JP6903767B2 - めっき処理方法、めっき処理装置及び記憶媒体 - Google Patents
めっき処理方法、めっき処理装置及び記憶媒体 Download PDFInfo
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- JP6903767B2 JP6903767B2 JP2019558127A JP2019558127A JP6903767B2 JP 6903767 B2 JP6903767 B2 JP 6903767B2 JP 2019558127 A JP2019558127 A JP 2019558127A JP 2019558127 A JP2019558127 A JP 2019558127A JP 6903767 B2 JP6903767 B2 JP 6903767B2
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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Description
図1を参照して、本発明の一実施形態に係るめっき処理装置の構成を説明する。図1は、本発明の一実施形態に係るめっき処理装置の構成を示す概略図である。
図1を参照して、めっき処理ユニット2の構成を説明する。図1は、めっき処理ユニット2の構成を示す概略平面図である。
次に図2を参照して、めっき処理部5の構成を説明する。図2は、めっき処理部5の構成を示す概略断面図である。
次に、本実施形態によるめっき処理方法によってめっき層が形成される基板の構成について説明する。
次に、めっき処理装置1を用いためっき処理方法について説明する。めっき処理装置1によって実施されるめっき処理方法は、上述した基板Wに対するめっき処理を含む。めっき処理は、めっき処理部5により実施される。めっき処理部5の動作は、制御部3によって制御される。
次に、本実施形態の各変形例について説明する。なお、以下の変形例を説明する各図において、上述した実施形態と同一部分には同一の符号を付してある。また、以下においては、上述した本実施形態との相違点を中心に説明し、上述した本実施形態と共通する事項については詳細な説明を省略する。
図9および図10は、本実施形態の一変形例(変形例1)を示す図である。図9に示すように、めっき処理部5は、基板保持部52に保持された基板Wに対して、吸着促進材料N5を供給する吸着促進材料供給部55eを更に備えている。この吸着促進材料供給部55eは、基板保持部52に保持された基板Wに対して、吸着促進材料N5を吐出するノズル551eと、ノズル551eに吸着促進材料N5を供給する吸着促進材料供給源552eとを備える。吸着促進材料供給源552eが有するタンクには、液状の吸着促進材料N5が貯留されており、ノズル551eには、吸着促進材料供給源552eから、バルブ553e等の流量調整器が介設された供給管路554eを通じて、吸着促進材料N5が供給される。ノズル551eは、アーム561に保持されてノズル551a〜551dとともに移動可能になっている。
図11は、本実施形態の他の変形例(変形例2)を示す図である。上述した実施形態においては、めっき層35を形成するめっき工程(ステップS7)の前に、基板W上の高分子化合物N4を除去する触媒液および高分子化合物除去工程(ステップS6)が設けられている場合を例にとって説明した。しかしながら、図11に示すように、高分子化合物除去工程(ステップS11)が、めっき工程(ステップS7)の後に行われても良い。例えば、高分子化合物N4の高分子膜37がリンス液N3によって除去されない材料からなる場合、めっき工程(ステップS7)の間、めっき不可材料部分31を高分子膜37によって覆っておいても良い。めっき工程(ステップS7)の後、高分子化合物除去工程(ステップS11)において、高分子化合物N4を溶解可能な洗浄液によって高分子化合物N4が洗い流されて除去される。この場合、めっき不可材料部分31にめっき金属が析出することをより確実に抑制することができる。なお、図11に示すめっき処理方法においても、高分子化合物供給工程(ステップS4)の後、触媒付与工程(ステップS5)の前に、吸着促進材料供給工程(ステップS10)を設けても良い。
本実施形態においては、高分子化合物供給工程(ステップS4)の後、触媒付与工程(ステップS5)が設けられている場合を例にとって説明した。しかしながら、これに限らず、高分子化合物供給工程(ステップS4)の後、触媒付与工程(ステップS5)の前に、基板W上のめっき可能材料部分32に付着してしまった微量な高分子膜37を除去するための予備的な高分子化合物除去工程を設けても良い。すなわち、なんらかの要因によりめっき可能材料部分32上に高分子膜37が付着することも考えられる。この場合、基板W上に、めっき不可材料部分31を覆う高分子膜37が全て除去されない程度の、例えば少量のリンス液または薬液を供給することによって、めっき可能材料部分32上の不要な高分子膜37を洗い流して除去することができる。
Claims (9)
- 末端NH x 基を有するめっき可能材料部分と、末端OH基を有するめっき不可材料部分とが表面に露出するように形成された基板を準備する工程と、
前記基板に、前記めっき不可材料部分の前記末端OH基に対して選択的に反応する高分子化合物を供給する工程と、
前記高分子化合物が供給された前記基板に対して触媒付与処理を行うことにより、前記めっき可能材料部分に対して選択的に触媒を付与する工程と、
前記基板に対してめっき処理を施すことにより、前記めっき可能材料部分に対して選択的にめっき層を形成する工程と、
前記めっき層を形成する工程の前または後に、前記基板上の前記高分子化合物を除去する工程と、を備えた、めっき処理方法。 - 前記高分子化合物は、アクリル系ポリマー又はポリグリセリンである、請求項1に記載のめっき処理方法。
- 前記高分子化合物を供給する工程の後、前記触媒を付与する工程の前に、前記基板に、前記めっき可能材料部分の前記末端NHx基に対して選択的に反応する吸着促進材料を供給する工程が設けられている、請求項1または2に記載のめっき処理方法。
- 前記吸着促進材料は、チオール化合物又はトリアゾール化合物である、請求項3に記載のめっき処理方法。
- 末端NH x 基を有するめっき可能材料部分と、末端OH基を有するめっき不可材料部分とが表面に露出するように形成された基板を保持する基板保持部と、
前記基板に、前記めっき不可材料部分の前記末端OH基に対して選択的に反応する高分子化合物を供給する高分子化合物供給部と、
前記高分子化合物が供給された前記基板に対して触媒付与処理を行うことにより、前記めっき可能材料部分に対して選択的に触媒を付与する触媒付与部と、
前記基板に対してめっき液を供給することにより、前記めっき可能材料部分に対して選択的にめっき層を形成するめっき液供給部と、
前記基板上の前記高分子化合物を除去する高分子化合物除去部と、を備えた、めっき処理装置。 - 前記高分子化合物は、アクリル系ポリマー又はポリグリセリンである、請求項5に記載のめっき処理装置。
- 前記基板に、前記めっき可能材料部分の前記末端NHx基に対して選択的に反応する吸着促進材料を供給する吸着促進材料供給部を更に備えた、請求項5または6に記載のめっき処理装置。
- 前記吸着促進材料は、チオール化合物又はトリアゾール化合物である、請求項7に記載のめっき処理装置。
- めっき処理装置の動作を制御するためのコンピュータにより実行されたときに、前記コンピュータが前記めっき処理装置を制御して請求項1乃至4のいずれか一項記載のめっき処理方法を実行させるプログラムが記録された記憶媒体。
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