JP6857830B2 - 物質検知装置及び物質検知方法 - Google Patents

物質検知装置及び物質検知方法 Download PDF

Info

Publication number
JP6857830B2
JP6857830B2 JP2017174389A JP2017174389A JP6857830B2 JP 6857830 B2 JP6857830 B2 JP 6857830B2 JP 2017174389 A JP2017174389 A JP 2017174389A JP 2017174389 A JP2017174389 A JP 2017174389A JP 6857830 B2 JP6857830 B2 JP 6857830B2
Authority
JP
Japan
Prior art keywords
gas
detection
substance
frame
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2017174389A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019049496A (ja
JP2019049496A5 (https=
Inventor
啓二 平田
啓二 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Priority to JP2017174389A priority Critical patent/JP6857830B2/ja
Priority to PCT/JP2018/028745 priority patent/WO2019049562A1/ja
Priority to US16/645,255 priority patent/US20200232914A1/en
Priority to EP18853789.8A priority patent/EP3683569A4/en
Publication of JP2019049496A publication Critical patent/JP2019049496A/ja
Publication of JP2019049496A5 publication Critical patent/JP2019049496A5/ja
Application granted granted Critical
Publication of JP6857830B2 publication Critical patent/JP6857830B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433Modulation spectrometry; Derivative spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/38Investigating fluid-tightness of structures by using light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00Image enhancement or restoration
    • G06T5/50Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/70Determining position or orientation of objects or cameras
    • G06T7/73Determining position or orientation of objects or cameras using feature-based methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/42Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/423Spectral arrangements using lasers, e.g. tunable
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3513Open path with an instrumental source
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396Type of laser source
    • G01N2021/399Diode laser
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20212Image combination
    • G06T2207/20221Image fusion; Image merging

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2017174389A 2017-09-11 2017-09-11 物質検知装置及び物質検知方法 Expired - Fee Related JP6857830B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017174389A JP6857830B2 (ja) 2017-09-11 2017-09-11 物質検知装置及び物質検知方法
PCT/JP2018/028745 WO2019049562A1 (ja) 2017-09-11 2018-07-31 物質検知装置及び物質検知方法
US16/645,255 US20200232914A1 (en) 2017-09-11 2018-07-31 Substance detection device and substance detection method
EP18853789.8A EP3683569A4 (en) 2017-09-11 2018-07-31 DEVICE AND METHOD FOR SUBSTANCE DETECTION

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017174389A JP6857830B2 (ja) 2017-09-11 2017-09-11 物質検知装置及び物質検知方法

Publications (3)

Publication Number Publication Date
JP2019049496A JP2019049496A (ja) 2019-03-28
JP2019049496A5 JP2019049496A5 (https=) 2020-06-25
JP6857830B2 true JP6857830B2 (ja) 2021-04-14

Family

ID=65633782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017174389A Expired - Fee Related JP6857830B2 (ja) 2017-09-11 2017-09-11 物質検知装置及び物質検知方法

Country Status (4)

Country Link
US (1) US20200232914A1 (https=)
EP (1) EP3683569A4 (https=)
JP (1) JP6857830B2 (https=)
WO (1) WO2019049562A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11108995B2 (en) * 2018-09-11 2021-08-31 Draeger Medical Systems, Inc. System and method for gas detection
JP6918194B1 (ja) * 2020-12-17 2021-08-11 東京瓦斯株式会社 表示装置、プログラム、ガス漏洩検知システム及びガス漏洩検知方法
JP7699936B2 (ja) * 2021-03-08 2025-06-30 株式会社フジタ ガス検出マップ生成システム及びガス検出マップ生成方法
JP7469557B2 (ja) * 2021-03-15 2024-04-16 東京ガスエンジニアリングソリューションズ株式会社 ガス検知器
CN114323508A (zh) * 2021-12-22 2022-04-12 南京航空航天大学 一种浮空器囊体泄漏点检测系统及其设计方法
JP7719747B2 (ja) * 2022-03-18 2025-08-06 株式会社東芝 ガス検出装置、およびガス検出方法
JPWO2025239427A1 (https=) * 2024-05-16 2025-11-20

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06317533A (ja) * 1993-03-11 1994-11-15 Toshiba Corp 異物検査方法及び異物検査装置
JP2004327546A (ja) * 2003-04-22 2004-11-18 Tokyo Electron Ltd 半導体製造システム
JP2008232920A (ja) 2007-03-22 2008-10-02 Anritsu Corp ガス検知装置及び該装置を用いた校正方法並びに波長確認方法
US9927356B2 (en) * 2015-03-20 2018-03-27 SMS Sensors Incorporated Systems and methods for detecting gases, airborne compounds, and other particulates
EP3343202B1 (en) * 2015-08-24 2019-12-04 Panasonic Intellectual Property Management Co., Ltd. Substance detecting device, substance detecting system, and substance detecting method
US9970756B2 (en) * 2015-10-06 2018-05-15 Bridger Photonics, Inc. High-sensitivity gas-mapping 3D imager and method of operation
JP6791721B2 (ja) 2016-03-22 2020-11-25 株式会社オービック 債権債務管理装置、債権債務管理方法、および、債権債務管理プログラム

Also Published As

Publication number Publication date
US20200232914A1 (en) 2020-07-23
JP2019049496A (ja) 2019-03-28
EP3683569A4 (en) 2020-10-28
WO2019049562A1 (ja) 2019-03-14
EP3683569A1 (en) 2020-07-22

Similar Documents

Publication Publication Date Title
JP6857830B2 (ja) 物質検知装置及び物質検知方法
CN110044294B (zh) 图像检查装置及照明装置
US9939518B2 (en) Safety scanner
US11188170B2 (en) Image display apparatus and method for controlling the same
JP2008287142A (ja) 画像投影装置
KR20130029742A (ko) 프로젝터 및 프로젝터 기능을 갖는 전자 기기
US9977230B2 (en) Microscope system
JP7087391B2 (ja) 画像表示装置およびその制御方法
JP5245343B2 (ja) 画像表示装置
JP6652327B2 (ja) 検査対象物の状態評価装置
JP4526988B2 (ja) 微小高さ測定方法及びそれに用いる微小高さ測定装置並びに変位ユニット
JP2007148223A (ja) 走査型レーザ顕微鏡の条件設定装置及び走査型レーザ顕微鏡システム
JP6492588B2 (ja) プロジェクター及びプロジェクターの制御方法
JP2016161396A (ja) 流体検知装置
JP2005249946A (ja) 表示装置の欠陥検査装置
JP2014224856A (ja) レーザ走査型顕微鏡
JP2017151570A (ja) 光学安全システム、安全スキャナ用の設定支援装置及び設定支援プログラム
US10379330B2 (en) Scanning microscope apparatus for generating super-resolution image based on set zoom magnification or set number of pixels
JP2013195378A (ja) 液晶検査装置
JP2019120885A (ja) 投影制御システム及び投影制御方法
JP4873231B2 (ja) 偏光選択型撮像装置
JP2008146463A (ja) 位置検出装置
JP2010134152A (ja) ヘッドマウントディスプレイ
JP6660582B2 (ja) 物質検出装置及び物質検出システム
JP4914567B2 (ja) 走査型共焦点顕微鏡

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200420

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200420

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210202

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210304

R151 Written notification of patent or utility model registration

Ref document number: 6857830

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees