JP6589128B2 - ACF sticking device - Google Patents

Description

  The present invention relates to an ACF adhering apparatus for adhering ACF to a substrate.

  In a liquid crystal panel production line, an ACF (Anisotropic Conductive Film) as an adhesive is attached to an electrode as a step prior to a component mounting operation for attaching a component such as a drive circuit to an electrode provided on an edge of a substrate. ACF sticking work is executed. The ACF sticking apparatus used in this ACF sticking operation includes a backup stage that supports the lower surface of the substrate on the base, and drives the pressing tool arranged above the backup stage downward by the pressing tool lifting / lowering means, ACF is pressed against the substrate and attached.

  In such an ACF adhering apparatus, the substrate is usually supported on the backup stage by lowering the substrate side. However, the vertical positioning of the substrate is stabilized by raising the backup stage side with respect to the substrate. There are also known things that can be done. In this type of ACF adhering apparatus, a cylinder with a drive shaft directed in the vertical direction is interposed between the base and the backup stage, and the backup stage is moved up and down by the cylinder ( For example, Patent Document 1).

Japanese Patent No. 4453849

  However, in the configuration in which the backup stage is moved up and down by the cylinder, the pressing force with which the pressing tool presses the ACF against the substrate is directly transmitted to the drive shaft of the cylinder through the backup stage. For this reason, the cylinder needs to have strength that can withstand the pressing force of the pressing tool, and there is a problem that the size of the cylinder may increase and the entire ACF sticking apparatus may increase in size.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an ACF sticking apparatus that is downsized as a whole while raising and lowering a backup stage.

An ACF adhering apparatus according to the present invention includes a base, a backup stage provided on the base and supporting the lower surface of the substrate, a pressing tool disposed above the backup stage, and the pressing tool downward. An ACF adhering device that is driven and includes a pressing tool lifting / lowering means for pressing and adhering the ACF to the substrate whose lower surface is supported by the backup stage, and between the base and the backup stage. An intervening member interposed, and a driving shaft extending in a direction different from the driving direction of the pressing tool by the pressing tool elevating means, and driving the interposing member by the driving shaft to An interposed member drive actuator that moves up and down between a first position that supports the lower surface of the substrate and a second position that is a position below the first position; The intervention member is composed of a linear motion cam having a first horizontal plane and a plane lower than the first horizontal plane on the upper surface, the backup stage includes a cam follower, and the intervention member drive actuator includes the cam follower The backup stage is moved up and down by moving the linear cam in a horizontal direction in contact with the upper surface, and the backup drive stage is positioned at the first position by the intervention member drive actuator. stage, the by abutting said cam follower to said first horizontal plane is indirectly supported by the translation cam, when said intermediate member drive actuator was positioned the backup stage to said second position, said backup stage before lower than the cam follower of the first horizontal plane It is indirectly supported by the linear cam by abutting the surface.
Further, another ACF adhering device of the present invention includes a base, a backup stage provided on the base and supporting the lower surface of the substrate, a pressing tool arranged above the backup stage, An ACF adhering device comprising: a pressing tool elevating means for driving the pressing tool downward and pressing and adhering the ACF to the substrate whose lower surface is supported by the backup stage, the base and the backup An interposition member interposed between the stage and a driving shaft extending in a direction different from the driving direction of the pressing tool by the pressing tool elevating means, and driving the interposition member by the driving shaft And an intervention member drive actuating mechanism that moves the backup stage up and down between a first position that supports the lower surface of the substrate and a second position that is a position below the first position. And a eta, said interposed member is constituted by bending freely link mechanism in the vertical direction, the interposed member drive actuator raises and lowers the backup stage by bending the intermediate member in the vertical direction.

  According to the present invention, in the ACF adhering apparatus, the entire apparatus can be downsized while the backup stage is moved up and down.

The perspective view of the ACF sticking apparatus in 1st Embodiment of this invention. The principal part perspective view of the ACF sticking apparatus in 1st Embodiment of this invention. The principal part side view of the ACF sticking apparatus in 1st Embodiment of this invention. (A) (b) Operation | movement explanatory drawing of the principal part of the ACF sticking apparatus in 1st Embodiment of this invention. (A) (b) Operation | movement explanatory drawing of the principal part of the ACF sticking apparatus in 1st Embodiment of this invention. The perspective view of the ACF sticking apparatus in 1st Embodiment of this invention. The block diagram which shows the control system of the ACF sticking apparatus in 1st Embodiment of this invention. (A) (b) (c) Operation | movement explanatory drawing of the ACF sticking apparatus in 1st Embodiment of this invention. (A) (b) (c) (d) Operation explanatory drawing of the principal part of the ACF sticking apparatus in 1st Embodiment of this invention. The perspective view of the ACF sticking apparatus in 2nd Embodiment of this invention. (A) (b) Operation | movement explanatory drawing of the principal part of the ACF sticking apparatus in 2nd Embodiment of this invention. The perspective view of the ACF sticking apparatus in 3rd Embodiment of this invention. (A) (b) Operation | movement explanatory drawing of the principal part of the ACF sticking apparatus in 3rd Embodiment of this invention. (A) (b) Operation | movement explanatory drawing of the principal part of the ACF sticking apparatus in 3rd Embodiment of this invention.

(First embodiment)
FIG. 1 shows an ACF sticking apparatus 1 according to the first embodiment of the present invention. The ACF adhering apparatus 1 is an apparatus that executes an ACF adhering operation for adhering ACF 3 as an adhesive to an electrode 2d provided on an edge of a substrate 2 in a liquid crystal panel production line. Here, for convenience of explanation, the front-rear direction of the ACF sticking apparatus 1 viewed from the operator OP is the X-axis direction, the left-right direction is the Y-axis direction, and the up-down direction is the Z-axis direction. Moreover, about the front-back direction, let the near side of the ACF sticking apparatus 1 seen from the worker OP be the front, and let the back side seen from the worker OP be the back.

  In FIG. 1, the ACF sticking apparatus 1 includes a substrate moving part 1A and a sticking mechanism part 1B. The substrate moving unit 1 </ b> A includes a substrate holding unit 11 that holds the substrate 2 and a substrate holding unit moving mechanism 12 that moves the substrate holding unit 11. The sticking mechanism 1B has a configuration in which a backup stage 14 and an ACF sticking mechanism 15 are provided on a base 13 provided behind the substrate moving part 1A (see also FIG. 2).

  In FIG. 1, the substrate holding part moving mechanism 12 includes an X-axis table 12a installed extending in the X-axis direction, a Y-axis table 12b moved in the X-axis direction by the X-axis table 12a, and a Y-axis table 12b. A lifting / lowering rotary table 12c moved in the Y-axis direction is provided. A substrate holding unit 11 is attached to the lifting / lowering rotary table 12c. The substrate holding unit 11 has a substrate suction port 11K on the upper surface, and sucks and holds the lower surface of the substrate 2 transferred from another apparatus on the upstream process side at the substrate suction port 11K.

  In FIG. 1, when the X-axis table 12a moves the Y-axis table 12b in the X-axis direction while the substrate holding unit 11 holds the substrate 2, the substrate 2 moves in the X-axis direction, and the Y-axis table 12b rotates up and down. When the table 12c is moved in the Y-axis direction, the substrate 2 is moved in the Y-axis direction. Further, when the lifting / lowering rotary table 12c raises / lowers the substrate holding unit 11, the substrate 2 moves up / down, and when the lifting / lowering rotary table 12c rotates the substrate holding unit 11 around the Z axis, the substrate 2 rotates in a horizontal plane. Thus, the substrate holding part moving mechanism 12 can move the substrate 2 held by the substrate holding part 11 to an arbitrary position.

  2, 3, and 4 (a) and 4 (b), the backup stage 14 is composed of a block-like member having an upper surface 14 </ b> S formed in a horizontal plane, and is connected via a linear motion cam 21 as an interposed member. It is installed in the front area of the base 13. 2 and 3, the ACF adhering mechanism 15 includes a pair of left and right base portions 31 on the base 13, and supports a base plate 32 extending in the XZ plane by the pair of left and right base portions 31. . A tape transport unit 33, a pressing unit 34, and a peeling unit 35 are provided on the front surface of the base plate 32.

  In FIG. 2, the tape transport unit 33 includes a tape supply reel 33a, a plurality of roller members 33b, a cutter unit 33c, and a collection unit 33d. The tape supply reel 33a feeds and supplies the tape member TB (FIG. 1) in which the separator SP is bonded to the tape-shaped ACF3. The plurality of roller members 33b guide and convey the tape member TB supplied by the tape supply reel 33a. The cutter part 33c cuts the tape-shaped ACF 3 on the separator SP at a predetermined interval and cuts it to a predetermined length. The collection unit 33d sucks and collects the separator SP from which the ACF3 is separated from the tape member TB.

  2 and 3, the pressing portion 34 includes a tool lifting cylinder 34a attached to the base plate 32 and a pressing tool 34b which is lifted and lowered by the tool lifting cylinder 34a. The pressing tool 34b extends in the X-axis direction, and the lower surface is a pressing surface. The peeling part 35 includes a peeling member 35a having a pair of pin members, and a peeling cylinder 35b for moving the peeling member 35a in the X-axis direction along a moving groove 35M provided in the lower part of the base plate 32. The peeling member 35a sandwiches the separator SP after the ACF 3 is separated from the tape member TB transported by the tape transport unit 33 between the pair of pin members.

