JP6718940B2 - 着色感光性樹脂組成物、これを用いて製造されたパターン層、および前記パターン層を含むカラーフィルタおよび表示装置 - Google Patents
着色感光性樹脂組成物、これを用いて製造されたパターン層、および前記パターン層を含むカラーフィルタおよび表示装置 Download PDFInfo
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- JP6718940B2 JP6718940B2 JP2018211246A JP2018211246A JP6718940B2 JP 6718940 B2 JP6718940 B2 JP 6718940B2 JP 2018211246 A JP2018211246 A JP 2018211246A JP 2018211246 A JP2018211246 A JP 2018211246A JP 6718940 B2 JP6718940 B2 JP 6718940B2
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- photosensitive resin
- resin composition
- colored photosensitive
- pigment
- black
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- 239000002904 solvent Substances 0.000 claims description 28
- 239000003999 initiator Substances 0.000 claims description 26
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- 239000001055 blue pigment Substances 0.000 claims description 11
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- 239000006229 carbon black Substances 0.000 claims description 10
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- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
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- 238000007906 compression Methods 0.000 description 1
- WRKRMDNAUJERQT-UHFFFAOYSA-N cumene hydroxyperoxide Chemical compound OOOO.CC(C)C1=CC=CC=C1 WRKRMDNAUJERQT-UHFFFAOYSA-N 0.000 description 1
- AWGWNMYTZFCQKW-UHFFFAOYSA-N cyclohexane-1,1-dicarboxylic acid oxetane Chemical compound C1COC1.C1COC1.OC(=O)C1(C(O)=O)CCCCC1 AWGWNMYTZFCQKW-UHFFFAOYSA-N 0.000 description 1
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 1
- NHAQFLFLZGBOBG-UHFFFAOYSA-N decan-3-yl prop-2-enoate Chemical compound CCCCCCCC(CC)OC(=O)C=C NHAQFLFLZGBOBG-UHFFFAOYSA-N 0.000 description 1
- XJOBOFWTZOKMOH-UHFFFAOYSA-N decanoyl decaneperoxoate Chemical compound CCCCCCCCCC(=O)OOC(=O)CCCCCCCCC XJOBOFWTZOKMOH-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- UYAAVKFHBMJOJZ-UHFFFAOYSA-N diimidazo[1,3-b:1',3'-e]pyrazine-5,10-dione Chemical compound O=C1C2=CN=CN2C(=O)C2=CN=CN12 UYAAVKFHBMJOJZ-UHFFFAOYSA-N 0.000 description 1
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000012769 display material Substances 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 1
- 229940093499 ethyl acetate Drugs 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- STVZJERGLQHEKB-UHFFFAOYSA-N ethylene glycol dimethacrylate Chemical compound CC(=C)C(=O)OCCOC(=O)C(C)=C STVZJERGLQHEKB-UHFFFAOYSA-N 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000006232 furnace black Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- QWVBGCWRHHXMRM-UHFFFAOYSA-N hexadecoxycarbonyloxy hexadecyl carbonate Chemical compound CCCCCCCCCCCCCCCCOC(=O)OOC(=O)OCCCCCCCCCCCCCCCC QWVBGCWRHHXMRM-UHFFFAOYSA-N 0.000 description 1
