JP6795143B2 - 原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法 - Google Patents

原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法 Download PDF

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JP6795143B2
JP6795143B2 JP2018113882A JP2018113882A JP6795143B2 JP 6795143 B2 JP6795143 B2 JP 6795143B2 JP 2018113882 A JP2018113882 A JP 2018113882A JP 2018113882 A JP2018113882 A JP 2018113882A JP 6795143 B2 JP6795143 B2 JP 6795143B2
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reaction chamber
raw material
microwave
surface wave
lorentz force
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JP2019214033A5 (fr
JP2019214033A (ja
Inventor
力 滝沢
力 滝沢
弘一 臼木
弘一 臼木
崇 白根
崇 白根
峯夫 森元
峯夫 森元
坂本 雄一
雄一 坂本
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SE Corp
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SE Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B6/00Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
    • C01B6/04Hydrides of alkali metals, alkaline earth metals, beryllium or magnesium; Addition complexes thereof
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/46Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP2018113882A 2018-06-14 2018-06-14 原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法 Active JP6795143B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018113882A JP6795143B2 (ja) 2018-06-14 2018-06-14 原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法
PCT/JP2019/019061 WO2019239765A1 (fr) 2018-06-14 2019-05-14 Dispositif et procédé de fabrication pour le traitement de matière première à l'aide d'un plasma à ondes de surface à micro-ondes et obtention d'un produit différent de la matière première
JP2020180785A JP6963848B2 (ja) 2018-06-14 2020-10-28 原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法

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JP2018113882A JP6795143B2 (ja) 2018-06-14 2018-06-14 原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法

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JP2020180785A Division JP6963848B2 (ja) 2018-06-14 2020-10-28 原料をマイクロ波表面波プラズマで処理して原料と異なる生成物を得る製造装置及び製造方法

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JP2019214033A JP2019214033A (ja) 2019-12-19
JP2019214033A5 JP2019214033A5 (fr) 2020-09-10
JP6795143B2 true JP6795143B2 (ja) 2020-12-02

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JP (1) JP6795143B2 (fr)
WO (1) WO2019239765A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11894724B2 (en) 2020-10-29 2024-02-06 Generac Power Systems, Inc. Alternator with rotor lamination stack

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133636A (en) * 1981-02-13 1982-08-18 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma at low temperature
JPH0635323B2 (ja) * 1982-06-25 1994-05-11 株式会社日立製作所 表面処理方法
JPH0652716B2 (ja) * 1984-08-24 1994-07-06 日本電信電話株式会社 半導体結晶性膜製造装置
JPH01225041A (ja) * 1988-03-03 1989-09-07 Mitsubishi Electric Corp イオン源装置
US5133826A (en) * 1989-03-09 1992-07-28 Applied Microwave Plasma Concepts, Inc. Electron cyclotron resonance plasma source
JPH02263799A (ja) * 1989-04-03 1990-10-26 Sumitomo Metal Ind Ltd 基板加熱装置及びその操業方法
JP2008071528A (ja) * 2006-09-12 2008-03-27 Seiko Epson Corp プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11894724B2 (en) 2020-10-29 2024-02-06 Generac Power Systems, Inc. Alternator with rotor lamination stack

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JP2019214033A (ja) 2019-12-19

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