JP6599187B2 - 空気ばねを備えた防振装置 - Google Patents
空気ばねを備えた防振装置 Download PDFInfo
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- JP6599187B2 JP6599187B2 JP2015184568A JP2015184568A JP6599187B2 JP 6599187 B2 JP6599187 B2 JP 6599187B2 JP 2015184568 A JP2015184568 A JP 2015184568A JP 2015184568 A JP2015184568 A JP 2015184568A JP 6599187 B2 JP6599187 B2 JP 6599187B2
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- JP
- Japan
- Prior art keywords
- vibration
- leaf spring
- vibration isolator
- flexible rod
- air spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F13/00—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs
- F16F13/002—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs comprising at least one fluid spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
- F16F15/0275—Control of stiffness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Vibration Prevention Devices (AREA)
- Springs (AREA)
- Fluid-Damping Devices (AREA)
Description
2 ベース部
3 ヘッド部
4 作動空間
5 ピストン
6 延出部
7 可撓性ロッド
8 膜
9 板ばねアセンブリ
10 板ばね
11 スペーサーリング
12 ねじ
13 クランプリング
14 ハウジング
15 ねじ
16 ねじ
17 ねじ
18 ねじ
19 ねじ
20 底部
21 板ばねアセンブリ
22 スペーサーリング
23 外リング
24 穴
25 ばねセグメント
26 内リング
27 穴
28 制御装置
29 センサー
30 防振システム
31 台
Claims (13)
- 空気ばねを備える防振装置(1)であって、前記空気ばねは、可撓性ロッド(7)によりヘッド部(3)と接続され、前記可撓性ロッド(7)は、垂直方向に有効な少なくとも1つの板ばね(10)によりベース部(2)に連結される、防振装置。
- 前記空気ばねは、延出部(6)を有するピストン(5)を含み、前記可撓性ロッド(7)は、該可撓性ロッド(7)の少なくとも一部が前記延出部(6)内に配置される、請求項1に記載の防振装置。
- 前記延出部(6)は、前記ピストン(5)の作動空間(4)内に突出する、請求項2に記載の防振装置。
- 前記可撓性ロッド(7)は、前記作動空間(4)の高さの少なくとも半分を超えて前記作動空間(4)内に突出する、請求項3に記載の防振装置。
- 前記板ばね(10)は板ばねアセンブリ(9)の一部である、請求項1〜4のいずれか1項に記載の防振装置。
- 前記板ばねアセンブリ(9)の板ばね(10)は、スペーサーリング(11)によって離間している、請求項5に記載の防振装置。
- 前記板ばね(10)は、平行につながった複数のばねセグメントを含む、請求項1〜6のいずれか1項に記載の防振装置。
- 前記空気ばねはピストン(5)を含み、前記板ばね(10)は、前記ピストン(5)に結合される内リング(26)と、前記ベース部(2)に結合される外リング(23)とを含む、請求項7に記載の防振装置。
- 垂直方向及び/又は水平方向に5Hz超の固有振動数を有する、請求項1〜8のいずれか1項に記載の防振装置。
- 前記可撓性ロッド又は前記板ばねは、剛性を調整するように交換可能である、請求項1〜9のいずれか1項に記載の防振装置。
- 防振システム(30)であって、請求項1〜10のいずれか1項に記載の防振装置(1)を複数備える、防振システム。
- 該防振システムは、振動、又は、前記防振装置の前記ヘッド部により支持されている部材の位置を検出する少なくとも1つのセンサー(29)と、該センサーに接続される、前記空気ばねの流体供給に用いる制御装置(28)とを有する、請求項11に記載の防振システム。
- 前記防振装置の前記ヘッド部により支持されている部材の高さは前記空気ばねにより調整可能である、請求項12に記載の防振システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14185342.4A EP2998611B1 (de) | 2014-09-18 | 2014-09-18 | Schwingungsisolator mit pneumatischer Feder |
EP14185342.4 | 2014-09-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016061443A JP2016061443A (ja) | 2016-04-25 |
JP6599187B2 true JP6599187B2 (ja) | 2019-10-30 |
Family
ID=51584975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015184568A Active JP6599187B2 (ja) | 2014-09-18 | 2015-09-18 | 空気ばねを備えた防振装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9869364B2 (ja) |
EP (1) | EP2998611B1 (ja) |
JP (1) | JP6599187B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3181944B1 (de) | 2015-12-16 | 2023-04-26 | Integrated Dynamics Engineering GmbH | Schwingungsisolator mit einer vertikal wirksamen pneumatischen feder |
EP3260733B1 (de) * | 2016-06-23 | 2019-08-07 | Integrated Dynamics Engineering GmbH | Aktives stationäres schwingungsisolationssystem |
EP3260732B1 (de) | 2016-06-23 | 2019-03-27 | Integrated Dynamics Engineering GmbH | Pneumatischer aktor sowie verfahren zum betrieb eines aktiven schwingungsisolationssystem |
DE102016223707A1 (de) * | 2016-11-29 | 2018-05-30 | Audi Ag | Lageranordnung für ein Fahrzeug sowie Verfahren zur Steuerung einer solchen Lageranordnung |
DE102017109026B4 (de) * | 2017-04-27 | 2019-11-28 | Rainer Holtmann | Dämpfungselement |
CN107035803B (zh) * | 2017-06-05 | 2022-08-23 | 上海核工碟形弹簧制造有限公司 | 一种力值特性可调的碟形弹簧装置 |
NL2022989A (en) * | 2018-05-08 | 2019-11-14 | Asml Netherlands Bv | Vibration isolation system and lithographic apparatus |
EP3597959A1 (de) | 2018-07-17 | 2020-01-22 | Integrated Dynamics Engineering GmbH | Schwingungsisolationssystem sowie dämpfer für ein schwingungsisolationssystem |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS608424U (ja) * | 1983-06-29 | 1985-01-21 | アイシン精機株式会社 | ウエストゲ−トバルブアクチユエ−タ |
FR2730288B1 (fr) * | 1995-02-03 | 1997-04-18 | Mesure Et Inf Mei | Dispositifs de reduction de vibrations a commande active constitues de masses mobiles excitees par des electro aimants selon 2 ou 3 axes |
NL1000810C1 (nl) * | 1995-07-14 | 1997-01-15 | Centa Nederland B V | Trillingsdemper. |
US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
JP3576176B2 (ja) | 1997-07-22 | 2004-10-13 | アーエスエム リソグラフィ ベスローテン フェンノートシャップ | ガス軸受を有する支持装置 |
US6926263B1 (en) * | 2001-04-17 | 2005-08-09 | Technical Manufacturing Corporation | High center of gravity stable pneumatic isolator |
JP3797891B2 (ja) * | 2001-06-13 | 2006-07-19 | 倉敷化工株式会社 | 気体ばね式除振装置 |
GB2404716B (en) * | 2003-08-08 | 2007-07-25 | Ultra Electronics Ltd | A vibration isolation mount and method |
JP4463573B2 (ja) * | 2004-01-22 | 2010-05-19 | 藤倉ゴム工業株式会社 | 除振装置 |
JP3845421B2 (ja) * | 2004-03-23 | 2006-11-15 | 株式会社ケーヒン | 電磁式アクチュエータ |
-
2014
- 2014-09-18 EP EP14185342.4A patent/EP2998611B1/de active Active
-
2015
- 2015-08-19 US US14/829,880 patent/US9869364B2/en active Active
- 2015-09-18 JP JP2015184568A patent/JP6599187B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
EP2998611B1 (de) | 2019-07-24 |
JP2016061443A (ja) | 2016-04-25 |
US9869364B2 (en) | 2018-01-16 |
EP2998611A1 (de) | 2016-03-23 |
US20160084339A1 (en) | 2016-03-24 |
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