TW202018306A - Probe card for electrical test and probe head for probe card - Google Patents

Abstract

Provided is a probe head for fixing, to a circuit board assembly to be conductively connected to an inspection apparatus, a plurality of probes coming into contact with a device to be inspected. The probe head comprises a first plate, a second plate, nut members, and first bolt members. The first plate and the second plate maintain the plurality of probes. The second plate is placed below the first plate. The nut members are coupled to the second plate. The first bolt members are screw-coupled to the nut members at a first position and a second position through the circuit board assembly. The first bolt members are screw-coupled to the nut members at the first position such that the first plate and the second plate come into close contact with each other. The first bolt members are screw-coupled to the nut members at the second position such that the second plate is distanced from the first plate.

Description

Probe card for electrical inspection and probe head of probe card

The invention relates to a probe card and a probe head of a probe card for electrically inspecting a device to be inspected.

In order to electrically inspect the device under inspection, the inspection device is provided with a connector that electrically connects the device under inspection with the inspection device. The device under inspection contacts the connector, and the connector transmits the electrical test signal of the inspection device to the device under inspection, and the response signal of the device under inspection to the inspection device. As an example of such a connector, a probe card having a plurality of probes in a needle shape is used for electrically inspecting semiconductor elements of a semiconductor wafer.

The probe contacts the terminal of the semiconductor element. The probe is fixed to the probe card by the probe head and inserted into the probe head. As an example, the probe head may have an upper plate, a middle plate with a quadrilateral opening in the center, and a lower plate. The probe can be inserted into the upper plate, middle plate and lower plate and held by the probe head.

As an example of fixing the probe to the probe card by the probe head, Korean Patent Publication No. 10-2018-0059867 proposes that the probe be completely inserted into the upper plate, middle plate, and lower plate to be coupled to the probe card .

As another example of fixing the probe to the probe card by the probe head, in the case of probes that are offset at the upper and lower ends, the lower plate and the intermediate plate are first assembled using the guide film disposed on the intermediate plate, and then Insert the probe through the membrane.

As described above, the probe head is fixed to the probe card by the probe head by the way that the probe head into which the probe is completely inserted is coupled to the probe card. In particular, when the upper plate, the middle plate and the lower plate are assembled, the probe must be fully inserted into the probe head. Therefore, the process of inserting the probe into the probe head is very precise and complicated, and manual work is required depending on the situation.

In the case where the thickness of the middle plate is large in order to realize a long probe, the distance between the upper plate and the lower plate becomes large, so it is very difficult to perform the insertion operation of the probe and the time for the insertion operation increases. The probe heads that need to be assembled on the upper plate, middle plate and lower plate first can only be applied to probes with a specific length. When some probes are worn out or some probes are replaced, the probe head needs to be disassembled from each board after being separated from the probe card.

As described above, the probe heads exemplified above are disadvantageous in easily and quickly inserting the probe, easily replacing the probe, and applying it to various probes. [Prior Technical Literature] [Patent Literature]

Korean Published Patent Gazette No. 10-2018-0059867

[Problems to be solved by the invention]

An embodiment of the present invention provides a probe head that can be easily and quickly inserted into a probe. An embodiment of the present invention provides a probe head with a variable holding position of the probe. An embodiment of the present invention provides a probe head that can be applied to probes of various lengths. An embodiment of the present invention provides a probe head that can easily cope with wear of a probe, damage to a probe, or replacement of a probe. An embodiment of the present invention provides a probe card having the above probe head. [Technical means to solve the problem]

An aspect of an embodiment of the present invention relates to a probe head that fixes a plurality of probes that are in contact with a device to be inspected on a circuit board assembly that is electrically connected to an inspection device. The probe head of an embodiment includes a first plate, a second plate, a nut member, and a first bolt member. The first board and the second board hold a plurality of probes. The second board is arranged below the first board. The nut member is coupled to the second plate. The first bolt member is screwed to the nut member at the first position and the second position by the circuit board assembly. The first bolt member is screwed to the nut member at the first position so that the first plate and the second plate are in close contact. The first bolt member is screwed to the nut member at the second position so that the second plate is separated from the first plate.

In one embodiment, the first plate and the second plate closely connected at the first position hold a plurality of probes, and the first plate and the second plate separated at the second position hold a plurality of probes. The plurality of probes respectively have a first protruding length protruding from the second plate at the first position of the first bolt member, and a first protruding length shorter than the first protruding length and protruding from the second plate at the second position of the first bolt member 2 Protruding length.

In one embodiment, the nut member is coupled to the upper surface of the second plate and penetrates the first plate.

In one embodiment, the probe head includes a stopper that fixes the first bolt member to the second position. The stopper can contact the first bolt member at the second position and be fixed to the circuit board assembly.

In one embodiment, the probe head includes a second bolt member that contacts the first bolt member and is screwed to the nut member by the first bolt member. The rotation of the second bolt member moves the second plate relative to the first plate by the nut member.

In one embodiment, the nut member has a first thread screwed to the first bolt member and a second thread screwed to the second bolt member. The pitch of the second thread may be smaller than the pitch of the first thread.

In one embodiment, the nut member includes a nut body having a first thread formed on the outer peripheral surface and a second thread formed on the inner peripheral surface. The first bolt member includes a bolt head that supports the hollow of the second bolt member, and a hollow bolt body having a female screw threaded with the first thread of the nut member on the inner circumferential surface.

In one embodiment, the second bolt member is screwed to the nut member at the second position of the first bolt member.

Another aspect of the embodiments of the present invention relates to a probe card for electrically inspecting a device under inspection. The probe card of an embodiment includes: a circuit board assembly that is connected to the inspection device in a conductive manner; a plurality of probes that are in contact with the device to be inspected; and a probe head that is combined with the circuit board assembly, Fix multiple probes. The probe head includes a first plate, a second plate, a nut member, and a first bolt member. The first board and the second board hold a plurality of probes. The second board is arranged below the first board. The nut member is coupled to the second plate. The first bolt member is screwed to the nut member at the first position and the second position by the circuit board assembly. The first bolt member is screwed to the nut member at the first position so that the first plate and the second plate are in close contact. The first bolt member is screwed to the nut member at the second position so that the second plate is separated from the first plate.

In one embodiment, the first plate and the second plate closely connected at the first position hold a plurality of probes, and the first plate and the second plate separated at the second position hold a plurality of probes.

In one embodiment, the nut member is coupled to the upper surface of the second plate and penetrates the first plate.

In one embodiment, the probe head includes a stopper that contacts the first bolt member, is coupled to the circuit board assembly, and fixes the first bolt member to the second position.

In one embodiment, the probe head includes a second bolt member that contacts the first bolt member and is screwed to the nut member by the first bolt member. The rotation of the second bolt member moves the second plate relative to the first plate by the nut member.

In one embodiment, the nut member includes a hollow nut body having a first screw thread screwed to the first bolt member formed on the outer circumferential surface and a second screw thread screwed to the second bolt member formed on the inner circumferential surface. The first bolt member includes a bolt head that supports the hollow of the second bolt member, and a hollow bolt body having a female screw threaded with the first thread of the nut member on the inner circumferential surface. The pitch of the second thread may be smaller than the pitch of the first thread.

In one embodiment, the circuit board assembly includes: a first circuit board assembly that is conductively connected to the inspection device; and a second circuit board assembly that is conductively coupled to the first circuit board In the assembly, the terminal pitch between the terminals of the first circuit board assembly is adjusted to the probe pitch between a plurality of probes. [Effect of invention]

An embodiment of the present invention can provide a probe head having a first plate and a second plate that are closely connected and spaced while maintaining the state of the probe. The probe head of such an embodiment can easily insert the probe, easily hold the probe, realize simple and simple assembly, and handle probes of various lengths. Furthermore, according to the probe head of an embodiment, the probe can be replaced without using a repair jig separately at the inspection site of the device to be inspected. The probe head of one embodiment of the present invention can handle the worn probe by the second plate that moves relative to the first plate while maintaining the state of the probe without separating and disassembling the probe head, thereby increasing the probe Card life. The probe head of an embodiment of the present invention can accurately adjust the insertion state of the probe and the interval between the first plate and the second plate by combining the first bolt member and the second bolt member of a nut member Larger scope and smaller scope. In the probe head according to an embodiment of the present invention, after the probe is inserted into the closely connected first plate and second plate, the spaced first plate and second plate ensure that the probe is fully inserted. Therefore, the probe head of an embodiment can realize the development of an automatic probe insertion device.

The embodiments of the present invention are exemplified for the purpose of explaining the technical idea of the present invention. The scope of rights of the present invention is not limited to the embodiments presented below or the specific descriptions of these embodiments.

As long as there is no other definition, all technical and scientific terms used in the present invention have the meanings generally understood by those of ordinary knowledge in the technical field to which the present invention belongs. All terms used in the present invention are selected for the purpose of more clearly explaining the present invention, and are not selected to limit the scope of rights of the present invention.

Expressions such as "comprising", "having", "having", etc. used in the present invention are understood as having the possibility of including other embodiments as long as other meanings are not mentioned in the sentence or sentence containing the corresponding expression Open-ended terms.

As long as other meanings are not mentioned, the singular expressions described in the present invention may include plural meanings, and this case also applies to the singular expressions described in the patent application scope of the invention.

Expressions such as "first" and "second" used in the present invention are used to distinguish a plurality of constituent elements from each other, and do not limit the order or importance of the corresponding constituent elements.

In the present invention, when it is described that a certain constituent element is “connected” or “connected” to another constituent element, it should be understood that one of the above constituent elements may be directly connected or linked to the other constituent element, or may Connected or connected with a brand-new yet another constituent element.

The "upper" direction indicator used in the present invention is based on the direction in which the probe head is positioned relative to the device under inspection, and the "lower" direction indicator refers to the opposite direction from above. The direction indicator of “vertical direction” used in the present invention includes an upward direction and a downward direction, but it should be understood that it does not refer to a specific one of the upward direction and the downward direction.

Hereinafter, the embodiments will be described with reference to the accompanying drawings. In the accompanying drawings, the same or corresponding constituent elements are given the same reference symbols. In addition, in the description of the following embodiments, repeated description of the same or corresponding constituent elements may be omitted. However, even if the description of the constituent elements is omitted, it does not mean that such constituent elements are not included in a certain embodiment.

The embodiments described below and the examples shown in the accompanying drawings relate to a probe card and a probe head of a probe card for electrically inspecting a device under inspection. As an example, the probe card and the probe head of the embodiment can be used for electrically inspecting the inspected device during the manufacturing process of the inspected device.

FIG. 1 shows a probe card having an embodiment of a probe head according to an embodiment. In FIG. 1, in order to explain an embodiment, the shapes of the probe card, the probe head, the device to be inspected, and the inspection device are schematically shown.

The probe card 100 according to an embodiment may be arranged in the inspection device 20 for electrically inspecting the device under inspection 10. As an example, the inspection device 20 may include a prober 21 and a testing machine 22. The probe card 100 can be arranged in the probe instrument 21 in a replaceable manner. The testing machine 22 can be electrically connected to the probe card 100. A transport device 23 that supports and transports the device to be inspected 10 can be provided inside the prober 21. The device to be inspected 10 may be arranged on the upper surface of the conveying device 23.

The device under inspection 10 may be a plurality of semiconductor elements formed on a semiconductor wafer, but it is not limited thereto. In addition, the semiconductor device may be a memory device or a non-memory device. Therefore, the probe card 100 can be used to perform the following inspections: before cutting a plurality of semiconductor elements formed on the semiconductor wafer from the semiconductor wafer, inspect the electrical functions and performance of the semiconductor elements to confirm the defects of the semiconductor elements.

The probe card 100 may include a circuit board assembly 101, a plurality of probes 102, and a probe head 200 according to an embodiment of fixing the plurality of probes 102 to the circuit board assembly 101. The circuit board assembly 101 can be the body of the probe card 100. The circuit board assembly 101 is connected to the inspection device 20 in a conductive manner. In detail, the circuit board assembly 101 is disposed in the prober 21 in an exchangeable manner, so that it can be connected to the testing machine 22 in a conductive manner, so as to transmit the electrical test signal from the testing machine 22 to the device under inspection 10 and transmit the response signal from the device under inspection 10 to the testing machine 22.

The probe head 200 holds a plurality of probes 102 and is attached to the circuit board assembly 101. Therefore, the plurality of probes 102 are fixed to the circuit board assembly 101 by the probe head 200. A plurality of probes 102 are in contact with the terminals of the circuit board assembly 101 at the upper end. In addition, a plurality of probes 102 are in contact with the device under test 10, specifically, the terminal 11 of the device under test 10 at the lower end. The probe head 200 includes a first plate 210 and a second plate 220, and the first plate 210 and the second plate 220 hold a plurality of probes 102 in the vertical direction. The second board 220 is disposed below the first board 210. The probe head 200 according to an embodiment is configured by adjusting the interval between the first plate 210 and the second plate 220.

Referring to FIG. 1, the device to be inspected 10 can be mounted on the transport device 23 to be in close contact with the probe card 100. In a state where the probe card 100 and the device under test 10 are in close contact in the vertical direction, the test machine 22 can output an electrical test signal to the device under test 10 by the probe 102 in contact with the device under test 10 from the device under test The response signal of 10 can be transmitted to the testing machine 22 through the probe 102 and the circuit board assembly 101. In this way, the probe card 100 can be used to perform an electrical check on the electrical characteristics, functional characteristics, operating speed, and the like of the device under test 10.

The probe card of an embodiment and the probe head of an embodiment will be described with reference to the examples shown in FIGS. 2 to 11.

FIG. 2 is a bottom perspective view of a probe card according to an embodiment. FIG. 3 is an exploded perspective view of the probe card of an embodiment, and FIG. 4 is an exploded perspective view of the probe card of an embodiment. FIG. 5 shows a cross-sectional shape taken along line 5-5 of FIG. 2.

2 and 3, in one embodiment, the circuit board assembly 101 of the probe card 100 includes a first circuit board assembly 110 and a second circuit board assembly 120. The first circuit board assembly 110 can be electrically connected to an inspection device (for example, the testing machine 22 of the inspection device 20 shown in FIG. 1 ). The second circuit board assembly 120 is attached to the first circuit board assembly 110 in the vertical direction VD, and is electrically connected to the first circuit board assembly 110. The second circuit board assembly 120 can adjust the terminal pitch between the terminals of the first circuit board assembly 110 to the probe pitch between the plurality of probes 102. Such a second circuit board assembly 120 can be referred to as a space transformer. In another embodiment, the circuit board assembly 101 of the probe card 100 may only include the first circuit board assembly 110. The probe card 100 of this example can be used to electrically inspect a device to be inspected, such as a memory element.

Referring to FIG. 3, the first circuit board assembly 110 may include a circular printed circuit board 111, a first stiffener 112 attached to the upper surface of the printed circuit board 111, and formed on the printed circuit along the first reinforcement 112 The second reinforcement 113 on the upper surface of the substrate 111 and the plurality of connectors 114 attached to the upper surface of the printed circuit board 111.

A plurality of signal lines (not shown) through which the power supply check signal and the response signal pass can be mounted on the lower surface of the printed circuit board 111. The first reinforcement 112 is located in the second reinforcement 113 and is attached to the upper surface of the printed circuit board 111. The second reinforcement 113 has a ring shape and can function to connect the probe card 100 and the inspection device. That is, the probe card 100 can be docked with the inspection device (for example, a part of the probe instrument 21 shown in FIG. 1) by the second reinforcement 113. For this reason, the second reinforcement 113 has an abutment portion for abutment on its upper surface. The plurality of connectors 114 are arranged radially, and are attached to the upper surface of the printed circuit board 111. The connector 114 may be combined with a corresponding connector (not shown) provided in the inspection device. As an example, a zero insertion force connector can be used as the connector 114.

Referring to FIG. 4, the second circuit board assembly 120 can be attached to the lower surface of the first circuit board assembly 110 by bolts 125. The second circuit board assembly 120 may include a multilayer organic circuit board 121, a third reinforcement 122 disposed between the printed circuit board 111 and the multilayer organic circuit board 121, and a third reinforcement 122 inserted into the multilayer An interposer 123 in contact with the organic circuit board 121 and a circuit board cover 124 disposed below the multilayer organic circuit board 121.

The probe 102 of the probe card 100 may be in contact with the terminal of the multilayer organic circuit substrate 121 at its upper end. The third reinforcement 122 has an opening 126 through which the interposer 123 is inserted. The interposer 123 is in contact with the lower surface of the printed circuit substrate 111 and the upper surface of the multilayer organic circuit substrate 121 to connect the printed circuit substrate 111 and the multilayer organic circuit substrate 121 in a conductive manner. The interposer 123 may include a conductive sheet having a plurality of conductive portions aligned in the vertical direction and an insulating portion that insulates and separates the conductive portions in the horizontal direction, and includes a polysilicon rubber material. The circuit board cover 124 is in contact with the lower surface of the multilayer organic circuit board 121, and the probe head accommodating portion 127 for accommodating the probe head 200 is formed through the circuit board cover 124 in the shape of an opening. The probe head 200 is inserted into the probe head accommodating portion 127. The bolt 125 is fastened to the second circuit board assembly 120 by the printed circuit board 111 to fix the second circuit board assembly 120 to the printed circuit board 111.

Referring to FIG. 2, a probe head 200 according to an embodiment fixes a plurality of probes 102 to a circuit board assembly 101. 3 and 4, the probe head 200 includes a first plate 210 and a second plate 220 that hold the probe 102. The probe head 200 can be replaceably coupled to the circuit board assembly 101. In the examples shown in FIGS. 3 and 4, the probe head 200 can be arranged in the second circuit board assembly 120 so as to be inserted into the probe head accommodating portion 127 of the circuit board cover 124. The first board 210 of the probe head 200 can be fixed to the second circuit board assembly 120 of the circuit board assembly. As an example, the first circuit board assembly 110 and the second circuit board assembly 120 may be provided with a plurality of through holes in the vertical direction, and the first board 210 may be provided with screw holes corresponding to the plurality of through holes along the edge or Screw slot. The screws are fastened to the screw holes or screw grooves by the through holes of the first circuit board assembly 110 and the second circuit board assembly 120 so that the first plate 210 can be fixed to the second circuit board assembly 120. The second plate 220 of the probe head 200 can move relative to the first plate 210 in the vertical direction VD.

3 and 4, the first plate 210 and the second plate 220 may have a four-sided flat plate shape with the same size. A plurality of first probe holes 211 into which the probe 102 is inserted penetrates in the vertical direction VD of the first plate 210. The probe 102 can be fixed to the first plate 210 at the upper end. As an example, the upper end of the probe 102 is provided with a locking portion that can be engaged with the first probe hole 211, so that the probe 102 and the first plate 210 can be fixed. The second board 220 is disposed below the first board 210. In the second plate 220, second probe holes 221 respectively inserted into the probe 102 and corresponding to the first probe holes 211 are penetrated in the vertical direction VD.

In one embodiment, the first plate 210 and the second plate 220 can hold the probe 102 and be in close contact with each other. In addition, the first plate 210 and the second plate 220 can hold the probe 102 and be spaced along the vertical direction VD by a predetermined interval (for example, the interval C shown in FIG. 1) in the vertical direction VD between them. In a state where the first plate 210 and the second plate 220 are in close contact, the probe 102 may be initially inserted into the first plate 210 and the second plate 220 in the downward direction LD. In the state where the probe 102 is initially inserted, the first plate 210 and the second plate 220 can simultaneously hold the upper portion of the probe 102. In a state where the first plate 210 and the second plate 220 are separated by the predetermined interval, the first plate 210 and the second plate 220 can hold the upper portion and the lower portion of the probe 102, respectively.

The probe head 200 includes a fixing device that fixes the first plate 210 and the second plate 220 holding the probe 102 to the circuit board assembly 101. In one embodiment, the probe head 200 includes a nut member 230 coupled to the second board 220 and a first bolt member 240 screwed to the nut member 230 by the circuit board assembly 101 as the fixing device.

In an embodiment, the nut member 230 may be coupled to the upper surface of the second plate 220 and may penetrate the first plate 210 in the vertical direction VD. The nut member 230 may be bonded to the upper surface of the second plate 220 by using an adhesive or by welding using a metallic material. 3 and 4 show the case where four nut members 230 are coupled to the second plate 220, but this is only an example. The probe head 200 may use at least two or more nut members 230.

Referring to FIGS. 3 and 4, the nut member 230 may include a nut head 231 coupled to the second plate 220 and a sleeve-shaped nut body 232 extending from the nut head 231 in the upward direction UD. The first bolt member 240 is screwed to the nut member 230 by the first circuit board assembly 110 and the second circuit board assembly 120. The probe head 200 uses the same number of first bolt members 240 as the number of nut members 230. The first bolt member 240 may include a bolt head 241 and a bolt body 242 extending vertically downward from the bolt head 241.

Referring to FIGS. 3 and 4, the first reinforcement 112 of the first circuit board assembly is formed with a plurality of grooves 115 recessed from the upper surface and having a generally rectangular shape. Each corner of the groove 115 is cut into a circular arc shape so as to have a relief. The alignment hole 116 is located in the center of the groove 115, and the alignment hole 116 penetrates the first reinforcement 112 in the vertical direction. In addition, a bolt head seat 117 is formed along the periphery of the alignment hole 116 so as to be recessed from the bottom surface of the groove 115. The printed circuit board 111 of the first circuit board assembly penetrates the alignment hole 118 corresponding to the alignment hole 116 in the vertical direction. The third reinforcement 122 and the multilayer organic circuit board 121 of the second circuit board assembly respectively penetrate through the alignment holes 128 and 129 corresponding to the alignment holes 116 and 118 in the vertical direction. The alignment holes 116, 118, 128, and 129 have diameters into which the nut body 232 and the bolt body 242 can be inserted. The nut body 232 penetrates the alignment hole 129 of the multilayer organic circuit board 121, the alignment hole 128 of the third reinforcement member 122, and the alignment hole 118 of the printed circuit board 111, the upper end of which can be positioned to the height of the upper surface of the printed circuit board 111 . The bolt body 242 penetrates the alignment hole 116 of the first reinforcement 112 and the alignment hole 118 of the printed circuit board 111, and the lower end thereof may be located in the middle of the alignment hole 118 of the printed circuit board 111. The first bolt member 240 allows the bolt head 241 to contact the upper surface of the first reinforcement 112 (specifically, the bolt head seat 117) to restrict the position of the first bolt member. The bolt head 241 may be in contact with the bolt head seat 117 on the lower surface thereof.

The nut body 232 may have a hollow sleeve shape. The bolt body 242 may have a hollow sleeve shape. In one embodiment, the nut body 232 can be inserted into the bolt body 242, and the first bolt member 240 is screwed to the nut member 230. In relation to this, a first thread 233 of a male thread can be formed on the outer peripheral surface of the nut body 232, and a female thread 243 screwed with the first thread 233 can be formed on the inner peripheral surface of the bolt body 242. In another embodiment, a female thread may be formed on the inner circumferential surface of the nut body 232 and a male thread may be formed on the outer circumferential surface of the bolt body 242 to insert the bolt body into the nut body.

In one embodiment, the first bolt member 240 can be screwed to the nut member 230 at the first position and the second position. The first bolt member 240 can be screwed with the nut member 230 at the above-mentioned first position so that the first plate 210 and the second plate 220 are in close contact with each other. The first bolt member 240 can be screwed with the nut member 230 at the above-mentioned second position so that the second plate 220 is separated from the first plate 210 in the vertical direction. The second position is a position away from the first position in the upward direction UD, and ensures that the position of the probe 102 is completely held by the first plate 210 and the second plate 220. That is, the second position may be a position where the first bolt member 240 is screwed to the nut member 230 so that the first plate 210 and the second plate 220 are not in close contact with each other, and the above-mentioned predetermined interval is formed therebetween.

In one embodiment, the probe head 200 may include a stopper 250 that fixes the first bolt member 240 screwed to the nut member 230 to the second position. The stopper 250 can restrain the movement of the first bolt member 240 in the upward direction UD and hold the second plate 220 in a state where the second plate 220 is away from the first plate 210.

3 and 4, the stopper 250 can be formed so as to cover the first bolt member 240. The stopper 250 may contact the upper end of the bolt head 241 to fix the first bolt member 240 at the second position. The stopper 250 has a size to be inserted into the groove 115. The stopper 250 can be accurately inserted into the groove 115 due to the protrusions provided at each corner of the groove 115. As shown in FIG. 3, a pair of through holes 251 is formed in the stopper 250, and a pair of screw holes 119 is formed in the groove 115 to penetrate downward from the bottom surface of the groove 115. The clamping bolt 252 penetrates the stopper 250 and is fastened to the screw hole 119 so that the stopper 250 can contact the bolt head 241 of the first bolt member 240 and be fixed to the first reinforcement 112 of the first circuit board assembly. That is, the stopper 250 can contact the first bolt member 240 at the second position of the first bolt member 240 and be fixed to the circuit board assembly 101.

As described above, since the first bolt member 240 is screwed to the nut member 230 at the second position, the second plate 220 can hold a part of the probe 102 away from the first plate 210. Therefore, the upper portion and the lower portion of the probe 102 can be held by the separated first plate 210 and second plate 220, respectively.

In one embodiment, the probe head 200 can accurately adjust the above-mentioned predetermined interval between the first plate 210 and the second plate 220. In relation to this, the probe head 200 may include a second bolt member 260 screwed to the nut member 230 by the first bolt member 240. The second bolt member 260 screwed to the nut member 230 can rotate forward or backward relative to the nut member 230. Such rotation of the second bolt member 260 can move the second plate 220 slightly upward or downward relative to the first plate 210 by the nut member 230. Therefore, the distance between the first plate 210 and the second plate 220 can be accurately adjusted, and the position of the second plate 220 holding the probe 102 can be changed. The second bolt member 260 can be screwed to the nut member 230 at the second position of the first bolt member 240.

In one embodiment, the first bolt member 240 can be formed such that the second bolt member 260 penetrates the first bolt member 240 in the vertical direction. Referring to FIG. 3, the bolt head 241 of the first bolt member 240 has a hexagonal recessed bolt head seat 244, and a through hole 245 is formed in the bolt body 242 from the bottom surface of the bolt head seat 244 in the vertical direction. The second bolt member 260 has a bolt head 261 formed with a hexagonal wrench hole, and a cylindrical bolt body 262 extending from the bolt head 261. The bolt body 262 can be inserted into the first bolt member 240 through the through hole 245. The lower surface of the bolt head 261 is in contact with the bottom surface of the bolt head seat 244 so that the second bolt member 260 can be in contact with the first bolt member 240. Therefore, the bolt head 241 of the first bolt member 240 can support the second bolt member 260.

In an embodiment, the nut member 230 may have a first thread 233 screwed to the first bolt member 240 and a second thread 234 screwed to the second bolt member 260 and having a diameter smaller than the first thread 233. As an example, the first thread 233 and the second thread 234 can be provided to the nut member 230 so as to be formed on the outer peripheral surface and the inner peripheral surface of the sleeve-shaped nut body 232, respectively. As yet another example, the first thread 233 and the second thread 234 may be formed on the outer peripheral surface of the cylindrical nut body. As another example, the first thread 233 and the second thread 234 may be formed on the inner circumferential surface of the sleeve-shaped nut body.

6 is a cross-sectional view showing a state where the first bolt member is screwed to the nut member and the second bolt member is screwed to the nut member. In one embodiment, referring to FIG. 6, a first thread 233 of a male thread screwed with the female thread 243 of the first bolt member 240 is formed on the outer peripheral surface of the nut body 232 of the nut member 230, and on the inner periphery of the nut body 232 The second thread 234 having a female thread that is screwed into the male thread 263 of the second bolt member 260 is formed on the surface.

In one embodiment, the thread pitch TP2 of the second thread 234 is smaller than the thread pitch TP1 of the first thread 233. When the thread pitch TP2 of the second thread is smaller than the thread pitch TP1 of the first thread, the thread pitch TP1 of the first thread 233 can be set in such a way that the interval between the first plate 210 and the second plate 220 can be adjusted slightly The ratio between the pitch TP2 of the second thread 234. In addition, the thread pitch of the male thread 263 of the second bolt member 260 is smaller than the thread pitch of the female thread 243 of the first bolt member 240. Referring to FIGS. 3, 5 and 6, the bolt head 261 of the second bolt member 260 contacts the bolt head seat 244 to restrict the movement of the second bolt member 260 in the vertical direction VD, and the nut member 230 is fixed to the second plate 220. Therefore, as the second bolt member 260 rotates forward or reverse relative to the nut member 230, the screw member caused by such rotation can move the nut member 230 slightly upward or downward, and the first plate 210 and The interval between the second plates 220.

7 to 11, an example in which the probe head of the embodiment is assembled to the probe card will be described.

7, the second circuit board assembly 120 is attached to the first circuit board assembly 110. Referring to FIG. 8, in a state where the second circuit board assembly 120 is assembled to the first circuit board assembly 110, the probe head 200 is mounted on the second circuit board assembly 120. In detail, the probe head 200 is mounted on the multilayer organic circuit by the probe head accommodating portion 127 of the circuit board cover 124 so that the first plate 210 of the probe head 200 faces the lower surface of the multilayer organic circuit board 121 The lower surface of the substrate 121. In the example shown in FIG. 8, the first plate 210 and the second plate 220 are in close contact with each other. As shown in FIG. 9, in a state where the first board 210 and the second board 220 are in close contact, the probe 102 may be inserted into the first board 210 and the second board 220 first. As an example, in a state where the probe 102 is initially inserted, the upper end of the probe 102 can be coupled to the first probe hole 211 by snapping, and the upper end of the probe 102 can pass through the second probe hole 221.

Referring to FIGS. 10 and 11, the first plate 210 and the second plate 220 in which the probe 102 is inserted and are in close contact with each other are mounted on the second circuit board assembly 120. The first board 210 can be fixed to the second circuit board assembly 120 by screws that penetrate the first circuit board assembly 110 and the second circuit board assembly 120 and are screwed to the first board 210. After the first plate 210 is fixed to the second circuit board assembly 120, the first bolt member 240 may be screwed to the nut member 230, and the second bolt member 260 may be screwed to the nut member 230. After the second bolt member 260 is screwed to the nut member 230, the stopper 250 can be coupled to the first circuit board assembly 110 by the clamping bolt 252.

As shown in FIG. 11, if the first plate 210 and the second plate 220 in close contact are mounted on the multilayer organic circuit board 121 of the second circuit board assembly, the nut member 230 penetrates the alignment hole 129 and the alignment hole 128. The first bolt member 240 penetrates the alignment hole 116 and the alignment hole 118 and is screwed to the nut member 230. The first bolt member 240 is screwed to the nut member 230 and held at the first position described above until the lower surface of the bolt head 241 contacts the bolt head seat 117. Therefore, the first bolt member 240 is screwed to the nut member 230 at the above-mentioned first position, and the first plate 210 and the second plate 220 are in close contact in the vertical direction VD.

As shown in FIG. 9, the probe holes 211 and 221 of each of the closely connected first plate 210 and the second plate 220 are aligned along the vertical direction VD, and the probe 102 is sequentially inserted into the first plate 210 and the second plate 220 . Therefore, when the probe 102 is first inserted into the probe head 200, the probe 102 can be easily inserted by the first plate 210 and the second plate 220 in close contact. The probe 102 is first inserted into the first plate 210 in the downward direction LD, and its upper end is fixed to the first plate 210 by the above-mentioned engagement. Therefore, the upper end of the inserted probe 102 can be located at the same level, which can ensure stable contact between the probe 102 and the circuit board assembly.

12 to 16 show an example of holding a probe on a probe card by the probe head of an embodiment. 12 to 16 show an example of holding the probe by the first plate and the second plate, and an example of the relative position between the nut member and the first bolt member.

FIG. 12 shows a state where the probe is inserted into the probe head and held by the probe head. In addition, FIG. 12 shows a state below the state shown in FIG. 11. As shown in FIG. 12, the first bolt member 240 can be screwed to the nut member 230 at the first position P1. The first plate 210 and the second plate 220 are in close contact in the vertical direction VD at the first position P1 of the first bolt member 240, and the probe 102 is held by the first plate 210 and the second plate 220 in close contact. At the first position P1 of the first bolt member 240, the upper portion of the probe 102 is held by the first plate 210 and the second plate 220, and the probe 102 has the first protruding length L1 protruding from the second plate 220.

FIG. 13 is a diagram similar to FIG. 12 and shows a state where the first bolt member is loosened from the nut member and is coupled to the nut member at the second position. Referring to FIG. 13, the first bolt member 240 is screwed with the nut member 230 at a second position P2 that is away from the first position P1 in the upward direction UD. The height difference between the first position P1 and the second position P2 can be appropriately selected according to the length of the probe 102. Since the first bolt member 240 is loosened from the nut member 230, a space is formed between the lower surface of the bolt head 241 and the bolt head seat 117. As a result, the first bolt member 240 can move downward together with the nut member 230 until the lower surface of the bolt head 241 contacts the bolt head seat 117. In addition, as the first bolt member 240 moves downward, the second plate 220 can be separated from the first plate 210.

Fig. 14 shows yet another example of holding the probe by the probe head, and shows the case where the second board is separated from the first board. 13 and 14, the first bolt member 240 is screwed to the nut member 230 at the second position P2. As the first bolt member 240 moves in the downward direction LD, the second plate 220 moves away from the first plate 210 in the downward direction LD. As the second plate 220 moves downward, the upper portion of the probe 102 is held by the first plate 210, and the lower portion of the probe 102 is held by the second plate 220. Therefore, the probe 102 is held by the spaced first plate 210 and second plate 220 at the second position P2 of the first bolt member 240. In addition, at the second position P2 of the first bolt member 240 shown in FIG. 14, the probe 102 has a second protruding length L2 protruding from the second plate 220. The second protrusion length L2 is shorter than the first protrusion length L1.

As shown in FIG. 14, the second plate 220 is separated from the first plate 210 and the upper part and the lower part of the probe 102 are held by the first plate 210 and the second plate 220. Therefore, the probe 102 can be easily assembled to the probe head 200 by the second plate 220 leaving the first plate 210. In addition, the second plate 220 can be moved by adjusting the first bolt member 240, so the probe head of the embodiment can be maintained by adjusting the interval C between the first plate 210 and the second plate 220 without additional equipment. Probes of various lengths.

According to the embodiment, the installation of the probe head 200 and the probe 102 may be completed in the positions of the first plate 210 and the second plate 220 shown in FIG. 14 and the state where the probe 102 is inserted. In this embodiment, the stopper 250 (see FIGS. 3 and 4) contacts the bolt head 241 and is coupled to the first reinforcement 112, whereby the first bolt member 240 can be fixed at the second position P2. The stopper restricts the upward movement of the first bolt member 240, so that the movement of the second plate 220 can be restricted in a state where the second plate 220 is away from the first plate 210 and the probe 102 is fully inserted.

FIG. 15 shows a state where the second bolt member is screwed to the nut member by the first bolt member. The second bolt member 260 penetrates the first bolt member 240 at the second position P2 of the first bolt member 240 and is screwed to the nut member 230. The second bolt member 260 can be screwed to the nut member 230 until the bolt head 261 contacts the bolt head seat 244. The male thread of the second bolt member 260 is screwed to the second thread of the nut member 230, and the female thread of the first bolt member 240 is screwed to the first thread of the nut member 230. As described above, the thread pitch TP2 of the second thread (refer to FIG. 6) is smaller than the thread pitch TP1 of the first thread (refer to FIG. 6). Therefore, if the second bolt member 260 is rotated forward or reverse relative to the nut member 230, the second plate 220 approaches the first plate in the upward direction UD by the screw movement between the second bolt member 260 and the nut member 230 210, or further away from the first plate 210 in the downward direction LD. Thereby, the interval C between the first plate 210 and the second plate 220 secured at the second position P2 of the first bolt member 240 can be accurately adjusted. When the second bolt member 260 rotates, the first bolt member 240 rotates together with the second bolt member 260 along the rotation direction of the second bolt member 260, so that the nut member 230 and the second plate 220 can be accurately moved.

The distance C between the first plate 210 and the second plate 220 attached to the second position P2 of the first bolt member 240 can be adjusted minutely and precisely by the rotation of the second bolt member 260. For example, when the lower end of the probe 102 is worn and the length of the probe 102 becomes shorter, the second plate 220 can move so that the interval C becomes narrower by the rotation of the second bolt member 260. That is, the distance C between the first plate 210 and the second plate 220 can be adjusted by using the second bolt member 260 without disassembling the first plate 210 and the second plate 220. In this way, the life of the probe card can be increased.

FIG. 16 shows a state where the first bolt member is fixed to the second position by the stopper. After the second bolt member 260 is screwed to the nut member 230, the stopper 250 can be fixed to the first circuit board assembly. For example, the stopper 250 fastens the clamping bolt 252 to the first reinforcement 112, whereby the stopper 250 can be attached to the first reinforcement 112 in contact with the first bolt member 240. The stopper 250 attached to the first reinforcement 112 restrains the first bolt member 240 so that the interval C between the first plate 210 and the second plate 220 can be maintained.

The nut member, the first bolt member, and the second bolt member may have shapes and arrangements different from those shown in the accompanying drawings. As an embodiment, the nut body may have a first portion forming a first thread, and a second portion having a diameter smaller than the first portion and extending from the first portion and having a second thread formed on an outer circumferential surface. In this example, the bolt body of the second bolt member may have a hollow cylindrical shape, and may have a female thread combined with the second thread of the male thread of the nut body on its inner circumferential surface. As an embodiment, the inner peripheral surface of the hollow nut body may have a first thread of a female thread and a second thread of a female thread smaller than the diameter of the first thread. The bolt body of the first bolt member may have The male thread of the first screw thread, and the bolt body of the second bolt member may have a male thread screwed with the second thread on the outer peripheral surface.

As an embodiment, the probe card may include only the above-mentioned first circuit board assembly. In this example, the printed circuit board that can be the first circuit board assembly includes a device that can fix the probe head to the printed circuit board.

In the above embodiments, the shape of the stopper and the position of the circuit board assembly on which the stopper is mounted are only examples. As long as the stopper can fix the first bolt member at the second position, it can have various shapes and can be attached to the probe card or probe head by various devices.

The shape of the probe shown in the figure is only an example. In one embodiment, the probe card may use a pogo pin probe or a pin probe. In yet another embodiment, the probe card may use a probe with an offset between the upper end and the lower end.

In the above, the technical idea of the present invention has been described through a part of the embodiments and the examples shown in the accompanying drawings, but it should be understood that the present invention can be understood without departing from the common understanding of those skilled in the technical field to which the present invention belongs Various replacements, changes and changes are made within the scope of technical ideas and scope. In addition, such replacements, changes, and alterations shall be deemed to fall within the scope of the accompanying patent application for invention.

10: Device under inspection 11: Terminal 20: Inspection device 21: Probe 22: Test machine 23: Transport device 100: probe card 101: Circuit board assembly 102: Probe 110: first circuit board assembly 111: printed circuit board 112: 1st reinforcement 113: 2nd reinforcement 114: connector 115: slot 116: Align the hole 117: bolt head seat 118: Align hole 119: screw hole 120: Second circuit board assembly 121: Multilayer organic circuit board 122: 3rd reinforcement 123: Interpolator 124: circuit board cover 125: bolt 126: opening 127: Probe head housing 128: Align hole 129: Align hole 200: Probe head 210: 1st board 211: 1st probe hole 220: 2nd board 221: Second probe hole 230: nut member 231: nut head 232: Nut body 233: 1st thread 234: 2nd thread 240: 1st bolt member 241: bolt head 242: Bolt body 243: Female thread 244: Bolt head seat 245: through hole 250: stopper 251: through hole 252: clamping bolt 260: 2nd bolt member 261: Bolt head 262: Bolt body 263: Male thread C: interval L1: 1st protrusion length L2: 2nd protrusion length LD: downward direction P1: 1st position P2: 2nd position TP1: pitch of the first thread TP2: pitch of the second thread UD: Upward direction VD: vertical direction

