JP6880600B2 - 回路装置、物理量検出装置、電子機器及び移動体 - Google Patents

回路装置、物理量検出装置、電子機器及び移動体 Download PDF

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Publication number
JP6880600B2
JP6880600B2 JP2016160393A JP2016160393A JP6880600B2 JP 6880600 B2 JP6880600 B2 JP 6880600B2 JP 2016160393 A JP2016160393 A JP 2016160393A JP 2016160393 A JP2016160393 A JP 2016160393A JP 6880600 B2 JP6880600 B2 JP 6880600B2
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Prior art keywords
detection
circuit
drive
frequency
angular velocity
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Japanese (ja)
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JP2018028473A5 (enExample
JP2018028473A (ja
Inventor
竜太 西澤
竜太 西澤
金本　啓
啓 金本
菊池　尊行
菊池　　尊行
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2016160393A priority Critical patent/JP6880600B2/ja
Priority to US15/672,776 priority patent/US10670428B2/en
Publication of JP2018028473A publication Critical patent/JP2018028473A/ja
Publication of JP2018028473A5 publication Critical patent/JP2018028473A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Power Engineering (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2016160393A 2016-08-18 2016-08-18 回路装置、物理量検出装置、電子機器及び移動体 Active JP6880600B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016160393A JP6880600B2 (ja) 2016-08-18 2016-08-18 回路装置、物理量検出装置、電子機器及び移動体
US15/672,776 US10670428B2 (en) 2016-08-18 2017-08-09 Circuit device, physical quantity detection device, electronic apparatus, and vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016160393A JP6880600B2 (ja) 2016-08-18 2016-08-18 回路装置、物理量検出装置、電子機器及び移動体

Publications (3)

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JP2018028473A JP2018028473A (ja) 2018-02-22
JP2018028473A5 JP2018028473A5 (enExample) 2019-07-11
JP6880600B2 true JP6880600B2 (ja) 2021-06-02

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US (1) US10670428B2 (enExample)
JP (1) JP6880600B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019045682A (ja) * 2017-09-01 2019-03-22 キヤノン株式会社 光学機器制御装置および光学機器
JP2019074433A (ja) * 2017-10-17 2019-05-16 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
JP7206905B2 (ja) * 2018-12-28 2023-01-18 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP2021067624A (ja) * 2019-10-28 2021-04-30 セイコーエプソン株式会社 慣性計測装置、電子機器及び移動体
JP7226246B2 (ja) * 2019-10-29 2023-02-21 株式会社デンソー 角速度センサおよび角速度センサシステム
JP7585717B2 (ja) 2020-10-29 2024-11-19 セイコーエプソン株式会社 慣性計測装置
CN114870395B (zh) * 2021-02-05 2023-09-15 腾讯科技（深圳）有限公司 游戏场景的终端振动检测方法、装置、介质及设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3264580B2 (ja) 1993-03-24 2002-03-11 トヨタ自動車株式会社 角速度検出装置
JPH0979859A (ja) * 1995-09-14 1997-03-28 Nissan Motor Co Ltd 振動式角速度センサのオフセット測定装置
KR100363246B1 (ko) 1995-10-27 2003-02-14 삼성전자 주식회사 진동구조물및진동구조물의고유진동수제어방법
JP4051490B2 (ja) * 1996-12-12 2008-02-27 株式会社ニコン 振動検出装置、及び、撮像装置
JP3666335B2 (ja) 2000-01-14 2005-06-29 株式会社村田製作所 角速度センサ
DE102004056699A1 (de) * 2004-11-24 2006-06-01 Litef Gmbh Verfahren zur Steuerung/Regelung einer physikalischen Größe eines dynamischen Systems, insbesondere eines mikromechanischen Sensors
JP2011203028A (ja) * 2010-03-25 2011-10-13 Hitachi Automotive Systems Ltd 角速度および加速度の検出装置
KR101208278B1 (ko) * 2011-05-20 2012-12-05 삼성전기주식회사 각속도 센서
JP5958688B2 (ja) 2012-03-05 2016-08-02 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
US10139229B2 (en) * 2015-12-10 2018-11-27 Panasonic Corporation Gyroscope with auxiliary self-test

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US10670428B2 (en) 2020-06-02
US20180052012A1 (en) 2018-02-22
JP2018028473A (ja) 2018-02-22

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