JPS6441825A - Temperature measuring system - Google Patents
Temperature measuring systemInfo
- Publication number
- JPS6441825A JPS6441825A JP19808087A JP19808087A JPS6441825A JP S6441825 A JPS6441825 A JP S6441825A JP 19808087 A JP19808087 A JP 19808087A JP 19808087 A JP19808087 A JP 19808087A JP S6441825 A JPS6441825 A JP S6441825A
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- coil
- measurement
- zero
- temperature measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
PURPOSE:To achieve an accurate temperature measurement with the removal of a high frequency component, by using a signal conductor itself for a coil composing a low pass filter in the measurement of temperature comprising a thermocouple, the low pass filter and a zero-point compensator. CONSTITUTION:A chromel wire of a thermocouple 5 for measurement composes a coil 1 and a coil 2 of a low pass filter and leads to a thermocouple 4 within a zero-point compensator 8 via a temperature measuring device 7. An alumel wire of the thermocouple 5 for measurement composes the coil 1 and a coil 3 and leads to a thermocouple within the zero-point compensator 8. This eliminates abnormal metal joint in a temperature measuring path thus obtained to generate no thermoelectromotive force, thereby enabling accurate temperature measurement with the removal of a high frequency component.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19808087A JPS6441825A (en) | 1987-08-10 | 1987-08-10 | Temperature measuring system |
| US07/192,178 US4956043A (en) | 1987-05-25 | 1988-05-10 | Dry etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19808087A JPS6441825A (en) | 1987-08-10 | 1987-08-10 | Temperature measuring system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6441825A true JPS6441825A (en) | 1989-02-14 |
Family
ID=16385182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19808087A Pending JPS6441825A (en) | 1987-05-25 | 1987-08-10 | Temperature measuring system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6441825A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0467391A2 (en) * | 1990-07-20 | 1992-01-22 | Tokyo Electron Limited | Plasma apparatus, and method and system for extracting electrical signal of member to which high-frequency-wave is applied |
| JP2000068253A (en) * | 1998-08-21 | 2000-03-03 | Toyo Commun Equip Co Ltd | Dry etching container |
| CN109843821A (en) * | 2016-11-16 | 2019-06-04 | 日本电气硝子株式会社 | The manufacturing method of glass substrate |
-
1987
- 1987-08-10 JP JP19808087A patent/JPS6441825A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0467391A2 (en) * | 1990-07-20 | 1992-01-22 | Tokyo Electron Limited | Plasma apparatus, and method and system for extracting electrical signal of member to which high-frequency-wave is applied |
| EP0467391A3 (en) * | 1990-07-20 | 1992-03-18 | Tokyo Electron Limited | Plasma apparatus, and method and system for extracting electrical signal of member to which high-frequency-wave is applied |
| JP2000068253A (en) * | 1998-08-21 | 2000-03-03 | Toyo Commun Equip Co Ltd | Dry etching container |
| CN109843821A (en) * | 2016-11-16 | 2019-06-04 | 日本电气硝子株式会社 | The manufacturing method of glass substrate |
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