JP6728123B2 - 半導体装置、電源回路、及び、コンピュータ - Google Patents
半導体装置、電源回路、及び、コンピュータ Download PDFInfo
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- JP6728123B2 JP6728123B2 JP2017224450A JP2017224450A JP6728123B2 JP 6728123 B2 JP6728123 B2 JP 6728123B2 JP 2017224450 A JP2017224450 A JP 2017224450A JP 2017224450 A JP2017224450 A JP 2017224450A JP 6728123 B2 JP6728123 B2 JP 6728123B2
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- 239000004065 semiconductor Substances 0.000 title claims description 180
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 232
- 229910052782 aluminium Inorganic materials 0.000 claims description 132
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 132
- 229910052757 nitrogen Inorganic materials 0.000 claims description 116
- 150000004767 nitrides Chemical class 0.000 claims description 111
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 68
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 68
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 26
- 239000001301 oxygen Substances 0.000 claims description 26
- 229910052760 oxygen Inorganic materials 0.000 claims description 26
- 229910002601 GaN Inorganic materials 0.000 claims description 17
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical group [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 14
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical group [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims description 6
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 239000010410 layer Substances 0.000 description 289
- 230000004888 barrier function Effects 0.000 description 51
- 238000010586 diagram Methods 0.000 description 22
- 230000008859 change Effects 0.000 description 21
- 230000007423 decrease Effects 0.000 description 21
- 230000000694 effects Effects 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 20
- 238000002347 injection Methods 0.000 description 19
- 239000007924 injection Substances 0.000 description 19
- 239000011229 interlayer Substances 0.000 description 17
- 230000001681 protective effect Effects 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 238000000137 annealing Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- 230000009471 action Effects 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000005533 two-dimensional electron gas Effects 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910017109 AlON Inorganic materials 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004645 scanning capacitance microscopy Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
Description
第1の実施形態の半導体装置は、第1の窒化物半導体層と、第1の窒化物半導体層の上に位置し、第1の窒化物半導体層よりもバンドギャップが大きい第2の窒化物半導体層と、第1の窒化物半導体層の上に位置し、第1の窒化物半導体層に電気的に接続された第1の電極と、第1の窒化物半導体層の上に位置し、第1の窒化物半導体層に電気的に接続された第2の電極と、第1の電極と第2の電極との間の第1の窒化物半導体層の上に位置するゲート電極と、第1の窒化物半導体層とゲート電極との間に位置し、酸化シリコン膜と、第1の窒化物半導体層と酸化シリコン膜との間の酸窒化アルミニウム膜とを有し、酸窒化アルミニウム膜の中の第1の位置における酸素と窒素の和に対する窒素の第1の原子比が、酸窒化アルミニウム膜の中の第1の位置よりも酸化シリコン膜に近い第2の位置における酸素と窒素の和に対する窒素の第2の原子比よりも大きいゲート絶縁層と、を備える。
第2の実施形態の半導体装置は、ゲート絶縁層と第1の窒化物半導体層とが離間している以外は、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については、記述を省略する。
第3の実施形態の半導体装置は、第1の窒化物半導体層と、第1の窒化物半導体層の上に位置し、第1の窒化物半導体層よりもバンドギャップが大きい第2の窒化物半導体層と、第1の窒化物半導体層の上に位置し、第1の窒化物半導体層に電気的に接続された第1の電極と、第1の窒化物半導体層の上に位置し、第1の窒化物半導体層に電気的に接続された第2の電極と、第1の電極と第2の電極との間の第1の窒化物半導体層の上に位置するゲート電極と、ゲート電極と第2の電極との間の第2の窒化物半導体層の上に位置し、酸化シリコン膜と、第2の窒化物半導体層と酸化シリコン膜との間の酸窒化アルミニウム膜とを有し、酸窒化アルミニウム膜の中の第1の位置における酸素と窒素の和に対する窒素の第1の原子比が、酸窒化アルミニウム膜の中の第1の位置よりも酸化シリコン膜に近い第2の位置における酸素と窒素の和に対する窒素の第2の原子比よりも大きい絶縁層と、を備える。
第4の実施形態の電源回路及びコンピュータは、第1ないし第3の実施形態のHEMTを有する。
15 バリア層(第2の窒化物半導体層)
16 ゲート絶縁層
16a 酸窒化アルミニウム膜
16b 酸化シリコン膜
18 ゲート電極
20 ソース電極(第1の電極)
22 ドレイン電極(第2の電極)
32 保護絶縁層
32a 酸窒化アルミニウム膜
32b 酸化シリコン膜
100 HEMT(半導体装置)
162 電源回路
200 HEMT(半導体装置)
300 HEMT(半導体装置)
400 サーバ(コンピュータ)
C1 第1の位置
C2 第2の位置
Claims (18)
- 第1の窒化物半導体層と、
前記第1の窒化物半導体層の上に位置し、前記第1の窒化物半導体層よりもバンドギャップが大きい第2の窒化物半導体層と、
前記第1の窒化物半導体層の上に位置し、前記第1の窒化物半導体層に電気的に接続された第1の電極と、
前記第1の窒化物半導体層の上に位置し、前記第1の窒化物半導体層に電気的に接続された第2の電極と、
前記第1の電極と前記第2の電極との間の前記第1の窒化物半導体層の上に位置するゲート電極と、
前記第1の窒化物半導体層と前記ゲート電極との間に位置し、酸化シリコン膜と、前記第1の窒化物半導体層と前記酸化シリコン膜との間の酸窒化アルミニウム膜とを有し、前記酸窒化アルミニウム膜の中の第1の位置における酸素と窒素の和に対する窒素の第1の原子比が、前記酸窒化アルミニウム膜の中の前記第1の位置よりも前記酸化シリコン膜に近い第2の位置における酸素と窒素の和に対する窒素の第2の原子比よりも大きいゲート絶縁層と、
を備える半導体装置。 - 前記第1の原子比は0.70以上0.87以下である請求項1記載の半導体装置。
- 前記第2の原子比は0.13以上0.30以下である請求項1又は請求項2記載の半導体装置。
- 前記第1の窒化物半導体層と前記酸窒化アルミニウム膜との界面、又は、前記第2の窒化物半導体層と前記酸窒化アルミニウム膜との界面から前記第1の位置までの距離は0.5nm以下であり、前記酸化シリコン膜と前記酸窒化アルミニウム膜との界面から前記第2の位置までの距離は0.5nm以下である請求項1ないし請求項3いずれか一項記載の半導体装置。
- 前記酸窒化アルミニウム膜の膜厚は1nm以上10nm以下である請求項1ないし請求項4いずれか一項記載の半導体装置。
- 前記ゲート絶縁層の厚さは20nm以上100nm以下である請求項1ないし請求項5いずれか一項記載の半導体装置。
- 前記ゲート絶縁層は、前記第1の窒化物半導体層に接する請求項1ないし請求項6いずれか一項記載の半導体装置。
- 前記ゲート絶縁層と前記第1の窒化物半導体層とが離間している請求項1ないし請求項6いずれか一項記載の半導体装置。
- 前記第1の窒化物半導体層は窒化ガリウムであり、前記第2の窒化物半導体層は窒化アルミニウムガリウムである請求項1ないし請求項8いずれか一項記載の半導体装置。
- 第1の窒化物半導体層と、
前記第1の窒化物半導体層の上に位置し、前記第1の窒化物半導体層よりもバンドギャップが大きい第2の窒化物半導体層と、
前記第1の窒化物半導体層の上に位置し、前記第1の窒化物半導体層に電気的に接続された第1の電極と、
前記第1の窒化物半導体層の上に位置し、前記第1の窒化物半導体層に電気的に接続された第2の電極と、
前記第1の電極と前記第2の電極との間の前記第1の窒化物半導体層の上に位置するゲート電極と、
前記ゲート電極と前記第2の電極との間の前記第2の窒化物半導体層の上に位置し、酸化シリコン膜と、前記第2の窒化物半導体層と前記酸化シリコン膜との間の酸窒化アルミニウム膜とを有し、前記酸窒化アルミニウム膜の中の第1の位置における酸素と窒素の和に対する窒素の第1の原子比が、前記酸窒化アルミニウム膜の中の前記第1の位置よりも前記酸化シリコン膜に近い第2の位置における酸素と窒素の和に対する窒素の第2の原子比よりも大きい絶縁層と、
を備える半導体装置。 - 前記第1の原子比は0.70以上0.87以下である請求項10記載の半導体装置。
- 前記第2の原子比は0.13以上0.30以下である請求項10又は請求項11記載の半導体装置。
- 前記第1の窒化物半導体層と前記酸窒化アルミニウム膜との界面、又は、前記第2の窒化物半導体層と前記酸窒化アルミニウム膜との界面から前記第2の位置までの距離は0.5nm以下である請求項10ないし請求項12いずれか一項記載の半導体装置。
- 前記酸窒化アルミニウム膜の膜厚は1nm以上10nm以下である請求項10ないし請求項13いずれか一項記載の半導体装置。
- 前記絶縁層は、前記第2の窒化物半導体層に接する請求項10ないし請求項14いずれか一項記載の半導体装置。
- 前記第1の窒化物半導体層は窒化ガリウムであり、前記第2の窒化物半導体層は窒化アルミニウムガリウムである請求項10ないし請求項15いずれか一項記載の半導体装置。
- 請求項1ないし請求項16いずれか一項記載の半導体装置を備える電源回路。
- 請求項1ないし請求項16いずれか一項記載の半導体装置を備えるコンピュータ。
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