JP6725326B2 - Vacuum chuck and method of manufacturing vacuum chuck - Google Patents

Description

The present invention relates to a vacuum chuck that holds a wafer such as a semiconductor element manufacturing wafer or a glass substrate on a suction table by suction, and a manufacturing method thereof.

Conventionally, a groove having a V-shaped cross section that is recessed toward the center is provided at the upper end of the peripheral side surface of a cylindrical suction table, and the groove is made of an elastic material such as rubber and gradually spreads outward from the bottom to the top. There is proposed a vacuum chuck provided with an annular seal member having a skirt-shaped cross section formed as described above (for example, refer to Patent Document 1). There is also proposed a vacuum chuck in which a seal member is fixed to a plate-like member with an adhesive, and the plate-like member is fixed to a suction table with screws so as to be detachably fixed (see, for example, Patent Document 2).

According to the vacuum chuck having the above structure, even when a substrate such as a wafer for manufacturing a semiconductor device or a glass substrate has a warp, a swell, or a step, the upper end portion of the seal member is brought into contact with the substrate over the entire circumference thereof. A sealed area is formed in the gap between the substrate and the suction surface. Therefore, a gap generated between the substrate and the suction table due to the warp of the substrate can be airtightly surrounded by the seal member, and the substrate can be firmly held on the suction table by using the airtight region as a negative pressure.

JP-A-07-308856 JP, 2010-153419, A

In the conventional vacuum chuck, in order to fix the seal member, an annular V-shaped groove is provided on the peripheral surface of the cylindrical suction table, and the annular seal member is fitted into this groove. However, when the groove is formed on the suction surface (surface) of the suction table on which the substrate is sucked, it is difficult to form a deep groove on the suction table, for example, in a vacuum chuck having a small thickness, and the sealing member should be firmly attached. It was difficult to fix in the groove.

Although it is possible to fix the seal member only with the adhesive, particles may be generated due to peeling of the adhesive or the like. Further, it may be difficult to fix the seal member with a screw due to problems such as securing a space for a screw hole.

In view of the above points, an object of the present invention is to provide a vacuum chuck capable of easily fixing a seal member to a suction table and a manufacturing method thereof.

[1] To achieve the above object, the vacuum chuck of the present invention comprises:
A vacuum chuck comprising a suction table for sucking and holding a substrate and a sealing member made of an annular elastic material,
The suction table includes
A suction path having an opening on the surface of the suction table,
An annular recess formed in an annular shape so as to dent from the surface and surround the opening,
Is provided,
The seal member is fitted in the annular recess,
The vacuum chuck forms a negative pressure region by a negative pressure in a space defined by the surface of the suction table, the substrate, and the seal member by suction from the suction path, thereby forming a surface of the suction table. Is configured to hold the substrate by suction,
At least a part of the fitting portion which is the inner peripheral surface of the sealing member and is fitted into the annular recess is a small-diameter portion formed to have a diameter smaller than the diameter of the inner wall which is the inner side wall of the annular recess,
The seal member is fitted to the inner wall so as to spread the small diameter portion ,
The seal member is
A fitting portion that fits in the annular recess,
An inclined portion that extends from the fitting portion toward the center of the suction table and extends above the surface of the suction table;
Equipped with
The inclined portion is not inclined before the fitting portion is fitted to the inner wall, extends upward from the upper end of the fitting portion, and has the same diameter as the fitting portion,
The inclined portion is expanded when the fitting portion is fitted to the inner wall, so that the fitting portion is expanded and the lower end portion of the inclined portion is also expanded, and the inclined portion gradually increases in the upward direction. It is characterized by being inclined so as to reduce the diameter .

According to the present invention, the seal member includes the small diameter portion formed to have a diameter smaller than the diameter of the inner wall of the annular recess, and the seal member pushes the small diameter portion to fit the inner wall of the annular recess. Therefore, the seal member is firmly fixed to the annular recess. Therefore, according to the present invention, it is possible to provide a vacuum chuck that can easily fix the seal member to the suction table.

[ 3 ] In the present invention, it is preferable to fit an annular fixing member that fixes the sealing member between the annular recess and the inner wall. According to this structure, the fitting portion of the seal member can be further pressed against the inner wall by the annular fixing member including the O ring or the C ring, and the seal member can be more firmly fixed to the annular recess.

[ 4 ] In the present invention, in the case where the annular recess includes an outer wall that is an outer side wall facing the inner wall, the annular recess defines the outer wall and the outer peripheral surface of the seal member. It is also possible that the fixing member is fitted in between and the fixing member is supported by the outer wall so that the sealing member is fixed between the fixing member and the inner wall.

According to such a configuration, the fixing member does not necessarily have to be annular, and the fitting member supported by the outer wall can further press the fitting portion of the sealing member against the inner wall, so that the sealing member can be more firmly fixed to the annular recess. Can be fixed.

Further, in the present invention, the sealing member is fitted to the annular recess, and is inclined toward the center of the suction table from the fitting section and extends above the surface of the suction table. An inclined portion, wherein the inclined portion is not inclined before the fitting portion is fitted to the inner wall, and extends upward from an upper end of the fitting portion and has the same diameter as the fitting portion. The inclined portion is expanded when the fitting portion is fitted to the inner wall, so that the fitting portion is expanded and the lower end portion of the inclined portion is also expanded. , Inclined so that the diameter gradually decreases as it goes upward .

According to the present invention, even if the upper end portion of the seal member is not inclined in advance, the inclined portion extending upward from the inner wall by fitting the fitting portion having a smaller diameter than the inner wall to the inner wall is reduced in diameter by its own restoring force. To do. As a result, the seal member can be easily manufactured, and the vacuum chuck as a whole can be easily manufactured.

Further, the upper and lower sides of the seal member have the same shape before the seal member is fitted to the inner wall. Therefore, it is not necessary to confirm the upper and lower sides of the seal member and fit the seal member on the inner wall, and it is possible to prevent the seal member from being erroneously assembled.

[ 2 ] Further, in the present invention, the sealing member has a fitting portion that fits in the annular recess, and an inclination from the fitting portion toward the center of the suction table, more than the surface of the suction table. An inclined portion extending upward, wherein the inclined portion is elastically tiltable inward so as to be pushed by the substrate when the substrate is sucked by the suction table, and the surface of the suction table is provided. Is preferably provided with an annular receiving portion that is located at an opening edge portion on the radially inner side of the annular concave portion and is recessed so as to be able to receive the tilted inclined portion.

With this configuration, since the inclined portion can be received by the receiving portion, it is possible to prevent the inclined portion from being sandwiched between the substrate and the surface of the suction table while protruding upward from the annular recessed portion, and it is possible to reduce the vacuum. It is possible to prevent the flatness on the surface of the suction table when the chuck is sucked from decreasing.

Further, in the vacuum chuck of the reference example, the sealing member has a fitting portion that fits in the annular recess, and a surface of the suction table while inclining so that the diameter gradually increases from the fitting portion upward. An inclined portion that extends upwardly, the inclined portion being elastically tiltable outward so as to be pushed by the substrate when the substrate is adsorbed by the adsorption table. It is preferable that an annular receiving portion, which is located at an opening edge portion on the radially outer side of the annular recessed portion and is recessed to receive the tilted inclined portion, is provided on the surface of the.

With this configuration, since the inclined portion can be received by the receiving portion, it is possible to prevent the inclined portion from being sandwiched between the substrate and the surface of the suction table while protruding upward from the annular recessed portion, and it is possible to reduce the vacuum. It is possible to prevent the flatness on the surface of the suction table when the chuck is sucked from decreasing.

Further, in the vacuum chuck of the reference example, a thick portion is formed at the lower end portion of the seal member so that the thickness becomes thicker downward, and the thick portion is formed at the lower end portion of the seal member. It is equipped with an insertion groove of the same shape (including almost the same shape) as the shape of the thick part and the insertion member of a member different from the sealing member is attached, and the sealing member is inserted through the insertion member. May be fixed in the annular recess.

With this configuration, the seal member can be firmly fixed to the suction table.

[ 5 ] Further, the method for manufacturing a vacuum chuck of the present invention is
A suction path having a suction path having an opening opening on the surface, and an annular recess formed in an annular shape so as to be recessed from the surface and surround the opening,
A sealing member made of an annular elastic material fitted in the annular recess,
Equipped with
By suctioning from the suction path, a negative pressure region is formed with a space defined by the surface of the suction table, the substrate mounted on the suction table, and the sealing member as a negative pressure, thereby forming the suction area. A method of manufacturing a vacuum chuck configured to adsorb and hold the substrate on the surface of a table,
At least a portion of the inner peripheral surface of the seal member, which is fitted into the annular recess, is formed with a smaller diameter than the diameter of the inner wall that is the inner side wall of the annular recess;
And a step of mounting a seal member in which the seal member is fitted in the annular recess by expanding a small-diameter portion formed in a small diameter of the seal member and fitting it into the inner wall.

According to the method of manufacturing a vacuum chuck of the present invention, a small diameter portion formed to have a diameter smaller than the diameter of the side wall inside the annular recess is provided in the sealing member by the manufacturing process, and the sealing member has a small diameter by the mounting process. The sealing member is firmly fixed to the annular recess because it is expanded and fitted into the inner wall of the annular recess. Therefore, according to the method of manufacturing the vacuum chuck of the present invention, it is possible to manufacture the vacuum chuck in which the seal member can be easily fixed to the suction table.

The perspective view which shows typically the vacuum chuck of 1st Embodiment of this invention by a partial cross section. The perspective view which decomposes|disassembles and shows the vacuum chuck of 1st Embodiment. Sectional drawing which shows a part of state which received the board|substrate with the lift pin of the vacuum chuck of 1st Embodiment. Sectional drawing which shows a part of state which made the vacuum chuck of 1st Embodiment adsorb and hold|maintain the board|substrate. The perspective view which shows typically the sealing member of the vacuum chuck of 2nd Embodiment of this invention. Sectional drawing which shows a part of state which received the board|substrate with the lift pin of the vacuum chuck of 2nd Embodiment. Sectional drawing which shows a part of state which made the vacuum chuck of 2nd Embodiment adsorb and hold|maintain a board|substrate. The perspective view which shows typically the sealing member of the vacuum chuck of 3rd Embodiment of this invention. The perspective view which shows typically the sealing member of the vacuum chuck of 4th Embodiment of this invention. FIG. 10A is a cross-sectional view showing the vacuum chuck of the fifth embodiment of the present invention in an exploded manner. FIG. 10B is a sectional view showing a state in which the vacuum chuck of the fifth embodiment is assembled.

[First Embodiment]
A first embodiment of a vacuum chuck of the present invention will be described with reference to FIGS. 1 to 4. With reference to FIG. 1, the vacuum chuck 1 of the first embodiment includes a suction table 2 made of a substantially disk-shaped ceramic having a relatively thin thickness (for example, about 1 mm to 2 mm). The adsorption table 2 is produced by firing an inorganic solid powder containing silicon carbide, aluminum nitride, alumina or silicon nitride as a main raw material.

The suction table 2 has a suction path 3 (through hole) having an opening 3a opening to the surface 2a (suction surface, suction plane) of the suction table 2 and a wafer W (substrate) suctioned by the suction table 2 is moved up and down. A lift hole 5 is formed through which a lift pin 4 for allowing the lift pin 4 to be inserted is protruded upward. Further, on the surface 2a of the suction table 2, an annular concave portion 6 (for example, a depth of 1 to 2 [mm], which is recessed downward from the surface 2a and surrounds the opening 3a of the suction path 3 at intervals in the radial direction, A width of 1 to 10 [mm]) is formed in an annular shape. An annular seal member 7 (including an O-ring shape as well as a C-shape) is fitted in the annular recess 6.

The surface 2a of the suction table 2 may be provided with an annular convex portion (for example, a height of 30 to 200 [μm]) protruding upward in an annular shape surrounding the annular concave portion 6. In this case, the upper end of the annular convex portion constitutes a part of the surface 2a, which is the contact point with the wafer W on the suction table 2. Further, on the surface 2a of the adsorption table 2, a plurality of pins (for example, a height of 30 to 200 [μm]) having a substantially columnar shape, a substantially hemispherical shape or a substantially truncated cone shape protruding upward are formed in a triangular lattice shape or a square lattice shape. Alternatively, they may be regularly arranged such as concentric circles. In this case, the upper ends of the plurality of pins form at least a part of the surface 2a of the suction table 2 that is in contact with the wafer W. In this case, the surface 2a is a set of discrete surfaces formed by the upper ends of the annular convex portions and the upper ends of the plurality of pins.

The seal member 7 is made of an elastic material such as urethane or fluororubber. The seal member 7 is composed of a fitting portion 8 that is fitted into the annular recess 6, and an inclined portion 9 that is inclined so that the diameter gradually decreases from the upper end of the fitting portion 8 toward the center of the suction table 2. There is.

The inclined portion 9 is pushed by the wafer W when the wafer W is sucked onto the suction table 2 so that the suction of the wafer W onto the suction table 2 is released from the state where the inclined portion 9 is elastically tilted. The inclined portion 9 has elasticity such that it returns to the original position by its own restoring force when the state transitions to the open state. In consideration of this point, the selection of the material forming the seal member 7 and the thickness of the seal member 7 are designed.

At least a part of the fitting portion 8 which is the inner peripheral surface of the seal member 7 and fits in the annular recess 6 is a small-diameter portion formed to have a diameter smaller than the diameter of the inner wall 6 a which is the inner side wall of the annular recess 6. is there. As shown in an exploded view in FIG. 2, in the present embodiment, the seal member 7 is configured to have the same diameter from the lower end to the upper end before being fitted into the annular recess 6, and in other words, For example, it can be said that the entire seal member 7 is composed of the small diameter portion. The small-diameter portion of the present invention is not limited to that of the present embodiment, and the inner peripheral surface of at least part of the fitting portion may have a smaller diameter than the inner wall. Further, at least the inner peripheral surface of the seal member 7 may be smaller than the diameter of the inner wall 6a, and the outer peripheral surface of the seal member 7 may be larger than or equal to the diameter of the inner wall 6a.

The sealing member 7 is fitted into the annular recess 6 by covering the inner wall 6a of the annular recess 6 such that the lower end portion of the sealing member 7 is widened. Since the seal member 7 is composed of a small-diameter portion as a whole, the seal member 7 becomes an inclined portion 9 which is inclined so that its upper end portion gradually decreases in diameter as it goes upward due to its own restoring force.

The inclined portion 9 is elastically inclinable inward so that the inclined portion 9 is pushed by the wafer W when the wafer W is adsorbed by the adsorption table 2. Further, on the surface 2a of the suction table 2, there is provided an annular receiving portion 10 which is located at an opening edge portion on the radially inner side of the annular concave portion 6 and which is recessed downward so as to be able to receive the inclined portion 9 which inclines inward. Has been.

Further, the annular recess 6 has an outer wall 6b which is an outer side wall facing the inner wall 6a. An annular fixing member 11 is fitted in the annular recess 6 so as to be located between the outer wall 6b and the outer peripheral surface of the seal member 7.

In order to attract the wafer W with the vacuum chuck 1 of the present embodiment, first, as shown in FIG. 3, the lift pins 4 are projected upward from the three lift holes 5, respectively. The lift pin 4 is projected so that its upper end is located above the upper end of the seal member 7. Then, the wafer W carried by the pair of transfer arms C is placed on the three lift pins 4.

After that, the pair of transfer arms C are pulled out, and the lift pins 4 are lowered into the lift holes 5 by an actuator (not shown), so that the wafer W is placed on the seal member 7. The upper end of the seal member 7 supports the wafer W while being slightly bent by the load of the wafer W. Therefore, the upper end of the seal member 7 can contact the wafer W over substantially the entire circumference.

Then, the wafer W is sucked from the suction path 3 by a vacuum pump (not shown), and the space defined by the surface 2a of the suction table 2, the seal member 7 and the wafer W is used as a negative pressure area, as shown in FIG. Are suction-held on the surface 2a of the suction table 2. At this time, the inclined portion 9 is received by the receiving portion 10 and is flush with the surface 2a of the suction table 2. Therefore, it is possible to prevent the inclined portion 9 from tilting inward and being sandwiched between the surface 2a of the suction table 2 and the wafer W, and the flatness of the surface 2a of the suction table 2 can be maintained. After subjecting the wafer W to predetermined processing or treatment, suction by the vacuum pump is stopped and the wafer W is lifted by the lift pins 4 as shown in FIG. Then, the wafer W is carried to the next step by the carrier arm C.

According to the vacuum chuck 1 of the present embodiment, when the wafer W is placed on the front surface 2a side of the suction table 2, the inclined portion 9 which is a part of the seal member 7 is not warped or undulated on the wafer W. However, it can be brought into contact with the wafer W over the entire circumference or almost the entire circumference. Then, the space (inner space) surrounded by the wafer W, the suction table 2, and the seal member 7 is vacuum-sucked through the suction path 3. As a result, a negative pressure region is formed in the inner space, and the seal member 7 elastically deforms so as to elastically tilt the inclined portion 9, and as shown in FIG. It becomes the same height as the suction plane. As a result, the wafer W can be entirely brought into contact with the surface 2a of the suction table 2, and the flatness of the suction table 2 can be improved.

Further, according to the vacuum chuck 1 of the present embodiment, the sealing member 7 is wholly constituted by the small diameter portion formed to have a diameter smaller than the diameter of the inner wall 6a of the annular recess 6, and the sealing member 7 has the small diameter portion. Since the lower end of the seal member 7 is spread outwardly and fitted over the inner wall 6a of the annular recess 6, the seal member 7 is firmly fixed to the annular recess 6. Therefore, according to the vacuum chuck 1 of the present embodiment, the seal member 7 can be easily fixed to the suction table 2 having a relatively thin thickness of, for example, about 1 mm to 2 mm and in which a deep groove cannot be formed.

Further, in the present embodiment, an annular fixing member 11 that sandwiches and fixes the seal member 7 with the inner wall 6 a is fitted in the annular recess 6. The ring-shaped fixing member 11 can further press the fitting portion 8 of the seal member 7 against the inner wall 6a, and can prevent the fitting portion 8 from spreading to the outside. It can be fixed in the recess 6.

Further, the seal member 7 has the same diameter from the lower end to the upper end in a state before being fitted to the inner wall 6a. In other words, the entire seal member 7 has a small diameter portion. Therefore, when the fitting portion 8 located at the lower end portion of the seal member 7 is expanded and fitted to the inner wall 6a, the fitting portion 8 pushes the inclined portion 9 located at the upper end portion of the seal member 7. As it is expanded, the lower end of the inclined portion 9 is also expanded and the inclined portion 9 has a shape in which the diameter gradually decreases upward due to its own restoring force. That is, the inclined portion 9 is naturally formed on the seal member 7 when fitted to the inner wall 6a. Therefore, it is not necessary to configure the seal member 7 so that the inclined portion 9 is formed in advance, and the manufacture of the seal member 7 is facilitated.

Further, since the seal member 7 has the same diameter from the lower end to the upper end, the seal member 7 has a vertically symmetrical shape. As a result, of the seal member 7, the portion fitted to the inner wall 6a becomes the fitting portion 8, and the remaining portion becomes the inclined portion 9. Therefore, as compared with the seal member in which the inclined portion 9 is formed in advance, it is possible to prevent the inclined portion 9 from being accidentally fitted to the inner wall 6a and prevent the seal member 7 from being erroneously assembled.

Next, a method of manufacturing the vacuum chuck 1 of this embodiment will be described. In order to manufacture the vacuum chuck 1, first, as a manufacturing process of the adsorption table 2, an inorganic solid powder containing silicon carbide, aluminum nitride, alumina, silicon nitride or the like as a main raw material is fired to form the disk-shaped adsorption table 2. To do. Then, the suction path 3 and the annular recess 6 are formed on the surface 2a (upper surface) of the suction table 2 to complete the suction table 2.

Further, as a manufacturing process of the seal member 7, an annular seal member 7 having a smaller diameter than the inner wall 6a of the annular recess 6 is formed of an elastic material such as urethane or fluororubber. At this time, the seal member 7 has the same diameter from the lower end to the upper end.

Then, in the step of attaching the seal member 7, the seal member 7 is fitted into the annular recess 6 such that the lower end portion of the seal member 7 is spread out to cover the inner wall 6 a of the annular recess 6. At this time, the inclined portion 9 located at the upper end portion of the seal member 7 is also expanded together with the lower end portion of the inclined portion 9 when the fitting portion 8 is expanded, and the inclined portion 9 is upwardly moved by its own restoring force. The diameter gradually decreases toward. That is, the inclined portion 9 is naturally formed on the seal member 7 when fitted to the inner wall 6a.

Then, in the attaching step of the fixing member 11, the annular fixing member 11 is fitted into the annular recess 6 and the fitting member 8 of the seal member 7 is pressed against the inner wall 6a by the fixing member 11 so that the sealing member 7 is pushed into the annular recess 6. It is firmly fixed by.

In the present embodiment, the vacuum chuck 1 including the suction table 2 having a relatively thin thickness of, for example, about 1 mm to 2 mm has been described, but the vacuum chuck of the present invention is not limited to this. For example, the suction table 2 may have a thickness of less than 1 mm or a thickness of more than 2 mm. This also similarly provides the effect of "the seal member can be easily fixed to the suction table" of the present invention. Can be obtained.

[Second Embodiment]
A second embodiment of the vacuum chuck of the present invention will be described with reference to FIGS. 5, 6 and 7. In the second embodiment, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIG. 5, the vacuum chuck 1 of the second embodiment differs from that of the first embodiment in that the inclined portion 9 is inclined so as to gradually expand outward in the radial direction as it goes upward. .. Further, as shown in FIG. 6, since the inclined portion 9 expands radially outward, the receiving portion 10' is also provided outside. The inner peripheral surface of the fitting portion 8 is formed to have a diameter smaller than the diameter of the inner wall 6a. Although the outer peripheral surface of the fitting portion 8 of the present embodiment is also formed to have a diameter smaller than the diameter of the inner wall 6a, the outer peripheral surface of the fitting portion of the present invention may have a diameter equal to or larger than the diameter of the inner wall 6a. ..

In order to attract the wafer W with the vacuum chuck 1 of the present embodiment, first, as shown in FIG. 6, the lift pins 4 are projected upward from the three lift holes 5, respectively. The lift pin 4 is projected so that its upper end is located above the upper end of the seal member 7. Then, the wafer W carried by the pair of transfer arms C is placed on the three lift pins 4.

After that, the pair of transfer arms C are pulled out, and the lift pins 4 are lowered into the lift holes 5 by an actuator (not shown), so that the wafer W is placed on the seal member 7. The upper end of the seal member 7 supports the wafer W while being slightly bent by the load of the wafer W. Therefore, the upper end of the seal member 7 can contact the wafer W over substantially the entire circumference.

Then, the wafer W is sucked from the suction path 3 by a vacuum pump (not shown), and the space defined by the surface 2a of the suction table 2, the seal member 7 and the wafer W is used as a negative pressure area, as shown in FIG. Are suction-held on the surface 2a of the suction table 2. At this time, the inclined portion 9 is received by the receiving portion 10 ′ and is flush with the surface 2 a of the suction table 2. Therefore, it is possible to prevent the inclined portion 9 from tilting outward and being sandwiched between the surface 2a of the suction table 2 and the wafer W, and the flatness of the surface 2a of the suction table 2 can be maintained. After subjecting the wafer W to predetermined processing or treatment, suction by the vacuum pump is stopped and the wafer W is lifted by the lift pins 4 as shown in FIG. Then, the wafer W is carried to the next step by the carrier arm C.

According to the vacuum chuck 1 of the present embodiment, at least the inner peripheral surface of the fitting portion 8 of the seal member 7 is a small-diameter portion formed to have a diameter smaller than the diameter of the inner wall 6a of the annular recess 6, and the seal member 7 is Since the fitting portion 8 which is a small diameter portion is spread outward and is fitted over the inner wall 6a of the annular recess 6, the seal member 7 is firmly fixed to the annular recess 6. Therefore, according to the vacuum chuck 1 of the present embodiment, the seal member 7 can be easily fixed to the suction table 2 which is relatively thin and cannot form a deep groove.

Further, in the present embodiment, an annular fixing member 11 that sandwiches and fixes the seal member 7 with the inner wall 6 a is fitted in the annular recess 6. The ring-shaped fixing member 11 can further press the fitting portion 8 of the seal member 7 against the inner wall 6a, and can prevent the fitting portion 8 from spreading to the outside. It can be fixed in the recess 6.

In the present embodiment, the vacuum chuck 1 including the suction table 2 having a relatively thin thickness of, for example, about 1 mm to 2 mm has been described, but the vacuum chuck of the present invention is not limited to this. For example, the suction table 2 may have a thickness of less than 1 mm or a thickness of more than 2 mm. This also similarly provides the effect of "the seal member can be easily fixed to the suction table" of the present invention. Can be obtained.

[Third Embodiment]
A vacuum chuck 1 according to a third embodiment of the present invention will be described with reference to FIG. The vacuum chuck 1 of the third embodiment is the same as that of the first embodiment except that the inclined portion 9 is inclined before the fitting portion 8 of the seal member 7 is fitted into the annular recess 6. It is configured.

According to the vacuum chuck 1 of the present embodiment, the fitting portion 8 of the sealing member 7 is configured by a small diameter portion formed to have a diameter smaller than the diameter of the inner wall 6a of the annular recess 6, and the sealing member 7 is fitted. The sealing member 7 is firmly fixed to the annular recess 6 because the fitting portion 8 is pushed outward and is fitted so as to cover the inner wall 6a of the annular recess 6. Therefore, according to the vacuum chuck 1 of the present embodiment, the seal member 7 can be easily fixed to the suction table 2 which is relatively thin and cannot form a deep groove.

Also in the present embodiment, similarly to the first embodiment, the annular fixing member 11 for sandwiching and fixing the seal member 7 with the inner wall 6a can be fitted into the annular recess 6. If the fitting portion 8 of the seal member 7 is further pressed against the inner wall 6a by the annular fixing member 11, it is possible to prevent the fitting portion 8 from spreading to the outside, so that the seal member 7 is more firmly fixed to the annular recess 6. Can be fixed.

Next, a method of manufacturing the vacuum chuck 1 of this embodiment will be described. To manufacture the vacuum chuck 1, first, as in the first embodiment, in the manufacturing process of the adsorption table 2, an inorganic solid powder containing silicon carbide, aluminum nitride, alumina, silicon nitride or the like as a main raw material is fired. A disk-shaped suction table 2 is created. Then, the suction path 3 and the annular recess 6 are formed on the surface 2a (upper surface) of the suction table 2 to complete the suction table 2.

Further, as a manufacturing process of the seal member 7, an annular seal member 7 having a smaller diameter than the inner wall 6a of the annular recess 6 is formed of an elastic material such as urethane or fluororubber. At this time, the lower end portion of the seal member 7 is a fitting portion 8 having a diameter smaller than the diameter of the inner wall 6a. Further, the upper end portion of the seal member 7 is an inclined portion 9 which is inclined so as to gradually reduce its diameter as it goes upward.

Then, in the step of attaching the seal member 7, the fitting member 8 which is the lower end portion of the seal member 7 is spread to cover the inner wall 6 a of the annular recess 6 so that the sealing member 7 is fitted into the annular recess 6. ..

Then, in the attaching step of the fixing member 11, the annular fixing member 11 is fitted into the annular recess 6 and the fitting member 8 of the seal member 7 is pressed against the inner wall 6a by the fixing member 11 so that the sealing member 7 is pushed into the annular recess 6. It is firmly fixed by.

In the present embodiment, the vacuum chuck 1 including the suction table 2 having a relatively thin thickness of, for example, about 1 mm to 2 mm has been described, but the vacuum chuck of the present invention is not limited to this. For example, the suction table 2 may have a thickness of less than 1 mm or a thickness of more than 2 mm. This also similarly provides the effect of "the seal member can be easily fixed to the suction table" of the present invention. Can be obtained.

[Fourth Embodiment]
Next, a vacuum chuck 1 according to a fourth embodiment of the present invention will be described with reference to FIG. In the vacuum chuck 1 of the fourth embodiment, the inclined portion 9 expands outward in the radial direction before the fitting portion 8 of the seal member 7 is fitted into the annular recess 6, and the fitting is performed. The portion 8 is also configured in the same manner as that of the second embodiment except that the portion 8 is also inclined at the same inclination angle as the inclined portion 9.

According to the vacuum chuck 1 of the present embodiment, at least a part of the inner peripheral surface of the inclined fitting portion 8 of the seal member 7 is a small-diameter portion formed to have a diameter smaller than the diameter of the inner wall 6a of the annular recess 6, Since the seal member 7 is fitted so as to push the fitting portion 8 having a small diameter outward and cover the inner wall 6a of the annular recess 6, the sealing member 7 is firmly fixed to the annular recess 6. It Therefore, according to the vacuum chuck 1 of the present embodiment, the seal member 7 can be easily fixed to the suction table 2 which is relatively thin and cannot form a deep groove.

Further, in the present embodiment, the annular fixing member 11 that fixes the sealing member 7 with the inner wall 6a can be fitted in the annular recess 6. The ring-shaped fixing member 11 can further press the fitting portion 8 of the seal member 7 against the inner wall 6a, and can prevent the fitting portion 8 from spreading to the outside. It can be fixed in the recess 6.

In the present embodiment, the vacuum chuck 1 including the suction table 2 having a relatively thin thickness of, for example, about 1 mm to 2 mm has been described, but the vacuum chuck of the present invention is not limited to this. For example, the suction table 2 may have a thickness of less than 1 mm or a thickness of more than 2 mm. This also similarly provides the effect of "the seal member can be easily fixed to the suction table" of the present invention. Can be obtained.

[Fifth Embodiment]
Next, a vacuum chuck 1 according to a fifth embodiment of the present invention will be described with reference to FIGS. 10A and 10B. In the vacuum chuck 1 of the fifth embodiment, the fitting portion 8 located at the lower end portion of the seal member 7 having the same diameter from the lower end to the upper end is formed thick so that the thickness becomes thicker downward. It is considered to be a thick part. An annular (including an O-ring shape as well as a C-shaped) insertion member 12 is attached to the fitting portion 8 of the seal member 7. As shown in an exploded view in FIG. 10A, the insertion member 12 is formed to have a diameter larger than that of the seal member 7, and is formed to have substantially the same diameter as the annular recess 6 so as to be press-fitted into the annular recess 6. There is.

The insertion member 12 is provided with an insertion groove 12a having the same shape (a shape including substantially the same shape) as the shape of the fitting portion 8 as the thick portion. The fitting portion 8 as a thick portion is inserted into the insertion groove 12a while being pushed outward in the radial direction. Since the insertion groove 12a has the same shape as the shape of the fitting portion 8, the width of the groove is narrowed upward, and the fitting portion 8 inserted into the insertion groove 12a is It is hard to fall off from the insertion groove 12a.

The insertion member 12 is formed of a material having a relatively high rigidity, which is a member different from the sealing member 7. As shown in FIG. 10B, the seal member 7 is fixed to the annular recess 6 by press-fitting and inserting the insertion member 12 into the annular recess 6. Other configurations are similar to those of the vacuum chuck 1 of the first embodiment.

According to the vacuum chuck 1 of the fifth embodiment, similarly to the other embodiments, even if the suction base 2 has a relatively thin thickness and in which the deep annular recess 6 cannot be formed, the suction base 2 is inserted via the insertion member 12. The seal member 7 can be firmly fixed to the surface 2a of the. Further, it is not necessary to form the inclined portion 9 in advance, which facilitates the manufacture of the seal member 7.

The insertion member 12 does not necessarily have to be annular (including C-shaped as well as O-ring-shaped), and may have another shape such as an arc shape. Further, for example, when the insertion member is formed in an arc shape, a plurality of insertion members may be arranged at intervals in the circumferential direction.

In the present embodiment, the vacuum chuck 1 including the suction table 2 having a relatively thin thickness of, for example, about 1 mm to 2 mm has been described, but the vacuum chuck of the present invention is not limited to this. For example, the suction table 2 may have a thickness of less than 1 mm or a thickness of more than 2 mm. This also similarly provides the effect of "the seal member can be easily fixed to the suction table" of the present invention. Can be obtained.

[Other Embodiments]
Besides the above-described embodiment, the respective shapes of the seal member 7 and the annular recess 6 may be variously changed. For example, the seal member 7 may have a substantially circular cross section, and the upper end portion thereof may be formed in a torus shape protruding above the surface 2a (suction plane) of the suction table 2. Similarly, the annular recess 6 may be formed so as to have a substantially trapezoidal cross section in which the upper bottom, which is shorter than the lower bottom, is on the upper side. Since the width of the opening above the bottom surface of the annular recess 6 is smaller, the annular recess 6 can firmly hold the seal member 7, and the seal member 7 can be prevented from falling off the annular recess 6.

The seal member 7 may have a bellows shape. The annular recess 6 has a substantially trapezoidal cross-section, and also has a shape having one or a plurality of protrusions protruding from the lower end position to the upper end position to prevent the seal member 7 from coming off the annular recess 6 It may have any possible shape. Moreover, the seal member 7 may be formed in a hollow torus shape. Further, the annular concave portion 6 may be formed to have an L-shaped cross-sectional shape in which a horizontally-long rectangular shape extending in the horizontal direction is continuous with an upper end portion of the vertically-long rectangular shape in which the seal member 7 is accommodated. Good. For example, the inclined portion 9 may not be inclined at a uniform angle, but may be formed in a shape such that the inclined angle gradually decreases or increases.

The annular concave portion 6 and the seal member 7 in the vacuum chuck 1 of the present embodiment are each formed in a substantially annular shape. It may be changed to any shape.

According to the vacuum chuck 1 of the present embodiment, when the wafer W is placed on the surface 2a of the suction table 2, the inclined portion 9 of the seal member 7 is elastically deformed by receiving a load from the wafer W. Therefore, even if the wafer W is warped or undulated, the inclined portion 9 can be brought into contact with the wafer W over the entire circumference or almost the entire circumference.

Then, the space (inner space) defined by the wafer W, the suction table 2, and the seal member 7 is vacuum-sucked through the suction path 3. As a result, a negative pressure region is formed in the inner space, and the inclined portion 9 of the seal member 7 is further elastically deformed to have the same height as the surface 2a (suction plane) of the suction table 2 (see FIG. 4). As a result, the wafer W as a whole can be brought into contact with the contact portion of the surface 2a of the suction table 2, and the flatness of the suction table 2 can be improved.

In addition, if an adhesive is applied to the inner peripheral surface of the fitting portion 8 of the seal member 7 and fixed to the inner wall 6a, it can be fixed more firmly. This is the same in the first to fourth embodiments.

Further, in the first embodiment, an O-ring-shaped member is used as the annular fixing member 11, but the effect of the present invention can be obtained even if the annular fixing member of the present invention has a C-ring shape. be able to.

Further, in the above-described embodiment, the vacuum chuck 1 having a relatively small thickness has been described, but the vacuum chuck of the present invention is not limited to this, and has a normal thickness (for example, a thickness exceeding 2 mm). Good. The thickness of the vacuum chuck of the present invention may be less than 1 mm.

Further, there may be a plurality of seal members having different diameters, whereby substrates having different diameters can be adsorbed. Further, by providing a plurality of sealing members having different diameters, even a substrate which is warped upward in the radial direction can be adsorbed by the seal member located in the radial direction.

1 vacuum chuck 2 suction table 2a surface (suction surface, suction plane)
3 Suction Path 3a Opening 4 Lift Pin 5 Lift Hole 6 Annular Recess 6a Inner Wall 6b Outer Wall 7 Seal Member 8 Fitting Part 9 Inclined Part 10 Receiving Part (First Embodiment)
10' Receiving unit (second embodiment)
11 fixing member 12 insertion member 12a insertion groove W wafer (substrate)
C transfer arm

Claims (5)

A vacuum chuck comprising a suction table for sucking and holding a substrate and a sealing member made of an annular elastic material,
The suction table includes
A suction path having an opening on the surface of the suction table,
An annular recess formed in an annular shape so as to dent from the surface and surround the opening,
Is provided,
The seal member is fitted in the annular recess,
The vacuum chuck forms a negative pressure region by a negative pressure in a space defined by the surface of the suction table, the substrate, and the seal member by suction from the suction path, thereby forming a surface of the suction table. Is configured to hold the substrate by suction,
At least a part of the fitting portion which is the inner peripheral surface of the sealing member and is fitted into the annular recess is a small-diameter portion formed to have a diameter smaller than the diameter of the inner wall which is the inner side wall of the annular recess,
The seal member is fitted to the inner wall so as to spread the small diameter portion ,
The seal member is
A fitting portion that fits in the annular recess,
An inclined portion that extends from the fitting portion toward the center of the suction table and extends above the surface of the suction table;
Equipped with
The inclined portion is not inclined before the fitting portion is fitted to the inner wall, extends upward from the upper end of the fitting portion, and has the same diameter as the fitting portion,
The inclined portion is expanded when the fitting portion is fitted to the inner wall, so that the fitting portion is expanded and the lower end portion of the inclined portion is also expanded. A vacuum chuck characterized by being inclined so as to reduce the diameter . The vacuum chuck according to claim 1, wherein
The seal member is
A fitting portion that fits in the annular recess,
An inclined portion that extends from the fitting portion toward the center of the suction table and extends above the surface of the suction table;
Equipped with
The inclined portion is elastically tiltable inward so as to be pushed by the substrate when the substrate is sucked by the suction table,
On the surface of the suction table, there is provided an annular receiving portion which is located at an opening edge portion on the inner side in the radial direction of the annular concave portion and is recessed so as to be able to receive the tilted inclined portion. Vacuum chuck. The vacuum chuck according to claim 1 or 2 , wherein
The vacuum chuck is characterized in that an annular fixing member for fixing the sealing member with the inner wall is fitted in the annular recess. The vacuum chuck according to any one of claims 1 to 3 ,
The annular recess includes an outer wall that is an outer side wall facing the inner wall,
In the annular recess, a fixing member is fitted and positioned between the outer wall and the outer peripheral surface of the sealing member,
The vacuum chuck, wherein the fixing member is fixed to the inner wall by sandwiching the seal member by being supported by the outer wall. A suction path having a suction path having an opening opening on the surface, and an annular recess formed in an annular shape so as to be recessed from the surface and surround the opening,
A sealing member made of an annular elastic material fitted in the annular recess,
Equipped with
By suctioning from the suction path, a negative pressure region is formed with a space defined by the surface of the suction table, the substrate mounted on the suction table, and the sealing member as a negative pressure, thereby forming the suction area. A method of manufacturing a vacuum chuck configured to adsorb and hold the substrate on the surface of a table,
At least a portion of the inner peripheral surface of the seal member, which is fitted into the annular recess, is formed with a smaller diameter than the diameter of the inner wall that is the inner side wall of the annular recess;
A vacuum chuck, characterized in that it comprises a step of mounting a seal member that pushes a small-diameter portion formed in a small diameter of the seal member and fits it into the inner wall to fit the seal member in the annular recess. Production method.