JP6667797B2 - ガラス基板の製造方法 - Google Patents

ガラス基板の製造方法 Download PDF

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Publication number
JP6667797B2
JP6667797B2 JP2016223253A JP2016223253A JP6667797B2 JP 6667797 B2 JP6667797 B2 JP 6667797B2 JP 2016223253 A JP2016223253 A JP 2016223253A JP 2016223253 A JP2016223253 A JP 2016223253A JP 6667797 B2 JP6667797 B2 JP 6667797B2
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Japan
Prior art keywords
glass substrate
air supply
port
processing
processing space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016223253A
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English (en)
Japanese (ja)
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JP2018080081A (ja
Inventor
好晴 山本
好晴 山本
弘樹 中塚
弘樹 中塚
大野　和宏
和宏 大野
誠一 伊澤
誠一 伊澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
Original Assignee
Nippon Electric Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Priority to JP2016223253A priority Critical patent/JP6667797B2/ja
Priority to PCT/JP2017/039058 priority patent/WO2018092558A1/ja
Priority to KR1020197007155A priority patent/KR102307129B1/ko
Priority to CN201780064578.5A priority patent/CN109843821B/zh
Priority to TW106138561A priority patent/TWI735698B/zh
Publication of JP2018080081A publication Critical patent/JP2018080081A/ja
Application granted granted Critical
Publication of JP6667797B2 publication Critical patent/JP6667797B2/ja
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
JP2016223253A 2016-11-16 2016-11-16 ガラス基板の製造方法 Active JP6667797B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016223253A JP6667797B2 (ja) 2016-11-16 2016-11-16 ガラス基板の製造方法
PCT/JP2017/039058 WO2018092558A1 (ja) 2016-11-16 2017-10-30 ガラス基板の製造方法
KR1020197007155A KR102307129B1 (ko) 2016-11-16 2017-10-30 유리 기판의 제조 방법
CN201780064578.5A CN109843821B (zh) 2016-11-16 2017-10-30 玻璃基板的制造方法
TW106138561A TWI735698B (zh) 2016-11-16 2017-11-08 玻璃基板之製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016223253A JP6667797B2 (ja) 2016-11-16 2016-11-16 ガラス基板の製造方法

Publications (2)

Publication Number Publication Date
JP2018080081A JP2018080081A (ja) 2018-05-24
JP6667797B2 true JP6667797B2 (ja) 2020-03-18

Family

ID=62145307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016223253A Active JP6667797B2 (ja) 2016-11-16 2016-11-16 ガラス基板の製造方法

Country Status (5)

Country Link
JP (1) JP6667797B2 (ko)
KR (1) KR102307129B1 (ko)
CN (1) CN109843821B (ko)
TW (1) TWI735698B (ko)
WO (1) WO2018092558A1 (ko)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441825A (en) * 1987-08-10 1989-02-14 Hitachi Ltd Temperature measuring system
US6352592B1 (en) * 1998-01-16 2002-03-05 Silicon Valley Group, Thermal Systems Llc Free floating shield and semiconductor processing system
JP4421609B2 (ja) * 2004-03-31 2010-02-24 富士通マイクロエレクトロニクス株式会社 基板処理装置および半導体装置の製造方法、エッチング装置
US20070259111A1 (en) * 2006-05-05 2007-11-08 Singh Kaushal K Method and apparatus for photo-excitation of chemicals for atomic layer deposition of dielectric film
WO2013146441A1 (ja) * 2012-03-26 2013-10-03 旭硝子株式会社 化学強化時の反りを低減できるガラス板
JP6048817B2 (ja) * 2012-12-27 2016-12-21 日本電気硝子株式会社 板状ガラスの表面処理装置及び表面処理方法
US9474706B2 (en) * 2013-02-28 2016-10-25 Amorepacific Corporation Composition for maintaining effect of filler
CN105593177A (zh) * 2013-09-25 2016-05-18 旭硝子株式会社 玻璃板的制造方法
US10150696B2 (en) * 2013-09-30 2018-12-11 Nippon Sheet Glass Company, Limited Method for producing glass sheet
WO2016080432A1 (ja) * 2014-11-20 2016-05-26 旭硝子株式会社 透明板、タッチパッド、およびタッチパネル
JP2016135726A (ja) * 2015-01-23 2016-07-28 旭硝子株式会社 ガラス基板の製造方法

Also Published As

Publication number Publication date
CN109843821A (zh) 2019-06-04
TWI735698B (zh) 2021-08-11
JP2018080081A (ja) 2018-05-24
KR102307129B1 (ko) 2021-09-30
TW201825978A (zh) 2018-07-16
KR20190078557A (ko) 2019-07-04
CN109843821B (zh) 2021-11-02
WO2018092558A1 (ja) 2018-05-24

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