JP6788675B2 - 半導体デバイスを処理するための方法、システムおよびコンピュータ・プログラム製品ならびにボンディングされた半導体パッケージ - Google Patents
半導体デバイスを処理するための方法、システムおよびコンピュータ・プログラム製品ならびにボンディングされた半導体パッケージ Download PDFInfo
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Description
上式でRはメチルシクロヘキサンまたはnブチルである。これらの2つの材料は、シクロヘキサノン単体、またはシクロヘキサノンとN−メチル−2−ピロリドン(NMP)溶剤との組合せに溶解することがわかっている。
Claims (36)
- 半導体デバイスを処理するための方法であって、
ハンドラに剥離層を塗布することと、
前記ハンドラに少なくとも1つの個片化半導体デバイスをボンディングすることと、
前記少なくとも1つの個片化半導体デバイスが前記ハンドラにボンディングされた状態で前記少なくとも1つの個片化半導体デバイスをパッケージ化することと、
前記ハンドラを介して前記剥離層にレーザを照射することによって前記剥離層をアブレーションすることと、
前記剥離層がアブレーションされた後に、透明な前記ハンドラから前記少なくとも1つの個片化半導体デバイスを取り外すことと
を含む方法。 - 前記剥離層は少なくとも1つの添加材料を含み、前記少なくとも1つの添加材料は前記剥離層の電磁放射吸収特性の周波数を調整する、請求項1に記載の方法。
- 前記ハンドラは、
ハンドル・ウエハと、
パネルと、
ハンドラ材料のロールと、
のうちの1つである、請求項1に記載の方法。 - 前記少なくとも1つの添加材料は単一の添加材料を含み、前記単一の添加材料は355nm波長用の化学吸収剤と600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤とのうちの1つであり、前記単一の添加材料は、室温ないし250℃を超える温度で有効であり、≧250℃の温度で熱的に安定である、請求項2に記載の方法。
- 前記少なくとも1つの添加材料は第1の添加材料と第2の添加材料とを含み、前記第1の添加材料は355nm波長用の化学吸収剤であり、前記第2の添加材料は600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤であり、前記第1および第2の添加材料のそれぞれは、≧250℃の温度で熱的に安定である、請求項2に記載の方法。
- 前記少なくとも1つの添加材料はフェノキシ系材料における355nm化学吸収剤である、請求項2に記載の方法。
- 前記少なくとも1つの添加材料は2,5−ビス(2−ベンズイミダゾリル)−ピリジンである、請求項2に記載の方法。
- 前記少なくとも1つの添加材料は、
- 前記少なくとも1つの添加材料は、600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤であり、シクロヘキサノン中で完全に溶解可能である、請求項2に記載の方法。
- 前記少なくとも1つの個片化半導体デバイスをボンディングする前に、前記剥離層上に誘電層を形成することをさらに含み、前記誘電層は前記剥離層と前記少なくとも1つの個片化半導体デバイスとの間に位置する、請求項1に記載の方法。
- 前記少なくとも1つの個片化半導体デバイスと前記剥離層との間に前記剥離層とは異なる接着層を塗布することをさらに含む、請求項1に記載の方法。
- 前記接着層は前記少なくとも1つの個片化半導体デバイスに塗布される、請求項11に記載の方法。
- 前記剥離層は前記レーザから放射される光の周波数を吸収する、請求項1に記載の方法。
- 前記レーザから放射される光は266nmないし5000nmの波長を有する、請求項1に記載の方法。
- 前記剥離層をアブレーションするために使用される前記レーザは、YAGレーザと、XeFエキシマ・レーザと、ダイオード励起固体(DPSS)レーザとのうちの1つである、請求項1に記載の方法。
- 前記レーザから放射される光は紫外線である、請求項1に記載の方法。
- 前記レーザから放射される光は赤外線である、請求項1に記載の方法。
- 前記剥離層は材料の単一層である、請求項1に記載の方法。
- 前記剥離層は可視光を実質的に透過させる、請求項1に記載の方法。
- 半導体デバイスを処理するための方法であって、
ハンドラに剥離層を塗布することと、
前記剥離層上に半導体パッケージング・コンポーネントを形成することと、
前記半導体パッケージング・コンポーネントに少なくとも1つの個片化半導体デバイスをボンディングすることと、
前記剥離層に前記ハンドラを介してレーザを照射することによって前記剥離層をアブレーションすることと、
前記剥離層がアブレーションされた後に、透明な前記ハンドラから前記少なくとも1つの個片化半導体デバイスを取り外すことと
を含む方法。 - 前記剥離層は少なくとも1つの添加材料を含み、前記少なくとも1つの添加材料は前記剥離層の電磁放射吸収特性の周波数を調整する、請求項20に記載の方法。
- 前記少なくとも1つの添加材料は単一の添加材料を含み、前記単一の添加材料は355
nm波長用の化学吸収剤と600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤とのうちの1つであり、前記単一の添加材料は、室温ないし250℃を超える温度で有効であり、≧250℃の温度で熱的に安定である、請求項21に記載の方法。 - 前記少なくとも1つの添加材料は第1の添加材料と第2の添加材料とを含み、前記第1の添加材料は355nm波長用の化学吸収剤であり、前記第2の添加材料は600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤であり、前記第1および第2の添加材料のそれぞれは、≧250℃の温度で熱的に安定である、請求項21に記載の方法。
