JP6681638B2 - 金型の製造方法 - Google Patents
金型の製造方法 Download PDFInfo
- Publication number
- JP6681638B2 JP6681638B2 JP2019557645A JP2019557645A JP6681638B2 JP 6681638 B2 JP6681638 B2 JP 6681638B2 JP 2019557645 A JP2019557645 A JP 2019557645A JP 2019557645 A JP2019557645 A JP 2019557645A JP 6681638 B2 JP6681638 B2 JP 6681638B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- mold
- manufacturing
- shape
- optical element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 55
- 230000003287 optical effect Effects 0.000 claims description 80
- 239000000758 substrate Substances 0.000 claims description 39
- 238000005520 cutting process Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 22
- 230000000737 periodic effect Effects 0.000 claims description 21
- 238000005530 etching Methods 0.000 claims description 17
- 238000003754 machining Methods 0.000 claims description 17
- 229910003460 diamond Inorganic materials 0.000 claims description 16
- 239000010432 diamond Substances 0.000 claims description 16
- 238000000059 patterning Methods 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 16
- 239000002184 metal Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Description
本実施形態による金型によって製造された光学素子の、第2の領域に対応する部分の断面は周期的な構造を示すので光線の回折、拡散などを生じさせることができる。
λ=546nm, d=2000nm
Claims (11)
- 金型の製造方法であって、
レジストパターニング及びエッチングによって、基板の表面の第1の領域に、2マイクロメータ以上の幅のほぼ平坦な底面を有する第1の溝を形成するステップと、
該第1の溝を形成するステップの後に、該基板の表面の該第1の領域を囲む第2の領域を、該底面と平行ではない面から構成される形状に機械加工するステップとを含み、1マイクロメータ以下のコーナーRで該第2の領域の該形状を形成する金型の製造方法。 - 金型が光学素子用の金型である請求項1に記載の金型の製造方法。
- 請求項2に記載の金型の製造方法によって製造した金型を使用する光学素子の製造方法。
- 該第1の溝の深さが30マイクロメータ以下であり、該第2の領域の該形状の深さが20マイクロメータ以下である請求項1に記載の金型の製造方法。
- 該第2の領域の該形状が周期的な構造を含み、該周期的な構造の周期が該第1の溝の底面の幅よりも小さい請求項1に記載の金型の製造方法。
- 該第2の領域の該形状が、長手方向がほぼ同じ方向となるように配列された複数の第2の溝であり、該複数の第2の溝の長手方向に垂直な断面が周期的な構造を示す請求項5に記載の金型の製造方法。
- 該第2の領域の該形状が回折格子に対応する請求項1に記載の金型の製造方法。
- 該第2の領域の該形状がマイクロプリズムアレイに対応する請求項1に記載の金型の製造方法。
- 該第2の領域の該形状がマイクロレンズアレイに対応する請求項1に記載の金型の製造方法。
- 該第2の領域の該形状を引き切り加工によって形成する請求項1に記載の金型の製造方法。
- 該第2の領域の該形状を、ダイヤモンド切削工具を使用して形成する請求項1に記載の金型の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862633186P | 2018-02-21 | 2018-02-21 | |
US62/633,186 | 2018-02-21 | ||
PCT/JP2019/005312 WO2019163630A1 (ja) | 2018-02-21 | 2019-02-14 | 金型の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019163630A1 JPWO2019163630A1 (ja) | 2020-02-27 |
JP6681638B2 true JP6681638B2 (ja) | 2020-04-15 |
Family
ID=67687559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019557645A Active JP6681638B2 (ja) | 2018-02-21 | 2019-02-14 | 金型の製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6681638B2 (ja) |
CN (1) | CN111741839B (ja) |
DE (1) | DE112019000913T5 (ja) |
WO (1) | WO2019163630A1 (ja) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003322707A (ja) * | 2000-02-10 | 2003-11-14 | Matsushita Electric Ind Co Ltd | レンズおよびその製造方法、並びにレンズを用いた光学装置 |
US7014316B2 (en) * | 2000-02-10 | 2006-03-21 | Matsushita Electric Industrial Co., Ltd. | Optical lens with marking and manufacturing method thereof |
US7257877B2 (en) * | 2003-06-30 | 2007-08-21 | Nidec Sankyo Corporation | Grating forming method and manufacturing method for master member for manufacturing molding die |
JP2008159274A (ja) * | 2006-12-20 | 2008-07-10 | Seiko Epson Corp | 導光板、導光板成形用金型、導光板成型用金型の製造方法及び導光板の製造方法 |
JP2007214001A (ja) * | 2006-02-10 | 2007-08-23 | Seiko Epson Corp | 導光板、導光板成形用金型、導光板成形用金型の製造方法および導光板の製造方法 |
