JP6678526B2 - 電気機械変換器 - Google Patents
電気機械変換器 Download PDFInfo
- Publication number
- JP6678526B2 JP6678526B2 JP2016121958A JP2016121958A JP6678526B2 JP 6678526 B2 JP6678526 B2 JP 6678526B2 JP 2016121958 A JP2016121958 A JP 2016121958A JP 2016121958 A JP2016121958 A JP 2016121958A JP 6678526 B2 JP6678526 B2 JP 6678526B2
- Authority
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- Japan
- Prior art keywords
- layer
- sio
- electret
- substrate
- electromechanical converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 84
- 230000009881 electrostatic interaction Effects 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 76
- 239000002585 base Substances 0.000 description 18
- 229910001414 potassium ion Inorganic materials 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 11
- 238000010248 power generation Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 230000006698 induction Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
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- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016121958A JP6678526B2 (ja) | 2016-06-20 | 2016-06-20 | 電気機械変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016121958A JP6678526B2 (ja) | 2016-06-20 | 2016-06-20 | 電気機械変換器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017228584A JP2017228584A (ja) | 2017-12-28 |
| JP2017228584A5 JP2017228584A5 (enExample) | 2019-01-17 |
| JP6678526B2 true JP6678526B2 (ja) | 2020-04-08 |
Family
ID=60892074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016121958A Active JP6678526B2 (ja) | 2016-06-20 | 2016-06-20 | 電気機械変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6678526B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6700139B2 (ja) * | 2016-08-01 | 2020-05-27 | シチズン時計株式会社 | エレクトレット基板の製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5931457B2 (ja) * | 2012-01-17 | 2016-06-08 | 学校法人 関西大学 | エレクトレットの製造方法、エレクトレット、発電装置 |
| JP5627130B2 (ja) * | 2012-08-30 | 2014-11-19 | アオイ電子株式会社 | 正イオンを含有したエレクトレットの形成方法 |
| JP2014107890A (ja) * | 2012-11-26 | 2014-06-09 | Panasonic Corp | エレクトレット素子およびそれを用いた振動発電器 |
| JP6653902B2 (ja) * | 2013-08-08 | 2020-02-26 | 国立大学法人静岡大学 | アクチュエータ |
| JP6335742B2 (ja) * | 2014-09-30 | 2018-05-30 | シチズン時計株式会社 | 電子機器 |
-
2016
- 2016-06-20 JP JP2016121958A patent/JP6678526B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017228584A (ja) | 2017-12-28 |
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