JP2016197094A5 - - Google Patents

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Publication number
JP2016197094A5
JP2016197094A5 JP2016021793A JP2016021793A JP2016197094A5 JP 2016197094 A5 JP2016197094 A5 JP 2016197094A5 JP 2016021793 A JP2016021793 A JP 2016021793A JP 2016021793 A JP2016021793 A JP 2016021793A JP 2016197094 A5 JP2016197094 A5 JP 2016197094A5
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JP
Japan
Prior art keywords
displacement
scale
detection head
detection device
amount
Prior art date
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Application number
JP2016021793A
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English (en)
Japanese (ja)
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JP2016197094A (ja
JP6723753B2 (ja
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Priority to PCT/JP2016/060286 priority Critical patent/WO2016163280A1/en
Priority to US15/546,250 priority patent/US10500733B2/en
Publication of JP2016197094A publication Critical patent/JP2016197094A/ja
Publication of JP2016197094A5 publication Critical patent/JP2016197094A5/ja
Application granted granted Critical
Publication of JP6723753B2 publication Critical patent/JP6723753B2/ja
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JP2016021793A 2015-04-06 2016-02-08 変位検出装置、トルク検出装置、ロボット装置、および変位検出方法 Active JP6723753B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2016/060286 WO2016163280A1 (en) 2015-04-06 2016-03-23 Displacement detecting apparatus, torque detecting apparatus, robot apparatus and displacement detecting method
US15/546,250 US10500733B2 (en) 2015-04-06 2016-03-23 Displacement detecting apparatus, torque detecting apparatus, robot apparatus and displacement detecting method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015077474 2015-04-06
JP2015077474 2015-04-06

Publications (3)

Publication Number Publication Date
JP2016197094A JP2016197094A (ja) 2016-11-24
JP2016197094A5 true JP2016197094A5 (cg-RX-API-DMAC7.html) 2019-04-18
JP6723753B2 JP6723753B2 (ja) 2020-07-15

Family

ID=57358070

Family Applications (1)

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JP2016021793A Active JP6723753B2 (ja) 2015-04-06 2016-02-08 変位検出装置、トルク検出装置、ロボット装置、および変位検出方法

Country Status (2)

Country Link
US (1) US10500733B2 (cg-RX-API-DMAC7.html)
JP (1) JP6723753B2 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019082373A (ja) * 2017-10-30 2019-05-30 セイコーエプソン株式会社 光学スケール、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
CN108120544A (zh) * 2018-02-13 2018-06-05 深圳精智机器有限公司 一种基于视觉传感器的三维测力平台
US11045950B2 (en) * 2018-11-02 2021-06-29 Canon Kabushiki Kaisha Driving device and detecting device
JP7289628B2 (ja) * 2018-11-02 2023-06-12 キヤノン株式会社 駆動装置、ロボット装置、制御方法、検出装置、制御プログラム及び記録媒体
KR102190455B1 (ko) * 2019-07-02 2020-12-11 재단법인대구경북과학기술원 로봇 관절 장치
JP7646393B2 (ja) 2021-03-02 2025-03-17 キヤノン株式会社 ロボットシステム、トルクセンサ、変位検出装置、検出方法、物品の製造方法、プログラム及び記録媒体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPP098497A0 (en) * 1997-12-17 1998-01-15 Bishop Innovation Pty Limited Transmission path torque transducer
GB2387826B (en) * 2001-02-07 2004-05-19 Visteon Global Tech Inc Torque sensing for a steering system
JP2009019876A (ja) 2005-10-28 2009-01-29 Mitsubishi Electric Corp 光学式絶対値エンコーダ
JP5489538B2 (ja) * 2009-06-03 2014-05-14 キヤノン株式会社 力覚センサ
JP2011161695A (ja) * 2010-02-06 2011-08-25 Ricoh Co Ltd エンコーダセンサ及び画像形成装置
JP2012189516A (ja) 2011-03-11 2012-10-04 Univ Of Tokyo トルクセンサ
CN103906997B (zh) * 2011-10-31 2016-12-07 日本精工株式会社 光学传感器、光学传感器的制造方法、光学式编码器、扭矩检测装置以及电动动力转向装置
JP6566315B2 (ja) * 2015-10-15 2019-08-28 株式会社リコー 画像形成装置

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