JP6837113B2 - ひずみゲージ及び多軸力センサ - Google Patents
ひずみゲージ及び多軸力センサ Download PDFInfo
- Publication number
- JP6837113B2 JP6837113B2 JP2019177655A JP2019177655A JP6837113B2 JP 6837113 B2 JP6837113 B2 JP 6837113B2 JP 2019177655 A JP2019177655 A JP 2019177655A JP 2019177655 A JP2019177655 A JP 2019177655A JP 6837113 B2 JP6837113 B2 JP 6837113B2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- pair
- causing
- sensitive elements
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019177655A JP6837113B2 (ja) | 2019-09-27 | 2019-09-27 | ひずみゲージ及び多軸力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019177655A JP6837113B2 (ja) | 2019-09-27 | 2019-09-27 | ひずみゲージ及び多軸力センサ |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017132792A Division JP6611761B2 (ja) | 2017-07-06 | 2017-07-06 | ひずみゲージ及び多軸力センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020073880A JP2020073880A (ja) | 2020-05-14 |
| JP2020073880A5 JP2020073880A5 (enExample) | 2020-10-08 |
| JP6837113B2 true JP6837113B2 (ja) | 2021-03-03 |
Family
ID=70610069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019177655A Active JP6837113B2 (ja) | 2019-09-27 | 2019-09-27 | ひずみゲージ及び多軸力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6837113B2 (enExample) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0943069A (ja) * | 1995-07-28 | 1997-02-14 | Matsushita Refrig Co Ltd | 3軸力覚センサ |
| JP5008188B2 (ja) * | 2007-05-31 | 2012-08-22 | ミネベア株式会社 | 3軸力センサ及び3軸力検出方法 |
| JP2010164495A (ja) * | 2009-01-19 | 2010-07-29 | Minebea Co Ltd | 3軸力センサ |
-
2019
- 2019-09-27 JP JP2019177655A patent/JP6837113B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2020073880A (ja) | 2020-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11293818B2 (en) | Strain gauge and multi-axis force sensor | |
| JP6616806B2 (ja) | ひずみゲージ、及び、3軸力センサ | |
| US7500406B2 (en) | Multiaxial sensor | |
| US6185814B1 (en) | Method of manufacturing a sensor detecting a physical action as an applied force | |
| US7121147B2 (en) | Force detection device | |
| JP6869710B2 (ja) | 起歪体およびその起歪体を備えた力覚センサ | |
| JP6611762B2 (ja) | ひずみゲージ及び多軸力センサ | |
| JP7396731B2 (ja) | 多軸触覚センサ | |
| US11187598B2 (en) | Strain body and force sensor provided with the strain body | |
| US20250060425A1 (en) | Magnetic sensor device and magnetic sensor system | |
| JP5007083B2 (ja) | 力覚センサ用チップ | |
| JP6611761B2 (ja) | ひずみゲージ及び多軸力センサ | |
| JP5174343B2 (ja) | 力覚センサ用チップ | |
| JP6767559B2 (ja) | ひずみゲージ及び多軸力センサ | |
| JP6836641B2 (ja) | ひずみゲージ、及び、3軸力センサ | |
| JP6837113B2 (ja) | ひずみゲージ及び多軸力センサ | |
| JPH03249530A (ja) | 分布型触覚センサ | |
| JP7408638B2 (ja) | 力センサ | |
| JP2008224406A (ja) | 物理量センサ | |
| JP2008116319A (ja) | 3軸力センサ | |
| JP3308368B2 (ja) | 三軸圧電加速度センサー | |
| JP2001153735A (ja) | ロードセル | |
| JP6010678B1 (ja) | 加速度センサ | |
| JP6931264B1 (ja) | 力覚センサ | |
| JPH0627089U (ja) | 3次元半導体力覚センサー |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200703 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200703 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200821 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200908 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20201109 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210105 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210126 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210208 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6837113 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |