JP6681471B2 - 半導体デバイスのゲート・スタック作製方法および半導体デバイス - Google Patents
半導体デバイスのゲート・スタック作製方法および半導体デバイス Download PDFInfo
- Publication number
- JP6681471B2 JP6681471B2 JP2018535118A JP2018535118A JP6681471B2 JP 6681471 B2 JP6681471 B2 JP 6681471B2 JP 2018535118 A JP2018535118 A JP 2018535118A JP 2018535118 A JP2018535118 A JP 2018535118A JP 6681471 B2 JP6681471 B2 JP 6681471B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gate stack
- semiconductor device
- gate
- nitride layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 80
- 239000004065 semiconductor Substances 0.000 title claims description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 150000004767 nitrides Chemical class 0.000 claims description 62
- 229910052751 metal Inorganic materials 0.000 claims description 48
- 239000002184 metal Substances 0.000 claims description 48
- 230000002000 scavenging effect Effects 0.000 claims description 46
- 238000000151 deposition Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 26
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 23
- 229910010041 TiAlC Inorganic materials 0.000 claims description 16
- 229910010038 TiAl Inorganic materials 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 230000005669 field effect Effects 0.000 claims description 11
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 239000007772 electrode material Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 3
- 230000008569 process Effects 0.000 description 29
- 230000008021 deposition Effects 0.000 description 24
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 17
- 229910052760 oxygen Inorganic materials 0.000 description 17
- 239000001301 oxygen Substances 0.000 description 17
- 230000004888 barrier function Effects 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 15
- 238000005530 etching Methods 0.000 description 11
- 238000000231 atomic layer deposition Methods 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 229910052719 titanium Inorganic materials 0.000 description 8
- 238000001459 lithography Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- -1 TiN and TaN Chemical class 0.000 description 1
- AXQKVSDUCKWEKE-UHFFFAOYSA-N [C].[Ge].[Si] Chemical compound [C].[Ge].[Si] AXQKVSDUCKWEKE-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823842—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823821—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0924—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors including transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28185—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation with a treatment, e.g. annealing, after the formation of the gate insulator and before the formation of the definitive gate conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28194—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation by deposition, e.g. evaporation, ALD, CVD, sputtering, laser deposition
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Description
Claims (16)
- 半導体デバイスのゲート・スタックを作製する方法であって、
前記半導体デバイスのチャネル領域の上方に第1の誘電体層を形成することと、
前記第1の誘電体層の上方に第1の窒化物層を形成することと、
前記第1の窒化物層の上方に第1のゲート金属層を形成することと、
前記第1のゲート金属層の上方にキャップ層を形成することと、
前記ゲート・スタックのp型電界効果トランジスタ(pFET)領域における前記第1の窒化物層の一部を露出させるために、前記キャップ層と前記第1のゲート金属層との一部を除去することと、
前記第1の窒化物層と前記キャップ層との上にスカベンジング層を堆積させることと、
前記スカベンジング層上に第2の窒化物層を堆積させることと、
前記第2の窒化物層上にゲート電極材料を堆積させることと
を含む方法。 - 前記第1の誘電体層は、酸化物材料を含む、請求項1に記載の方法。
- 前記第1のゲート金属層はTiAlCを含む、請求項1又は2に記載の方法。
- 前記第1のゲート金属層はTiAlを含む、請求項1又は2に記載の方法。
- 前記第1の窒化物層はTiNを含む、請求項1乃至4のいずれかに記載の方法。
- 前記第1の窒化物層はTaNを含む、請求項1乃至4のいずれかに記載の方法。
- 前記第2の窒化物層はTiNを含む、請求項1乃至6のいずれかに記載の方法。
- 前記ゲート電極材料はWを含む、請求項1乃至7のいずれかに記載の方法。
- 前記ゲート・スタックを形成する前に、前記ゲート・スタックに隣接するソース/ドレイン領域を形成することをさらに含む、請求項1乃至8のいずれかに記載の方法。
- 前記ゲート・スタックを形成する前に、
