JP6684480B2 - シリンダ駆動用マニホールド装置及びシリンダ駆動装置 - Google Patents
シリンダ駆動用マニホールド装置及びシリンダ駆動装置 Download PDFInfo
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/16—Servomotor systems without provision for follow-up action; Circuits therefor with two or more servomotors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
- F15B11/024—Systems essentially incorporating special features for controlling the speed or actuating force of an output member by means of differential connection of the servomotor lines, e.g. regenerative circuits
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/06—Servomotor systems without provision for follow-up action; Circuits therefor involving features specific to the use of a compressible medium, e.g. air, steam
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/06—Servomotor systems without provision for follow-up action; Circuits therefor involving features specific to the use of a compressible medium, e.g. air, steam
- F15B11/064—Servomotor systems without provision for follow-up action; Circuits therefor involving features specific to the use of a compressible medium, e.g. air, steam with devices for saving the compressible medium
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
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- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/021—Valves for interconnecting the fluid chambers of an actuator
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0814—Monoblock manifolds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0817—Multiblock manifolds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0832—Modular valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0832—Modular valves
- F15B13/0839—Stacked plate type valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0871—Channels for fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/008—Reduction of noise or vibration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K47/00—Means in valves for absorbing fluid energy
- F16K47/04—Means in valves for absorbing fluid energy for decreasing pressure or noise level, the throttle being incorporated in the closure member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B2013/002—Modular valves, i.e. consisting of an assembly of interchangeable components
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/305—Directional control characterised by the type of valves
- F15B2211/30505—Non-return valves, i.e. check valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/31—Directional control characterised by the positions of the valve element
- F15B2211/3122—Special positions other than the pump port being connected to working ports or the working ports being connected to the return line
- F15B2211/3133—Regenerative position connecting the working ports or connecting the working ports to the pump, e.g. for high-speed approach stroke
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/405—Flow control characterised by the type of flow control means or valve
- F15B2211/40515—Flow control characterised by the type of flow control means or valve with variable throttles or orifices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/405—Flow control characterised by the type of flow control means or valve
- F15B2211/40576—Assemblies of multiple valves
- F15B2211/40584—Assemblies of multiple valves the flow control means arranged in parallel with a check valve
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/40—Flow control
- F15B2211/415—Flow control characterised by the connections of the flow control means in the circuit
- F15B2211/41554—Flow control characterised by the connections of the flow control means in the circuit being connected to a return line and a directional control valve
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/86—Control during or prevention of abnormal conditions
- F15B2211/8616—Control during or prevention of abnormal conditions the abnormal condition being noise or vibration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/88—Control measures for saving energy
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/885—Control specific to the type of fluid, e.g. specific to magnetorheological fluid
- F15B2211/8855—Compressible fluids, e.g. specific to pneumatics
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
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- Analytical Chemistry (AREA)
- Fluid-Pressure Circuits (AREA)
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Description
12…シリンダ駆動装置 14…流体圧シリンダ
18…第1シリンダ室 20…第2シリンダ室
22…ピストン 28…切換弁
30…マニホールド 32…チェック弁
34…絞り弁 36…供給ポート
38…排出ポート 40…導入ポート
42…第1接続ポート 44…第2接続ポート
46…第3接続ポート 48…導出ポート
Claims (7)
- 複数の流体圧シリンダを駆動させるためのシリンダ駆動用マニホールド装置であって、
複数の流体圧シリンダの駆動に用いられる流体が流通する複数の孔が形成されたブロック状のマニホールドを備え、
前記マニホールドは、各前記流体圧シリンダのピストンによって区画された第1シリンダ室と第2シリンダ室とに交互に流体を供給するための複数の切換弁が装着可能に構成されており、
前記マニホールドの複数の前記孔には、複数のチェック弁と複数の絞り弁とが組み込まれている、ことを特徴とするシリンダ駆動用マニホールド装置。 - 請求項1記載のシリンダ駆動用マニホールド装置において、
前記マニホールドの複数の前記孔は、
各前記切換弁に流体を導く複数の導入ポートと、
各前記切換弁から流体が導かれる複数の導出ポートと、
各前記流体圧シリンダの前記第1シリンダ室と各前記切換弁とを互いに連通させるための複数の第1接続ポートと、
各前記流体圧シリンダの前記第2シリンダ室と各前記切換弁とを互いに連通させるための複数の第2接続ポートと、
各前記第1接続ポートと各前記切換弁とを互いに繋ぐ複数の第3接続ポートと、を含み、
各前記第3接続ポートには、前記第1接続ポートから前記切換弁に向かう方向の流体の流れを許可するとともに前記切換弁から前記第1接続ポートに向かう方向の流体の流れを阻止する前記チェック弁が設けられ、
各前記導出ポートには、前記絞り弁が設けられ、
各前記切換弁は、前記導入ポート及び前記第1接続ポートの間、前記第1接続ポート及び前記導出ポートの間、前記導出ポート及び前記第2接続ポートの間、前記第2接続ポート及び前記第3接続ポートの間のそれぞれを連通状態と遮断状態とに切り換え可能であり、
前記切換弁の第1位置において、前記導入ポートと前記第1接続ポートとが互いに連通するとともに前記導出ポートと前記第2接続ポートとが互いに連通し、且つ前記第1接続ポートと前記導出ポートとの連通が遮断されるとともに前記第2接続ポートと前記第3接続ポートとの連通が遮断され、
前記切換弁の第2位置において、前記第1接続ポートと前記導出ポートとが互いに連通するとともに前記第2接続ポートと前記第3接続ポートとが互いに連通し、且つ前記導入ポートと前記第1接続ポートとの連通が遮断されるとともに前記導出ポートと前記第2接続ポートとの連通が遮断される、
ことを特徴とするシリンダ駆動用マニホールド装置。 - 請求項2記載のシリンダ駆動用マニホールド装置において、
各前記第1接続ポート及び各前記第3接続ポートは、前記第1接続ポートのうち前記第1シリンダ室に連通する配管が接続可能なコネクタが装着可能な開口部から前記チェック弁までの流体流路が直線状に延在するように形成されている、
ことを特徴とするシリンダ駆動用マニホールド装置。 - 請求項2又は3に記載のシリンダ駆動用マニホールド装置において、
各前記絞り弁は、各前記チェック弁よりも前記マニホールドにおける複数の前記切換弁の装着部位に近い箇所に設けられた可変絞り弁である、
ことを特徴とするシリンダ駆動用マニホールド装置。 - 請求項2〜4のいずれか1項に記載のシリンダ駆動用マニホールド装置において、
前記マニホールドには、各前記導入ポートに連通して流体供給源からの流体が供給される1つの供給ポートが形成されている、
ことを特徴とするシリンダ駆動用マニホールド装置。 - 請求項2〜5のいずれか1項に記載のシリンダ駆動用マニホールド装置において、
前記マニホールドには、各前記導出ポートに連通して前記マニホールドの外部に流体を排出するための1つの排出ポートが形成され、
前記排出ポートには、流体の排出音を低減するための1つのサイレンサが設けられている、
ことを特徴とするシリンダ駆動用マニホールド装置。 - 請求項1〜6のいずれか1項に記載の前記シリンダ駆動用マニホールド装置と、
複数の前記切換弁と、を備える、
ことを特徴とするシリンダ駆動装置。
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017098128A JP6684480B2 (ja) | 2017-05-17 | 2017-05-17 | シリンダ駆動用マニホールド装置及びシリンダ駆動装置 |
CN201880032631.8A CN110651145B (zh) | 2017-05-17 | 2018-04-02 | 缸驱动用歧管装置及缸驱动装置 |
PCT/JP2018/014058 WO2018211837A1 (ja) | 2017-05-17 | 2018-04-02 | シリンダ駆動用マニホールド装置及びシリンダ駆動装置 |
RU2019141810A RU2739850C9 (ru) | 2017-05-17 | 2018-04-02 | Манифольдное устройство для привода цилиндров и устройство привода цилиндров |
BR112019023986A BR112019023986A2 (pt) | 2017-05-17 | 2018-04-02 | dispositivo de coletor de acionamento de cilindro e aparelho de acionamento de cilindro |
KR1020197037119A KR102266451B1 (ko) | 2017-05-17 | 2018-04-02 | 실린더 구동용 매니폴드 장치 및 실린더 구동장치 |
MX2019013588A MX2019013588A (es) | 2017-05-17 | 2018-04-02 | Dispositivo colector de accionamiento de cilindro y aparato de accionamiento de cilindro. |