JP4938365B2 (ja) * | 2006-06-26 | 2012-05-23 | パナソニック株式会社 | カーボン金型、およびその製造方法 |
JP2008114345A (ja) * | 2006-11-07 | 2008-05-22 | Toppan Printing Co Ltd | 微細で鋭利な針状構造の規則配列体、及びその複製物の製造方法 |
JP2012203094A (ja) * | 2011-03-24 | 2012-10-22 | Toppan Printing Co Ltd | 照明光路制御用光学シート及びそのシートの製造方法並びにディスプレイ用バックライト・ユニット並びにディスプレイ |
WO2014076983A1 (ja) * | 2012-11-16 | 2014-05-22 | ナルックス株式会社 | 反射防止構造用金型製造方法、及び反射防止構造用金型としての使用方法 |
JP2018176564A (ja) * | 2017-04-14 | 2018-11-15 | キヤノン株式会社 | マークの表示方法およびマークを有する製品 |
-
2019
- 2019-02-14 WO PCT/JP2019/005312 patent/WO2019163630A1/ja active Application Filing
- 2019-02-14 DE DE112019000913.3T patent/DE112019000913T5/de active Pending
- 2019-02-14 CN CN201980013917.6A patent/CN111741839B/zh active Active
- 2019-02-14 JP JP2019557645A patent/JP6681638B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
DE112019000913T5 (de) | 2020-11-12 |
WO2019163630A1 (ja) | 2019-08-29 |
JPWO2019163630A1 (ja) | 2020-02-27 |
CN111741839B (zh) | 2022-08-19 |
CN111741839A (zh) | 2020-10-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7561333B2 (en) | Method for manufacturing mold | |
TWI440833B (zh) | 混合式繞射光柵、模具及繞射光柵及其模具的製造方法 | |
US4012843A (en) | Concave diffraction grating and a manufacturing method thereof | |
GB2509536A (en) | Diffraction grating | |
JP2012145908A (ja) | 回折格子の製造方法 | |
US9233512B2 (en) | Manufacturing method of blazed diffraction grating and mold for making a blazed difraction grating | |
US20180050508A1 (en) | Methods for forming partial retroreflector tooling and sheeting and devices | |
US7257877B2 (en) | Grating forming method and manufacturing method for master member for manufacturing molding die | |
JP3268929B2 (ja) | 光学素子の製造方法 | |
JP6681638B2 (ja) | 金型の製造方法 | |
JP2014002294A (ja) | 回折格子の製造方法 | |
US20140376095A1 (en) | Diffusing plate having microlens array | |
JP6661164B2 (ja) | 微細な溝を形成した金型、及びその製造方法 | |
US11186512B2 (en) | Mold manufacturing method | |
JP2005037868A (ja) | 反射防止面の形成方法、反射防止部材形成用金型の製造方法、金型、反射防止部材、金型製造用のマスター部材の製造方法 | |
CN112285815A (zh) | 衍射器件、分光装置和衍射器件的制造方法 | |
US20150177428A1 (en) | Diffraction grating and diffraction grating producing method | |
JP5305670B2 (ja) | 光学部品及び光学部品の製造方法 | |
JPH10332918A (ja) | レリーフ型回折光学素子、およびレリーフ型回折光学素子製造用の型 | |
US20020144576A1 (en) | Micro-cutting tool and production method for 3-dimensional microstructures | |
JP6248240B1 (ja) | 成形型及び光学素子の製造方法ならびに光学素子 | |
JPH08190135A (ja) | 焦点板用金型および焦点板 | |
CN109061781B (zh) | 一种光刻二元谐衍射Alvarez透镜变焦系统的方法 | |
JP3326333B2 (ja) | 位相型回折素子およびそのグレーティングパターン製造方法 | |
JP2009151257A (ja) | 傾斜露光リソグラフシステム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191021 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191021 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20191021 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20191106 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191217 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200114 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200204 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200217 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200302 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200316 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6681638 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |