JP6678612B2 - X-ray inspection equipment - Google Patents

Description

  The present invention is directed to irradiating an X-ray generated by an X-ray generator to an inspection object such as meat, fish, processed food, and a pharmaceutical, and detecting the X-ray transmitted through the inspection object by an X-ray detector. The present invention relates to an X-ray inspection apparatus for inspecting the inspection object for the presence or absence of a foreign substance, a defect, and the like.

  2. Description of the Related Art X-ray inspection apparatuses have conventionally been used to detect the presence or absence of foreign matter mixed into an inspection object such as food. The X-ray inspection apparatus irradiates the inspected object with X-rays, and detects the presence or absence of a foreign substance, a defect, etc. in the inspected object from an X-ray image obtained according to an amount of X-ray transmitted through the inspected object. Has been inspected.

  As this type of conventional X-ray inspection apparatus, the one described in Patent Document 1 is known. In the apparatus described in Patent Document 1, an X-ray generator and an X-ray detector are arranged to face each other so as to straddle a conveying path on a conveyor in a width direction. X-rays are radiated sideways.

JP 2001-272357A

  Here, as a lateral irradiation type X-ray inspection apparatus as described in Patent Document 1, there is a built-in type X-ray inspection apparatus that is not provided with a conveyor but is used by being incorporated into a conveyor of a production facility, This built-in type X-ray inspection apparatus is often used.

  The built-in X-ray inspection device is used by inspection workers during product inspection after the X-ray generator and X-ray detector have been adjusted to the optimum position with respect to the conveyor by the installation worker when installed in production equipment. Can be The optimum positions of the X-ray generator and the X-ray detector are such that the X-ray image obtained by irradiating the inspection object on the conveyor with X-rays does not show the conveyor and also shows the entire inspection object. Position. By arranging the X-ray generator and the X-ray detector at the optimum positions, the conveyor does not appear in the X-ray image and the inspection accuracy is prevented from being reduced due to erroneous detection or the like.

  However, in the conventional X-ray inspection apparatus, in order to arrange the X-ray generator and the X-ray detector at the optimum positions, the position is determined with high accuracy in pixel units obtained from each detection element of the X-ray detector. It is necessary to make adjustments, and it is not easy to completely adjust to the optimum position or to always maintain the optimum position.Therefore, it is not possible to completely eliminate the cause of erroneous detection, and there is a possibility that the inspection accuracy may be reduced. Was.

  Therefore, even when the X-ray generator and the X-ray detector deviate from the optimum positions, it is required to prevent the inspection accuracy from being deteriorated due to the conveyor being reflected in the X-ray image. Was.

  Accordingly, the present invention has been made to solve the above-described conventional problems, and an X-ray inspection apparatus capable of preventing a decrease in inspection accuracy due to a conveyor being reflected in an X-ray image. The purpose is to provide.

An X-ray inspection apparatus according to the present invention includes an X-ray generator that generates X-rays, and an X-ray detector that detects X-rays, and a conveyor that forms a transport path through which a test object passes in a horizontal direction. An X-ray inspection apparatus in which the X-ray generator and the X-ray detector are arranged so that the X-ray detector detects the height direction from the conveyor surface of the conveyor, An image processing unit that performs image processing on an X-ray image based on the X-rays detected by the X-ray detector, and a specific part detection unit that detects a predetermined specific part of the inspection object in the X-ray image the region from the specific portion of the specific portion detecting section detects to a predetermined length of the height direction, the inspection area is inspected, the image processing unit in the examination zone is conducted image processing And inspecting the inspection object.

  With this configuration, it is possible to automatically set a region where only the inspection object is reflected in the X-ray image and the conveyor is not reflected as the inspection region, and the inspection can be performed only on the inspection region. For this reason, erroneous detection due to the conveyor being reflected in the X-ray image can be prevented. As a result, it is possible to prevent the inspection accuracy from being lowered due to the conveyor being reflected in the X-ray image.

  In the X-ray inspection apparatus according to the present invention, the specific part detection unit detects an upper end surface of the inspection object in the X-ray image as the specific part, and the lower part from the specific part detected by the specific part detection unit. The inspection is performed by using an area up to a predetermined length as the inspection area.

  With this configuration, by setting the upper end surface of the inspection object W as a specific portion, only one length value needs to be set as the set value, so that the set value setting operation can be simplified, and the setting operation error Can be prevented.

  In the X-ray inspection apparatus according to the present invention, the specific part detection unit detects a part lower than an upper end surface of the inspection object in the X-ray image as the specific part, and the specific part detection unit detects the part. An inspection is performed on a region from a specific portion to a first predetermined length downward and a second predetermined length upward, as the inspection region.

  In this X-ray inspection apparatus, due to the relative position of the X-ray generator, the conveyor, and the X-ray detector, the inclination angle at which the X-ray passes through the inspection object increases as the distance from the transport surface of the conveyor increases. Although the image of the X-ray is easily blurred, the error due to the blur of the X-ray image can be obtained even when the height of the inspection object is high, for example, by setting the position close to the conveying surface of the conveyor as the specific position as described above. And the inspection area and the non-inspection area can be accurately separated.

  In the X-ray inspection apparatus according to the present invention, the specific part detection unit detects the specific part based on an outer shape of the inspection object in the X-ray image.

  With this configuration, when it is easy to detect a specific portion based on the external shape, the specific portion can be reliably detected.

  In the X-ray inspection apparatus according to the present invention, the specific part detection unit detects the specific part based on luminance of the inspection object in the X-ray image.

  With this configuration, when it is easy to detect the specific part based on the luminance, the specific part can be reliably detected.

  The present invention can provide an X-ray inspection apparatus that can prevent a decrease in inspection accuracy due to a conveyor being reflected in an X-ray image.

It is a perspective view of the X-ray inspection device concerning one embodiment of the present invention. It is a sectional view in a section which intersects perpendicularly with the conveyance direction of the X-ray inspection device concerning one embodiment of the present invention. 4 is a flowchart illustrating an operation in an inspection mode of the X-ray inspection apparatus according to one embodiment of the present invention. FIG. 3 is a diagram showing an example in which an inspection area is set based on an upper end surface of an inspection object in an inspection mode of the X-ray inspection apparatus according to one embodiment of the present invention. FIG. 4 is a diagram showing an example in which an inspection area is set based on a shoulder of an inspection object in an inspection mode of the X-ray inspection apparatus according to one embodiment of the present invention. FIG. 3 is a diagram showing an example in which an inspection area is set based on the upper end surface of the content of the inspection object in the inspection mode of the X-ray inspection apparatus according to one embodiment of the present invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. First, the configuration will be described.

  In FIG. 1, the X-ray inspection apparatus 1 includes a housing 4. The housing 4 is incorporated in the conveyor 2 that transports the inspection object W. The upper space of the conveyor 2 forms a transport path 3 through which the inspection object W passes in the horizontal direction. This embodiment illustrates a case where the inspection object W is a beverage bottle.

  The conveyor 2 is a part of a production facility for the inspection object W, and is configured separately from the X-ray inspection apparatus 1. This embodiment exemplifies a case where the conveyor 2 comprises a top chain conveyor. The top chain conveyor is provided with a plurality of plates on an endless chain, and conveys the inspection object W on the upper surface of a plate serving as the conveying member 21 of the conveyor 2.

  As described above, the X-ray inspection apparatus 1 is a built-in X-ray inspection apparatus incorporated in the separate conveyor 2, and includes a top chain conveyor, a belt conveyor, and the like that are often used in bottle conveyance as shown in FIG. The inspection object W is incorporated into an existing conveyor that transports the inspection object W in the horizontal direction. In the case of transporting the inspection object W by the belt conveyor, the belt serves as the transport member 21. Further, the conveyor 2 may be configured integrally with the X-ray inspection apparatus 1.

  The housing 4 has an opening 7 into which the inspection object W is carried in, and an opening 8 through which the inspection object W is carried out. The conveyor 2 penetrates the housing 4 through the openings 7 and 8. The housing 4 includes a shielding cover 16 made of a metal such as stainless steel capable of shielding X-rays around the openings 7 and 8. The shielding cover 16 is configured to transmit X-rays from the openings 7 and 8 to the outside. Leakage is prevented.

  A guide member 61 is provided above the conveyor 2, and guides the inspection object W so as to be conveyed at a center position in the width direction on the conveyor 2. The guide members 61 are provided in a pair on the left and right, and a total of four guide members 61 are provided so as to sandwich the inspection object W in the width direction.

  The guide member 61 is divided so as not to enter the X-ray irradiation field of the X-ray generator 9. Note that the guide member 61 may be made of a material having a high X-ray transmittance, and may be provided continuously so as to penetrate from the opening 7 to the opening 8 similarly to the conveyor 2.

  2, the X-ray inspection apparatus 1 includes an X-ray generator 9 that generates X-rays, an X-ray detector 10 that detects X-rays, and a general control unit 40. The X-ray generator 9, the X-ray detector 10, and the general control unit 40 are housed inside the housing 4 (see FIG. 1).

  The X-ray generator 9 and the X-ray detector 10 are arranged opposite to each other in the width direction of the conveyor 2 so as to sandwich the transport path 3 on which the inspection object W on the conveyor 2 is transported. That is, the X-ray generator 9 and the X-ray detector 10 are arranged so as to face each other with the conveyor 2 sandwiched in the width direction.

  The X-ray generator 9 generates an X-ray by irradiating an electron beam from a cathode of an X-ray tube (not shown) provided therein to a target of an anode, and generates the X-ray by a slit (not shown). In the form of a screen. The X-ray generator 9 irradiates the X-rays formed in the screen-shaped X-ray irradiation field toward the X-ray detector 10 so as to cross the conveying path 3 on the conveyor 2 in the width direction. It has become.

  Therefore, X-rays generated from the X-ray generator 9 spread radially using the X-ray generator 9 as a point light source. For this reason, near the transport surface 2A, which is the upper surface of the conveyor 2, the X-rays are emitted substantially parallel to the transport surface 2A, but the X-rays are emitted obliquely at a larger angle at a position farther from the transport surface 2A.

  The X-ray detector 10 includes an X-ray line sensor in which a plurality of detection elements 10A are arranged in a line. The detection element 10A of the X-ray detector 10 includes a photodiode (not shown) and a scintillator (not shown) provided on the photodiode. X-rays are converted into light by the scintillator, and the light is detected by the photodiode. ing.

  The plurality of detection elements 10 </ b> A of the X-ray detector 10 are vertically arranged with respect to the upper surface of the conveyor 2. Data output from the detection element 10A at the lower end of the X-ray detector 10 corresponds to the first pixel image at the lower end of the X-ray image.

  Similarly, data output from the n-th detection element 10A from the lower end of the X-ray detector 10 corresponds to the image at the n-th pixel from the lower end of the X-ray image. In FIG. 2, the position of the guide member 61 is indicated by a broken line, but the guide member 61 does not enter the X-ray irradiation field of the X-ray generator 9.

  The X-ray detector 10 having the above-described configuration is configured such that an X-ray image corresponding to the amount (detection level) of X-rays transmitted through the inspection object W when the inspection object W passes through the X-ray detector 10 Is output. The X-ray detector 10 includes an A / D converter (not shown), and the A / D converter converts luminance value data from the photodiode into digital data.

  Note that the data output from the A / D converter may be an X-ray image (bright and dark image) represented by brightness and darkness by a brightness value, or a density value obtained by converting the brightness value to a desired density. May be an X-ray image (shade image) represented by shading. In the present embodiment, the X-ray image output from the A / D converter of the X-ray detector 10 is a light-dark image in which the detection level is expressed by light and dark.

  In the present embodiment, the X-ray generator 9 is adjusted in advance by an installation operation such that the X-ray irradiation field is above the conveyor 2. More specifically, the X-ray generator 9 is adjusted to be located on the same plane as the conveyor surface 2A of the conveyor 2. Further, the position of the X-ray detector 10 is adjusted in advance by an installation operation such that the lower end of the X-ray detector 10 is substantially at the same height as the upper surface of the conveyor 2.

  The X-ray inspection apparatus 1 includes a display unit 5, a setting operation unit 45, and a general control unit 40.

  The display unit 5 is configured by a flat display or the like, and performs display output to a user. The display unit 5 displays an image such as an inspection result by the general control unit 40.

  In addition, the display unit 5 displays the result of the pass / fail judgment of the inspection object W with characters or symbols such as “OK” and “NG”. The display unit 5 displays statistical values such as the total number of inspections, the number of non-defective products, and the total number of NGs.

  The display content and the display mode of the display unit 5 are determined based on a default setting or a request by a predetermined key operation from the setting operation unit 45.

  The setting operation section 45 is for inputting setting of various parameters and the like to the general control section 40. The setting operation unit 45 includes a plurality of keys and switches operated by the user, and performs setting input of various parameters and the like and selection of an operation mode to the general control unit 40. In the present embodiment, the display unit 5 and the setting operation unit 45 are integrated as a touch panel display, and are arranged on the upper front surface of the housing 4. The operation modes of the X-ray inspection apparatus 1 include a normal inspection mode for inspecting the inspection object W and a maintenance mode for performing various adjustments and state confirmation of the X-ray inspection apparatus 1.

  The general control unit 40 includes an X-ray image storage unit 42, an image processing unit 43, a determination unit 44, and a control unit 46.

  The X-ray image storage unit 42 temporarily stores the X-ray image received from the X-ray detector 10. That is, the X-ray image storage unit 42 functions as an X-ray image buffer memory.

  The image processing unit 43 performs image processing on the X-ray image read from the X-ray image storage unit 42 by applying various image processing algorithms and the like. Here, the image processing algorithm includes a combination of a plurality of image processing filters. In the present embodiment, the image processing unit 43 is provided with a specific part detection unit 43A, and the specific part detection unit 43A detects a predetermined specific part of the inspection object W in the X-ray image. ing.

  The determination unit 44 performs foreign matter determination on the X-ray image image-processed by the image processing unit 43 to determine whether or not foreign matter is mixed with the inspection object W to determine whether foreign matter is mixed. A shape determination for determining the quality of the shape of the object W is performed.

  The control unit 46 has a CPU and a memory as a storage area or a work area for a control program, and controls the entire X-ray inspection apparatus 1 in each operation mode including the inspection mode and the maintenance mode. ing. The control content of the control unit 46 includes control of the display content and the display mode of the display unit 5.

  Here, it is not easy to completely adjust the X-ray generator 9 and the X-ray detector 10 to the optimum position with respect to the conveyor 2, or to maintain the X-ray detector 9 at the perfect optimum position. For this reason, the conveyor 2 may be reflected in the X-ray image acquired from the X-ray detector 10. For example, if the plane along the upper surface of the conveyor 2 is constantly displaced above the lower end of the X-ray detector 10 due to vibration or the like after the position adjustment at the time of installation, the X-ray image shows the upper side of the conveyor 2, that is, The transport member 21 on which the inspection object W is placed is reflected. In particular, the conveyor 2 of the present embodiment is a top chain conveyor in which a plurality of conveying members 21 as plates are provided in an endless chain, and the X-ray transmittance of the conveying member 21 is lower than the belt of the belt conveyor. Therefore, the influence of the reflection of the transport member 21 on the X-ray image is large.

  If the transport member 21 of the conveyor 2 is reflected in the X-ray image, erroneous detection may occur in the determination unit 44 due to the influence of the transport member 21 and inspection accuracy may be reduced. On the other hand, it may not be easy to adjust the X-ray detector 10 to the optimum position again, for example, because time for the adjustment operation cannot be secured.

  Therefore, the X-ray inspection apparatus 1 of the present embodiment automatically sets only the region in the X-ray image where the inspection object W is reflected as the inspection region, which is the inspection target region, and excludes the non-inspection region. Inspection is performed only on the inspection area. The inspection region is a region to be inspected in the X-ray image, and the non-inspection region is a region outside the inspection target in the X-ray image.

  Specifically, the specific part detection unit 43A of the image processing unit 43 detects a predetermined specific part of the inspection object W in the X-ray image, and detects a region from the detected specific part to a predetermined length in a predetermined height direction. Is set in the inspection area to be inspected.

  The predetermined specific portion, the predetermined height direction, and the predetermined length are input by the user as setting values from the setting operation portion 45 in the maintenance mode in advance, and are stored in the specific portion detecting portion 43A. . Among the set values, for a predetermined specific portion, information relating to the outer shape or luminance capable of identifying the specific portion is set.

  When the inspected object W is a material or a shape that is easy to detect a specific part based on the outer shape, it is preferable to use the outer shape as the set value, and the inspected object W is a material or a shape that easily detects the specific part based on luminance. In this case, it is preferable to use the luminance as the set value. Details of the set value and details of the operation of setting the inspection area based on the set value will be described later.

  In the case where a specific part is set based on the external shape of the inspection object W, a plurality of parts such as the shoulder part of the bottle as the inspection object W or the base part of the neck part may be set as the specific part. . Further, a plurality of portions such as an upper bottom portion of a dent in a bottle having a dent at a bottom portion and a constricted portion of a bottle having a dent may be set as a specific portion. By setting a plurality of specific parts, even if the inspection object W is shaking, it is possible to correct the height direction from the positional relationship of the plurality of specific parts, so that the conveyor 2 is not included in the inspection area. The inspection region and the non-inspection region can be accurately separated.

  By doing so, an area where only the inspection object W is reflected in the X-ray image and the conveyor 2 is not reflected can be automatically set as the inspection area, and the inspection can be performed only on the inspection area. For this reason, erroneous detection due to the conveyor 2 being reflected in the X-ray image can be prevented. As a result, it is possible to prevent the inspection accuracy from being lowered due to the conveyor being reflected in the X-ray image.

  Next, the operation and effect will be described. First, the operation in the inspection mode will be described with reference to the flowchart in FIG. In the inspection mode, the X-ray inspection apparatus 1 acquires data of an X-ray image (transmission image) from the X-ray detector 10 (Step S1), and temporarily stores the X-ray image in the X-ray image storage unit 42. (Step S2).

  Next, the X-ray inspection apparatus 1 reads a set value for setting an inspection area in the X-ray image (Step S3). Next, the X-ray inspection apparatus 1 detects a specific part based on the set value, divides the X-ray image into an inspection area and a non-inspection area, and performs image processing such as edge enhancement processing on the inspection area. (Step S4).

  As described above, in the present embodiment, the image processing is not performed on the entire X-ray image, but is performed only on the inspection area that is the inspection target area. Load can be reduced.

  Next, the X-ray inspection apparatus 1 makes a determination as to whether or not there is a foreign substance and whether or not there is a shape defect by the determination unit 44 only for the inspection area set and image-processed in step S4 (step S5). The determination result is displayed on the display unit 5 together with the X-ray image and the like (step S6).

  Hereinafter, the details of the set value and the details of the operation of setting the inspection area based on the set value will be described.

  In the above step S4, the specific part detection unit 43A of the image processing unit 43 detects the upper end surface of the inspection object W in the X-ray image as the specific part, and determines an area from the specific part to a predetermined length downward, It is preferable to set the inspection area to be inspected.

  More specifically, the specific part detection unit 43A detects the upper end surface of the transmission image WX of the inspection object W in the X-ray image as the specific part P1, as shown in FIG. Then, the specific part detection unit 43A sets an area up to the length L1 of the inspection object W below the reference part P1 as the inspection area 52.

  Thus, the inspection area 52 is a vertical area (an area sandwiched between two broken lines) in which only the transmission image WX of the inspection object W on the X-ray image is shown in FIG. In addition, the specific part detection unit 43A sets areas other than the inspection area 52 as the non-inspection areas 51 and 53.

  In FIG. 4, the non-inspection area 51 is an area where the transmission image 2X of the conveyor 2 is reflected in the X-ray image, and the non-inspection area 53 is above the transmission image WX of the inspection object W in the X-ray image. The background area.

  In this embodiment, the case where the conveyor 2 is a top chain conveyor is illustrated. Therefore, in FIG. 4, the upper surface of the transmission image 2 </ b> X of the conveyor 2 is not flat but has a step between the plates.

  As shown in FIG. 4, the upper end surface of the inspection object W is defined as the specific region P <b> 1, and a vertical region extending downward from the specific region P <b> 1 to the length L <b> 1 is set as the inspection region 52. 2 can be prevented from being included, and only the transmitted image WX of the inspection object W can be included in the inspection area 52.

  Further, even when the inspection object W is displaced up and down due to the vibration of the conveyor 2 or the like, the specific portion P1 is detected following the displacement, so that the X-ray image is always accurately inspected and inspected. It is divided into and.

  For this reason, erroneous detection due to reflection of the conveyor 2 in the inspection region 52 of the X-ray image can be prevented, and erroneous determination is prevented in the determination operation in step S5, so that the inspection accuracy of the inspection object W can be improved. it can.

  In particular, by setting the upper end surface of the inspection object W to the specific portion P1, only one length value needs to be set as the set value, so that the set value setting operation can be simplified, and the setting operation error can be reduced. Can be prevented.

  Here, in the X-ray inspection apparatus 1, due to the relative position of the X-ray generator 9, the conveyor 2, and the X-ray detector 10, the X-rays to be inspected become more distant from the conveyor surface 2A of the conveyor 2 The inclination angle passing through the object W increases, and the X-ray image is easily blurred.

  Therefore, in the above step S4, the specific site detecting unit 43A detects a predetermined specific site below the upper end surface of the inspected object W in the X-ray image, and the first predetermined length from the specific site downward. It is preferable that an area up to a second predetermined length be set as an inspection area to be inspected.

  More specifically, the specific part detection unit 43A detects the shoulder of the transmission image WX of the inspection object W in the X-ray image as the specific part P1, as shown in FIG. Then, the specific part detection unit 43A sets an area up to the length L2 and the area up to the length L3 upward as the inspection area 52 based on the specific part P1. The length L2 corresponds to a first predetermined length in the present invention, and the length L3 corresponds to a second predetermined length in the present invention.

  As shown in FIG. 5, the shoulder of the inspection object W is defined as a specific portion P1, and a region extending from the specific portion P1 to a length L2 downward and a length L3 upward is set as the inspection region 52, so that the conveyor 2 The position close to the transfer surface 2A can be set as the specific position. For this reason, for example, even for an inspection object W having a high height, an error due to blurring of the X-ray image can be reduced and the inspection region and the non-inspection region can be accurately separated.

  Here, the transmission image WX of the inspection object W includes a transmission image WX1 of the container and a transmission image WX2 of the content, and the upper end surface of the transmission image WX2 of the content can be detected based on the shape or the luminance. .

  Therefore, in the above step S4, the specific part detection unit 43A detects the upper end surface of the transparent image WX2 of the contents as the specific part P1, as shown in FIG. An area up to the length L4 and up to the length L5 may be set as the inspection area 52. The length L4 corresponds to a first predetermined length in the present invention, and the length L5 corresponds to a second predetermined length in the present invention.

  As shown in FIG. 6, by setting the upper end surface of the transparent image WX2 of the content as a specific portion P1, and setting a region having a length L4 below and a length L5 above the specific portion P1 as the inspection region 52, The inspection area 52 can be prevented from including the transmission image 2X of the conveyor 2, and only the transmission image WX of the inspection object W can be included in the inspection area 52.

  Further, even when the inspection object W is displaced up and down due to the vibration of the conveyor 2 or the like, the specific portion P1 is detected following the displacement, so that the X-ray image is always accurately inspected and inspected. It is divided into and.

  For this reason, erroneous detection due to reflection of the conveyor 2 in the inspection region 52 of the X-ray image can be prevented, and erroneous determination is prevented in the determination operation in step S5, so that the inspection accuracy of the inspection object W can be improved. it can.

  As described above, the X-ray inspection apparatus according to the present invention has an effect that it is possible to prevent the inspection accuracy from being reduced due to the fact that the conveyor is reflected in the X-ray image. Thus, the present invention is useful as an X-ray inspection apparatus for detecting foreign matter by detecting X-rays transmitted through an inspection object with an X-ray detector.

DESCRIPTION OF SYMBOLS 1 X-ray inspection apparatus 2 Conveyor 3 Transport path 9 X-ray generator 10 X-ray detector 43 Image processing part 43A Specific part detection part 52 Inspection area W Inspection object P1 Specific part L1 Length

Claims (5)

An X-ray generator (9) for generating X-rays,
An X-ray detector (10) for detecting X-rays,
With the conveyor (2) forming a transport path (3) through which the object to be inspected (W) passes in the horizontal direction interposed therebetween, the X-ray detector detects the height direction from the transport surface of the conveyor, An X-ray inspection apparatus in which the X-ray generator and the X-ray detector are arranged,
An image processing unit (43) that performs image processing on an X-ray image based on the X-ray detected by the X-ray detector;
A specific part detector (43A) for detecting a predetermined specific part (P1) of the inspection object in the X-ray image,
Said region from a particular part detection unit is the specific site has been detected to a predetermined length (L1) of the height direction, the inspection area to be inspected (52), the image processing unit in the examination region X-ray inspection apparatus, which performs image processing and inspects the inspection object. The specific part detection unit detects an upper end surface of the inspection object in the X-ray image as the specific part,
2. The X-ray inspection apparatus according to claim 1, wherein an inspection is performed using, as the inspection area, a region extending down to a predetermined length from the specific region detected by the specific region detection unit. 3. The specific part detection unit detects a part of the X-ray image below an upper end surface of the inspection object as the specific part,
The inspection is performed using, as the inspection area, an area extending from the specific area detected by the specific area detection unit to a first predetermined length downward and a second predetermined length upward. 2. The X-ray inspection apparatus according to 1.   The X-ray according to any one of claims 1 to 3, wherein the specific part detection unit detects the specific part based on an outer shape of the inspection object in the X-ray image. Inspection equipment.   The X-ray inspection according to any one of claims 1 to 3, wherein the specific part detection unit detects the specific part based on luminance of the inspection object in the X-ray image. apparatus.