前記半導体デバイスの前記チャネル領域の上方に犠牲ゲート・スタックを形成することと、
前記犠牲ゲート・スタックの側壁に沿ってスペーサを形成することと、
前記犠牲ゲート・スタックに隣接して前記半導体デバイスのソース/ドレイン領域を形成することと、
前記スペーサの周囲に絶縁材料の層を形成することと、
前記半導体デバイスの前記チャネル領域を露出させるために前記犠牲ゲート・スタックを除去することと
をさらに含む、請求項1乃至9のいずれかに記載の方法。 - 半導体デバイスであって、前記半導体デバイスのチャネル領域の上方に配置されたゲート・スタックを含み、前記ゲート・スタックはn型電界効果トランジスタ(nFET)部を含み、
前記nFET部は、
基板上に配置された誘電体層と、
前記誘電体層上に配置された第1の窒化物層と、
前記第1の窒化物層上に配置された第1のゲート金属層と、
前記第1のゲート金属層上に配置されたキャップ層と、
前記キャップ層上に配置されたスカベンジング層と、
前記スカベンジング層上に配置された第2の窒化物層と、
前記第2の窒化物層上に配置されたゲート電極と
を含む、半導体デバイス。 - p型電界効果トランジスタ(pFET)部をさらに含み、前記pFET部は、
前記基板上に配置された前記誘電体層と、
前記誘電体層上に配置された前記第1の窒化物層と、
前記第1の窒化物層上に配置された前記スカベンジング層と、
前記スカベンジング層上に配置された前記第2の窒化物層と、
前記第2の窒化物層上に配置された前記ゲート電極と
を含む、請求項11に記載の半導体デバイス。 - 前記誘電体層は酸化物材料を含む、請求項11又は12に記載の半導体デバイス。
- 前記ゲート電極はWを含む、請求項11乃至13のいずれかに記載の半導体デバイス。
- 前記ゲート・スタックに隣接して配置されたソース/ドレイン領域をさらに含む、請求項11乃至14のいずれかに記載の半導体デバイス。
- 前記半導体デバイスの前記チャネル領域は、前記基板上に配置された半導体フィンによって部分的に画定される、請求項11乃至15のいずれかに記載の半導体デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/996,572 US9859169B2 (en) | 2016-01-15 | 2016-01-15 | Field effect transistor stack with tunable work function |
US14/996,572 | 2016-01-15 | ||
PCT/IB2016/057033 WO2017122066A1 (en) | 2016-01-15 | 2016-11-22 | Field effect transistor stack with tunable work function |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019503585A JP2019503585A (ja) | 2019-02-07 |
JP6681471B2 true JP6681471B2 (ja) | 2020-04-15 |
Family
ID=59310867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018535118A Active JP6681471B2 (ja) | 2016-01-15 | 2016-11-22 | 半導体デバイスのゲート・スタック作製方法および半導体デバイス |
Country Status (6)
Country | Link |
---|---|
US (3) | US9859169B2 (ja) |
JP (1) | JP6681471B2 (ja) |
CN (1) | CN108475693B (ja) |
DE (1) | DE112016004645T5 (ja) |
GB (1) | GB2562945B (ja) |
WO (1) | WO2017122066A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9859169B2 (en) | 2016-01-15 | 2018-01-02 | International Business Machines Corporation | Field effect transistor stack with tunable work function |
TWI713117B (zh) * | 2017-01-05 | 2020-12-11 | 聯華電子股份有限公司 | 製作金屬閘極結構的方法 |
CN112635401A (zh) * | 2019-09-24 | 2021-04-09 | 长鑫存储技术有限公司 | 晶体管的形成方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130032886A1 (en) | 2011-08-01 | 2013-02-07 | International Business Machines Corporation | Low Threshold Voltage And Inversion Oxide Thickness Scaling For A High-K Metal Gate P-Type MOSFET |
US8114739B2 (en) * | 2009-09-28 | 2012-02-14 | Freescale Semiconductor, Inc. | Semiconductor device with oxygen-diffusion barrier layer and method for fabricating same |
US8440520B2 (en) * | 2011-08-23 | 2013-05-14 | Tokyo Electron Limited | Diffused cap layers for modifying high-k gate dielectrics and interface layers |
US9337303B2 (en) | 2011-09-24 | 2016-05-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Metal gate stack having TiAICN as work function layer and/or blocking/wetting layer |
US8716088B2 (en) | 2012-06-27 | 2014-05-06 | International Business Machines Corporation | Scavenging metal stack for a high-K gate dielectric |
KR101913434B1 (ko) * | 2012-06-29 | 2018-10-30 | 에스케이하이닉스 주식회사 | 반도체 소자 및 그 제조 방법 |
US9093558B2 (en) * | 2012-08-24 | 2015-07-28 | International Business Machines Corporation | Integration of multiple threshold voltage devices for complementary metal oxide semiconductor using full metal gate |
US9496143B2 (en) | 2012-11-06 | 2016-11-15 | Globalfoundries Inc. | Metal gate structure for midgap semiconductor device and method of making same |
US8778789B2 (en) | 2012-11-30 | 2014-07-15 | GlobalFoundries, Inc. | Methods for fabricating integrated circuits having low resistance metal gate structures |
US8932923B2 (en) | 2013-02-19 | 2015-01-13 | Globalfoundries Inc. | Semiconductor gate structure for threshold voltage modulation and method of making same |