- MZWHIEFYUAYOJU-UHFFFAOYSA-N hexanedioic acid;oxetane Chemical compound C1COC1.C1COC1.OC(=O)CCCCC(O)=O MZWHIEFYUAYOJU-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- NUHSROFQTUXZQQ-UHFFFAOYSA-N isopentenyl diphosphate Chemical compound CC(=C)CCO[P@](O)(=O)OP(O)(O)=O NUHSROFQTUXZQQ-UHFFFAOYSA-N 0.000 description 1
- 239000006233 lamp black Substances 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 1
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- MQWFLKHKWJMCEN-UHFFFAOYSA-N n'-[3-[dimethoxy(methyl)silyl]propyl]ethane-1,2-diamine Chemical compound CO[Si](C)(OC)CCCNCCN MQWFLKHKWJMCEN-UHFFFAOYSA-N 0.000 description 1
- GYVGXEWAOAAJEU-UHFFFAOYSA-N n,n,4-trimethylaniline Chemical compound CN(C)C1=CC=C(C)C=C1 GYVGXEWAOAAJEU-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- WCAOBJJSISYNMN-UHFFFAOYSA-N oxetane;terephthalic acid Chemical compound C1COC1.C1COC1.OC(=O)C1=CC=C(C(O)=O)C=C1 WCAOBJJSISYNMN-UHFFFAOYSA-N 0.000 description 1
- 125000003566 oxetanyl group Chemical group 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- DSXJYGUJWPLXKE-UHFFFAOYSA-N pentoxy 7,7-dimethyloctaneperoxoate Chemical compound CCCCCOOOC(=O)CCCCCC(C)(C)C DSXJYGUJWPLXKE-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- HPAFOABSQZMTHE-UHFFFAOYSA-N phenyl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)C1=CC=CC=C1 HPAFOABSQZMTHE-UHFFFAOYSA-N 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- BWJUFXUULUEGMA-UHFFFAOYSA-N propan-2-yl propan-2-yloxycarbonyloxy carbonate Chemical compound CC(C)OC(=O)OOC(=O)OC(C)C BWJUFXUULUEGMA-UHFFFAOYSA-N 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 229940116423 propylene glycol diacetate Drugs 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007348 radical reaction Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- OPQYOFWUFGEMRZ-UHFFFAOYSA-N tert-butyl 2,2-dimethylpropaneperoxoate Chemical compound CC(C)(C)OOC(=O)C(C)(C)C OPQYOFWUFGEMRZ-UHFFFAOYSA-N 0.000 description 1
- VNJISVYSDHJQFR-UHFFFAOYSA-N tert-butyl 4,4-dimethylpentaneperoxoate Chemical compound CC(C)(C)CCC(=O)OOC(C)(C)C VNJISVYSDHJQFR-UHFFFAOYSA-N 0.000 description 1
- GJBRNHKUVLOCEB-UHFFFAOYSA-N tert-butyl benzenecarboperoxoate Chemical compound CC(C)(C)OOC(=O)C1=CC=CC=C1 GJBRNHKUVLOCEB-UHFFFAOYSA-N 0.000 description 1
- SWAXTRYEYUTSAP-UHFFFAOYSA-N tert-butyl ethaneperoxoate Chemical compound CC(=O)OOC(C)(C)C SWAXTRYEYUTSAP-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- CSKKAINPUYTTRW-UHFFFAOYSA-N tetradecoxycarbonyloxy tetradecyl carbonate Chemical compound CCCCCCCCCCCCCCOC(=O)OOC(=O)OCCCCCCCCCCCCCC CSKKAINPUYTTRW-UHFFFAOYSA-N 0.000 description 1
- 239000006234 thermal black Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N vinyl-ethylene Natural products C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Materials For Photolithography (AREA)
- Optical Filters (AREA)
Description
前記着色剤は、青色顔料およびオレンジ顔料を含み、
前記青色顔料は、C.I.ピグメントブルー16であることを特徴とする着色感光性樹脂組成物を提供する。
前記着色剤は、青色顔料およびオレンジ顔料を含み、
前記青色顔料は、C.I.ピグメントブルー16であることを特徴とする着色感光性樹脂組成物に関する。
以下、本発明の着色感光性樹脂組成物を各成分ごとに詳細に説明する。
本発明において、着色剤は、可視光線に遮光性のあるものを使用し、本発明の着色剤は、青色顔料およびオレンジ顔料を含む。
本発明において、アルカリ可溶性樹脂は、通常、感光性樹脂組成物を用いて形成された感光性樹脂層の非露光部をアルカリ可溶性にし、顔料に対して分散媒質としても作用できる。アルカリ可溶性樹脂は、当該適用技術分野で使用される多様な重合体の中から選択可能であるが、エポキシ基を含むバインダー樹脂がさらに効果的でありうる。
本発明の光重合性化合物は、不飽和結合を含み、光開始剤と光反応を進行させて、感光性樹脂層を形成するもので、本発明で適用される重合性化合物は、一般的に使用される(メタ)アクリレートを官能基に含むことができ、不飽和基を含み感光性を帯びていれば使用に制限はない。
本発明の光重合開始剤は、感光性樹脂組成物のラジカル反応を開始させて、硬化を起こし感度を向上させる役割を果たす。光重合開始剤は、感光性樹脂組成物に一般的に使用される光重合開始剤であって、オキシム系、アセトフェノン系、ベンゾフェノン系、トリアジン系、チオキサントン系、ベンゾイン系、ビイミダゾール系化合物などを使用することができる。
前記溶剤は、着色感光性樹脂組成物に含まれる他の成分を溶解させるのに効果的でかつ反応しないものであれば、通常の着色感光性樹脂組成物で使用される溶剤を特に制限なく使用することができ、特に、エーテル類、アセテート類、芳香族炭化水素類、ケトン類、アルコール類、またはエステル類などが好ましい。
本発明の着色感光性樹脂組成物は、上記の成分のほか、本発明の目的を阻害しない範囲で通常の技術者の必要に応じて別の添加剤を含む。
本発明はまた、前記着色感光性樹脂組成物を用いて製造されたパターン層を含むカラーフィルタに関する。
a)基板に着色感光性樹脂組成物を塗布するステップと、
b)溶媒を乾燥するプリベークステップと、
c)得られた被膜上にフォトマスクを当てて活性光線を照射して露光部を硬化させるステップと、
d)アルカリ水溶液を用いて未露光部を溶解する現像工程を行うステップと、
e)乾燥およびポストベーク実行ステップとを含んでなる。
撹拌機、温度計、還流冷却管、滴下漏斗、および窒素導入管を備えた内容積1Lの分離型フラスコにメトキシブチルアセテート277gを投入し、80℃まで加熱した。次に、3,4−エポキシトリシクロ[5.2.1.0,2,6]デカン−9−イルアクリレートと3,4−エポキシトリシクロ[5.2.1.0,2,6]デカン−8−イルアクリレートを50:50のモル比で混合した混合物301g、メタクリル酸49g、およびアゾビスジメチルバレロニトリル23gをメトキシブチルアセテート350gに溶解させた混合溶液を調製した。前記混合溶液を滴下漏斗を用いてフラスコ内に5時間かけて滴下した後、3時間反応を進行させて分散樹脂[固形分(NV)35.0重量%]を製造した。前記製造された分散樹脂の酸価(dry)は69.8KOHmg/g、重量平均分子量(Mw)は12,300、分散度(Mw/Mn)は2.1であった。
下記表1の組成により、実施例1〜12および比較例1〜2の着色感光性樹脂組成物を製造した。
B16:C.I.ピグメントブルー16
V23:C.I.ピグメントバイオレット23
CB:カーボンブラック
OBP:有機ブラック顔料
B15:6:C.I.ピグメントブルー15:6
B60:C.I.ピグメントブルー60
B(分散樹脂):合成例のアルカリ可溶性樹脂
M(光重合性化合物):ジペンタエリスリトールヘキサアクリレート(DPHA)(日本化薬(株))
PI(光重合開始剤):1−[9−エチル−6−(2−メチルベンゾイル)−9H−カルバゾール−3−イル]−エタノン−1−(O−アセチルオキシム)(Irgacure OXE−02:Ciba社)
D1(添加剤1):ソルスパース5000(Lubrisol社)
D2(添加剤2):F554(DIC社)
S(溶剤):プロピレングリコールモノメチルエーテルアセテート(PGMEA)
5cm×5cmのガラス基板(コーニング社)を中性洗剤および水で洗浄後に乾燥した。前記ガラス基板上に、前記実施例および比較例で製造された着色感光性樹脂組成物それぞれを最終膜厚さが3.0μmとなるようにスピンコーティングをし、80〜120℃で前焼成し、1〜2分間乾燥して溶剤を除去した。その後、露光量25〜35mJ/cm2で露光してパターンを形成し、アルカリ水溶液を用いて非露光部を除去した。次に、200〜250℃で後焼成を10〜30分間行って、着色基板を製造した。
1.信頼性評価
前記のような基板の製造基準で、パターンなしに全面に黒色感光性樹脂が塗布されるように基板を作製する。これを3×3cmのサイズに裁断して、これをNMP溶媒に浸漬させた後、100℃で60分間熱を加えるようにする。この後、NMP溶媒のみを抽出して、NMP溶剤の溶出程度をUV−vis spectrometerを用いて吸光度を測定して300〜800nmの積分値で表す。具体的な評価基準は下記の通りであり、測定結果は下記表2に記載した。
[評価基準]
信頼性(NMP溶出信頼性):300〜800nm Abs
優秀◎:0.5以下
良好○:0.5超過〜1.0以下
不十分△:1.0超過〜1.2以下
悪化×:1.2超過
前記のような基板の製造基準で、パターンなしに全面に黒色感光性樹脂が塗布されるように作製した基板をもって光特性を評価する。UV−vis(UV−2550、Shimadzu社)を用いる。光特性の評価時、400〜650nmでは光学密度を意味し、700〜750nmおよび950nmでは近赤外線(Near−IR)領域で各波長別の測定値を確認し、硬化後の膜厚さが2.5μmで光学密度計(361T、X−rite社)を用いて510nmの中心波長における透過率を測定して、1μmの厚さに対する光学密度を求めた。具体的な評価基準は下記の通りであり、評価結果は下記表2に記載した。
[評価基準]
(1)光学密度
優秀◎:1.3以上
良好○:1.1以上〜1.3未満
不十分△:1.0以上〜1.1未満
悪化×:1.0未満
(2)750nmの透過率
優秀◎:10T%以下
良好○:10T%超過〜12T%以下
不十分△:12T%超過〜15T%以下
悪化×:15T%超過
(3)950nmの透過率
優秀◎:15T%以上
良好○:12T%以上〜15T%未満
不十分△:10T%以上〜12T%未満
悪化×:10T%未満
前記のような基板の製造基準で、パターンなしに全面に黒色感光性樹脂が塗布されるように基板を作製して色座標を測定した。Contrast Tester(CT−1、Tsubosak社)を用いてx、y座標値を測定した。具体的な評価基準は下記の通りであり、評価結果は下記表2に記載した。
[評価基準]
(1)x座標値
優秀◎:0.1以下
良好○:0.1超過〜0.2以下
不十分△:0.2超過〜0.4以下
悪化×:0.4超過
(2)y座標値
優秀◎:0.05以下
良好○:0.05超過〜0.15以下
不十分△:0.15超過〜0.25以下
悪化×:0.25超過
前記のような作製基準で、カラムスペーサパターンのある基板を作製した。前記作製された基板を、SNU(SIS−2000、SNU社)を用いて基準状態におけるパターンの厚さおよび高さを測定した。この後、硬度計(Nano−indenter HM500、Fisher社)を平面圧子を用いてパターンが1μm変形する地点まで2mN/secの速度で押圧し、1μm変形する地点で5秒間Holding Timeをもった。この後、SNUを用いてパターンの厚さおよび高さを測定し、前と後のパターンの厚さ変化で弾性回復率を測定した。具体的な評価基準は下記の通りであり、評価結果は下記表2に記載した。
[評価基準]
優秀◎:98%以上
良好○:96%以上〜98%未満
不十分△:94%以上〜96%未満
悪化×:94%未満
Claims (11)
- 着色剤、アルカリ可溶性樹脂、光重合性化合物、光重合開始剤、および溶剤を含む着色感光性樹脂組成物であって、
前記着色剤は、青色顔料およびオレンジ顔料を含み、
前記青色顔料は、C.I.ピグメントブルー16であり、
前記着色感光性樹脂組成物中の固形分の総重量に対して、着色剤18〜55重量%、アルカリ可溶性樹脂5〜60重量%、光重合性化合物5〜50重量%、および光重合開始剤0.1〜40重量%を含み、前記着色感光性樹脂組成物の総重量に対して、溶剤60〜90重量%を含む
ことを特徴とする着色感光性樹脂組成物。 - 前記オレンジ顔料は、C.I.ピグメントオレンジ46、62、64、68、72および77からなる群より選択される1種以上を含むことを特徴とする請求項1に記載の着色感光性樹脂組成物。
- 前記着色感光性樹脂組成物は、追加の着色剤としてバイオレット顔料をさらに含むことを特徴とする請求項1に記載の着色感光性樹脂組成物。
- 前記バイオレット顔料は、C.I.ピグメントバイオレット14、19、23、29、32、33、36および37からなる群より選択される1種以上を含むことを特徴とする請求項3に記載の着色感光性樹脂組成物。
- 前記着色感光性樹脂組成物は、追加の着色剤として黒色顔料をさらに含むことを特徴とする請求項1に記載の着色感光性樹脂組成物。
- 前記黒色顔料は、ラクタムブラック、アニリンブラック、ペリレンブラック、チタンブラック、およびカーボンブラックからなる群より選択される1種以上を含むことを特徴とする請求項5に記載の着色感光性樹脂組成物。
- 前記着色感光性樹脂組成物は、熱開始剤、硬化剤、密着促進剤、および界面活性剤からなる群より選択される1種以上の添加剤を追加的に含むことを特徴とする請求項1に記載の着色感光性樹脂組成物。
- 請求項1〜7のいずれか1項に記載の着色感光性樹脂組成物で製造されたパターン層。
- 前記パターン層は、カラムスペーサ、ブラックマトリックス、およびブラックカラムスペーサからなる群より選択される1種以上である、請求項8に記載のパターン層。
- 請求項8に記載のパターン層を含むカラーフィルタ。
- 請求項10に記載のカラーフィルタを含む表示装置。
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