JP6749405B2 - 基板処理方法および基板処理装置 - Google Patents
基板処理方法および基板処理装置 Download PDFInfo
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67017—Apparatus for fluid treatment
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
Description
上述した実施形態では、撥水化処理において、第1置換処理後のウェハWに対して室温の撥水化液を供給した後、ウェハWに対し、ウェハWを加熱しながら撥水化液を供給することとした。しかし、撥水化処理の手順は上記の例に限定されない。そこで、以下では、撥水化処理の変形例について図7を参照して説明する。図7は、変形例に係る撥水化処理の説明図である。
1 基板処理システム
4 制御装置
16 処理ユニット
18 制御部
30 基板保持機構
40 処理流体供給部
46a 薬液供給源
46b CDIW供給源
46c 第1IPA供給源
46d 撥水化液供給源
46e 第2IPA供給源
Claims (6)
- 基板に対して水分を含んだ処理液を供給する液処理工程と、
前記液処理工程後の基板に対して第1温度の有機溶剤を供給して前記処理液を置換する第1置換工程と、
前記第1置換工程後の基板に対して撥水化液を供給して前記基板を撥水化させる撥水化工程と、
前記撥水化工程後の基板に対して前記第1温度よりも高い第2温度の有機溶剤を供給して前記撥水化液を置換する第2置換工程と、
前記第2置換工程後の基板から前記有機溶剤を除去する乾燥工程と
を含み、
前記第1温度は、35℃以下の温度であり、
前記第2温度は、60℃以上の温度である、基板処理方法。 - 基板に対して水分を含んだ処理液を供給する液処理工程と、
前記液処理工程後の基板に対して第1温度の有機溶剤を供給して前記処理液を置換する第1置換工程と、
前記第1置換工程後の基板に対して撥水化液を供給して前記基板を撥水化させる撥水化工程と、
前記撥水化工程後の基板に対して前記第1温度よりも高い第2温度の有機溶剤を供給して前記撥水化液を置換する第2置換工程と、
前記第2置換工程後の基板から前記有機溶剤を除去する乾燥工程と
を含み、
前記撥水化工程は、
前記撥水化液を供給する第1撥水化工程と、
前記第1撥水化工程後の基板に対し、前記第1撥水化工程において供給される撥水化液よりも高温の撥水化液を供給する第2撥水化工程と
を含む、基板処理方法。 - 基板に対して水分を含んだ処理液を供給する液処理工程と、
前記液処理工程後の基板に対して第1温度の有機溶剤を供給して前記処理液を置換する第1置換工程と、
前記第1置換工程後の基板に対して撥水化液を供給して前記基板を撥水化させる撥水化工程と、
前記撥水化工程後の基板に対して前記第1温度よりも高い第2温度の有機溶剤を供給して前記撥水化液を置換する第2置換工程と、
前記第2置換工程後の基板から前記有機溶剤を除去する乾燥工程と
を含み、
前記撥水化工程は、
前記基板を加熱せずに前記撥水化液を供給する第1撥水化工程と、
前記第1撥水化工程後の基板に対し、該基板を加熱しながら前記撥水化液を供給する第2撥水化工程と
を含む、基板処理方法。 - 基板を回転させる回転機構と、
前記基板に対して水分を含んだ処理液を供給する処理液供給部と、
前記処理液を供給した後の前記基板に対して第1温度の有機溶剤を供給する第1有機溶剤供給部と、
前記基板に対して撥水化液を供給して前記基板を撥水化させる撥水化液供給部と、
撥水化された前記基板に対して前記第1温度より高い第2温度の有機溶剤を供給する第2有機溶剤供給部と
を備え、
前記撥水化液供給部は、
第1撥水化液を供給する第1撥水化液供給源と、前記第1撥水化液よりも高温の第2撥水化液を供給する第2撥水化液供給源とに接続され、前記基板に対して前記第1撥水化液を供給した後、該基板に対して前記第2撥水化液を供給する、基板処理装置。 - 基板を回転させる回転機構と、
前記基板に対して水分を含んだ処理液を供給する処理液供給部と、
前記処理液を供給した後の前記基板に対して第1温度の有機溶剤を供給する第1有機溶剤供給部と、
前記基板に対して撥水化液を供給して前記基板を撥水化させる撥水化液供給部と、
撥水化された前記基板に対して前記第1温度より高い第2温度の有機溶剤を供給する第2有機溶剤供給部と、
前記基板の裏面に対して前記撥水化液よりも高温の液体を供給する裏面供給部と
を備え、
前記撥水化液供給部から前記基板の表面に前記撥水化液を供給し、
次に、前記撥水化液供給部から前記基板の表面に前記撥水化液を供給しつつ、該基板の裏面に前記裏面供給部から前記高温の液体を供給する、基板処理装置。 - 前記第1温度は、35℃以下の温度であり、
前記第2温度は、60℃以上の温度である、請求項4または5に記載の基板処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016194067 | 2016-09-30 | ||
JP2016194067 | 2016-09-30 | ||
PCT/JP2017/032278 WO2018061697A1 (ja) | 2016-09-30 | 2017-09-07 | 基板処理方法および基板処理装置 |
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JPWO2018061697A1 JPWO2018061697A1 (ja) | 2019-07-04 |
JP6749405B2 true JP6749405B2 (ja) | 2020-09-02 |
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JP2018542325A Active JP6749405B2 (ja) | 2016-09-30 | 2017-09-07 | 基板処理方法および基板処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20190228963A1 (ja) |
JP (1) | JP6749405B2 (ja) |
KR (1) | KR102414577B1 (ja) |
CN (1) | CN109791886B (ja) |
TW (1) | TW201816843A (ja) |
WO (1) | WO2018061697A1 (ja) |
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JP6967922B2 (ja) * | 2017-09-22 | 2021-11-17 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
US11854815B2 (en) * | 2018-01-29 | 2023-12-26 | Tokyo Electron Limited | Substrate drying apparatus, substrate drying method and storage medium |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7838425B2 (en) * | 2008-06-16 | 2010-11-23 | Kabushiki Kaisha Toshiba | Method of treating surface of semiconductor substrate |
JP5662081B2 (ja) | 2010-08-20 | 2015-01-28 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP2012222329A (ja) * | 2011-04-14 | 2012-11-12 | Tokyo Electron Ltd | 液処理方法及び液処理装置 |
JP6317547B2 (ja) * | 2012-08-28 | 2018-04-25 | 株式会社Screenホールディングス | 基板処理方法 |
-
2017
- 2017-09-07 JP JP2018542325A patent/JP6749405B2/ja active Active
- 2017-09-07 US US16/337,466 patent/US20190228963A1/en not_active Abandoned
- 2017-09-07 KR KR1020197008876A patent/KR102414577B1/ko active IP Right Grant
- 2017-09-07 CN CN201780060609.XA patent/CN109791886B/zh active Active
- 2017-09-07 WO PCT/JP2017/032278 patent/WO2018061697A1/ja active Application Filing
- 2017-09-21 TW TW106132335A patent/TW201816843A/zh unknown
Also Published As
Publication number | Publication date |
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KR20190053866A (ko) | 2019-05-20 |
KR102414577B1 (ko) | 2022-06-29 |
JPWO2018061697A1 (ja) | 2019-07-04 |
WO2018061697A1 (ja) | 2018-04-05 |
CN109791886B (zh) | 2023-08-29 |
CN109791886A (zh) | 2019-05-21 |
US20190228963A1 (en) | 2019-07-25 |
TW201816843A (zh) | 2018-05-01 |
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