JP6814798B2 - 固体撮像素子 - Google Patents
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- 229910052710 silicon Inorganic materials 0.000 description 4
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
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Description
以上により、可視光画像用受光部12には赤外光17も入射するが、その影響を解消して可視光18成分に基づいた画像を取得できる。また、赤外光17を遮光するカラーフィルタを用いないことから、深層受光部13に入射する赤外光17が多くなり、感度に優れた赤外画像を取得することができる。
――固体撮像素子の構造――
次に、より具体的な固体撮像素子について、図2〜図4を参照して説明する。図2は例示的固体撮像素子100の受光部の配列について示す図である。
以下、本実施形態の固体撮像素子100による可視光画像及び赤外光画像の取得について説明する。固体撮像素子100において、可視光画像(RGB画像)は浅層受光部101である可視光画像用受光部101r、101g及び101bを用いて取得し、赤外光画像については深層受光部102をその一部とする複層受光部103を用いて取得する。ここで、可視光画像と赤外光画像とを同時に撮像する場合、固体撮像素子100に赤外線が入射するのを防ぐ赤外線カットフィルタを用いずに撮像を行う。この結果、既に述べた通り、可視光画像用受光部において赤外線の一部が吸収され、色再現性等の点で画質が劣化する原因となる。
次に、図6を参照して、固体撮像素子100の製造方法のうち注入のレイアウトについて説明する。
次に、本開示の第2の実施形態について説明する。
この結果、固体撮像素子100の場合(図6の151)に比べると、深層水平分離部122内の位置による第2赤外光受光部101yまでの距離について、大小の違いが少なくなっている。この結果、残像不良等による画質の劣化を抑制することができる。
12 可視光画像用受光部
13 深層受光部
14、15 カラーフィルタ
16 信号補正手段
17 赤外光
18 可視光
21〜24 電荷信号
100 固体撮像素子
101 浅層受光部
101r、101g、101b 可視光画像用受光部
101x 第1赤外光受光部
101y 第2赤外光受光部
102、102a 深層受光部
103 複層受光部
111 接続部
121 浅層水平分離部
122、122a 深層水平分離部
123 垂直分離部
124 垂直オーバーフローバリア
130 半導体基板
200 固体撮像素子
Claims (8)
- 半導体基板の表面近傍に二次元配列された複数の浅層受光部と、前記浅層受光部の下方に二次元配列された深層受光部とを備え、
前記浅層受光部は、可視光及び赤外光を光電変換して信号を出力する可視光画像用受光部と、赤外光を光電変換する赤外光受光部とを含み、
前記赤外光受光部は、前記可視光画像用受光部が出力する信号を補正して前記可視光画像用受光部における可視光成分に基づく信号を得るための第1赤外光受光部と、前記深層受光部と接続されて複層受光部を構成する第2赤外光受光部とを含み、
前記第1赤外光受光部は、前記深層受光部とは分離されていることを特徴とする固体撮像素子。 - 請求項1の固体撮像素子において、
前記深層受光部は、隣接する複数の前記浅層受光部の下方に伸びて設けられていることを特徴とする固体撮像素子。 - 請求項2の固体撮像素子において、
前記深層受光部は、隣接する8個の前記浅層受光部に対応して設けられ、当該8個の前記浅層受光部は、前記第1赤外光受光部と、それぞれ赤色光、緑色光及び青色光に対応する3つの前記可視光画像用受光部とを含む4つの前記浅層受光部、及び、前記第2赤外光受光部と、それぞれ赤色光、緑色光及び青色光に対応する3つの前記可視光画像用受光部とを含む4つの前記浅層受光部、を含むことを特徴とする固体撮像素子。 - 請求項2又は3の固体撮像素子において、
前記深層受光部は、前記第2赤外光受光部が中央に位置するように配置されることを特徴とする固体撮像素子。 - 請求項2〜4のいずれか1つの固体撮像素子において、
前記可視光画像用受光部が出力する可視光成分及び赤外光成分を含む信号から、同じ前記隣接する複数の浅層受光部に含まれる前記第1赤外光受光部が光電変換により出力する信号の赤外成分を減算することにより、当該可視光画像用受光部における可視光成分のみの信号を得る信号補正手段を更に備えることを特徴とする固体撮像素子。 - 請求項1〜5のいずれか1つの固体撮像素子において、
前記浅層受光部にそれぞれ設けられたカラーフィルタを含むカラーフィルタ層を更に備え、
前記可視光画像用受光部のカラーフィルタは、可視光及び赤外光を共に透過し、
前記赤外光受光部のカラーフィルタは、可視光を遮光し且つ赤外光を透過することを特徴とする固体撮像素子。 - 請求項6の固体撮像素子において、
前記カラーフィルタ層は、前記可視光画像用受光部に設けられ、赤色光、緑色光及び青色光のいずれか1つ及び赤外光に対応する3種のカラーフィルタと、前記赤外光受光部に設けられ、赤外光に対応するカラーフィルタとの4種を一組のカラーフィルタとして含むことを特徴とする固体撮像素子。 - 請求項1〜7のいずれか1つの固体撮像素子において、
前記浅層受光部は、入射する赤外光の一部を吸収し、
前記深層受光部は、前記浅層受光部を通過した赤外光を吸収し、
前記複層受光部は、当該複層受光部を構成する前記第2赤外光受光部及び前記深層受光部にて吸収した赤外光を光電変換して信号を出力することを特徴とする固体撮像素子。
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JP2016104071 | 2016-05-25 | ||
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PCT/JP2017/017009 WO2017203936A1 (ja) | 2016-05-25 | 2017-04-28 | 固体撮像素子 |
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