JP6657992B2 - 薄膜積層体とその製造方法、及び水分解システム - Google Patents
薄膜積層体とその製造方法、及び水分解システム Download PDFInfo
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- 239000010409 thin film Substances 0.000 title claims description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title description 14
- 239000004065 semiconductor Substances 0.000 claims description 132
- 239000000463 material Substances 0.000 claims description 31
- 239000010408 film Substances 0.000 claims description 20
- 239000003792 electrolyte Substances 0.000 claims description 4
- 239000005001 laminate film Substances 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 description 22
- 230000031700 light absorption Effects 0.000 description 21
- 239000010936 titanium Substances 0.000 description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 15
- 239000001301 oxygen Substances 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 15
- 238000001228 spectrum Methods 0.000 description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 13
- 239000002131 composite material Substances 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 11
- 239000000758 substrate Substances 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 10
- 229910052739 hydrogen Inorganic materials 0.000 description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910052719 titanium Inorganic materials 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 7
- 239000011575 calcium Substances 0.000 description 6
- 229910052746 lanthanum Inorganic materials 0.000 description 6
- 230000033116 oxidation-reduction process Effects 0.000 description 6
- 238000004549 pulsed laser deposition Methods 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910052712 strontium Inorganic materials 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 229910052727 yttrium Inorganic materials 0.000 description 5
- 229910006404 SnO 2 Inorganic materials 0.000 description 4
- 229910002367 SrTiO Inorganic materials 0.000 description 4
- 238000000862 absorption spectrum Methods 0.000 description 4
- 229910052788 barium Inorganic materials 0.000 description 4
- 229910052791 calcium Inorganic materials 0.000 description 4
- 239000008151 electrolyte solution Substances 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000011941 photocatalyst Substances 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910000457 iridium oxide Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical group [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000006479 redox reaction Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- -1 strontium (Sr) Chemical class 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
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Description
第1の酸化物半導体層と、前記第1の酸化物半導体層と異なる種類の第2の酸化物半導体層とが交互に繰り返し積層された積層体を有し、
