JP6639971B2 - Adjusting jig - Google Patents

Description

  The present invention relates to an adjustment jig provided in a cutting device and capable of adjusting a height position of a nozzle that supplies cutting water to a cutting blade.

  For example, a wafer in which a plurality of devices such as ICs and LSIs are sectioned by dividing lines and formed on the surface is cut by a cutting device having a rotatable cutting blade, divided into individual devices, and divided into various electronic devices. It's being used. In the cutting process, the temperature at and around the processing point where the rotating cutting blade comes into contact with the wafer increases due to frictional heat. If the temperature of the processing point is too high, abnormal wear of the cutting blade, burning or chipping of the wafer occurs, and the processing quality is significantly deteriorated. In order to prevent these, the cutting device is provided with cutting water supply means for supplying cutting water toward the side surface of the cutting blade to cool the processing point and its surroundings (for example, see Patent Document 1). . The cutting water supply means includes, for example, two pipe nozzles extending in the cutting feed direction with the cutting blade interposed therebetween.

JP 2013-033802 A

  The two pipe nozzles are, for example, a support member or the like sandwiching the cutting blade so that the cutting water can be sprayed in a thickness direction of the cutting blade of the cutting blade on a wheel cover mounted on a spindle housing supporting the spindle. It is arranged through. That is, the two pipe nozzles extend along the front surface and the back surface of the cutting blade, respectively, and a plurality of nozzles of the pipe nozzle are arranged in the surface direction of the cutting blade. If the height position of the pipe nozzle with respect to the cutting blade is not at an appropriate position, the processing point is not sufficiently cooled, causing breakage of the cutting blade and deterioration of wafer quality.

  For the cutting blade mounted on the spindle, for example, a hub blade formed by extending the cutting blade radially outward from an outer peripheral portion of a base metal made of aluminum alloy casting or the like, and an abrasive grain as appropriate. There is a washer-type annular blade fixed in a binder and formed into an annular shape. There is a difference between the hub blade and the annular blade in the appropriate height position of the pipe nozzle at the time of cutting, and even if the same type of cutting blade has a different outer diameter, the pipe nozzle is It is necessary to adjust the height position individually.

  In the case of adjusting the height position of the pipe nozzle, for example, the cutting blade is cut and fed downward, and the cutting and feeding is stopped at a position where the tip of the cutting blade slightly contacts the holding surface of the chuck table. In this state, measure the distance from the holding surface of the chuck table to the lower end of the pipe nozzle to adjust the height position of the pipe nozzle, or insert a block between the holding surface of the chuck table and the lower end of the pipe nozzle. In addition, the height of the pipe nozzle is adjusted by placing the pipe nozzle on the block.

  However, in order to cut and feed the cutting blade until the cutting blade slightly contacts the holding surface of the chuck table and stop the cutting blade, a predetermined stage between the chuck table and the cutting means, which is only a stage before adjusting the height position of the pipe nozzle, is performed. It took a lot of time to position to the height position. In addition, when the cutting blade is cut and fed, if the cutting unit is set at a wrong position, there is a risk that the cutting unit provided with the cutting blade may be damaged by contact with the chuck table.

  Therefore, when adjusting the height position of the pipe nozzle provided in the cutting device, there is a problem that the adjustment of the height position does not take much time and there is no possibility that the cutting means is damaged. .

  The present invention for solving the above-mentioned problems has a chuck table having a holding surface for holding a wafer, a cutting means for cutting a wafer held on the chuck table by a rotatable cutting blade, and a cutting means for the cutting blade. Cutting water supply means for supplying cutting water to the side surface, an adjusting jig for adjusting the height position of the cutting water supply means of a cutting device, the cutting means, the cutting blade at the front end A spindle housing for mounting and rotating, a spindle housing for housing the spindle and rotatably supporting and having a flat bottom surface made of a magnetic material; and a motor for rotating the spindle rotatably supported by the spindle housing. Wherein the cutting water supply means extends in the cutting feed direction parallel to the holding surface, sandwiches the cutting blade, and faces the side surface of the cutting blade. It comprises two pipe nozzles having a spout, and a support member for supporting the two pipe nozzles in a vertically adjustable manner, and the adjusting jig embeds a magnet on the bottom surface of the spindle housing. A magnetic mounting surface, and a mounting surface on which the pipe nozzle is mounted in which a groove for allowing the cutting blade to enter is formed, and the magnetic mounting surface is magnetically mounted on the bottom surface of the spindle housing. An adjusting jig for mounting the pipe nozzle on a mounting surface and adjusting a height position of the pipe nozzle.

