JP6723753B2 - 変位検出装置、トルク検出装置、ロボット装置、および変位検出方法 - Google Patents

変位検出装置、トルク検出装置、ロボット装置、および変位検出方法 Download PDF

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Publication number
JP6723753B2
JP6723753B2 JP2016021793A JP2016021793A JP6723753B2 JP 6723753 B2 JP6723753 B2 JP 6723753B2 JP 2016021793 A JP2016021793 A JP 2016021793A JP 2016021793 A JP2016021793 A JP 2016021793A JP 6723753 B2 JP6723753 B2 JP 6723753B2
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Japan
Prior art keywords
displacement
scale
detection head
detection
light receiving
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JP2016021793A
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English (en)
Japanese (ja)
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JP2016197094A5 (cg-RX-API-DMAC7.html
JP2016197094A (ja
Inventor
勇 大熊
勇 大熊
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to PCT/JP2016/060286 priority Critical patent/WO2016163280A1/en
Priority to US15/546,250 priority patent/US10500733B2/en
Publication of JP2016197094A publication Critical patent/JP2016197094A/ja
Publication of JP2016197094A5 publication Critical patent/JP2016197094A5/ja
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Publication of JP6723753B2 publication Critical patent/JP6723753B2/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00Controls for manipulators
    • B25J13/08Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085Force or torque sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02Rotary-transmission dynamometers
    • G01L3/04Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/12Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving photoelectric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02Rotary-transmission dynamometers
    • G01L3/14Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • G01L3/1407Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs
    • G01L3/1421Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs using optical transducers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00Robots
    • Y10S901/46Sensing device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Optical Transform (AREA)
  • Manipulator (AREA)
JP2016021793A 2015-04-06 2016-02-08 変位検出装置、トルク検出装置、ロボット装置、および変位検出方法 Active JP6723753B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2016/060286 WO2016163280A1 (en) 2015-04-06 2016-03-23 Displacement detecting apparatus, torque detecting apparatus, robot apparatus and displacement detecting method
US15/546,250 US10500733B2 (en) 2015-04-06 2016-03-23 Displacement detecting apparatus, torque detecting apparatus, robot apparatus and displacement detecting method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015077474 2015-04-06
JP2015077474 2015-04-06

Publications (3)

Publication Number Publication Date
JP2016197094A JP2016197094A (ja) 2016-11-24
JP2016197094A5 JP2016197094A5 (cg-RX-API-DMAC7.html) 2019-04-18
JP6723753B2 true JP6723753B2 (ja) 2020-07-15

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JP2016021793A Active JP6723753B2 (ja) 2015-04-06 2016-02-08 変位検出装置、トルク検出装置、ロボット装置、および変位検出方法

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Country Link
US (1) US10500733B2 (cg-RX-API-DMAC7.html)
JP (1) JP6723753B2 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019082373A (ja) * 2017-10-30 2019-05-30 セイコーエプソン株式会社 光学スケール、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
CN108120544A (zh) * 2018-02-13 2018-06-05 深圳精智机器有限公司 一种基于视觉传感器的三维测力平台
US11045950B2 (en) * 2018-11-02 2021-06-29 Canon Kabushiki Kaisha Driving device and detecting device
JP7289628B2 (ja) * 2018-11-02 2023-06-12 キヤノン株式会社 駆動装置、ロボット装置、制御方法、検出装置、制御プログラム及び記録媒体
KR102190455B1 (ko) * 2019-07-02 2020-12-11 재단법인대구경북과학기술원 로봇 관절 장치
JP7646393B2 (ja) 2021-03-02 2025-03-17 キヤノン株式会社 ロボットシステム、トルクセンサ、変位検出装置、検出方法、物品の製造方法、プログラム及び記録媒体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPP098497A0 (en) * 1997-12-17 1998-01-15 Bishop Innovation Pty Limited Transmission path torque transducer
GB2387826B (en) * 2001-02-07 2004-05-19 Visteon Global Tech Inc Torque sensing for a steering system
JP2009019876A (ja) 2005-10-28 2009-01-29 Mitsubishi Electric Corp 光学式絶対値エンコーダ
JP5489538B2 (ja) * 2009-06-03 2014-05-14 キヤノン株式会社 力覚センサ
JP2011161695A (ja) * 2010-02-06 2011-08-25 Ricoh Co Ltd エンコーダセンサ及び画像形成装置
JP2012189516A (ja) 2011-03-11 2012-10-04 Univ Of Tokyo トルクセンサ
CN103906997B (zh) * 2011-10-31 2016-12-07 日本精工株式会社 光学传感器、光学传感器的制造方法、光学式编码器、扭矩检测装置以及电动动力转向装置
JP6566315B2 (ja) * 2015-10-15 2019-08-28 株式会社リコー 画像形成装置

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JP2016197094A (ja) 2016-11-24
US10500733B2 (en) 2019-12-10
US20180021957A1 (en) 2018-01-25

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