JP6608296B2 - ネガティブ型感光性樹脂組成物、これを用いて形成された光硬化パターンおよび画像表示装置 - Google Patents
ネガティブ型感光性樹脂組成物、これを用いて形成された光硬化パターンおよび画像表示装置 Download PDFInfo
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- JP6608296B2 JP6608296B2 JP2016018958A JP2016018958A JP6608296B2 JP 6608296 B2 JP6608296 B2 JP 6608296B2 JP 2016018958 A JP2016018958 A JP 2016018958A JP 2016018958 A JP2016018958 A JP 2016018958A JP 6608296 B2 JP6608296 B2 JP 6608296B2
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- 239000011342 resin composition Substances 0.000 title claims description 55
- 238000000016 photochemical curing Methods 0.000 title claims description 18
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- 239000011347 resin Substances 0.000 claims description 83
- 239000000126 substance Substances 0.000 claims description 31
- 239000000178 monomer Substances 0.000 claims description 29
- 150000001875 compounds Chemical class 0.000 claims description 23
- 238000001723 curing Methods 0.000 claims description 17
- 239000002904 solvent Substances 0.000 claims description 17
- 239000003999 initiator Substances 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 15
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 8
- 229920000642 polymer Polymers 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 239000012752 auxiliary agent Substances 0.000 claims description 5
- 230000000977 initiatory effect Effects 0.000 claims description 5
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- 239000000203 mixture Substances 0.000 claims description 4
- 239000012963 UV stabilizer Substances 0.000 claims description 3
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- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 24
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- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 4
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 3
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- DXPPIEDUBFUSEZ-UHFFFAOYSA-N 6-methylheptyl prop-2-enoate Chemical compound CC(C)CCCCCOC(=O)C=C DXPPIEDUBFUSEZ-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
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- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- VTLHIRNKQSFSJS-UHFFFAOYSA-N [3-(3-sulfanylbutanoyloxy)-2,2-bis(3-sulfanylbutanoyloxymethyl)propyl] 3-sulfanylbutanoate Chemical compound CC(S)CC(=O)OCC(COC(=O)CC(C)S)(COC(=O)CC(C)S)COC(=O)CC(C)S VTLHIRNKQSFSJS-UHFFFAOYSA-N 0.000 description 3
- IPTNXMGXEGQYSY-UHFFFAOYSA-N acetic acid;1-methoxybutan-1-ol Chemical compound CC(O)=O.CCCC(O)OC IPTNXMGXEGQYSY-UHFFFAOYSA-N 0.000 description 3
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- 150000001346 alkyl aryl ethers Chemical class 0.000 description 3
- 150000008366 benzophenones Chemical class 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 3
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- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
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- 125000006850 spacer group Chemical group 0.000 description 3
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- PSGCQDPCAWOCSH-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) prop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C=C)CC1C2(C)C PSGCQDPCAWOCSH-UHFFFAOYSA-N 0.000 description 2
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
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- 125000004182 2-chlorophenyl group Chemical group [H]C1=C([H])C(Cl)=C(*)C([H])=C1[H] 0.000 description 2
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- 239000000600 sorbitol Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 description 1
- LVEOKSIILWWVEO-UHFFFAOYSA-N tetradecyl 3-(3-oxo-3-tetradecoxypropyl)sulfanylpropanoate Chemical compound CCCCCCCCCCCCCCOC(=O)CCSCCC(=O)OCCCCCCCCCCCCCC LVEOKSIILWWVEO-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical class [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- XOALFFJGWSCQEO-UHFFFAOYSA-N tridecyl prop-2-enoate Chemical compound CCCCCCCCCCCCCOC(=O)C=C XOALFFJGWSCQEO-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 230000002087 whitening effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Polymerisation Methods In General (AREA)
- Graft Or Block Polymers (AREA)
Description
アルカリ可溶性樹脂(A)、光重合モノマー(B)、光重合開始剤(C)、および溶剤(D)を含み、
前記アルカリ可溶性樹脂(A)は、下記化学式1の繰り返し単位を含む第1樹脂、および下記化学式2の繰り返し単位を含む第2樹脂を含むことを特徴とするネガティブ型感光性樹脂組成物を提供する。
アルカリ可溶性樹脂(A)、光重合モノマー(B)、光重合開始剤(C)、および溶剤(D)を含み、
前記アルカリ可溶性樹脂(A)は、下記化学式1の繰り返し単位を含む第1樹脂、および下記化学式2の繰り返し単位を含む第2樹脂を含むことを特徴とするネガティブ型感光性樹脂組成物を提供する。
本発明の感光性樹脂組成物に含まれるアルカリ可溶性樹脂(A)は、パターンを形成する時の現像処理工程で用いられるアルカリ現像液に対して可溶性を付与する成分で、下記化学式1の繰り返し単位を含む第1樹脂、および下記化学式2の繰り返し単位を含む第2樹脂を含むことを特徴とする。
フマル酸、メサコン酸、イタコン酸などのジカルボン酸類およびこれらの無水物;
ビニルトルエン、p−クロロスチレン、スチレン、α−メチルスチレン、o−メトキシスチレン、m−メトキシスチレン、p−メトキシスチレン、o−ビニルベンジルメチルエーテル、m−ビニルベンジルメチルエーテル、p−ビニルベンジルメチルエーテル、o−ビニルベンジルグリシジルエーテル、m−ビニルベンジルグリシジルエーテル、p−ビニルベンジルグリシジルエーテルなどの芳香族ビニル化合物;
酢酸ビニル、プロピオン酸ビニルなどのカルボン酸ビニルエステル化合物;
(メタ)アクリロニトリル、α−クロロアクリロニトリルなどのシアン化ビニル化合物;
ω−カルボキシポリカプロラクトンモノ(メタ)アクリレートなどの両末端にカルボキシ基と水酸基を有するポリマーのモノ(メタ)アクリレート類;
メチル(メタ)アクリレート、エチル(メタ)アクリレート、n−プロピル(メタ)アクリレート、i−プロピル(メタ)アクリレート、n−ブチル(メタ)アクリレート、i−ブチル(メタ)アクリレート、sec−ブチル(メタ)アクリレートなどのアルキル(メタ)アクリレート類;
シクロペンチル(メタ)アクリレート、2−メチルシクロヘキシル(メタ)アクリレート、2−ジシクロペンタニルオキシエチル(メタ)アクリレート、シクロヘプチル(メタ)アクリレートなどの脂環族(メタ)アクリレート類;
フェニル(メタ)アクリレート、ベンジル(メタ)アクリレート、フェノキシ(メタ)アクリレートなどのアリール(メタ)アクリレート類;
炭素数4〜16のシクロアルカンまたはジシクロアルカン環で置換された(メタ)アクリレート類;
3−(メタクリロイルオキシメチル)オキセタン、3−(メタクリロイルオキシメチル)−3−エチルオキセタン、3−(メタクリロイルオキシメチル)−2−トリフルオロメチルオキセタン、3−(メタクリロイルオキシメチル)−2−フェニルオキセタン、2−(メタクリロイルオキシメチル)オキセタン、2−(メタクリロイルオキシメチル)−4−トリフルオロメチルオキセタンなどの不飽和オキセタン化合物;メチルグリシジル(メタ)アクリレートなどの不飽和オキシラン化合物;などから選択された1種または2種以上が挙げられ、より好ましくは、(メタ)アクリル系単量体が使用できる。
本発明の感光性樹脂組成物に含まれる光重合モノマー(B)は、後述する光重合開始剤(C)の作用で重合可能なモノマーであって、二重結合を含み、光重合開始剤によって生成されたラジカルと反応する。前記光重合モノマーは、他の光重合モノマーまたはアルカリ可溶性樹脂と結合して架橋結合を形成することができる。
エチレングリコールジ(メタ)アクリレート、トリエチレングリコールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、3−メチルペンタンジオールジ(メタ)アクリレート、1,6−ヘキサンジオールジ(メタ)アクリレート、ジペンタエリスリトールヘキサアクリレート(dipentaerythritol hexaacrylate)、ペンタエリスリトールトリアクリレート(pentaerythritol triacrylate)、ペンタエリスリトールテトラアクリレート(pentaerythritol tetraacrylate)、トリメチルプロパントリアクリレート(trimethylpropane triacrylate)、トリメチルプロパントリメタクリレート(trimethylpropane trimethacrylate)、グリセロールトリアクリレート(glycerol triacrylate)、トリス(2−ヒドロキシエチル)イソシアヌレート トリアクリレート[tris(2−hydroxyethyl)isocyanurate triacrylate]、エトキシレーテッドトリメチロールプロパントリアクリレート(Ethoxylated trimethylolpropane triacrylate)、ジ−トリメチルプロパンテトラアクリレート(di−trimethylpropane tetraacrylate)、ジペンタエリスリトールペンタクリレート(dipentaerythritol pentaacrylate)、またはペンタエリスリトールテトラアクリレート(pentaerythritol tetraacrylate)などが挙げられる。これらは、それぞれ単独でまたは2種以上が混合されて使用できる。
本発明の感光性樹脂組成物に含まれる光重合開始剤(C)は、一定波長の光によって活性化する化合物であって、光によってラジカル(radical)を発生し、上述した光重合モノマー(B)を重合させることができるものであれば、その種類を特に制限することなく使用できる。例えば、アセトフェノン系化合物、ベンゾフェノン系化合物、トリアジン系化合物、ビイミダゾール系化合物、チオキサントン系化合物、オキシムエステル系化合物からなる群より選択された1種以上の化合物が使用でき、より好ましくは、オキシムエステル系化合物が使用できる。
本発明の感光性樹脂組成物に含まれる溶剤(D)は特に制限されず、当該分野で通常使用されるものであれば制限なく使用できる。
ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、ジエチレングリコールエチルメチルエーテル、ジエチレングリコールジプロピルエーテル、ジエチレングリコールジブチルエーテルなどのジエチレングリコールジアルキルエーテル類;
メチルセロソルブアセテート、エチルセロソルブアセテート、エチレングリコールモノブチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテートなどのエチレングリコールアルキルエーテルアセテート類;
プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノプロピルエーテルアセテート、メトキシブチルアセテート、メトキシペンチルアセテートなどのアルキレングリコールアルキルエーテルアセテート類;
プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノブチルエーテルなどのプロピレングリコールモノアルキルエーテル類;
プロピレングリコールジメチルエーテル、プロピレングリコールジエチルエーテル、プロピレングリコールエチルメチルエーテル、プロピレングリコールジプロピルエーテルプロピレングリコールプロピルメチルエーテル、プロピレングリコールエチルプロピルエーテルなどのプロピレングリコールジアルキルエーテル類;
プロピレングリコールメチルエーテルプロピオネート、プロピレングリコールエチルエーテルプロピオネート、プロピレングリコールプロピルエーテルプロピオネート、プロピレングリコールブチルエーテルプロピオネートなどのプロピレングリコールアルキルエーテルプロピオネート類;
メトキシブチルアルコール、エトキシブチルアルコール、プロポキシブチルアルコール、ブトキシブチルアルコールなどのブチルジオールモノアルキルエーテル類;
メトキシブチルアセテート、エトキシブチルアセテート、プロポキシブチルアセテート、ブトキシブチルアセテートなどのブタンジオールモノアルキルエーテルアセテート類;
メトキシブチルプロピオネート、エトキシブチルプロピオネート、プロポキシブチルプロピオネート、ブトキシブチルプロピオネートなどのブタンジオールモノアルキルエーテルプロピオネート類;
ジプロピレングリコールジメチルエーテル、ジプロピレングリコールジエチルエーテル、ジプロピレングリコールメチルエチルエーテルなどのジプロピレングリコールジアルキルエーテル類;
ベンゼン、トルエン、キシレン、メシチレンなどの芳香族炭化水素類;
メチルエチルケトン、アセトン、メチルアミルケトン、メチルイソブチルケトン、シクロヘキサノンなどのケトン類;
エタノール、プロパノール、ブタノール、ヘキサノール、シクロヘキサノール、エチレングリコール、グリセリンなどのアルコール類;
酢酸メチル、酢酸エチル、酢酸プロピル、酢酸ブチル、2−ヒドロキシプロピオン酸エチル、2−ヒドロキシ−2−メチルプロピオン酸メチル、2−ヒドロキシ−2−メチルプロピオン酸エチル、ヒドロキシ酢酸メチル、ヒドロキシ酢酸エチル、ヒドロキシ酢酸ブチル、乳酸メチル、乳酸エチル、乳酸プロピル、乳酸ブチル、3−ヒドロキシプロピオン酸メチル、3−ヒドロキシプロピオン酸エチル、3−ヒドロキシプロピオン酸プロピル、3−ヒドロキシプロピオン酸ブチル、2−ヒドロキシ−3−メチルブタン酸メチル、メトキシ酢酸メチル、メトキシ酢酸エチル、メトキシ酢酸プロピル、メトキシ酢酸ブチル、エトキシ酢酸メチル、エトキシ酢酸エチル、エトキシ酢酸プロピル、エトキシ酢酸ブチル、プロポキシ酢酸メチル、プロポキシ酢酸エチル、プロポキシ酢酸プロピル、プロポキシ酢酸ブチル、ブトキシ酢酸メチル、ブトキシ酢酸エチル、ブトキシ酢酸プロピル、ブトキシ酢酸ブチル、2−メトキシプロピオン酸メチル、2−メトキシプロピオン酸エチル、2−メトキシプロピオン酸プロピル、2−メトキシプロピオン酸ブチル、2−エトキシプロピオン酸メチル、2−エトキシプロピオン酸エチル、2−エトキシプロピオン酸プロピル、2−エトキシプロピオン酸ブチル、2−ブトキシプロピオン酸メチル、2−ブトキシプロピオン酸エチル、2−ブトキシプロピオン酸プロピル、2−ブトキシプロピオン酸ブチル、3−メトキシプロピオン酸メチル、3−メトキシプロピオン酸エチル、3−メトキシプロピオン酸プロピル、3−メトキシプロピオン酸ブチル、3−エトキシプロピオン酸メチル、3−エトキシプロピオン酸エチル、3−エトキシプロピオン酸プロピル、3−エトキシプロピオン酸ブチル、3−プロポキシプロピオン酸メチル、3−プロポキシプロピオン酸エチル、3−プロポキシプロピオン酸プロピル、3−プロポキシプロピオン酸ブチル、3−ブトキシプロピオン酸メチル、3−ブトキシプロピオン酸エチル、3−ブトキシプロピオン酸プロピル、3−ブトキシプロピオン酸ブチルなどのエステル類;
テトラヒドロフラン、ピランなどの環状エーテル類;
γ−ブチロラクトンなどの環状エステル類などが挙げられる。ここで例示した溶剤は、それぞれ単独でまたは2種以上を混合して使用できる。
本発明の感光性樹脂組成物は、前記成分のほか、必要に応じて、充填剤、光重合開始補助剤、UV安定剤、他の高分子化合物、硬化剤、レベリング剤、連鎖移動剤、密着促進剤、酸化防止剤、および凝集防止剤などの添加剤を追加でさらに含むことができる。
製造例1.アルカリ可溶性樹脂(第1樹脂)の合成
還流冷却器、滴下漏斗および撹拌機を備えた1Lのフラスコ内に、窒素を0.02L/minで流して窒素雰囲気とし、メチルエチルジエチレングリコール300重量部を入れて、撹拌しながら70℃まで加熱した。次に、ノルボルネン(norbornene)20重量部、スチレン30重量部、メタクリル酸45重量部、3−アクリロイルオキシ−2−ヒドロキシプロピルメタクリレート(3−Acryloyloxy−2−hydroxypropyl methacrylate)135重量部を、メチルエチルジエチレングリコール140重量部に溶解して溶液を調製した。
還流冷却器、滴下漏斗および撹拌機を備えた1Lのフラスコ内を窒素雰囲気とし、メチルエチルジエチレングリコール300重量部を入れて、撹拌しながら70℃まで加熱した。次に、下記化学式4および化学式5の混合物(モル比は50:50)300重量部、(3−エチルオキセタン−3−イル)メチルメタクリレート((3−ethyloxetan−3−yl)methyl methacrylate)150重量部、およびメタクリル酸50重量部を、メチルエチルジエチレングリコール140重量部に溶解して溶液を調製した。
ノルボルネン(norbornene)を添加しなかったことを除き、前記製造例1と同様の方法でアルカリ可溶性樹脂を製造して、固形分35.5重量%、酸価が123.7mgKOH/g(固形分換算)の共重合体(A−3)の溶液を得た。
3−アクリロイルオキシ−2−ヒドロキシプロピルメタクリレート(3−Acryloyloxy−2−hydroxypropyl methacrylate)を添加しなかったことを除き、前記製造例1と同様の方法でアルカリ可溶性樹脂を製造して、固形分35.5重量%、酸価が123.7mgKOH/g(固形分換算)の共重合体(A−4)の溶液を得た。
(3−エチルオキセタン−3−イル)メチルメタクリレート((3−ethyloxetan−3−yl)methyl methacrylate)を添加しなかったことを除き、前記製造例2と同様の方法でアルカリ可溶性樹脂を製造して、固形分36.7重量%、酸価59mgKOH/g(固形分換算)の共重合体(A−5)の溶液を得た。
下記表1に記載された組成および含有量で混合し、3時間撹拌して、ネガティブ型感光性樹脂組成物を製造した。溶剤として、ジエチレングリコールメチルエチルエーテル(MEDG):プロピレングリコールモノメチルエーテルアセテート(PGMEA)=40:60(v/v)を70重量%として使用した。
(A)アルカリ可溶性樹脂
A−1:製造例1の樹脂
A−2:製造例2の樹脂
A−3:製造例3の樹脂
A−4:製造例4の樹脂
A−5:製造例5の樹脂
(B)光重合モノマー
B−1:ジペンタエリスリトールヘキサアクリレート
B−2:エトキシレーテッドトリメチルプロパントリアクリレート(Ethoxylated trimethylpropane triacrylate)
(C)光重合開始剤
C−1:
C−3:2,4−ジエチルチオキサントン(2,4−Diethyl thioxanthone(C−DETX))
(E)添加剤
E−1:ペンタエリスリトールテトラキス(3−メルカプトブチレート)(Pentaerythritol Tetrakis(3−mercaptobutylate))
ITO膜を成膜した横縦2インチのガラス基板(イーグル2000;コーニング社製)を、中性洗剤、水、およびアルコールで順次洗浄した後、乾燥した。この基板上に、前記実施例1〜12および比較例1〜7で製造された感光性樹脂組成物をそれぞれスピンコーティングした後、ホットプレート(Hot plate)を用いて、90℃で120秒間プリベークした。前記プリベークした基板を常温に冷却後、石英ガラス製フォトマスクとの間隔を150μmとして、露光器(UX−1100SM;Ushio(株)製)を用いて、60mJ/cm2の露光量(365nm基準)で光を照射した。
90℃で1時間加熱して硬化段階を経た塗膜を、50℃のetchant(MA−S02、東友ファインケム)溶液(耐酸性評価)、または50℃のstripper(SAM−19、東友ファインケム)溶液(耐剥離液性評価)にそれぞれ10分間浸漬した。前記複数の溶液に放置した時の厚さ変化を観察することにより、耐化学性評価を実施した。厚さ変化率は下記数式1で計算し、厚さ変化率が少ないほど好ましいといえる。評価した結果を下記表2に記載した。
[数式1]
厚さ変化率(%)={(溶液放置前の膜厚さ−溶液放置後の膜厚さ)/(溶液放置前の膜厚さ)}X100(%)
90℃で1時間加熱して硬化段階を経た塗膜を、50℃のetchant(MA−S02、東友ファインケム)溶液(耐酸性)、または50℃のstripper(SAM−19、東友ファインケム)溶液(耐剥離液性)にそれぞれ2分間浸漬した。
<密着性評価基準>
5B:剥離0%
4B:剥離0%超過〜5%未満
3B:剥離5〜15%未満
2B:剥離15〜35%未満
1B:剥離35〜65%未満
0B:65%以上
実施例1〜12および比較例1〜7で製造された感光性樹脂組成物を、23℃の保管条件で60日間保管して粘度変化を観察し、結果を下記表2に記載した。
<保管安定性評価基準>
粘度変化が2cp以上:X
粘度変化が2cp未満:○
前記実施例1〜12および比較例1〜7の感光性樹脂組成物に対して、それぞれUv−vis spectrometer[V−650;日本分光(株)製](石英セル、光路長さ;1cm)を用いて、400nmにおける平均透過率を測定した。結果を下記表2に記載した。
Claims (10)
- 前記アルカリ可溶性樹脂の第1樹脂および第2樹脂のうちの少なくとも1つは、(メタ)アクリル系単量体由来の繰り返し単位を追加的に含むことを特徴とする請求項1に記載のネガティブ型感光性樹脂組成物。
- アルカリ可溶性樹脂に含まれる第1樹脂と第2樹脂は、1:1〜1:15の重量比であることを特徴とする請求項1〜3のいずれか1項に記載のネガティブ型感光性樹脂組成物。
- 前記第1樹脂および第2樹脂の重量平均分子量は、4,000〜25,000であることを特徴とする請求項1〜4のいずれか1項に記載のネガティブ型感光性樹脂組成物。
- 100〜150℃の温度で硬化が可能であることを特徴とする請求項1〜5のいずれか1項に記載のネガティブ型感光性樹脂組成物。
- 前記感光性樹脂組成物は、充填剤、光重合開始補助剤、UV安定剤、他の高分子化合物、硬化剤、レベリング剤、連鎖移動剤、密着促進剤、酸化防止剤、および凝集防止剤から選択される1種以上を追加的に含むことを特徴とする請求項1〜6のいずれか1項に記載のネガティブ型感光性樹脂組成物。
- 感光性樹脂組成物中の固形分の総重量に対して、
前記アルカリ可溶性樹脂10〜90重量%;
前記光重合モノマー5〜70重量%;および
前記光重合開始剤0.1〜20重量%を含み、
感光性樹脂組成物の総重量に対して、
前記溶剤40〜95重量%を含むことを特徴とする請求項1〜7のいずれか1項に記載のネガティブ型感光性樹脂組成物。 - 請求項1〜8のいずれか1項に記載のネガティブ型感光性樹脂組成物で形成される光硬化パターン。
- 請求項9に記載の光硬化パターンを含む画像表示装置。
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