JP6907280B2 - 減圧乾燥装置 - Google Patents

減圧乾燥装置 Download PDF

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Publication number
JP6907280B2
JP6907280B2 JP2019166447A JP2019166447A JP6907280B2 JP 6907280 B2 JP6907280 B2 JP 6907280B2 JP 2019166447 A JP2019166447 A JP 2019166447A JP 2019166447 A JP2019166447 A JP 2019166447A JP 6907280 B2 JP6907280 B2 JP 6907280B2
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JP
Japan
Prior art keywords
liquid
substrate
peripheral portion
vacuum drying
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019166447A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021042919A (ja
Inventor
慎也 福井
慎也 福井
雅樹 横山
雅樹 横山
寿夫 神戸
寿夫 神戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP2019166447A priority Critical patent/JP6907280B2/ja
Priority to TW109120269A priority patent/TWI737353B/zh
Priority to CN202010939262.XA priority patent/CN112474205A/zh
Publication of JP2021042919A publication Critical patent/JP2021042919A/ja
Application granted granted Critical
Publication of JP6907280B2 publication Critical patent/JP6907280B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/0413—Heating with air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0486—Operating the coating or treatment in a controlled atmosphere

Landscapes

  • Drying Of Solid Materials (AREA)
  • Coating Apparatus (AREA)
JP2019166447A 2019-09-12 2019-09-12 減圧乾燥装置 Active JP6907280B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019166447A JP6907280B2 (ja) 2019-09-12 2019-09-12 減圧乾燥装置
TW109120269A TWI737353B (zh) 2019-09-12 2020-06-16 減壓乾燥裝置
CN202010939262.XA CN112474205A (zh) 2019-09-12 2020-09-09 减压干燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019166447A JP6907280B2 (ja) 2019-09-12 2019-09-12 減圧乾燥装置

Publications (2)

Publication Number Publication Date
JP2021042919A JP2021042919A (ja) 2021-03-18
JP6907280B2 true JP6907280B2 (ja) 2021-07-21

Family

ID=74863226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019166447A Active JP6907280B2 (ja) 2019-09-12 2019-09-12 減圧乾燥装置

Country Status (3)

Country Link
JP (1) JP6907280B2 (zh)
CN (1) CN112474205A (zh)
TW (1) TWI737353B (zh)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100449961B1 (ko) * 1995-09-18 2004-09-24 미네소타 마이닝 앤드 매뉴팩춰링 캄파니 피복 기재의 건조 장치
US6695922B2 (en) * 1999-12-15 2004-02-24 Tokyo Electron Limited Film forming unit
US6808566B2 (en) * 2001-09-19 2004-10-26 Tokyo Electron Limited Reduced-pressure drying unit and coating film forming method
JP3806660B2 (ja) * 2002-03-12 2006-08-09 東京エレクトロン株式会社 減圧乾燥装置及び減圧乾燥方法
JP2003338499A (ja) * 2002-05-20 2003-11-28 Tokyo Electron Ltd 膜形成方法及び膜形成装置
JP2007234991A (ja) * 2006-03-02 2007-09-13 Matsushita Electric Ind Co Ltd プラズマ処理装置およびプラズマ処理方法
JP5089288B2 (ja) * 2007-01-26 2012-12-05 大日本スクリーン製造株式会社 減圧乾燥装置
KR100912837B1 (ko) * 2008-03-17 2009-08-18 참앤씨(주) 건식식각장치
JP2010182893A (ja) * 2009-02-06 2010-08-19 Panasonic Corp 基板処理方法および基板処理装置
JP6945314B2 (ja) * 2017-03-24 2021-10-06 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Also Published As

Publication number Publication date
CN112474205A (zh) 2021-03-12
TW202111268A (zh) 2021-03-16
TWI737353B (zh) 2021-08-21
JP2021042919A (ja) 2021-03-18

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