- 前記少なくとも1つの添加材料はフェノキシ系材料における355nm化学吸収剤である、請求項21に記載の方法。
- 前記少なくとも1つの添加材料は2,5−ビス(2−ベンズイミダゾリル)−ピリジンである、請求項21に記載の方法。
- 前記少なくとも1つの添加材料は、
- 前記少なくとも1つの添加材料は、600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤であり、シクロヘキサノン中で完全に溶解可能である、請求項21に記載の方法。
- 前記半導体パッケージング・コンポーネントと前記剥離層との間に前記剥離層とは異なる接着層を塗布することをさらに含む、請求項20に記載の方法。
- ボンディングされた半導体パッケージであって、
ハンドラと、
透明な前記ハンドラにボンディングされた少なくとも1つのパッケージ化半導体デバイスと、
レーザ放射によるアブレーションに対して耐性がなく、透明な前記ハンドラと前記少なくとも1つのパッケージ化半導体デバイスとの間において、透明な前記ハンドラ上に直接設けられた剥離層と
を含み、
前記剥離層は少なくとも1つの添加材料を含み、前記少なくとも1つの添加材料は前記剥離層の電磁放射吸収特性の周波数を調整する、
ボンディングされた半導体パッケージ。 - 前記少なくとも1つの添加材料は単一の添加材料と複数の添加材料とのうちの一方を含み、前記単一の添加材料は355nm波長用の化学吸収剤と600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤とのうちの1つであり、前記単一の添加材料は、室温ないし250℃を超える温度で有効であり、≧250℃の温度で熱的に安定であり、前記複数の添加材料のうちの第1の添加材料は355nm波長用の化学吸収剤であり、前記複数の添加材料のうちの第2の添加材料は600nmないし740nmを含む範囲の1つまたは複数の波長用の化学吸収剤であり、前記第1および第2の複数の添加材料のそれぞれは、室温ないし250℃を超える温度で有効であり、≧250℃の温度で熱的に安定である、請求項29に記載のボンディングされた半導体パッケージ。
- 半導体デバイスを処理するためのシステムであって、
メモリと、
前記メモリに動作可能に結合された少なくとも1つのプロセッサと、
前記メモリと前記少なくとも1つのプロセッサとに動作可能に結合された少なくとも1つのコントロール・ユニットとを含み、前記コントロール・ユニットは、前記システムの少なくとも1つの半導体デバイス処理構成要素を、
ハンドラに剥離層を塗布し、
前記ハンドラに少なくとも1つの個片化半導体デバイスをボンディングし、
前記少なくとも1つの個片化半導体デバイスが前記ハンドラにボンディングされている状態で前記少なくとも1つの個片化半導体デバイスをパッケージ化し、
前記ハンドラを介して前記剥離層にレーザを照射することによって前記剥離層をアブレーションし、
前記剥離層がアブレーションされた後に前記少なくとも1つの個片化半導体デバイスを透明な前記ハンドラから取り外す
ように動作させる、システム。 - 前記コントロール・ユニットは、前記システムの少なくとも1つの半導体デバイス処理構成要素を、
前記剥離層とは異なる接着層を前記少なくとも1つの個片化半導体デバイスと前記剥離層との間に塗布するようにさらに動作させる、請求項31に記載のシステム。 - 前記剥離層は1つまたは複数の添加材料を含み、前記添加材料は前記剥離層の光吸収特性の周波数を調整する、請求項31に記載のシステム。
- 半導体デバイスの処理を制御するためのコンピュータ・プログラム製品であって、
少なくとも1つの処理回路によって読取り可能であり、方法を行うために前記少なくとも1つの処理回路による実行のための命令を記憶する記憶媒体を含み、
前記方法は、
ハンドラに剥離層を塗布することと、
前記ハンドラに少なくとも1つの個片化半導体デバイスをボンディングすることと、
前記少なくとも1つの個片化半導体デバイスが前記ハンドラにボンディングされた状態で前記少なくとも1つの個片化半導体デバイスをパッケージ化することと、
前記ハンドラを介して前記剥離層にレーザを照射することによって前記剥離層をアブレーションすることと、
前記剥離層がアブレーションされた後に、透明な前記ハンドラから前記少なくとも1つの個片化半導体デバイスを取り外すことと
を含む、コンピュータ・プログラム製品。 - 前記方法は、
前記少なくとも1つの個片化半導体デバイスと前記剥離層との間に前記剥離層とは異な
る接着層を塗布することをさらに含む、請求項34に記載のコンピュータ・プログラム製品。 - 前記剥離層は1つまたは複数の添加材料を含み、前記添加材料は前記剥離層の光吸収特性の周波数を調整する、請求項34に記載のコンピュータ・プログラム製品。
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US14/983,674 US10224219B2 (en) | 2015-12-30 | 2015-12-30 | Handler bonding and debonding for semiconductor dies |
US14/983,674 | 2015-12-30 | ||
US15/083,665 US9947570B2 (en) | 2015-12-30 | 2016-03-29 | Handler bonding and debonding for semiconductor dies |
US15/083,665 | 2016-03-29 | ||
PCT/IB2016/057296 WO2017115175A1 (en) | 2015-12-30 | 2016-12-02 | Handler bonding and debonding for semiconductor dies |
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