US9190409B2 (en) | 2013-02-25 | 2015-11-17 | Renesas Electronics Corporation | Replacement metal gate transistor with controlled threshold voltage |
US8802527B1 (en) | 2013-03-15 | 2014-08-12 | International Business Machines Corporation | Gate electrode optimized for low voltage operation |
US9012319B1 (en) * | 2013-11-01 | 2015-04-21 | Globalfoundries Inc. | Methods of forming gate structures with multiple work functions and the resulting products |
KR102190673B1 (ko) | 2014-03-12 | 2020-12-14 | 삼성전자주식회사 | 중간갭 일함수 금속 게이트 전극을 갖는 반도체 소자 |
US10109534B2 (en) | 2014-03-14 | 2018-10-23 | Applied Materials, Inc. | Multi-threshold voltage (Vt) workfunction metal by selective atomic layer deposition (ALD) |
TWI653762B (zh) * | 2014-10-08 | 2019-03-11 | 聯華電子股份有限公司 | 具有金屬閘極之半導體元件之製作方法 |
KR102358318B1 (ko) * | 2015-06-04 | 2022-02-04 | 삼성전자주식회사 | 멀티 일함수 게이트 패턴들을 갖는 반도체 소자 |
US10458018B2 (en) * | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US9859169B2 (en) | 2016-01-15 | 2018-01-02 | International Business Machines Corporation | Field effect transistor stack with tunable work function |
-
2016
- 2016-01-15 US US14/996,572 patent/US9859169B2/en active Active
- 2016-11-22 CN CN201680078837.5A patent/CN108475693B/zh active Active
- 2016-11-22 DE DE112016004645.6T patent/DE112016004645T5/de not_active Ceased
- 2016-11-22 WO PCT/IB2016/057033 patent/WO2017122066A1/en active Application Filing
- 2016-11-22 JP JP2018535118A patent/JP6681471B2/ja active Active
- 2016-11-22 GB GB1812599.7A patent/GB2562945B/en active Active
-
2017
- 2017-10-27 US US15/795,413 patent/US10249543B2/en active Active
- 2017-10-27 US US15/795,414 patent/US10312157B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20180047640A1 (en) | 2018-02-15 |
GB201812599D0 (en) | 2018-09-19 |
US10312157B2 (en) | 2019-06-04 |
US9859169B2 (en) | 2018-01-02 |
DE112016004645T5 (de) | 2018-06-28 |
CN108475693A (zh) | 2018-08-31 |
GB2562945B (en) | 2020-08-12 |
GB2562945A (en) | 2018-11-28 |
JP2019503585A (ja) | 2019-02-07 |
WO2017122066A1 (en) | 2017-07-20 |
US20180047639A1 (en) | 2018-02-15 |
CN108475693B (zh) | 2021-12-24 |
US10249543B2 (en) | 2019-04-02 |
US20170207131A1 (en) | 2017-07-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9640436B1 (en) | MOSFET with asymmetric self-aligned contact | |
US7763510B1 (en) | Method for PFET enhancement | |
US9431399B1 (en) | Method for forming merged contact for semiconductor device | |
US11031301B2 (en) | Gate formation scheme for n-type and p-type transistors having separately tuned threshold voltages | |
US9773709B2 (en) | Forming CMOSFET structures with different contact liners | |
US9640536B2 (en) | Method to make dual material finFET on same substrate | |
US9515141B1 (en) | FinFET device with channel strain | |
JP6930979B2 (ja) | 半導体デバイスのゲート・スタック作製方法および半導体デバイス | |
JP6681471B2 (ja) | 半導体デバイスのゲート・スタック作製方法および半導体デバイス | |
JP6817312B2 (ja) | 半導体デバイスのゲート・スタック作製方法および半導体デバイス | |
US9793161B2 (en) | Methods for contact formation for 10 nanometers and beyond with minimal mask counts | |
US10079182B2 (en) | Field effect transistor gate stack | |
CN107437527B (zh) | 使用硅化物的通过接触部 | |
US11322602B2 (en) | Vertical field-effect transistor (VFET) devices and methods of forming the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190419 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200207 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200218 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200302 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200317 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200323 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6681471 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |