 研削装置 | |
CN111386598B (zh) | 基板输送装置、基板处理系统、基板处理方法以及计算机存储介质 | |
JP7357567B2 (ja) | ウェーハの加工方法 | |
JP4966069B2 (ja) | 加工装置 | |
JP6938262B2 (ja) | ウエーハの加工方法 | |
US11400563B2 (en) | Processing method for disk-shaped workpiece | |
JP7477330B2 (ja) | 研削装置及び被加工物の研削方法 | |
WO2022054641A1 (ja) | 加工装置及び加工方法 | |
US20220134509A1 (en) | Grinding method of workpiece | |
JP2022072120A (ja) | ウェーハの研削方法 | |
JP2024031191A (ja) | 研削装置 | |
JP2022122141A (ja) | 保持面の洗浄方法 | |
JP2022001395A (ja) | 確認治具、および、回転軸傾き調整方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200515 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210415 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210420 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210614 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210622 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210719 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6917233 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |