JP6630684B2 - 高アスペクト比を有する面を検査するための走査プローブ顕微鏡及び方法 - Google Patents

高アスペクト比を有する面を検査するための走査プローブ顕微鏡及び方法 Download PDF

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JP6630684B2
JP6630684B2 JP2016575527A JP2016575527A JP6630684B2 JP 6630684 B2 JP6630684 B2 JP 6630684B2 JP 2016575527 A JP2016575527 A JP 2016575527A JP 2016575527 A JP2016575527 A JP 2016575527A JP 6630684 B2 JP6630684 B2 JP 6630684B2
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cantilever
tip
measurement
region
scanning
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JP2017521655A (ja
JP2017521655A5 (enExample
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クリストフ バウアー
クリストフ バウアー
クラウス エディンガー
クラウス エディンガー
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カール・ツァイス・エスエムティー・ゲーエムベーハー
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Micromachines (AREA)
JP2016575527A 2014-06-26 2015-06-15 高アスペクト比を有する面を検査するための走査プローブ顕微鏡及び方法 Active JP6630684B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014212311.9 2014-06-26
DE102014212311.9A DE102014212311A1 (de) 2014-06-26 2014-06-26 Rastersondenmikroskop und Verfahren zum Untersuchen einer Oberfläche mit großem Aspektverhältnis
PCT/EP2015/063291 WO2015197398A1 (de) 2014-06-26 2015-06-15 Rastersondenmikroskop und verfahren zum untersuchen einer oberfläche mit grossem aspektverhältnis

Publications (3)

Publication Number Publication Date
JP2017521655A JP2017521655A (ja) 2017-08-03
JP2017521655A5 JP2017521655A5 (enExample) 2018-10-18
JP6630684B2 true JP6630684B2 (ja) 2020-01-15

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JP2016575527A Active JP6630684B2 (ja) 2014-06-26 2015-06-15 高アスペクト比を有する面を検査するための走査プローブ顕微鏡及び方法

Country Status (4)

Country Link
US (1) US10119990B2 (enExample)
JP (1) JP6630684B2 (enExample)
DE (1) DE102014212311A1 (enExample)
WO (1) WO2015197398A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016214658B4 (de) * 2016-08-08 2020-10-08 Carl Zeiss Smt Gmbh Rastersondenmikroskop und Verfahren zum Untersuchen einer Probenoberfläche
DE102017202455B4 (de) 2017-02-15 2021-05-27 Nano Analytik Gmbh MEMS- oder NEMS-basierter Sensor und Verfahren zum Betrieb eines solchen
GB201705613D0 (en) 2017-04-07 2017-05-24 Infinitesima Ltd Scanning probe system
WO2019016224A1 (en) 2017-07-21 2019-01-24 Carl Zeiss Smt Gmbh METHOD AND APPARATUS FOR REMOVING EXCESS MATERIALS FROM A PHOTOLITHOGRAPHIC MASK
JP7048964B2 (ja) * 2018-03-26 2022-04-06 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びその走査方法
EP3591410A1 (en) * 2018-07-06 2020-01-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Probe chip, scan head, scanning probe microscopy device and use of a probe chip
AT522624A1 (de) * 2019-05-17 2020-12-15 Univ Wien Tech Cantilever für ein rasterkraftmikroskop
US11002759B2 (en) * 2019-09-10 2021-05-11 The United States Of America As Represented By The Secretary Of The Army High-sensitivity, low thermal deflection, stress-matched atomic force microscopy and scanning thermal microscopy probes
US11169176B2 (en) * 2020-03-05 2021-11-09 Jerusalem College of Technology (JCT), Lev Academic Center Photodetector for scanning probe microscope
CN112098680B (zh) * 2020-09-16 2023-11-14 中国科学院深圳先进技术研究院 原子力显微测试系统及其样品台
WO2025013582A1 (ja) * 2023-07-12 2025-01-16 株式会社島津製作所 走査型プローブ顕微鏡

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US5103095A (en) * 1990-05-23 1992-04-07 Digital Instruments, Inc. Scanning probe microscope employing adjustable tilt and unitary head
JPH04161807A (ja) * 1990-10-26 1992-06-05 Olympus Optical Co Ltd 走査型プローブ顕微鏡
US5347854A (en) * 1992-09-22 1994-09-20 International Business Machines Corporation Two dimensional profiling with a contact force atomic force microscope
JPH0894651A (ja) 1994-09-20 1996-04-12 Olympus Optical Co Ltd 集積型ｓｐｍセンサー及び測定方法
JPH09267278A (ja) * 1996-04-01 1997-10-14 Denso Corp マイクロマニピュレータおよび圧電アクチュエータ製造方法
US20060156798A1 (en) * 2003-12-22 2006-07-20 Vladimir Mancevski Carbon nanotube excitation system
JP3892198B2 (ja) 2000-02-17 2007-03-14 エスアイアイ・ナノテクノロジー株式会社 マイクロプローブおよび試料表面測定装置
JP3785018B2 (ja) * 2000-03-13 2006-06-14 エスアイアイ・ナノテクノロジー株式会社 マイクロプローブおよびそれを用いた走査型プローブ装置
US6441371B1 (en) * 2000-04-03 2002-08-27 Korea Institute Of Science And Technology Scanning probe microscope
US20030233870A1 (en) * 2001-07-18 2003-12-25 Xidex Corporation Multidimensional sensing system for atomic force microscopy
US7168301B2 (en) * 2002-07-02 2007-01-30 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
JP2005037205A (ja) * 2003-07-18 2005-02-10 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡およびその計測方法
JP2005331509A (ja) * 2004-04-19 2005-12-02 Japan Science & Technology Agency 固有振動可変型のカンチレバーによる測定対象物の計測方法および装置
US7476556B2 (en) * 2005-08-11 2009-01-13 Micron Technology, Inc. Systems and methods for plasma processing of microfeature workpieces
JP2006276027A (ja) * 2006-05-15 2006-10-12 Hitachi Ltd 走査プローブ顕微鏡
US7748260B2 (en) * 2006-07-12 2010-07-06 Veeco Instruments Inc. Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
RU2013137810A (ru) * 2011-01-31 2015-03-10 Инфинитесима Лимитед Адаптивный сканирующий зондовый микроскоп
US8458810B2 (en) 2011-04-07 2013-06-04 Michael E. MCCONNEY Scanning thermal twisting atomic force microscopy
US9739799B2 (en) * 2014-02-28 2017-08-22 Bruker Nano, Inc. Method and apparatus to compensate for deflection artifacts in an atomic force microscope

Also Published As

Publication number Publication date
WO2015197398A1 (de) 2015-12-30
JP2017521655A (ja) 2017-08-03
US20170102407A1 (en) 2017-04-13
US10119990B2 (en) 2018-11-06
DE102014212311A1 (de) 2015-12-31

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