JP6613844B2 - Inspection jig, substrate inspection apparatus, and substrate inspection method - Google Patents

Description

  The present invention relates to an inspection jig for bringing a probe into contact with a substrate, a substrate inspection apparatus including the inspection jig, and a substrate inspection method.

  Conventionally, a plurality of unit substrates to be inspected are formed in a matrix of a plurality of rows and a plurality of columns to create a collective substrate, and a plurality of inspection jigs are arranged corresponding to the inspection points of a plurality of adjacent unit substrates, A technique is known in which a plurality of unit substrates in the collective substrate are inspected at a time (see Patent Document 1).

JP-A-8-21867

  However, in a collective substrate in which a plurality of unit substrates are arranged and integrated into a single substrate, the inspection point of each unit substrate in the collective substrate is deviated from the ideal design position in the collective substrate manufacturing process. . This is because the substrate manufactured by the build-up structure is fixed by high-temperature pressure bonding when the layers are laminated, and the base material constituting the substrate may contract. In particular, in a collective substrate composed of a flexible substrate, since a thin and flexible material is used, the substrate tends to be elongated during its manufacture.

  As described above, when the substrate contracts or expands, the positional relationship between the position of the inspection point that should be brought into contact with the probe and the probe attached to the inspection jig is shifted, and the substrate cannot be correctly inspected. In particular, in the case of a collective substrate, the substrate area increases because it includes a plurality of unit substrates. As a result, there is an inconvenience that the amount of displacement of the inspection point when the substrate contracts or expands tends to increase, and thus the possibility that the substrate inspection cannot be performed correctly increases.

  An object of the present invention is to provide an inspection jig, a substrate inspection apparatus, and a substrate inspection method that can easily perform a substrate inspection correctly even when the substrate contracts or expands.

  An inspection jig according to the present invention is attached to an inspection apparatus main body for inspecting an inspection substrate to be inspected, and an inspection jig for bringing a probe into contact with a plurality of inspection points provided on the inspection substrate. And a plate-like fixing plate having a first surface and a second surface, and first and second opposing members attached to the fixing plate, wherein the first opposing member is formed on the substrate to be inspected. The probe is arranged so as to correspond to the arrangement of the inspection points provided in a part of the first region, and is arranged on the first opposing surface for being arranged opposite to the first region and the second surface of the fixing plate. A first mounting surface to be mounted, and the second opposing member corresponds to an arrangement of inspection points provided in a second region different from the first region of the substrate to be inspected. And arranging the second area A second opposing surface for opposing placement and a second attachment surface attached to the second surface of the fixed plate, wherein the first surface of the fixed plate is for attachment to the inspection apparatus body A plurality of fixed side positioning holes penetrating the fixing plate vertically for inserting positioning pins for positioning in a region where the second opposing member is attached to the second surface. The second opposing member is formed with a moving-side positioning hole for positioning that is paired with the plurality of fixed-side positioning holes and can receive the tip side of the positioning pin. The fixed-side positioning holes and the moving-side positioning holes are made into a plurality of pairs, and at least one of the plurality of pairs of fixed-side positioning holes and the moving-side positioning holes moves with the fixed-side positioning holes. The positioning pin is located on the side positioning hole. The fixed-side positioning hole and the moving-side positioning hole are positioned at positions shifted along a predetermined first direction in a state where the fixing plate and the second opposing member are positioned by inserting Pairs are included in the plurality of pairs.

  According to this structure, the 1st and 2nd opposing member which arrange | positions a probe so as to correspond to arrangement | positioning of the test | inspection point provided in the to-be-inspected board is attached to a fixed plate. And the several fixed side positioning hole is formed in the area | region where the 2nd opposing member of a fixed plate is attached. On the other hand, the second opposing member is formed with a moving-side positioning hole that is paired with each of the plurality of fixed-side positioning holes and that can receive the tip side of the positioning pin. Further, a positioning pin is inserted into at least one pair of the fixed-side positioning hole and the moving-side positioning hole among the plurality of pairs of the fixed-side positioning hole and the moving-side positioning hole, If the positioning is performed, a pair is provided so that the fixed-side positioning hole and the moving-side positioning hole are positioned at positions shifted along a predetermined first direction.

  Here, when a positioning pin is inserted into the pair of fixed-side positioning holes and the moving-side positioning holes located at the shifted positions, the positions and movements of the fixed-side positioning holes positioned at the shifted positions are moved. The second opposing member is moved with respect to the fixed plate so that the position of the side positioning hole coincides. If the second opposing member moves relative to the fixed plate, the positional relationship between the first opposing member and the second opposing member changes. That is, according to this configuration, the positional relationship between the first opposing member and the second opposing member is inserted by inserting the positioning pin into the pair of the fixed side positioning hole and the moving side positioning hole having an appropriate shift amount. That is, the positional relationship between the probe arranged by the first opposing member and the probe arranged by the second opposing member can be adjusted, so that even if the substrate to be inspected contracts or extends, It becomes easy to properly bring the probe into contact with the inspection point provided on the inspection substrate, and as a result, it becomes easy to correctly perform the substrate inspection.

  Moreover, it is preferable that said 1st direction is a direction along the alignment direction of said 1st opposing member and said 2nd opposing member.

  According to this configuration, when the positioning pins are inserted into the pair of fixed-side positioning holes and moving-side positioning holes located at the shifted positions, the first opposing member and the second opposing member are aligned along the alignment direction. The second counter member moves, that is, the distance between the probe arranged by the first counter member and the probe arranged by the second counter member can be adjusted. However, it becomes easy to appropriately bring the probe into contact with the inspection point provided on the substrate to be inspected, and as a result, it becomes easy to correctly perform the substrate inspection.

  Moreover, it is preferable that there are a plurality of pairs located at the displaced positions, and the plurality of pairs have different amounts of displacement along the first direction.

  According to this configuration, the amount of movement for moving the second facing member can be changed by appropriately selecting the pair into which the positioning pin is inserted. Thereby, the freedom degree of position adjustment of a 2nd opposing member increases. As a result, it becomes easy to properly bring the probe into contact with the inspection points provided on the substrate to be inspected, and it becomes easy to correctly perform the substrate inspection.

  The at least one pair is a plurality of pairs having the same amount of displacement along the first direction, and the pair located at the displaced position is a plurality of pairs having the same amount of displacement along the first direction. preferable.

  According to this configuration, it is possible to insert positioning pins into a plurality of pairs of fixed-side positioning holes and moving-side positioning holes formed at different positions of the second facing member. As a result, since the direction of the second opposing member attached to the fixed plate can be defined, it becomes easy to properly bring the probe into contact with the inspection point provided on the substrate to be inspected. It becomes easy to perform the inspection.

  In addition, the pair located at the shifted position includes a plurality of pairs, each of which includes a plurality of pairs whose displacement amounts along the first direction are equal to each other, and the plurality of sets are arranged in the first direction. It is preferable that the amount of deviation along the different.

  According to this configuration, by appropriately selecting a plurality of pairs into which the positioning pins are inserted, the movement amount for moving the second opposing member is changed while defining the direction of the second opposing member attached to the fixed plate. Can do. Thereby, the freedom degree of the position adjustment of a 2nd opposing member can be improved, prescribing | regulating the direction of the 2nd opposing member attached to a fixed plate. As a result, it becomes easy to properly bring the probe into contact with the inspection points provided on the substrate to be inspected, and it becomes easy to correctly perform the substrate inspection.

  The tip of the positioning pin is inclined at an angle from the outer periphery of the positioning pin toward the axis, and an angle formed with respect to the axis of the positioning pin is 45 degrees or less. The displacement amount along the first direction in the pair positioned at the displaced position is preferably smaller than the width along the direction perpendicular to the axis of the inclined surface.

  According to this configuration, when the positioning pin is inserted into the pair positioned at the shifted position, the inclined surface causes the second position in the direction to eliminate the shift between the inserted fixed-side positioning hole and the moving-side positioning hole. The opposing member is moved. As a result, the second opposing member can be moved by inserting the positioning pin.

  The positioning pin includes a screw portion formed on a rear end side, and a columnar positioning portion having a smaller diameter than the screw portion and extending from the tip of the screw portion along the axis, and the inclined surface. Is formed at the distal end portion of the positioning portion, and an internal thread portion for screwing with the screw portion is formed in the vicinity of the opening on the first surface side of the fixed-side positioning hole, The length in the axial direction from the rear end of the fixed portion to the tip of the inclined surface is preferably shorter than the thickness of the fixed plate.

  According to this configuration, when the positioning pin is inserted into the fixed-side positioning hole and the screw portion and the female screw portion are screwed together, the positioning portion of the positioning pin is inserted into the moving-side positioning hole. Here, since the length in the axial direction from the rear end of the positioning portion to the tip of the inclined surface is shorter than the thickness of the fixed plate, the fixed side positioning hole and the moving side positioning hole are paired. When the positioning pin is inserted, before the inclined surface reaches the peripheral edge of the opening of the moving side positioning hole, the threaded portion of the positioning pin reaches the female threaded portion of the fixed side positioning hole and the threads of each other interfere. To do. When the positioning pin is rotated in the screw tightening direction in this state, the positioning pin advances toward the moving side positioning hole, and the inclined surface comes into contact with the peripheral edge of the opening of the moving side positioning hole. When the positioning pin is further rotated in the screw tightening direction and the positioning pin is advanced, the inclined surface and the peripheral edge of the opening of the moving-side positioning hole slide, and the fixed-side positioning hole as the positioning pin advances. The second opposing member is moved in a direction to match the position of the moving side positioning hole and the position of the moving side positioning hole, and the positioning portion of the positioning pin is inserted into the moving side positioning hole to fix the fixed side positioning hole and the moving side position. The hole is positioned. Therefore, it becomes easy to move and position a 2nd opposing member.

  In addition, the tip of the positioning pin has a spherical shape, and a part of the spherical shape is an inclined surface that is inclined from the outer periphery of the positioning pin toward the axial center. The amount of displacement along the first direction in the pair located at the right angle is orthogonal to the axis from the contact position where the angle formed by the tangent to the inclined surface and the axis of the positioning pin is 45 degrees to the outer periphery of the positioning pin It is preferable that the distance is smaller than the distance along the direction.

  According to this configuration, when the positioning pin is inserted into the pair positioned at the shifted position, the inclined surface causes the second position in the direction to eliminate the shift between the inserted fixed-side positioning hole and the moving-side positioning hole. The opposing member is moved. As a result, the second opposing member can be moved by inserting the positioning pin.

  The positioning pin includes a screw portion formed on a rear end side, and a columnar positioning portion having a smaller diameter than the screw portion and extending from the tip of the screw portion along the axis, and the inclined surface. Is formed at the distal end portion of the positioning portion, and an internal thread portion for screwing with the screw portion is formed in the vicinity of the opening on the first surface side of the fixed-side positioning hole. The length in the axial direction from the rear end of the portion to the contact point position is preferably shorter than the thickness of the fixed plate.

  According to this configuration, the second opposing member can be easily moved and positioned by inserting and screwing the positioning pin into the pair of the fixed-side positioning hole and the moving-side positioning hole. Furthermore, by making the inclined surface spherical, the angle between the inclined surface and the axial direction becomes smaller as the distance from the axial position of the locating pin decreases, so the force that advances the locating pin by screw tightening is efficient. It is converted into a force for moving the second opposing member. As a result, the force required for screwing can be reduced.

  Moreover, the board | substrate inspection apparatus which concerns on this invention is equipped with the above-mentioned inspection jig and the said inspection apparatus main body to which the said inspection jig was attached.

  According to this configuration, even when the substrate to be inspected contracts or expands, it becomes easy to appropriately bring the probe into contact with the inspection point provided on the substrate to be inspected. A board inspection apparatus that is easy to execute can be obtained.

  Further, the inspection substrate is provided with a plurality of unit regions which are regions including the first region and the second region and in which the inspection points are arranged in substantially the same arrangement. The main body has a driving unit that relatively moves the substrate to be inspected and the inspection jig, and the driving unit sequentially contacts the probes to the inspection points of the unit regions. It is preferable to include a movement control unit that relatively moves the substrate to be inspected and the inspection jig.

  According to this configuration, even when the interval between the plurality of unit regions changes due to the contraction or extension of the substrate to be inspected, the inspection jig can be moved to the position for each unit region. Therefore, even when the board to be inspected contracts or expands, it becomes easy to properly contact the probe with the inspection point provided on the board to be inspected, and as a result, the board inspection is executed correctly. Can be obtained.

  The substrate inspection method according to the present invention is a substrate inspection method for inspecting the substrate to be inspected using the above-described inspection jig, wherein the substrate to be inspected includes the first region and the second region. A plurality of unit regions in which the inspection points are arranged in substantially the same arrangement with each other, and at least a pair of fixed positioning holes and moving side positioning holes are fixed. A plate positioning step for positioning the fixed plate and the second opposing member by inserting the positioning pin into a side positioning hole and a moving side positioning hole, and for the inspection point of each unit region, And a moving step of relatively moving the substrate to be inspected and the inspection jig so that the probes are brought into contact with each other.

  According to this substrate inspection method, the interval between the plurality of unit regions and the positional relationship between the first region and the second region in each unit region are changed by contraction or expansion of the substrate to be inspected. However, the position of the second opposing member relative to the fixed plate is appropriately determined by the plate positioning step in response to the change in position between the first region and the second region, that is, the first opposing member and the second opposing member Can be adjusted. In addition, regarding the change in the interval between the unit regions, the inspection jig can be moved to the position of each unit region by the moving process. As a result, even when the substrate to be inspected contracts or expands, it becomes easy to appropriately bring the probe into contact with the inspection point provided on the substrate to be inspected, and it is easy to correctly execute the substrate inspection. Become.

  The plurality of unit regions are arranged in a matrix along the first direction and a second direction perpendicular to the first direction, and are arranged in a row in the second direction in the moving step. In the plate positioning step, the substrate to be inspected and the inspection jig are relatively moved so that the probes are sequentially brought into contact with the inspection points of the unit regions. In contrast, a pair of the fixed-side positioning holes and the moving-side positioning holes of the plurality of pairs corresponding to the unit region in the row adjacent in the first direction is selected, and the fixed-side position of the selected pair is selected. The positioning pins are inserted into the positioning holes and the moving side positioning holes to position the fixed plate and the second opposing member, and then, in the moving step, each of the rows adjacent in the first direction For the inspection points in the unit area, Serial it is preferable that the relatively moving a and the substrate to be inspected the inspection jig into contact with each probe.

  According to this configuration, when the plurality of unit regions are arranged in a matrix, it is easy to appropriately bring the probe into contact with the inspection points provided on the substrate to be inspected.

  The inspection jig, the substrate inspection apparatus, and the substrate inspection method having such a configuration can easily perform the substrate inspection correctly even when the substrate contracts or expands.

It is a front view showing roughly the composition of the substrate inspection device which performs the substrate inspection method concerning one embodiment of the present invention. It is explanatory drawing which shows an example of the board | substrate shown in FIG. It is a conceptual diagram which shows notionally an example of a structure of the test | inspection part drive mechanism and test | inspection part which are shown in FIG. It is a top view which shows the state by which the attachment plate was attached to the fixed plate. It is the VV sectional view taken on the line in FIG. It is explanatory drawing for demonstrating the effect | action of the positioning pin at the time of inserting a positioning pin into the pair of the fixed side positioning hole and moving side positioning hole shown in FIG. It is explanatory drawing which shows the state which inserted the positioning pin into the pair of the fixed side positioning hole and moving side positioning hole shown in FIG. It is explanatory drawing for demonstrating the positioning pin by which the inclined surface was made spherical.

  Embodiments according to the present invention will be described below with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted. FIG. 1 is a front view schematically showing a configuration of a substrate inspection apparatus 1 that executes a substrate inspection method according to an embodiment of the present invention. A substrate inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting a circuit pattern formed on a substrate 100 that is a substrate to be inspected. In FIG. 1, the direction of the board inspection apparatus 1 is shown with the left-right direction of the paper as the X-axis direction, the depth direction of the paper as the Y-axis direction, and the vertical direction of the paper as the Z-axis direction.

  The substrate 100 may be various substrates such as a flexible substrate, a rigid substrate such as glass epoxy, an electrode plate for a liquid crystal display and a plasma display, a package substrate for a semiconductor package, and a film carrier. A wiring pattern is formed on the substrate 100, and inspection points for inspecting conduction, disconnection, short circuit, and the like of the wiring pattern are set. As inspection points, predetermined portions of the wiring pattern, pads, lands, electrodes, and the like are appropriately set.

  FIG. 2 is an explanatory diagram showing an example of the substrate 100 shown in FIG. A substrate 100 shown in FIG. 2 is a flexible substrate, for example, and is a collective substrate in which a plurality of circuit boards are integrated into one sheet. A plurality of unit areas A11 to A14, unit areas A21 to A24, and unit areas A31 to A34 in which the circuit board P1 and the circuit board P2 are paired are formed on the substrate 100 shown in FIG. The unit areas A11 to A14, the unit areas A21 to A24, and the unit areas A31 to A34 each include a first area A1 and a second area A2. In each figure, description of wiring patterns and inspection points formed on the circuit boards P1 and P2 is omitted. Hereinafter, the unit areas A11 to A14, the unit areas A21 to A24, and the unit areas A31 to A34 are collectively referred to as a unit area A.

  The first area A1 is provided to include inspection points formed on the circuit board P1, and the second area A2 is provided to include inspection points formed on the circuit board P2. In the example shown in FIG. 2, the circuit board P1 and the circuit board P2 are the same circuit board. Considering the shape of the circuit boards P1 and P2, the circuit board P2 is arranged by rotating the circuit board P1 by 180 degrees so that the circuit boards P1 and P2 can be efficiently obtained from the board 100.

  The circuit board P1 and the circuit board P2 may be different circuit boards, or may be the same circuit board arranged in the same direction.

  A board inspection apparatus 1 shown in FIG. 1 includes an inspection apparatus main body 2 and inspection jigs 3U and 3D. That is, the inspection apparatus main body 2 corresponds to a part where the inspection jigs 3U and 3D are removed from the board inspection apparatus 1. The inspection apparatus main body 2 mainly includes inspection units 4U and 4D, inspection jig drive mechanisms 5U and 5D, a substrate fixing device 6, inspection unit drive mechanisms 7U and 7D, a control unit 9, and a housing 8 that accommodates these units. In preparation. The inspection jig driving mechanisms 5U and 5D and the inspection unit driving mechanisms 7U and 7D correspond to an example of a driving unit. The substrate fixing device 6 is configured to fix the substrate 100 to be inspected at a predetermined position.

  The control unit 9 is configured using, for example, a power supply circuit that supplies a current or voltage for inspection to the probe Pr, a detection circuit that detects a voltage or current signal detected by the probe Pr, a microcomputer, and the like. By executing the control program, the operation of each part of the substrate inspection apparatus 1 is controlled, and the substrate 100 is inspected. The control unit 9 supplies voltage or current to each inspection point, for example, via the probe Pr, detects a voltage signal or current signal detected from each inspection point by the probe Pr, and is calculated from these detection values and detection values. The substrate 100 is inspected by comparing the resistance value and the like with a reference value stored in advance.

  The inspection unit 4U is located above the substrate 100 fixed to the substrate fixing device 6. The inspection unit 4D is located below the substrate 100 fixed to the substrate fixing device 6. The inspection unit drive mechanism 7U is a moving mechanism that moves the inspection unit 4U in the X-axis direction and the Y-axis direction. The inspection unit drive mechanism 7D is a moving mechanism that moves the inspection unit 4D in the X-axis direction and the Y-axis direction. The inspection unit drive mechanisms 7U and 7D are configured to be able to move the inspection units 4U and 4D to arbitrary positions on the XY plane in accordance with a control signal from the control unit 9. Hereinafter, the inspection unit driving mechanisms 7U and 7D are collectively referred to as the inspection unit driving mechanism 7. The control unit 9 corresponds to an example of a movement control unit.

  The inspection units 4U and 4D are configured to be detachable from inspection jigs 3U and 3D for inspecting a circuit pattern formed on the substrate 100. Since the inspection unit 4U and the inspection unit 4D are vertically inverted and configured in the same manner, the inspection units 4U and 4D are hereinafter collectively referred to as the inspection unit 4, and the inspection jig driving mechanisms 5U and 5D are collectively referred to. The inspection jig driving mechanism 5 is referred to as the inspection jig 3U, 3D, and the inspection jig 3U is generally referred to as the inspection jig 3. Hereinafter, the configuration of each of the inspection sections 4U, 4D will be described collectively.

  FIG. 3 is a conceptual diagram conceptually showing an example of the configuration of the inspection unit drive mechanism 7 and the inspection unit 4 shown in FIG. The inspection unit 4 shown in FIG. 3 is configured by attaching an inspection jig 3 to an inspection jig driving mechanism 5.

  The inspection jig 3 includes a fixed plate 31, a first opposing member 30a, and a second opposing member 30b. The fixed plate 31 has a plate shape, and one of the plate surfaces is a first surface 31a and the other is a second surface 31b. The first surface 31 a of the fixed plate 31 is detachably attached to the inspection jig driving mechanism 5. Note that the fixing plate 31 may be fixedly attached to the inspection jig driving mechanism 5.

  The first opposing member 30 a and the second opposing member 30 b are attached to the second surface 31 b of the fixed plate 31.

  The first opposing member 30a is disposed to face the substrate 100, a plate-like attachment plate 32a attached to the second surface 31b of the fixed plate 31, an electrode plate 33a on which an electrode for contacting the probe Pr is formed, and the substrate 100. The counter plate 34a is laminated in this order. The mounting plate 32a, the electrode plate 33a, and the counter plate 34a are integrated by a fastener such as a bolt (not shown), an adhesive, or the like.

  The attachment plate 32 a is attached to the fixed plate 31 by a plurality of bolts 35. A through-hole 351 for inserting a screwdriver for screwing the bolt 35 is formed in the electrode plate 33a and the counter plate 34a. A plate surface of the mounting plate 32a on the fixed plate 31 side is a first mounting surface 320a. As a result, the entire first facing member 30 a is attached to the fixed plate 31.

  A plate surface of the counter plate 34a on the side facing the substrate 100 is a first counter surface 341a. A through-hole for holding the probe Pr is formed in the counter plate 34a so as to correspond to the arrangement of each inspection point provided in the first region A1. The probe Pr is inserted into the through hole, and the tip of the probe Pr slightly protrudes from the first facing surface 341a.

  On the plate surface of the electrode plate 33a on the counter plate 34a side, electrodes 37 are formed so as to correspond to the through holes formed in the counter plate 34a. Thereby, the rear end portion of the probe Pr inserted into each through hole is brought into contact with each electrode 37. Each electrode 37 is connected to the control unit 9 by a cable (not shown).

  The second opposing member 30b is disposed opposite to the substrate 100, a plate-like attachment plate 32b attached to the second surface 31b of the fixed plate 31, an electrode plate 33b on which an electrode for contacting the probe Pr is formed, and the substrate 100. The counter plate 34b is laminated in this order. The mounting plate 32b, the electrode plate 33b, and the counter plate 34b are integrated with each other by, for example, a fastener such as an unillustrated bolt or an adhesive.

  The attachment plate 32 b is attached to the fixed plate 31 with a plurality of bolts 35. A through-hole 351 for inserting a screwdriver for screwing the bolt 35 is formed in the electrode plate 33b and the counter plate 34b. A plate surface of the mounting plate 32b on the fixed plate 31 side is a second mounting surface 320b. Thus, the entire second opposing member 30b is attached to the fixed plate 31.

  A fixed-side positioning hole 211 that vertically penetrates the fixing plate 31 for inserting a positioning pin 36 for positioning in a region where the second opposing member 30b is attached to the second surface 31b of the fixing plate 31. To 217 are formed.

  The mounting plate 32b of the second facing member 30b is paired correspondingly with each of the fixed-side positioning holes 211 to 217 and is a moving-side positioning hole for positioning that can receive the distal end side of the positioning pin 36. 221 to 227 are formed. 3 shows an example in which the movement-side positioning holes 221 to 227 pass through the mounting plate 32b, but the movement-side positioning holes 221 to 227 can receive the distal end portion of the positioning pin 36. It is not always necessary to penetrate through the mounting plate 32b.

  A plate surface of the counter plate 34b on the side facing the substrate 100 is a second counter surface 341b. A through-hole for holding the probe Pr is formed in the counter plate 34b so as to correspond to the arrangement of the inspection points provided in the second region A2. The probe Pr is inserted into the through hole so that the tip of the probe Pr slightly protrudes from the second facing surface 341b.

  On the plate surface of the electrode plate 33b on the counter plate 34b side, electrodes 37 are formed so as to correspond to the through holes formed in the counter plate 34b. Thereby, the rear end portion of the probe Pr inserted into each through hole is brought into contact with each electrode 37. Each electrode 37 is connected to the control unit 9 by a cable (not shown).

  FIG. 4 is a plan view showing a state in which the attachment plate 32 a and the attachment plate 32 b are attached to the fixed plate 31. 4, the top view seen from the 1st surface 31a side of the fixed plate 31 is shown. The mounting plate 32a has a shape corresponding to the first region A1 so as to cover the first region A1. The mounting plate 32b has a shape corresponding to the second region A2 so as to cover the second region A2. In the example shown in FIG. 4, the alignment direction of the mounting plate 32a and the mounting plate 32b is set along the X-axis direction, that is, the alignment direction of the first opposing member 30a and the second opposing member 30b is in the X-axis direction. To be along. The X-axis direction corresponds to an example of the first direction, and the Y-axis direction corresponds to an example of the second direction.

  The attachment plates 32a and 32b are attached to the fixed plate 31 by bolts 35 in the vicinity of the corners. Fixed-side positioning holes 211 to 217 are provided at three positions on the fixed plate 31 where the mounting plate 32b is mounted.

  5 is a cross-sectional view taken along line VV in FIG. In a state where the mounting plate 32b is attached to the fixed plate 31 with the bolt 35, the second mounting surface 320b of the mounting plate 32b is moved to a position corresponding to the fixed-side positioning holes 211 to 217 of the fixed plate 31, respectively. The positioning holes 221 to 227 are formed to make a pair with the fixed side positioning holes 211 to 217. In FIG. 5, although one place is shown among the fixed side positioning holes 211-217 and the movement side positioning holes 221-227 provided in three places, since it is comprised similarly about the other two places. The description is omitted.

  FIG. 6 is an explanatory diagram for explaining the operation of the positioning pin 36 when the positioning pin 36 is inserted into the pair of the fixed-side positioning hole 214 and the moving-side positioning hole 224 shown in FIG. . Hereinafter, an example of the configuration of the positioning pin 36, the fixed-side positioning holes 211 to 217, and the moving-side positioning holes 221 to 227 will be described with reference to FIGS. 5 and 6.

  The positioning pin 36 includes a cylindrical positioning portion 361, an inclined surface 362 provided at the tip of the positioning portion 361, a screw having a larger diameter than the positioning portion 361 and having a thread formed on the outer periphery. Part 363. The screw portion 363 is formed with a tool hole or a tool groove for screwing with a screwdriver.

  The inclined surface 362 is inclined from the outer periphery of the positioning portion 361 toward the axis, and has a conical shape, for example. An angle R formed by the inclined surface 362 and the axis of the positioning portion 361 is 45 degrees or less. The inclined surface 362 is not limited to a conical shape, and may be, for example, a truncated cone shape, a spherical shape, or other shapes.

  Three positioning pins 36 are prepared corresponding to the three fixed side positioning holes 211 to 217 and the moving side positioning holes 221 to 227. Hereinafter, the fixed-side positioning holes 211 to 217 are collectively referred to as the fixed-side positioning holes 21, and the moving-side positioning holes 221 to 227 are collectively referred to as the moving-side positioning holes 22.

  Each of the fixed-side positioning holes 211 to 217 includes a circular hole B that can receive the positioning part 361 with high accuracy, and a female screw part C that is formed so as to be screwed with the screw part 363. Is formed. The movement-side positioning holes 221 to 227 have a circular hole shape having the same diameter as the hole B. The length L2 of the hole B is shorter than the length Lb of the positioning portion 361 of the positioning pin 36. The positioning pin 36 is inserted into the fixed-side positioning holes 211 to 217, and the screw portion 363 and the female screw are inserted. When the portion C is screwed together, the positioning portion 361 of the positioning pin 36 is inserted into the moving side positioning holes 221 to 227.

  In the example shown in FIG. 5, the positioning pin 36 is inserted into the pair of the fixed side positioning hole 211 and the moving side positioning hole 221. Although not shown in FIG. 5, the other two fixed-side positioning holes 211 and the moving-side positioning holes 221 out of the pair of the three fixed-side positioning holes 211 and the moving-side positioning holes 221. A positioning pin 36 is also inserted into the pair. Hereinafter, when the positioning pin 36 is inserted into any one of the fixed-side positioning holes 211 to 217 and the moving-side positioning holes 221 to 227, the corresponding pairs having the same reference numerals attached to all three locations. It is assumed that the positioning pin 36 is inserted into.

  When the positioning pin 36 is inserted into the pair of the fixed side positioning hole 211 and the moving side positioning hole 221, the central axis of the fixed side positioning hole 211 and the central axis of the moving side positioning hole 221 are Match. In this state, in the other pair other than the fixed side positioning hole 211 and the moving side positioning hole 221, the fixed side positioning holes 212 to 217 and the moving side positioning holes 222 to 227 forming the respective pairs are arranged in the X axis. The first counter member 30a and the second counter member 30b are arranged at positions shifted in the direction, that is, the alignment direction of the first counter member 30a and the second counter member 30b.

  As a specific example, the movement-side positioning hole 222 is located at a position shifted by 20 μm in the −X direction (left direction in the drawing) with respect to the fixed-side positioning hole 212. Hereinafter, the “−” sign is hidden with respect to the amount of deviation in the −X direction, and the “+” sign is shown with respect to the amount of deviation in the + X direction. The moving side positioning hole 223 is located at a position shifted by −40 μm from the fixed side positioning hole 213, and the moving side positioning hole 224 is positioned at a position shifted by −60 μm from the fixed side positioning hole 214. The moving side positioning hole 225 is positioned at a position shifted by +20 μm with respect to the fixed side positioning hole 215, and the moving side positioning hole 226 is positioned at a position shifted by +40 μm with respect to the fixed side positioning hole 216. The moving side positioning hole 227 is located at a position shifted by +60 μm from the fixed side positioning hole 217.

  That is, each of the pairs of the fixed side positioning holes 212 to 217 and the moving side positioning holes 222 to 227 provided at the three positions, which are located at positions where the hole positions are shifted, has a deviation amount along the X-axis direction. A plurality of equal pairs (three fixed-side positioning holes 212 and moving-side positioning holes 222, three fixed-side positioning holes 213 and moving-side positioning holes 223, ..., three A plurality of sets including a pair of fixed-side positioning holes 217 and moving-side positioning holes 227 (a set of three fixed-side positioning holes 212 and a moving-side positioning hole 222, three positions Including a pair of fixed-side positioning holes 213 and moving-side positioning holes 223, ..., a set of three fixed-side positioning holes 217 and moving-side positioning holes 227). The plurality of sets have different amounts of deviation along the X-axis direction.

  The shift amount D along the X-axis direction in the pair of the fixed side positioning holes 212 to 217 and the moving side positioning holes 222 to 227 located at positions where the hole positions are shifted is the axis of the inclined surface 362 of the positioning pin 36. The width W is smaller than the width W along the direction orthogonal to the center. Accordingly, when the positioning pin 36 is inserted into the pair of the fixed side positioning holes 212 to 217 and the moving side positioning holes 222 to 227, the inserted fixed side positioning hole and the moving side position are inclined by the inclined surface 362. The mounting plate 32b is moved in a direction that eliminates the deviation from the fixed hole.

  Here, the bolt 35 is provided with a predetermined play in a direction orthogonal to the axial direction of the bolt 35. The play of the bolt 35 is set to be equal to or greater than the maximum shift amount of each pair of shifts, and in the example shown in FIG. 5, play of 60 μm or more is provided in each of the + X direction and the −X direction. Therefore, when the positioning pin 36 is inserted with the bolt 35 slightly loosened, the mounting plate 32b can be moved within the range of play of the bolt 35.

  As shown in FIG. 6, the length La of the positioning pin 36 that combines the positioning portion 361 and the inclined surface 362, that is, the length in the axial direction from the rear end of the positioning portion 361 to the tip of the inclined surface 362. La is shorter than the depth of the fixed-side positioning hole 21, that is, the thickness L1 of the fixed plate 31. Accordingly, for example, as shown in FIG. 6, when the positioning pin 36 is inserted into a pair of the fixed-side positioning hole 214 and the moving-side positioning hole 224, the inclined surface 362 becomes the peripheral edge of the opening of the moving-side positioning hole 22. Before reaching the female screw portion C of the fixed-side positioning hole 21, the screw threads interfere with each other and cannot be inserted linearly.

  When the positioning pin 36 is rotated in the screw tightening direction using a tool in this state, the positioning pin 36 advances toward the moving side positioning hole 224 and the inclined surface 362 is the peripheral edge of the opening of the moving side positioning hole 22. Abut. When the positioning pin 36 is further rotated in the screw tightening direction and the positioning pin 36 is advanced, the inclined surface 362 and the peripheral edge of the opening of the moving side positioning hole 22 slide, and the positioning pin 36 advances. The mounting plate 32b is moved in the direction in which the position of the fixed side positioning hole 214 coincides with the position of the moving side positioning hole 224, and the positioning portion 361 of the positioning pin 36 is inserted into the moving side positioning hole 224. The fixed side positioning hole 214 and the moving side positioning hole 224 are positioned.

  When the combined length La of the positioning portion 361 and the inclined surface 362 is longer than the thickness L1 of the fixed plate 31, a pair of the fixed-side positioning hole 21 and the moving-side positioning hole 22 that are displaced in position is used. Even if the positioning pin 36 is to be inserted linearly, the inclined surface 362 abuts on the periphery of the opening of the moving side positioning hole 22, and in order to insert the positioning pin 36 as it is, a very large pressing force is required. I need it.

  However, as shown in FIG. 6, the combined length La of the positioning portion 361 and the inclined surface 362 is shorter than the thickness L1 of the fixed plate 31, so that the inclined surface 362 is moved to the moving side positioning hole. 22, the positioning pin 36 is inserted while moving the mounting plate 32 b by rotating the positioning pin 36 using a tool such as a screwdriver, and the fixed plate 31 and the mounting plate 31. 32b can be positioned. Therefore, the length La of the positioning portion 361 and the inclined surface 362 combined is shorter than the thickness L1 of the fixed plate 31, so that the mounting plate 32b can be easily moved and positioned.

  FIG. 7 is an explanatory view showing a state in which the positioning pin 36 is inserted into the pair of the fixed side positioning hole 214 and the moving side positioning hole 224 shown in FIG. By inserting the positioning pin 36 into the pair of the fixed side positioning hole 214 and the moving side positioning hole 224 shown in FIG. 5, the mounting plate 32b is moved, and as shown in FIG. 214 and the position of the movement side positioning hole 224 coincide. Then, the positioning pin 36 is inserted across the fixed-side positioning hole 214 and the moving-side positioning hole 224, and the mounting plate 32b is positioned with respect to the fixed plate 31, that is, fixed to the fixed plate 31. The second opposing member 30b is positioned with respect to the first opposing member 30a.

  As shown in FIG. 5, when the fixed-side positioning hole 211 and the moving-side positioning hole 221 are aligned, the moving-side positioning hole 224 is shifted by 60 μm in the −X direction with respect to the fixed-side positioning hole 214. Are arranged. Therefore, when the positions of the fixed-side positioning hole 214 and the moving-side positioning hole 224 are matched, as shown in FIG. 7, the mounting plate 32b in which the moving-side positioning hole 224 is formed is moved by 60 μm in the + X direction. That's right.

  Here, a pair of the fixed side positioning hole 211 and the moving side positioning hole 221 (the deviation amount is zero), a pair of the fixed side positioning hole 212 and the moving side positioning hole 222, and the fixed side positioning hole 213 A pair with the moving side positioning hole 223, a pair with the fixed side positioning hole 214 and the moving side positioning hole 224, a pair with the fixed side positioning hole 215 and the moving side positioning hole 225, and a fixed side positioning hole 216. The pair of the moving side positioning hole 226 and the pair of the fixed side positioning hole 217 and the moving side positioning hole 227 have different amounts of displacement from each other. The amount of movement of the mounting plate 32b, that is, the distance between the first opposing member 30a and the second opposing member 30b can be appropriately set according to whether the pair is selected. In this case, the amount of movement of the mounting plate 32b is the amount of displacement between the fixed-side positioning hole into which the positioning pin 36 is inserted and the moving-side positioning hole, so that the first opposing member 30a and the second opposing member 30b The interval can be set with high accuracy.

  Thereby, even if the board | substrate 100 shrink | contracts or expand | extends and the space | interval of the circuit board P1 and the circuit board P2 changes from the design space | interval, according to the variation | change_quantity, a fixed side positioning hole and a moving side are suitably used. By selecting a pair with a positioning hole and inserting a positioning pin 36, the first opposing member 30a and the second opposing member 30b are arranged to oppose each other with high precision on the circuit board P1 and the circuit board P2. By correctly contacting each probe Pr provided on the first opposing member 30a and the second opposing member 30b with each inspection point provided on the board P1 and the circuit board P2, the board inspection is executed correctly. Becomes easy.

  FIG. 8 is an explanatory diagram for explaining the positioning pin 36 in which the inclined surface 362 is spherical, for example, hemispherical. The positioning pin 36 shown in FIG. 8 is a contact position Px that is an in-plane line including the axis of the positioning pin 36, and the tangent line 364 to the spherical inclined surface 362 makes an angle R of 45 degrees with the axis. The length La, which is the distance in the direction along the axis from the positioning portion 361 to the rear end of the positioning portion 361, is shorter than the thickness L1 of the fixed plate 31. Further, the shift amount D is relative to the axis line from the contact position Px to the positioning portion 361 within a plane including the contact position Px and the axis where the angle R formed by the tangent line 364 and the axis is 45 degrees. The distance in the orthogonal direction is set to be equal to or less than W1.

  Accordingly, like the positioning pin 36 shown in FIG. 6, the positioning plate 36 is inserted into the fixed-side positioning hole 214 and the moving-side positioning hole 224 and screwed to move the mounting plate 32b for positioning. Easy to do. Further, by making the inclined surface 362 spherical, the angle formed by the inclined surface 362 and the axis decreases as the distance from the axial position increases, so that the force for advancing the positioning pin 36 by screw tightening is efficiently attached to the mounting plate. It is converted into a force that moves 32b. As a result, the force required for screwing can be reduced as compared with the case where the inclined surface 362 has a cone shape or a truncated cone shape.

  On the other hand, when the inclined surface 362 has a conical shape like the positioning pin 36 shown in FIG. 6, it is easy to make the angle R formed by the inclined surface 362 and the shaft center to 45 degrees or less to the axial center position. Accordingly, the amount of displacement between the fixed side positioning hole 21 and the moving side positioning hole 22 can be set to a value close to the radius of the positioning part 361. Therefore, if the inclined surface 362 has a conical shape, the fixed side positioning is determined. It is easy to increase the amount of deviation between the hole 21 and the moving side positioning hole 22.

  Referring to FIG. 3, the inspection jig driving mechanism 5 is connected to the X jig driving unit 5 </ b> X that moves the inspection jig 3 in the X-axis direction with respect to the inspection apparatus body 2, and the X jig driving unit 5 </ b> X. A Y jig driving unit 5Y that moves the inspection jig 3 in the Y axis direction, a θ jig driving unit 5θ that is connected to the Y jig driving unit 5Y and rotates the inspection jig 3 about the Z axis, The Z jig driving section 5Z is connected to the θ jig driving section 5θ and moves the inspection jig 3 in the Z-axis direction.

  Accordingly, the inspection jig driving mechanism 5 positions the inspection jig 3 relative to the substrate 100 in accordance with a control signal from the control unit 9 or moves the inspection jig 3 in the vertical direction (Z-axis direction). And the probe Pr attached to the inspection jig 3 can be brought into contact with or separated from the inspection points on the wiring pattern formed on the substrate 100.

  Next, a substrate inspection method using the substrate inspection apparatus 1 to which the inspection jig 3 according to an embodiment of the present invention is attached will be described. Since the inspection unit 4U and the inspection unit 4D operate in the same manner, the description of the operation of the inspection unit 4D will be omitted, and the operation of the inspection unit 4U will be described.

  Referring to FIG. 2, the substrate 100 has a variation in the distance between the unit regions A due to the manufacturing variation, and further, the distance between the first region A1 and the second region A2 in each unit region A. Variation occurs. Therefore, in order to make the probe Pr accurately contact each inspection point in each unit area A, it is necessary to adjust the contact position of the probe according to the variation.

  Therefore, in the substrate inspection method according to the present invention, the position adjustment between the unit areas A is sequentially performed by the inspection unit drive mechanism 7 and the inspection jig drive mechanism 5 with respect to the inspection points of the unit areas A. Adjustment is performed by a moving process in which the inspection jig 3 is moved so as to bring the probe Pr into contact. Moreover, about position adjustment between 1st area | region A1 and 2nd area | region A2, any one of a pair of fixed side positioning hole 21 and moving side positioning hole 22 of a pair of fixed side positioning hole 21 and A plate for adjusting the distance between the first opposing member 30a and the second opposing member 30b by inserting the positioning pin 36 into the moving side positioning hole 22 and positioning the fixed plate 31 and the second opposing member 30b. The position is adjusted by the positioning process.

  In the moving process, for example, a camera that images the surface of the substrate 100 is provided, and the control unit 9 performs the inspection unit driving mechanism 7 and the inspection treatment based on the image of the unit area A (circuit boards P1 and P2) captured by the camera. The probe 3 may be moved by controlling the driving of the tool driving mechanism 5 so that the probe Pr is brought into contact with each inspection point provided in the unit region A to be inspected.

  The plate positioning process is executed as follows, for example. First, the user measures the distance between the circuit board P1 and the circuit board P2 in the board 100 to be inspected, and calculates the difference from the design reference value. Then, the user first loosens the bolt 35 of the second facing member 30b and selects a pair of the fixed-side positioning hole 21 and the moving-side positioning hole 22 in which the deviation amount D is set to cancel the calculated difference. Then, after the positioning pin 36 is inserted into the pair and screwed to adjust and position the second facing member 30b, the bolt 35 of the second facing member 30b is tightened and fixed.

  Thereby, the shift of the distance between the circuit board P1 and the circuit board P2 due to the expansion and contraction of the board 100 is corrected, and the probe Pr attached to the first opposing member 30a and the probe Pr attached to the second opposing member 30b are combined. It is possible to appropriately contact the inspection point of the circuit board P1 and the inspection point of the circuit board P2, respectively.

  The plate positioning process may be appropriately executed at an arbitrary timing. For example, the deviation in the distance between the circuit board P1 and the circuit board P2 often changes for each production lot of the board 100. Therefore, the plate positioning process may be executed for each production lot of the substrate 100.

  Further, for example, in the substrate 100 shown in FIG. 2, there is a case where the expansion and contraction is performed so that the variation in expansion and contraction in the X-axis direction becomes large. In such a case, after the inspection process of the unit regions A11 to A14 is performed by sequentially moving the inspection jig 3 to the row of unit regions A11 to A14 arranged in the Y-axis direction (second direction) by the moving process, the unit regions A plate positioning step is performed in accordance with the distance between the first region A1 and the second region A2 in the unit regions A21 to A24 arranged in a row adjacent to the row of A11 to A14 in the X axis direction, and the first facing member 30a The interval between the second opposing member 30b may be adjusted, and then the inspection jig 3 may be sequentially moved to the unit regions A21 to A24 by the moving process to inspect the unit regions A21 to A24.

  In addition, although the 2nd opposing member 30b showed the example comprised by laminating | stacking the attachment plate 32b, the electrode plate 33b, and the opposing plate 34b, the 2nd opposing member 30b is not restricted to a laminated structure, It comprises integrally. May be. Moreover, although the movement side positioning hole 22 is an example of a through hole penetrating the mounting plate 32b, the moving side positioning hole 22 may not pass through the mounting plate 32b, or may be the second opposite. It may be a through hole penetrating the entire member 30b.

  Further, although the first area A1 and the second area A2 correspond to the circuit board P1 and the circuit board P2, respectively, and the circuit board P1 and the circuit board P2 are the same board, the circuit board P1 is shown. And the circuit board P2 may be different boards. Further, although an example in which the circuit board P1 and the circuit board P2 are included in the unit area A is shown, the unit area A may include only one circuit board. And 1st area | region A1 and 2nd area | region A2 may be set with respect to the one circuit board.

  In addition, two regions of the first region A1 and the second region A2 are set in the unit region A, and the first facing member 30a corresponding to the first region A1 and the second facing member 30b corresponding to the second region A2. In the unit region A, the first region A1 and a plurality of second regions A2 are set, and the first opposing member 30a corresponding to the first region A1 and the plurality of second regions are set. A plurality of second opposing members 30b corresponding to the region A2 may be provided.

  Moreover, although the fixed side positioning holes 211-217 and the movement side positioning holes 221-227 showed the example provided in three places, you may be provided in two places or four or more places. Further, the fixed side positioning holes 211 to 217 and the moving side positioning holes 221 to 227 may be provided in one place. However, when the fixed side positioning holes 211 to 217 and the moving side positioning holes 221 to 227 are provided at a plurality of positions, the mounting angle of the mounting plate 32b with respect to the fixed plate 31 can be accurately adjusted by the plurality of positioning pins 36. It is more preferable in that it can be defined.

  Further, although the example in which the inclined surface 362 is formed at the tip of the positioning pin 36 is shown, a configuration in which the inclined surface 362 is not provided may be used. However, by providing the inclined surface 362, the positioning pin 36 can be smoothly inserted into the pair of the fixed-side positioning hole 21 and the moving-side positioning hole 22, and the force for inserting the positioning pin 36 can be increased. It is more preferable in that it can be converted into a force for moving the mounting plate 32b.

  Moreover, although the screw part 363 was provided in the positioning pin 36 and the female screw part C was provided in the fixing plate 31, the screw part 363 and the female screw part C do not need to be provided.

  Moreover, it is an example of a drive part. The example in which the inspection jig driving mechanisms 5U and 5D and the inspection unit driving mechanisms 7U and 7D move the inspection jig 3 relative to each other by moving the inspection jig 3 has been described. The substrate 100 and the inspection jig 3 may be moved relative to each other by moving the substrate 100 or moving both the substrate 100 and the inspection jig 3.

  Further, the fixed-side positioning hole 21 is also formed in the region of the fixed plate 31 where the first opposing member 30a is attached, and the moving-side positioning hole 22 is also formed in the first opposing member 30a (attaching plate 32a). There may be.

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 2 Inspection apparatus main body 3, 3U, 3D Inspection jig 4, 4U, 4D Inspection part 5, 5U, 5D Inspection jig drive mechanism 5XX X jig drive part 5Y Y jig drive part 5Z Z jig drive Part 5θ θ jig driving part 6 substrate fixing device 7, 7U, 7D inspection part driving mechanism 8 housing 9 control parts 21, 211-217 fixed side positioning holes 22, 221-227 moving side positioning holes 30a first facing Member 30b Second opposing member 31 Fixed plate 31a First surface 31b Second surface 32a, 32b Mounting plate 33a, 33b Electrode plate 34a, 34b Opposing plate 35 Bolt 36 Positioning pin 37 Electrode 100 Substrate (movement control unit)
320a 1st mounting surface 320b 2nd mounting surface 341a 1st opposing surface 341b 2nd opposing surface 351 Through-hole 361 Positioning part 362 Inclined surface 363 Screw part 364 Tangent A, A11-A14, A21-A24, A31-A34 Unit area A1 1st area A2 2nd area B Hole C Female thread D Shift amount L1 Thickness L2, La, Lb Length P1, P2 Circuit board Pr Probe Px Contact position R Angle W Width W1 Distance

Claims (12)

An inspection jig that is attached to an inspection apparatus main body that inspects a substrate to be inspected as an inspection target, and makes a probe contact each of a plurality of inspection points provided on the inspection substrate,
A plate-like fixing plate having a first surface and a second surface;
A first and a second opposing member attached to the fixed plate;
The first opposing member is a first for disposing the probe so as to correspond to the arrangement of inspection points provided in a part of the first region of the substrate to be inspected, and to be opposed to the first region. Having a first mounting surface that is mounted on the opposing surface and the second surface of the fixed plate;
The second opposing member arranges the probe so as to correspond to the arrangement of inspection points provided in a second area different from the first area of the substrate to be inspected, and is arranged opposite to the second area. A second opposing surface to be attached and a second attachment surface attached to the second surface of the fixed plate;
The first surface of the fixing plate is a surface to be attached to the inspection apparatus main body, and a positioning pin for positioning is inserted into a region in which the second opposing member is attached to the second surface. A plurality of fixed-side positioning holes penetrating the fixing plate vertically are formed,
The second opposing member is formed with a moving-side positioning hole for positioning that is paired with the plurality of fixed-side positioning holes and that can receive the distal end side of the positioning pin. A plurality of fixed side positioning holes and the moving side positioning holes are paired,
The positioning plate is inserted into at least one pair of the fixed-side positioning hole and the moving-side positioning hole among the plurality of pairs of the fixed-side positioning hole and the moving-side positioning hole, and the fixed plate and the second opposing surface are inserted. In the state in which the member is positioned, a pair in which the fixed side positioning hole and the moving side positioning hole are located at positions shifted along a predetermined first direction is included in the plurality of pairs .
The tip of the positioning pin is inclined from the outer periphery of the positioning pin toward the axis, and an inclined surface having an angle of 45 degrees or less with respect to the axis of the positioning pin is formed.
The inspection jig in which the shift amount along the first direction in the pair positioned at the shifted position is smaller than the width along the direction orthogonal to the axis of the inclined surface . The positioning pin includes a screw portion formed on a rear end side, and a cylindrical positioning portion having a smaller diameter than the screw portion and extending from the tip of the screw portion along the axis.
The inclined surface is formed at a tip portion of the positioning portion,
In the vicinity of the opening on the first surface side of the fixed-side positioning hole, a female screw part for screwing with the screw part is formed,
The inspection jig according to claim 1, wherein a length in the axial direction from a rear end of the positioning portion to a front end of the inclined surface is shorter than a thickness of the fixed plate. An inspection jig that is attached to an inspection apparatus main body that inspects a substrate to be inspected as an inspection target, and makes a probe contact each of a plurality of inspection points provided on the inspection substrate,
A plate-like fixing plate having a first surface and a second surface;
A first and a second opposing member attached to the fixed plate;
The first opposing member is a first for disposing the probe so as to correspond to the arrangement of inspection points provided in a part of the first region of the substrate to be inspected, and to be opposed to the first region. Having a first mounting surface that is mounted on the opposing surface and the second surface of the fixed plate;
The second opposing member arranges the probe so as to correspond to the arrangement of inspection points provided in a second area different from the first area of the substrate to be inspected, and is arranged opposite to the second area. A second opposing surface to be attached and a second attachment surface attached to the second surface of the fixed plate;
The first surface of the fixing plate is a surface to be attached to the inspection apparatus main body, and a positioning pin for positioning is inserted into a region in which the second opposing member is attached to the second surface. A plurality of fixed-side positioning holes penetrating the fixing plate vertically are formed,
The second opposing member is formed with a moving-side positioning hole for positioning that is paired with the plurality of fixed-side positioning holes and that can receive the distal end side of the positioning pin. A plurality of fixed side positioning holes and the moving side positioning holes are paired,
The positioning plate is inserted into at least one pair of the fixed-side positioning hole and the moving-side positioning hole among the plurality of pairs of the fixed-side positioning hole and the moving-side positioning hole, and the fixed plate and the second opposing surface are inserted. In the state in which the member is positioned, a pair in which the fixed side positioning hole and the moving side positioning hole are located at positions shifted along a predetermined first direction is included in the plurality of pairs.
The tip of the positioning pin has a spherical shape, and a part of the spherical shape is an inclined surface inclined from the outer periphery of the positioning pin toward the axis,
The amount of displacement along the first direction in the pair located at the displaced position is from the contact position where the angle formed by the tangent to the inclined surface and the axis of the locating pin is 45 degrees to the outer periphery of the locating pin. An inspection jig smaller than a distance along a direction orthogonal to the axis . The positioning pin includes a screw portion formed on a rear end side, and a cylindrical positioning portion having a smaller diameter than the screw portion and extending from the tip of the screw portion along the axis.
The inclined surface is formed at a tip portion of the positioning portion,
An internal thread portion for screwing with the thread portion is formed in the vicinity of the opening on the first surface side of the fixed-side positioning hole,
The inspection jig according to claim 3 , wherein a length in the axial direction from a rear end of the positioning portion to the contact position is shorter than a thickness of the fixed plate. The inspection jig according to any one of claims 1 to 4, wherein the first direction is a direction along an arrangement direction of the first opposing member and the second opposing member. The inspection jig according to any one of claims 1 to 5 , wherein there are a plurality of pairs located at the shifted positions, and the plurality of pairs have different amounts of displacement along the first direction. The at least one pair is a plurality of pairs having the same amount of displacement along the first direction,
The inspection jig according to any one of claims 1 to 5 , wherein the pair positioned at the shifted position is a plurality of pairs whose shift amounts along the first direction are equal to each other. The pair located at the shifted position includes a plurality of pairs each including a plurality of pairs having the same amount of shift along the first direction, and the plurality of sets are shifted along the first direction. The inspection jig according to claim 7, wherein the amounts are different from each other. The inspection jig according to any one of claims 1 to 8 ,
A board inspection apparatus comprising the inspection apparatus main body to which the inspection jig is attached. The substrate to be inspected is an area including the first area and the second area, and is provided with a plurality of unit areas in which the inspection points are arranged in substantially the same arrangement.
The inspection apparatus main body is:
A drive unit for relatively moving the substrate to be inspected and the inspection jig;
The movement control part which moves the said to-be-inspected board | substrate and the said test jig | tool relatively so that the said each probe may contact one by one with respect to the said test | inspection point of each said unit area | region by the said drive part. 9. The substrate inspection apparatus according to 9 . A substrate inspection method for inspecting the substrate to be inspected using the inspection jig according to any one of claims 1 to 8 ,
The substrate to be inspected is an area including the first area and the second area, and is provided with a plurality of unit areas in which the inspection points are arranged in substantially the same arrangement.
The positioning plate is inserted into at least one pair of the fixed-side positioning hole and the moving-side positioning hole among the plurality of pairs of the fixed-side positioning hole and the moving-side positioning hole, and the fixed plate and the second opposing surface are inserted. A plate positioning step for positioning the member;
A substrate inspection method including a moving step of relatively moving the substrate to be inspected and the inspection jig so that the probes are sequentially brought into contact with the inspection points of the unit regions. The plurality of unit regions are arranged in a matrix along the first direction and a second direction perpendicular to the first direction,
In the moving step, the substrate to be inspected and the inspection jig are relatively moved so that the probes are sequentially brought into contact with the inspection points of the row of unit regions arranged in the second direction. Thereafter, in the plate positioning step, a pair of the fixed-side positioning holes and the moving-side positioning holes corresponding to the unit regions of the rows adjacent to the one row in the first direction Selecting, positioning the fixed plate and the second opposing member by inserting the positioning pin into the selected pair of fixed-side positioning hole and moving-side positioning hole, and then in the moving step 2. The substrate to be inspected and the inspection jig are relatively moved so that the probes are sequentially brought into contact with the inspection points of the unit regions in rows adjacent to the first direction. 2. The substrate inspection method according to 1.

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