JP6867328B2 - 機械工具のための熱コンセプト - Google Patents
機械工具のための熱コンセプト Download PDFInfo
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- JP6867328B2 JP6867328B2 JP2018082911A JP2018082911A JP6867328B2 JP 6867328 B2 JP6867328 B2 JP 6867328B2 JP 2018082911 A JP2018082911 A JP 2018082911A JP 2018082911 A JP2018082911 A JP 2018082911A JP 6867328 B2 JP6867328 B2 JP 6867328B2
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- 238000003754 machining Methods 0.000 claims description 32
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- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
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- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
- B23K26/125—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases of mixed gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/003—Cooling means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Laser Beam Processing (AREA)
Description
Claims (13)
- 制御ユニット(30)と、レーザアブレーション装置(10)と、気体供給部(40)とを有するレーザ加工システム(1)であって、前記レーザアブレーション装置(10)が、レーザビーム(14)を生成するためのレーザ(12)と、該レーザ(12)のレーザビーム(14)を加工されるべきワークピース(22)の表面(20)へ向けるためのリダイレクト装置(18)を含むレーザヘッド(16)とを含んでおり、前記ワークピース(22)が作業チャンバ(28)内に配置された収容装置(26)に配置されており、前記レーザヘッド(16)と前記ワークピース(22)の間の相対移動のために位置決め装置(32)が設けられており、前記作業チャンバ(28)が、気体のための少なくとも1つの入口(46)及び少なくとも1つの出口(48)を含んでいる、前記レーザ加工システムにおいて、
前記気体供給部(40)が、前記作業チャンバ(28)内での気体の流れを供給するように構成されており、前記気体の流れ(44)の温度を調整するために温度システム(11)が設けられており、前記温度システム(11)が、前記気体の流れの温度を調整するための少なくとも1つの装置と、前記ワークピース(22)の熱的な値及び/又は前記作業チャンバ(28)における気体の熱的な値を特定するように構成された少なくとも1つの温度センサ(84,86)とを含んでおり、これら熱的な値が、入ってくる気体の流れの温度を調整するために前記制御ユニット(30)によって用いられることを特徴とするレーザ加工システム。 - 前記気体が周囲からの空気であることを特徴とする請求項1に記載のレーザ加工システム(1)。
- 前記気体供給部(40)は、入ってくる前記気体の流れ(44)がポンプ及び少なくとも1つの出口(48)を用いて前記作業チャンバへ圧縮又は吸引されるように、気体供給構造部(41)及び気体排出構造部(42)を含んでいることを特徴とする請求項1又は2に記載のレーザ加工システム(1)。
- 前記気体供給部(40)が前記制御ユニット(30)によって制御されることを特徴とする請求項1〜3のいずれか1項に記載のレーザ加工システム(1)。
- 前記少なくとも1つの装置が熱交換器(80)として構成されていることを特徴とする請求項1〜4のいずれか1項に記載のレーザ加工システム(1)。
- 前記温度システム(11)の前記少なくとも1つの温度センサ(84,86)が、前記ワークピース(22)の熱的な値を設定するために構成されていることを特徴とする請求項1〜5のいずれか1項に記載のレーザ加工システム(1)。
- 前記温度システム(11)の前記少なくとも1つの温度センサ(84,86)が、前記作業チャンバ(28)における気体の熱的な値を設定するために構成されていることを特徴とする請求項1〜6のいずれか1項に記載のレーザ加工システム(1)。
- 前記温度センサ(84,86)によって設定された温度が、入ってくる前記気体の流れ(44)の温度をあらかじめ設定された値へ調整するように前記熱交換器(80)を制御するために前記制御ユニット(30)によって用いられることを特徴とする請求項6又は7に記載のレーザ加工システム(1)。
- 入ってくる前記気体の流れ(44)が、前記作業チャンバ(28)へ入る前に、フィルタ手段を通過することを特徴とする請求項1〜8のいずれか1項に記載のレーザ加工システム(1)。
- アブレーションデブリが部分的に収集されるようにトレイ(88)が配置されていることを特徴とする請求項1〜9のいずれか1項に記載のレーザ加工システム(1)。
- フィルタ手段が、アブレーションデブリを吸収するように適合された前記気体排出構造部(42)に配置されていることを特徴とする請求項1〜10のいずれか1項に記載のレーザ加工システム(1)。
- 前記作業チャンバ(28)が二重壁によって限定されていることを特徴とする請求項1〜11のいずれか1項に記載のレーザ加工システム(1)。
- 前記作業チャンバ(28)の前記二重壁が断熱材料で満たされた隙間を提供することを特徴とする請求項12に記載のレーザ加工システム(1)。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP17169292.4 | 2017-05-03 | ||
EP17169292.4A EP3398709B1 (en) | 2017-05-03 | 2017-05-03 | Laser machining system with a thermo-concept |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018187678A JP2018187678A (ja) | 2018-11-29 |
JP2018187678A5 JP2018187678A5 (ja) | 2021-03-04 |
JP6867328B2 true JP6867328B2 (ja) | 2021-04-28 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2018082911A Active JP6867328B2 (ja) | 2017-05-03 | 2018-04-24 | 機械工具のための熱コンセプト |
Country Status (5)
Country | Link |
---|---|
US (1) | US11292086B2 (ja) |
EP (1) | EP3398709B1 (ja) |
JP (1) | JP6867328B2 (ja) |
CN (1) | CN108817676B (ja) |
PL (1) | PL3398709T3 (ja) |
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CN112475613B (zh) * | 2020-11-06 | 2022-04-05 | 中国科学院上海光学精密机械研究所 | 一种水气同轴辅助振镜扫描的激光加工装置 |
WO2022162768A1 (ja) * | 2021-01-27 | 2022-08-04 | ギガフォトン株式会社 | レーザ加工方法、及びレーザ加工システム |
DE102021205679A1 (de) | 2021-06-04 | 2022-12-08 | Q.ant GmbH | Verfahren zum Herstellen von Mikrostrukturen an einem Diamant-Kristall |
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2017
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EP3398709A1 (en) | 2018-11-07 |
US11292086B2 (en) | 2022-04-05 |
EP3398709B1 (en) | 2020-12-16 |
JP2018187678A (ja) | 2018-11-29 |
PL3398709T3 (pl) | 2021-06-28 |
CN108817676A (zh) | 2018-11-16 |
US20180318963A1 (en) | 2018-11-08 |
CN108817676B (zh) | 2022-01-11 |
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