JP6846441B2 - 物体の表面の光学的三次元トポグラフィ計測システム - Google Patents
物体の表面の光学的三次元トポグラフィ計測システム Download PDFInfo
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- JP6846441B2 JP6846441B2 JP2018559667A JP2018559667A JP6846441B2 JP 6846441 B2 JP6846441 B2 JP 6846441B2 JP 2018559667 A JP2018559667 A JP 2018559667A JP 2018559667 A JP2018559667 A JP 2018559667A JP 6846441 B2 JP6846441 B2 JP 6846441B2
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/50—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels
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- G—PHYSICS
- G01—MEASURING; TESTING
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- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/395—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers using a topographic target
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
本願は、この参照を以てその全容が本願に繰り入れられるところの2016年2月1日付米国暫定特許出願第62/289889号に基づく優先権を主張する出願である。
諸実施形態では、そのパターンマスクが、これに限られるものではないが市松模様又はピンホールアレイを有するものとされる。本件技術分野で既知な他のパターン化照明生成向けパターンも遜色なく用いうる。
1.格子ピッチ(Λ)を小さくすること
2.フリンジコントラスト(C0)を高めること
3.光学系により制限される照明数値開口(NAi)を高めること
4.センサにより制限される画像ダイナミックレンジの逆数を大きくすること
5.データレート及びスループットにより制限される計測回数を増やすこと
で、計測再現性を改善することができる。
Claims (10)
- 物体の表面の光学的三次元トポグラフィ計測システムであって、
パターン化照明源と、
上記物体の表面の巨視的拡張により定義される平面に対し垂直な光軸を含み、上記パターン化照明を上記物体の表面に差し向けるよう配置された対物系と、
上記対物系を介し上記物体の表面の複数の画像を記録するよう配置及び構成された検出器と、
上記検出器に接続され、上記複数の画像の光強度差に基づき上記物体の表面の位置の高さ情報を決定するように構成されたコンピュータであり、上記光強度は上記対物系の光軸に対して斜めの角度を含む方向に沿って変化する、コンピュータと、
を備えるシステム。 - 請求項1に記載のシステムであって、上記パターン化照明源が光源及びパターンマスクを有するシステム。
- 請求項2に記載のシステムであって、上記パターンマスクが市松模様又はピンホールアレイを有するシステム。
- 請求項2に記載のシステムであって、上記パターンマスクが格子であるシステム。
- 請求項4に記載のシステムであって、上記格子が振幅格子又は位相格子であるシステム。
- 請求項4に記載のシステムであって、上記格子がライン格子又は正弦格子又はクロスライン格子であるシステム。
- 請求項4に記載のシステムであって、上記格子がブレーズド格子であるシステム。
- 請求項1に記載のシステムであって、上記パターン化照明源・上記対物系間の照明路と、上記対物系・上記検出器間の撮像路とが、双方ともそのビームスプリッタを通過する形態で、ビームスプリッタが配置されているシステム。
- 請求項8に記載のシステムであって、上記対物系は、上記ビームスプリッタにより生じる回折を補正するように配置されるシステム。
- 請求項2に記載のシステムであって、上記パターンマスク及び上記検出器が共役平面内に存するシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662289889P | 2016-02-01 | 2016-02-01 | |
US62/289,889 | 2016-02-01 | ||
PCT/US2016/060599 WO2017136011A2 (en) | 2016-02-01 | 2016-11-04 | Method and system for optical three-dimensional topography measurement |
Related Child Applications (1)
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JP2021031926A Division JP7166375B2 (ja) | 2016-02-01 | 2021-03-01 | 物体の表面の光学的三次元トポグラフィ計測システム |
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JP2019503499A JP2019503499A (ja) | 2019-02-07 |
JP6846441B2 true JP6846441B2 (ja) | 2021-03-24 |
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JP2018559667A Active JP6846441B2 (ja) | 2016-02-01 | 2016-11-04 | 物体の表面の光学的三次元トポグラフィ計測システム |
JP2021031926A Active JP7166375B2 (ja) | 2016-02-01 | 2021-03-01 | 物体の表面の光学的三次元トポグラフィ計測システム |
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Country Status (12)
Country | Link |
---|---|
US (2) | US10634487B2 (ja) |
EP (2) | EP3998477A1 (ja) |
JP (2) | JP6846441B2 (ja) |
KR (1) | KR102668017B1 (ja) |
CN (2) | CN113607088A (ja) |
ES (1) | ES2908695T3 (ja) |
MY (1) | MY196634A (ja) |
PH (1) | PH12018501598A1 (ja) |
PT (1) | PT3411695T (ja) |
SG (2) | SG10201912769PA (ja) |
TW (2) | TWI775331B (ja) |
WO (1) | WO2017136011A2 (ja) |
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- 2016-11-04 CN CN202110901243.2A patent/CN113607088A/zh active Pending
- 2016-11-04 KR KR1020187025110A patent/KR102668017B1/ko active IP Right Grant
- 2016-11-04 SG SG10201912769PA patent/SG10201912769PA/en unknown
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- 2016-11-04 JP JP2018559667A patent/JP6846441B2/ja active Active
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- 2016-11-04 EP EP21216084.0A patent/EP3998477A1/en active Pending
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US10634487B2 (en) | 2020-04-28 |
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US20180209784A1 (en) | 2018-07-26 |
PT3411695T (pt) | 2022-03-03 |
WO2017136011A3 (en) | 2018-02-22 |
CN113607088A (zh) | 2021-11-05 |
SG11201805467TA (en) | 2018-08-30 |
SG10201912769PA (en) | 2020-02-27 |
JP2021081446A (ja) | 2021-05-27 |
TWI775331B (zh) | 2022-08-21 |
US20200217651A1 (en) | 2020-07-09 |
EP3411695A2 (en) | 2018-12-12 |
MY196634A (en) | 2023-04-25 |
ES2908695T3 (es) | 2022-05-03 |
EP3411695B1 (en) | 2022-01-26 |
CN108603848B (zh) | 2021-08-10 |
PH12018501598A1 (en) | 2019-04-08 |
JP7166375B2 (ja) | 2022-11-07 |
TW201732263A (zh) | 2017-09-16 |
TW202127008A (zh) | 2021-07-16 |
US11287248B2 (en) | 2022-03-29 |
WO2017136011A2 (en) | 2017-08-10 |
EP3411695A4 (en) | 2019-10-02 |
CN108603848A (zh) | 2018-09-28 |
KR20180101612A (ko) | 2018-09-12 |
TWI723129B (zh) | 2021-04-01 |
KR102668017B1 (ko) | 2024-05-21 |
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