FIG. 1 schematically shows a probe card having an embodiment of a probe head according to an embodiment. FIG. 2 is a bottom perspective view of a probe card according to an embodiment. 3 is an exploded perspective view of the probe card according to an embodiment. 4 is an exploded perspective view of a probe card according to an embodiment. Fig. 5 is a cross-sectional view taken along line 5-5 of Fig. 2. 6 is a cross-sectional view showing a nut member, a first bolt member, and a second bolt member. 7 is a perspective view of a probe card according to an embodiment without a probe head. FIG. 8 is a perspective view showing an example of assembly of a probe card according to an embodiment, which shows a circuit board assembly and a probe head. FIG. 9 shows an example where the probe is first inserted into the first board and the second board which are in close contact with each other. 10 is a perspective view showing an example of the assembly of the probe card of an embodiment, which shows the probe head mounted on the circuit board assembly. FIG. 11 shows a nut member and a first bolt member of the probe head mounted on the circuit board assembly. FIG. 12 shows an example of holding the probe by the probe head of an embodiment, and shows a case where the first bolt member is coupled to the nut member at the first position. FIG. 13 is a view similar to FIG. 12 and shows a state where the first bolt member is coupled to the nut member at the second position. Fig. 14 shows still another example of holding the probe by the probe head of an embodiment. Fig. 15 is a view similar to Fig. 14 and shows a state where the second bolt member is coupled to the nut member. Fig. 16 shows a probe head which is an embodiment of a circuit board assembly.

102: Probe

111: printed circuit board

112: 1st reinforcement

116: Align the hole

117: bolt head seat

118: Align hole

119: screw hole

121: Multilayer organic circuit board

122: 3rd reinforcement

124: circuit board cover

128: Align hole

129: Align hole

210: 1st board

220: 2nd board

230: nut member

231: nut head

232: Nut body

240: 1st bolt member

241: bolt head

242: Bolt body

244: Bolt head seat

245: through hole

250: stopper

251: through hole

252: clamping bolt

260: 2nd bolt member

261: Bolt head

262: Bolt body

C: interval

L2: 2nd protrusion length

LD: downward direction

P2: 2nd position

UD: Upward direction

VD: vertical direction

Claims (19)

A probe head is a probe head for fixing a plurality of probes in contact with a device to be inspected in a circuit board assembly electrically connected to an inspection device, which comprises: The first board, which holds the above-mentioned plural probes; The second board, which holds the plurality of probes, is arranged below the first board; Nut member, which is coupled to the second plate; and The first bolt member is screwed to the nut member at the first position and the second position by the circuit board assembly, and is screwed to the nut member at the first position so that the first plate and the second plate It is in close contact and screwed to the nut member at the second position so that the second plate is separated from the first plate. The probe head according to claim 1, wherein the first plate and the second plate in close contact at the first position hold the plurality of probes, and the first plate and the second plate are separated at the second position Keep the probes above. The probe head according to claim 1, wherein the plurality of probes each have a first protruding length protruding from the second plate at the first position of the first bolt member, and shorter than the first protruding length and The second position at which the second position of the first bolt member protrudes from the second plate. The probe head according to claim 1, wherein the nut member is coupled to the upper surface of the second plate and penetrates the first plate. The probe head according to claim 1, further includes a stopper for fixing the first bolt member to the second position. The probe head according to claim 5, wherein the stopper comes into contact with the first bolt member at the second position and is fixed to the circuit board assembly. The probe head according to claim 1, further comprising a second bolt member which is in contact with the first bolt member and is screwed to the nut member by the first bolt member, The rotation of the second bolt member moves the second plate relative to the first plate by the nut member. The probe head according to claim 7, wherein the nut member has a first screw thread screwed to the first bolt member, and a second screw thread screwed to the second bolt member. The probe head according to claim 8, wherein the pitch of the second thread is smaller than the pitch of the first thread. The probe head according to claim 8, wherein the nut member includes a nut body having the first screw thread formed on the outer peripheral surface and a hollow second screw thread formed on the inner peripheral surface, The first bolt member includes a bolt head that supports the hollow of the second bolt member, and a bolt body having a female thread hollow on the inner peripheral surface that is screwed into the first thread of the nut member. The probe head according to claim 7, wherein the second bolt member is screwed to the nut member at the second position of the first bolt member. A probe card is a probe card containing the following components: The circuit board assembly, which is connected to the inspection device in a conductive manner; A plurality of probes, which are in contact with the device under inspection; A probe head, which is combined with the circuit board assembly and fixes the plurality of probes; and The above probe head includes: The first board, which holds the above-mentioned plural probes; The second board, which holds the plurality of probes, is arranged below the first board; Nut member, which is coupled to the second plate; and The first bolt member is screwed to the nut member at the first position and the second position by the circuit board assembly, and is screwed to the nut member at the first position so that the first plate and the second plate It is in close contact and screwed to the nut member at the second position so that the second plate is separated from the first plate. The probe card according to claim 12, wherein the first board and the second board in close contact at the first position hold the plurality of probes, and the first board and the second board are separated at the second position Keep the above probes. The probe card according to claim 12, wherein the nut member is coupled to the upper surface of the second plate and penetrates the first plate. The probe card according to claim 12, wherein the probe head further includes a stopper that contacts the first bolt member and is coupled to the circuit board assembly and fixes the first bolt member to the second position. The probe card according to claim 12, wherein the probe head further includes a second bolt member that contacts the first bolt member and is screwed to the nut member by the first bolt member, The rotation of the second bolt member moves the second plate relative to the first plate by the nut member. The probe card according to claim 16, wherein the nut member includes a first thread formed on the outer circumferential surface to be screwed with the first bolt member and a second thread formed on the inner circumferential surface to be screwed with the second bolt member Hollow nut body, The first bolt member includes a bolt head that supports the hollow of the second bolt member, and a bolt body having a female thread hollow on the inner peripheral surface that is screwed into the first thread of the nut member. The probe card according to claim 17, wherein the thread pitch of the second thread is smaller than the thread pitch of the first thread. The probe card according to claim 12, wherein the above circuit board assembly includes: The first circuit board assembly, which is electrically connected to the above inspection device; and The second circuit board assembly is electrically connected to the first circuit board assembly and adjusts the terminal pitch between the terminals of the first circuit board assembly to the probe pitch between the plurality of probes.

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