  An adjustment jig according to the present invention includes a chuck table having a holding surface for holding a wafer, cutting means for cutting a wafer held on the chuck table by a cutting blade rotatably mounted, and cutting water on a side surface of the cutting blade. A cutting jig for adjusting the height position of the cutting jig supplying means of the cutting device, the cutting jig being mounted on a front end of a cutting blade, and a spindle rotating. A spindle housing that accommodates the spindle and is rotatably supported and has a flat bottom surface made of a magnetic material, and a motor that rotates the spindle rotatably supported by the spindle housing, and a cutting water supply unit includes: Two pipe nozzles having an injection port extending parallel to the holding surface in the cutting feed direction and sandwiching the cutting blade and facing the side surface of the cutting blade; A support member for supporting the two pipe nozzles in a vertically adjustable manner, wherein the adjusting jig has a magnetized surface for burying a magnet and magnetizing the magnet to the bottom surface of the spindle housing, and a groove for allowing a cutting blade to enter. And a mounting surface on which the pipe nozzle is formed, so that the adjusting jig is magnetically attached to the bottom surface of the spindle housing and the pipe nozzle is mounted on the mounting surface of the adjusting jig. Height position can be adjusted accurately. Therefore, it does not take much time to adjust the height position of the pipe nozzle, and it is not necessary to cut and feed the cutting means to the chuck table at the time of adjustment, so there is no risk of damaging the cutting means. .

It is a perspective view showing an example of a cutting device. It is a perspective view which shows an example of a cutting means and an adjustment jig. It is a perspective view which shows the state which adjusts the height position of a pipe nozzle using an adjustment jig. FIG. 4 is a schematic explanatory view of a state in which the height position of a pipe nozzle is adjusted using an adjustment jig when viewed from the front when the cutting blade is a washer-type annular blade. FIG. 7 is a schematic explanatory view when a height position of a pipe nozzle is adjusted using an adjustment jig when the cutting blade is a hub blade, as viewed from the front.

  The cutting device 1 shown in FIG. 1 is a device for cutting a wafer held on a holding surface 300a of a chuck table 30 by cutting a rotating cutting blade 60 provided in a cutting means 6.

  On the base 10 of the cutting device 1, cutting feed means 11 for reciprocating the chuck table 30 in the cutting feed direction (X-axis direction) is provided. The cutting feed means 11 includes a ball screw 110 having an axis in the X-axis direction, a pair of guide rails 111 disposed in parallel with the ball screw 110, a motor 112 for rotating the ball screw 110, and an internal nut serving as the ball screw 110. And a movable plate 113 whose bottom is slidably contacted with the guide rail 111. When the motor 112 rotates the ball screw 110, the movable plate 113 is guided by the guide rail 111 and moves in the X-axis direction, and the chuck table 30 disposed on the movable plate 113 moves the movable plate 113. The wafer held by the chuck table 30 is cut and fed by moving in the X-axis direction with the movement of the wafer.

  The chuck table 30 provided on the movable plate 113 has, for example, a circular outer shape, and includes a suction unit 300 that suctions a wafer and a frame body 301 that supports the suction unit 300. The suction unit 300 communicates with a suction source (not shown) and suction-holds the wafer on a holding surface 300a which is an exposed surface of the suction unit 300. The chuck table 30 is rotatable by being driven by rotating means 302 disposed on the bottom surface side of the chuck table 30. Further, around the chuck table 30, when the wafer is supported by the annular frame, four fixing clamps 304 for fixing the annular frame are arranged in the illustrated example.

  On the rear side (−X direction side) on the base 10, a portal column 14 is provided upright so as to straddle the cutting feed unit 11. On the front surface of the portal column 14, there is provided an indexing and feeding means 12 for reciprocating the cutting means 6 in the Y-axis direction.

  The indexing and feeding means 12 includes a ball screw 120 having an axis in the Y-axis direction, a pair of guide rails 121 disposed in parallel with the ball screw 120, a motor 122 for rotating the ball screw 120, and an internal nut being a ball screw 120. And a movable plate 123 which is screwed to the side and slides on the guide rail 121. When the motor 122 rotates the ball screw 120, the movable plate 123 is guided by the guide rail 121 and moves in the Y-axis direction, and the cutting means 6 disposed on the movable plate 123 moves the movable plate 123. Is indexed and fed in the Y-axis direction with the movement of.

  On the movable plate 123, a notch feeding means 16 for reciprocating the cutting means 6 in the Z-axis direction is provided. The notch feed means 16 includes a ball screw 160 having an axis in the Z-axis direction, a pair of guide rails 161 disposed in parallel with the ball screw 160, a motor 162 for rotating the ball screw 160, and an internal nut having a ball screw 160. And a supporting member 163 that is screwed into the guide rail 161 and the side part slides on the guide rail 161. When the motor 162 rotates the ball screw 160, the support member 163 is guided by the guide rail 161 and moves in the Z-axis direction, and the cutting means 6 supported by the support member 163 causes the support member 163 to rotate. Is moved in the Z-axis direction with the movement of.

  The cutting means 6 shown in FIG. 2 includes a spindle 61 which is mounted with a cutting blade 60 at a front end 61a (the end on the −Y side) and rotates, and a flat plate formed of a magnetic material which accommodates the spindle 61 and rotatably supports it. At least a spindle housing 62 having a bottom surface 62b and a motor 63 for rotating the spindle 61 rotatably supported by the spindle housing 62 are provided.

  In the present embodiment, for example, the spindle housing 62 is entirely made of a ferromagnetic material such as iron, and has a rectangular parallelepiped outer shape. Inside the spindle housing 62, the spindle 61 and the motor 63 are housed. I have. The lower end surface of the support member 163 is fixed to the upper surface 62a of the spindle housing 62, and the spindle housing 62 moves up and down as the support member 163 moves up and down.

  On the side surface 62c on the + X direction side of the spindle housing 62, an alignment means 64 for imaging and detecting the position of the wafer to be cut is provided. The alignment means 64 is provided with an alignment camera 640 that captures an image of the surface to be cut of the wafer. Based on an image acquired by the alignment camera 640, the position of the wafer to be cut is detected by image processing such as pattern matching. Can be.

  The bottom surface 62b of the spindle housing 62 is formed flat, and is, for example, a horizontal plane orthogonal to the Z axis. Since the bottom surface 62b of the spindle housing 62 is made of a ferromagnetic material, a magnet can be magnetically attached thereto.

  The spindle 61 housed in the spindle housing 62 has a shaft direction (Y-axis direction) perpendicular to the moving direction (X-axis direction) of the chuck table 30 in the horizontal direction, and is rotatable by the spindle housing 62. It is supported by. That is, for example, an air bearing is provided inside the spindle housing 62, and the spindle 61 is rotatably supported by the air bearing in a non-contact state. A motor 63 is connected to a rear end 61b (an end on the + Y direction side) of the spindle 61. The front end 61a of the spindle 61 protrudes from the spindle housing 62 in the -Y direction so that the cutting blade 60 can be mounted.

  In the present embodiment, the cutting blade 60 is, for example, a hubless type, that is, a washer-type annular blade having no base. However, the present invention is not limited to this. A hub blade having a cutting blade extending from the outer peripheral portion of the gold may be used. For example, a mounting flange (not shown) is attached to the front end 61a of the spindle 61, the cutting blade 60 is attached to the front end 61a of the spindle 61, and then the fixing flange 610 is attached, and a nut or the like is further tightened to the spindle 61. Thus, the cutting blade 60 can be clamped and fixed to the front end 61a of the spindle 61 by the fixing flange 610 and the mount flange (not shown).

  The cutting means 6 includes, for example, a blade cover 65 that covers the cutting blade 60. The blade cover 65 is provided with an opening for attaching the cutting blade 60 at a substantially central portion thereof, and is attached to the front surface 62d (the surface on the −Y direction side) of the spindle housing 62 via the connecting member 650. The cutting blade 60 can be positioned at the opening to cover the cutting blade 60 from above.

  The cutting water supply means 5 shown in FIG. 2 includes two pipe nozzles 50 extending in the cutting feed direction (X-axis direction) parallel to the holding surface 300a of the chuck table 30 shown in FIG. And a support member 51 that supports the 50 in a vertically adjustable manner. The two pipe nozzles 50 are arranged with the cutting blade 60 interposed therebetween, and each of the pipe nozzles 50 has an injection port 500 facing the side surface of the cutting blade 60. The support member 51 is attached to, for example, a side surface on the −X direction side of the blade cover 65 and is fastened by an adjustment screw 510 so as to be slidable in the Z-axis direction. The adjusting screw 510 is inserted into a long hole formed in the supporting member 51. By loosening the adjusting screw 510 and moving the supporting member 51 along the long hole, the supporting member 51 can slide in the Z-axis direction.

  The two pipe nozzles 50 have a substantially L-shaped shape when viewed from the −Y direction side, and are supported by a support member 51 so as to be vertically adjustable. That is, each of the two pipe nozzles 50 has its upper end 50a side fixed to the support member 51 by a fixing nut, extends through the support member 51 and extends downward from the bottom surface of the support member 51, and then the chuck table shown in FIG. While maintaining a horizontal state parallel to the holding surface 300a of the cutting blade 30, the cutting blades 60 extend in parallel to the + X direction side so as to sandwich the lower part of the cutting blade 60. The upper ends 50a of the two pipe nozzles 50 communicate with a cutting water supply source (not shown).

  As shown in FIG. 2, at a position facing the side surface of the cutting blade 60 of the two-pipe nozzle 50, a plurality of injection ports 500 for injecting cutting water are provided in line in the X-axis direction. Cutting water is sprayed from both sides in the Y-axis direction by 500 to cool and clean the processing point between the cutting blade 60 and the wafer. The two pipe nozzles 50 also move up and down as the support member 51 moves up and down.

  An adjustment jig 8 shown in FIG. 2 is used to adjust the height position of the pipe nozzle 50 constituting the cutting water supply means 5. The adjusting jig 8 includes a magnetized surface 81 for burying the magnet 810 and magnetizing the magnet 810 on the bottom surface 62 b of the spindle housing 62, a mounting surface 82 on which the groove 820 for the cutting blade 60 to enter is formed and the pipe nozzle 50 is mounted on. , Is provided.

  For example, the adjusting jig 8 is formed in a substantially rectangular shape in plan view, and has, for example, one step on its upper surface 8a. In the example shown in the figure, the upper surface of the upper surface of the upper surface 8a becomes the magnetically attached surface 81 and the upper surface of the lower one becomes the mounting surface 82.

  In the illustrated example, four magnets 810 (for example, a ferrite magnet or a metal magnet) are evenly buried in the magnetically attached surface 81. In the state where the magnets 810 are embedded, the magnetically attached surface 81 has a flat surface. Has become. In addition to the example shown in FIG. 2, for example, the magnet 810 is formed in a flat plate shape, and the flat magnet 810 is embedded in the magnetized surface 81 and buried, so that the magnetized surface 81 is mostly magnetized. The flat surface formed at 810 may be used. For example, in the present embodiment, a partition plate 811 is provided upright from one side of the −Y direction side of the magnetically attached surface 81, and the side surface on the + Y direction side is in contact with the front surface 62 d of the spindle housing 62. Although the surface 811a is used, the partition plate 811 may not be provided on the magnetically attached surface 81.

  The mounting surface 82 is a flat surface, and is formed so that a groove 820 into which the cutting blade 60 enters extends in the X-axis direction. The groove 820 is formed such that the center line of the groove 820 is positioned at the center in the thickness direction of the cutting blade 60 when, for example, the front surface 62d of the spindle housing 62 contacts the contact surface 811a of the partition plate 811. It is determined on the placing surface 82. At both sides of the groove 820 in the Y-axis direction, mounting holes 821 for mounting a pair of spacers 83 for adjusting the height of the mounting surface 82 are formed in parallel.

  The pair of spacers 83 is composed of, for example, two rectangular flat plates having a predetermined height determined according to the type and the outer diameter of the cutting blade 60, each of which is placed on the mounting surface 82. By mounting, the height of the mounting surface 82 can be adjusted by raising the height of the mounting surface 82 by the height of the spacer 83. When the pair of spacers 83 are mounted on the mounting surface 82, the upper surface, which is the flat surface of each spacer 83, becomes the mounting surface 83a on which the pipe nozzle 50 is mounted. When the height position of the cutting water supply means 5 is adjusted using, for example, the adjusting jig 8 to which the spacer 83 is not attached, the groove 820 formed in the mounting surface 82 is at least the lowermost end of the cutting blade 60. Has a depth that does not contact the adjustment jig 8.

  The adjustment method when adjusting the height position of the pipe nozzle 50 of the cutting water supply means 5 by the adjusting jig 8 and the operation of each component of the adjusting jig 8 will be described below with reference to FIGS.

  In adjusting the height position of the pipe nozzle 50, for example, first, as shown in FIG. 2, a pair of spacers 83 is mounted on the mounting surface 82 of the adjusting jig 8, and the upper surface of the spacer 83 is connected to the pipe nozzle. 50 is a mounting surface 83a on which to mount. Note that the spacer 83 may not be mounted on the mounting surface 82 of the adjustment jig 8 depending on the outer diameter of the cutting blade 60 and the like. Then, as shown in FIG. 3, the operator magnetically attaches the magnetically attached surface 81 to the bottom surface 62b of the spindle housing 62, causes the cutting blade 60 to enter the groove 820, and attaches the front surface 62d of the spindle housing 62 to the partition plate. 811 is brought into contact with the contact surface 811a. Since the front surface 62d of the spindle housing 62 is in contact with the contact surface 811a of the partition plate 811, when a force that pushes the adjustment jig 8 in the + Y direction is applied from the operator, the adjustment jig 8 The displacement in the Y-axis direction can be restricted.

  Here, when the height position of the pipe nozzle 50 is higher than the mounting surface 83a of the adjusting jig 8, for example, the adjusting screw 510 shown in FIG. Then, the two pipe nozzles 50 fixed to the support member 51 are mounted on the mounting surface 83a. That is, the lower end of the side surface 50c of the pipe nozzle 50 comes into contact with the mounting surface 83a. In this state, the support member 51 is fixed by tightening the adjustment screw 510.

  When the cutting blade 60 is a washer-type annular blade as in the present embodiment, for example, the distance L1 from the lowermost end of the fixed flange 610 shown in FIG. 4 to the lower end of the side surface 50c of the pipe nozzle 50 is important. Become. For this reason, the adjusting jig 8 to which the spacer 83 is attached is magnetically attached to the bottom surface 62b of the spindle housing 62 shown in FIG. 3, and is a distance L1 (for example, about 0.75 mm) from the outer diameter of the fixed flange 610. It is designed such that the mounting surface 83a is positioned only at a higher position. Therefore, the height position of the pipe nozzle 50 is appropriately adjusted by bringing the lower end of the side surface 50c of the pipe nozzle 50 into contact with the mounting surface 83a.

  For example, when the cutting blade 60 is a hub blade 60A as shown in FIG. 5, the height position of the pipe nozzle 50 is adjusted as follows. A cutting blade 60A shown in FIG. 5 includes, for example, a base 600 made of aluminum formed in a disk shape, and a cutting blade 601 formed to extend radially outward from an outer peripheral portion of the base 600. In FIG. 5, parts for mounting the cutting blade 60 such as a nut on the spindle 61 are omitted. When the cutting blade 60 is the hub blade 60A, the distance L2 from the lowermost end of the cutting blade 601 to the lower end of the side surface 50c of the pipe nozzle 50 is important. For this reason, the adjusting jig 8 to which the spacer 83 is attached is magnetically attached to the bottom surface 62b of the spindle housing 62 shown in FIG. 3 and the distance L2 (for example, 1) from the lowermost end of the cutting blade 601 of the hub blade 60A. The mounting surface 83a is designed to be positioned higher by .75 mm). Therefore, the height position of the pipe nozzle 50 is appropriately adjusted by bringing the lower end of the side surface 50c of the pipe nozzle 50 into contact with the mounting surface 83a.

  The adjusting jig 8 includes a magnetized surface 81 for burying the magnet 810 and magnetizing the magnet 810 on the bottom surface 62 b of the spindle housing 62, a mounting surface 82 on which the groove 820 for the cutting blade 60 to enter is formed and the pipe nozzle 50 is mounted on. The height of the pipe nozzle 50 can be adjusted simply by magnetically attaching the adjustment jig 8 to the bottom surface 62b of the spindle housing 62 and mounting the pipe nozzle 50 on the mounting surface 82 of the adjustment jig 8. Be able to adjust accurately. Therefore, it is not necessary to take much time to adjust the height position of the pipe nozzle 50, and it is not necessary to cut and feed the cutting means 6 with respect to the chuck table 30 at the time of adjustment. There is no danger.

  The adjusting jig 8 according to the present invention and the cutting device 1 for adjusting the pipe nozzle 50 by the adjusting jig 8 are not limited to the above-described embodiment, and the cleaning device illustrated in the accompanying drawings. The size, shape, and the like of each component are not limited thereto, and can be appropriately changed within a range where the effects of the present invention can be exhibited. For example, the outer shape of the spindle housing 62 of the cutting means 6 is not limited to a rectangular parallelepiped, and it is sufficient if at least the bottom surface 62b is made of a magnetic material and is flat.

1: cutting device 10: base 14: portal column 11: cutting feed means 110: ball screw 111: pair of guide rails
112: motor 113: movable plate 12: index feeding means 120: ball screw 121: pair of guide rails
122: motor 123: movable plate 16: slit feed means 160: ball screw 161: pair of guide rails
162: motor 163: support member 30: chuck table 300: suction unit 300a: holding surface 301: frame
302: rotating means 304: fixed clamp 6: cutting means
60: Cutting blade 60A: Hub blade 600: Base 601: Cutting blade 61: Spindle 61a: Front end of spindle 610: Fixed flange 62: Spindle housing 62a: Upper surface of spindle housing
62b: bottom surface of spindle housing 62c: side surface of spindle housing
62d: front surface of the spindle housing 63: motor 64: alignment means 640: camera for alignment
65: blade cover 650: connecting member 5: cutting water supply means 50: pipe nozzle 500: injection port
50a: Upper end of pipe nozzle 50c: Lower side surface 51 of pipe nozzle 51: Support member 510: Adjusting screw 8: Adjusting jig 8a: Upper surface 81 of adjusting jig: Magnetically attached surface 810: Magnet 811: Partition plate 811a: Partition Plate contact surface 82: mounting surface 820: groove 821: mounting hole 83: spacer 83a: upper surface of spacer

Claims (1)

A chuck table having a holding surface for holding a wafer, cutting means for cutting a wafer held on the chuck table by a cutting blade rotatably mounted, and cutting water supply means for supplying cutting water to a side surface of the cutting blade And an adjusting jig for adjusting the height position of the cutting water supply means of the cutting device comprising:
The cutting means,
A spindle that rotates with the cutting blade mounted on the front end;
A spindle housing having a flat bottom surface that accommodates the spindle and rotatably supports and is made of a magnetic material;
A motor for rotating the spindle rotatably supported by the spindle housing,
The cutting water supply means,
Two pipe nozzles extending parallel to the holding surface and extending in the cutting feed direction and having an injection port sandwiching the cutting blade and facing the side surface of the cutting blade;
A support member that supports the two pipe nozzles in a vertically adjustable manner,
The adjustment jig is
A magnetized surface for burying a magnet and magnetizing the magnet to the bottom surface of the spindle housing;
A mounting surface on which a groove for forming the cutting blade is formed and on which a pipe nozzle is mounted,
An adjusting jig for adjusting the height of the pipe nozzle by magnetically attaching the magnetically attached surface to the bottom surface of the spindle housing and mounting the pipe nozzle on the mounting surface.

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