JP6802651B2 - レーザ加工装置、レーザ増幅器、レーザ共振器、主発振器出力増幅器 - Google Patents
レーザ加工装置、レーザ増幅器、レーザ共振器、主発振器出力増幅器 Download PDFInfo
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- JP6802651B2 JP6802651B2 JP2016132106A JP2016132106A JP6802651B2 JP 6802651 B2 JP6802651 B2 JP 6802651B2 JP 2016132106 A JP2016132106 A JP 2016132106A JP 2016132106 A JP2016132106 A JP 2016132106A JP 6802651 B2 JP6802651 B2 JP 6802651B2
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- 229910052691 Erbium Inorganic materials 0.000 description 1
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- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016132106A JP6802651B2 (ja) | 2016-07-01 | 2016-07-01 | レーザ加工装置、レーザ増幅器、レーザ共振器、主発振器出力増幅器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016132106A JP6802651B2 (ja) | 2016-07-01 | 2016-07-01 | レーザ加工装置、レーザ増幅器、レーザ共振器、主発振器出力増幅器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018006585A JP2018006585A (ja) | 2018-01-11 |
| JP2018006585A5 JP2018006585A5 (https=) | 2019-04-25 |
| JP6802651B2 true JP6802651B2 (ja) | 2020-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016132106A Active JP6802651B2 (ja) | 2016-07-01 | 2016-07-01 | レーザ加工装置、レーザ増幅器、レーザ共振器、主発振器出力増幅器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6802651B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114690518B (zh) * | 2020-12-25 | 2023-03-24 | 中强光电股份有限公司 | 照明系统及投影装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4450147B2 (ja) * | 1999-09-10 | 2010-04-14 | 株式会社ニコン | レーザ装置を備えた露光装置 |
| JP6261472B2 (ja) * | 2014-07-31 | 2018-01-17 | 株式会社キーエンス | レーザ加工装置 |
| JP6343229B2 (ja) * | 2014-11-18 | 2018-06-13 | 浜松ホトニクス株式会社 | レーザ増幅装置、レーザ装置及びレーザ核融合炉 |
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- 2016-07-01 JP JP2016132106A patent/JP6802651B2/ja active Active
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| Publication number | Publication date |
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| JP2018006585A (ja) | 2018-01-11 |
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