US16/614,194 US11181127B2 (en) | 2017-05-17 | 2018-04-02 | Cylinder drive manifold device and cylinder drive apparatus |
EP18802075.4A EP3627018B1 (en) | 2017-05-17 | 2018-04-02 | Cylinder drive apparatus with a cylinder drive manifold device |
TW107112259A TWI666388B (zh) | 2017-05-17 | 2018-04-10 | 工作缸驅動用分歧總管裝置及工作缸驅動裝置 |
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JP2017098128A JP6684480B2 (ja) | 2017-05-17 | 2017-05-17 | シリンダ駆動用マニホールド装置及びシリンダ駆動装置 |
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US (1) | US11181127B2 (ja) |
EP (1) | EP3627018B1 (ja) |
JP (1) | JP6684480B2 (ja) |
KR (1) | KR102266451B1 (ja) |
CN (1) | CN110651145B (ja) |
BR (1) | BR112019023986A2 (ja) |
MX (1) | MX2019013588A (ja) |
RU (1) | RU2739850C9 (ja) |
TW (1) | TWI666388B (ja) |
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DE102019121433B4 (de) * | 2019-08-08 | 2022-12-29 | SMC Deutschland GmbH | Fluidrückführvorrichtung für einen doppeltwirkenden Zylinder und Verfahren zum Betreiben eines solchen Zylinders |
TW202141165A (zh) | 2020-03-27 | 2021-11-01 | 美商應用材料股份有限公司 | 極紫外光遮罩吸收材料 |
US11300871B2 (en) * | 2020-04-29 | 2022-04-12 | Applied Materials, Inc. | Extreme ultraviolet mask absorber materials |
TW202202641A (zh) | 2020-07-13 | 2022-01-16 | 美商應用材料股份有限公司 | 極紫外線遮罩吸收劑材料 |
Family Cites Families (17)
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SU1000617A1 (ru) * | 1981-06-30 | 1983-02-28 | Предприятие П/Я Р-6266 | Самореверсирующийс пневмо(гидро)привод |
JPH0743447Y2 (ja) * | 1988-10-14 | 1995-10-09 | 株式会社巴技術研究所 | 弁の操作速度制御装置 |
JPH02118202A (ja) * | 1988-10-27 | 1990-05-02 | Nippon Pneumatic Mfg Co Ltd | 分岐回路ユニット |
DE4232628A1 (de) | 1992-09-29 | 1994-03-31 | Herion Werke Kg | Wegeventil |
JPH10132104A (ja) * | 1996-10-28 | 1998-05-22 | Smc Corp | パイロット式3ポート切換弁 |
JP3705730B2 (ja) | 2000-04-28 | 2005-10-12 | Smc株式会社 | 空気圧シリンダの排気回収装置 |
US6834669B2 (en) * | 2001-11-12 | 2004-12-28 | Otto Herman Seyfarth | Integrated pneumatic manifold |
KR100522056B1 (ko) | 2002-03-15 | 2005-10-18 | 김명환 | 서보액튜에이터 메니폴드 |
US6890200B1 (en) * | 2003-12-04 | 2005-05-10 | Hon Hai Precision Ind. Co., Ltd. | Floatable panel mount cable assembly |
JP4378627B2 (ja) | 2004-03-30 | 2009-12-09 | Smc株式会社 | エアサーボシリンダ |
DE202005016766U1 (de) * | 2005-10-26 | 2006-01-12 | Festo Ag & Co. | Ventilbatterie |
US20090094971A1 (en) * | 2007-09-21 | 2009-04-16 | Dantas Roy J | System and apparatus to synchronize a plurality of hydraulically actuated components |
US8464754B2 (en) * | 2008-06-02 | 2013-06-18 | Eaton Corporation | Valve manifold |
CN103917787B (zh) | 2011-11-02 | 2017-05-24 | Smc株式会社 | 流量控制设备 |
JP2013104518A (ja) | 2011-11-16 | 2013-05-30 | Kawasaki Heavy Ind Ltd | クッションバルブ装置、及びそれを備えるマルチクッションバルブユニット |
RU141437U8 (ru) * | 2013-03-22 | 2014-09-20 | Общество с ограниченной ответственностью "Браво Моторс" | Гидроцилиндр трансформации |
JP6213342B2 (ja) * | 2014-03-28 | 2017-10-18 | 三菱マテリアル株式会社 | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 |
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US20200149560A1 (en) | 2020-05-14 |
CN110651145B (zh) | 2021-07-16 |
CN110651145A (zh) | 2020-01-03 |
TW201901041A (zh) | 2019-01-01 |
EP3627018A1 (en) | 2020-03-25 |
WO2018211837A1 (ja) | 2018-11-22 |
KR20200007041A (ko) | 2020-01-21 |
MX2019013588A (es) | 2020-01-13 |
JP2018194083A (ja) | 2018-12-06 |
BR112019023986A2 (pt) | 2020-06-09 |
EP3627018B1 (en) | 2022-12-21 |
RU2739850C9 (ru) | 2021-10-26 |
KR102266451B1 (ko) | 2021-06-17 |
RU2739850C1 (ru) | 2020-12-29 |
TWI666388B (zh) | 2019-07-21 |
US11181127B2 (en) | 2021-11-23 |
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