前記積層体は、1.3eV〜1.5eVのバンドギャップを含む1以上のバンドギャップを有する。
(付記1)
第1の酸化物半導体層と、前記第1の酸化物半導体層と異なる種類の第2の酸化物半導体層とが交互に繰り返し積層された積層体を有し、
前記積層体は1.3eV〜1.5eVのバンドギャップを含む1以上のバンドギャップを有することを特徴とする薄膜積層体。
(付記2)
前記第1の酸化物半導体と前記第2の酸化物半導体層の膜厚は、0.8nm以上、5nm以下、または2単位格子以上、12単位格子以下であることを特徴とする付記1に記載の薄膜積層体。
(付記3)
前記第1の酸化物半導体層は、少なくともチタン(Ti)と酸素(O)を含み、スズ(Sn)を含まず、
前記第2の酸化物半導体層は、少なくともスズ(Sn)と酸素(O)を含み、チタン(Ti)を含まないことを特徴とする付記1または2に記載の薄膜積層体。
(付記4)
前記第1の酸化物半導体層はA1-xMx TiO3で表されるペロブスカイト型材料であり、Aは、Sr、Ba、及びCaの中から選択されることを特徴とする付記3に記載の薄膜積層体。
(付記5)
前記第1の酸化物半導体層はA1-xMx TiO3で表されるペロブスカイト型材料であり、Mは、La、Y、及びZrの中から選択されることを特徴とする付記3または4に記載の薄膜積層体。
(付記6)
前記第2の酸化物半導体層はA1-yRySnO3で表されるペロブスカイト型材料であり、Aは、Sr、Ba、及びCaの中から選択されることを特徴とする付記3に記載の薄膜積層体。
(付記7)
前記第2の酸化物半導体層はA1-yRySnO3で表されるペロブスカイト型材料であり、Rは、La、Y、及びZrの中から選択されることを特徴とする付記3または6に記載の薄膜積層体。
(付記8)
前記積層体は、
前記第1の酸化物半導体層の上に前記第2の酸化物半導体層が形成された合成層が、第1の厚さを有する第1の積層体と、
前記第1の酸化物半導体層の上に前記第2の酸化物半導体層が形成された合成層が、第2の厚さを有する第2の積層体と、
を有することを特徴とする付記1〜7のいずれかに記載の薄膜積層体。
(付記9)
前記積層体の中で、前記第1の酸化物半導体層と前記第2の酸化物半導体層の膜厚比は可変であることを特徴とする付記1〜8のいずれかに記載の薄膜積層体。
(付記10)
付記1〜9のいずれかに記載の薄膜積層体を用いた光電変換デバイス。
(付記11)
第1の酸化物半導体層と、前記第1の酸化物半導体層と異なる種類の第2の酸化物半導体層が交互に繰り返し積層され、1.3eV〜3.0eVの範囲にわたって光吸収感度を有する薄膜積層体を有する第1電極と、
前記第1電極と対向して配置される第2電極と、
前記第1電極と前記第2電極の間に配置される電解液と、
を有する水分解システム。
(付記12)
前記電解液を収容するチャンバー、
をさらに有し、
前記チャンバーは、前記第2電極側で水素を収集する第1の管を有することを特徴とする付記11に記載の水分解システム。
(付記13)
前記チャンバーは、前記第1電極側で酸素を収集する第2の管を有することを特徴とする付記11に記載の水分解システム。
(付記14)
膜厚が0.8nm以上、5nm以下、または2単位格子以上、12単位格子以下の第1の酸化物半導体層を形成し、
前記第1の酸化物半導体層11の上に、前記第1の酸化物半導体層11と異なる材料で膜厚が0.8nm以上、5nm以下、または2単位格子以上、12単位格子以下の第2の酸化物半導体層を形成し、
前記第1の酸化物半導体層と前記第2の酸化物半導体層を交互に複数回繰り返して積層する、
ことを特徴とする薄膜積層体の製造方法。
10、10A 薄膜積層体
10−1 第1の積層体
10−2 第2の積層体
11 第1の酸化物半導体層
12 第2の酸化物半導体層
13 合成層
21 アノード電極21
22 カソード電極22
29 電解液
31 チャンバー
32 水素管
33 酸素管
Claims (5)
- 第1の酸化物半導体層と、前記第1の酸化物半導体層と異なる種類の第2の酸化物半導体層とが交互に繰り返し積層された積層体を有し、
前記第1の酸化物半導体はSr 1-x La x TiO 3 であり、前記第2の酸化物半導体はBa 1-y La y SnO 3 であり、前記第1の酸化物半導体層と前記第2の酸化物半導体層のそれぞれは、膜厚が0.8nm以上、5nm以下、または2単位格子以上、12単位格子以下であることを特徴とする薄膜積層体。 - 前記積層体は、
前記第1の酸化物半導体層及び前記第2の酸化物半導体層が第1の厚さを有する第1の積層体と、
前記第1の酸化物半導体層及び前記第2の酸化物半導体層が第2の厚さを有する第2の積層体と、
を有することを特徴とする請求項1に記載の薄膜積層体。 - 前記積層体の中で、前記第1の酸化物半導体層と前記第2の酸化物半導体層の膜厚比は可変であることを特徴とする請求項1又は2に記載の薄膜積層体。
- 第1の酸化物半導体層と、前記第1の酸化物半導体層と異なる種類の第2の酸化物半導体層とが交互に繰り返し積層された薄膜積層体を有する第1電極と、
前記第1電極と対向して配置される第2電極と、
前記第1電極と前記第2電極の間に配置される電解液と、
を有し、
前記第1の酸化物半導体はSr 1-x La x TiO 3 であり、前記第2の酸化物半導体はBa 1-y La y SnO 3 であり、前記第1の酸化物半導体層と前記第2の酸化物半導体層のそれぞれは、膜厚が0.8nm以上、5nm以下、または2単位格子以上、12単位格子以下である水分解システム。 - 膜厚が0.8nm以上、5nm以下、または2単位格子以上、12単位格子以下の第1の酸化物半導体層を形成し、
前記第1の酸化物半導体層の上に、前記第1の酸化物半導体層と異なる材料で膜厚が0.8nm以上、5nm以下、または2単位格子以上、12単位格子以下の第2の酸化物半導体層を形成し、
前記第1の酸化物半導体はSr 1-x La x TiO 3 であり、前記第2の酸化物半導体はBa 1-y La y SnO 3 であり、前記第1の酸化物半導体層と前記第2の酸化物半導体層を交互に複数回繰り返して積層する、
ことを特徴とする薄膜積層体の製造方法。
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