  4A and 4B, the linear motion cam 21 is guided by a guide member 41 provided on the base 13 so as to extend in the X-axis direction and can move in the X-axis direction (that is, in the horizontal direction). ing. A cylinder holding portion 42 is provided in a right region of the linear motion cam 21 on the base 13, and a drive cylinder 43 is held in the cylinder holding portion 42. The drive cylinder 43 is held in a horizontal posture by the cylinder holding portion 42, and the front end portion of the drive shaft (piston rod) 43a is directed leftward. The drive shaft 43a of the drive cylinder 43 has a tip connected to the linear cam 21. When the drive cylinder 43 operates the drive shaft 43a in the left-right direction against the weight of the backup stage 14, the linear cam 21 It moves on the guide member 41 in the X-axis direction (that is, in the horizontal direction). The upper surface of the linear motion cam 21 has a first horizontal surface 21a having a predetermined height with respect to the base 13, and a second horizontal surface 21b having a height lower than that of the first horizontal surface 21a. A slope 21m is formed between the first horizontal surface 21a and the second horizontal surface 21b.

  3 and 4 (a) and 4 (b), a block-like lifting base 44 is attached to the lower front part of the pair of left and right base parts 31. A pair of left and right lifting guides 45 extending in the vertical direction are provided on the front surface of the lifting base 44, and a pair of left and right sliders 14 B provided on the back surface of the backup stage 14 are engaged with the pair of left and right lifting guides 45. Match. Therefore, the backup stage 14 can move only in the vertical direction with respect to the base 13.

  2, 4A, 5B, and 5A and 5B, a roller 14R as a cam follower is provided on the front surface of the lower portion 14K of the backup stage 14. The roller 14R is attached to a rotating shaft 14J that protrudes forward from the lower portion 14K of the backup stage 14 in the Y-axis direction, and is rotatable in a plane parallel to the moving surface (XZ surface) of the linear motion cam 21. .

  The backup stage 14 is indirectly supported by the linear cam 21 by bringing the roller 14 </ b> R into contact with the first horizontal plane 21 a or the second horizontal plane 21 b on the upper surface of the linear cam 21. When the linear motion cam 21 moves in the X-axis direction, the roller 14R rolls on the upper surface of the linear motion cam 21, and contacts the first horizontal surface 21a when the first horizontal surface 21a is positioned below (FIG. 4A). 5 (a)), when the second horizontal surface 21b is located below, the second horizontal surface 21b abuts (FIG. 4 (b) and FIG. 5 (b)). Since the roller 14R is in contact with the upper surface of the linear motion cam 21 by its own weight, the linear motion cam 21 moves in the X-axis direction and the contact surface with the upper surface of the linear motion cam 21 is the first horizontal surface 21a. 14R does not move away from the upper surface of the linear cam 21 even if it changes between the second horizontal surface 21b and the second horizontal surface 21b.

  The height of the upper surface 14S of the backup stage 14 when the roller 14R is in contact with the first horizontal surface 21a of the linear cam 21 is H1 (FIG. 5A), and the roller 14R is the second horizontal surface of the linear cam 21. If the height of the upper surface 14S of the backup stage 14 when in contact with 21b is H2 (FIG. 5B), the height of the second horizontal plane 21b is lower than the height of the first horizontal plane 21a. > H2. Hereinafter, the position of the backup stage 14 when the roller 14R is in contact with the first horizontal surface 21a of the linear cam 21 is referred to as “first position”, and the roller 14R contacts the second horizontal surface 21b of the linear cam 21. The position of the backup stage 14 when in contact is referred to as a “second position”.

  When the backup stage 14 is in the “first position”, the drive cylinder 43 operates to move the linear cam 21 in the X-axis direction, and the roller 14R moves along the slope 21m from the first horizontal surface 21a of the linear cam 21. Then, when moving to the second horizontal plane 21b (FIG. 5 (a) → FIG. 5 (b)), the backup stage 14 descends and is positioned at the “second position”. On the other hand, from the state where the backup stage 14 is located at the “second position”, the drive cylinder 43 operates to move the linear cam 21 in the X-axis direction, and the roller 14R is inclined from the second horizontal surface 21b of the linear cam 21. When moving to the first horizontal surface 21a through 21m (FIG. 5 (b) → FIG. 5 (a)), the backup stage 14 is lifted and positioned at the “first position”.

  Thus, the drive cylinder 43 that is an interposed member drive actuator moves the backup stage 14 up and down by moving the linear cam 21 that is the interposed member in the horizontal direction. Then, the backup stage 14 has a “first position” (FIG. 5A) where the height of the upper surface 14S is the height H1 or a “second position” where the height of the upper surface 14S is H2 (<H1). (Selectively positioned in FIG. 5B. The backup stage 14 supports the lower surface of the substrate 2 in the state of “first position”, and supports the lower surface of the substrate 2 in the state of “second position”. Separated downward from the bottom surface.

  The substrate holder 11 is moved by the substrate holder moving mechanism 12 between a “substrate transfer position” (position shown in FIG. 1) and a “work position” (position shown in FIG. 6). Here, the substrate transfer position is a position at which the substrate 2 is transferred to and from other apparatuses arranged on the upstream process side and the downstream process side. On the other hand, the work position refers to the area of the edge of the substrate 2 held by the substrate holder 11 where the electrode 2d to be ACF attached is provided (hereinafter referred to as “work area”) below the pressing tool 34b. It is a position to be located. When the backup stage 14 rises from the “second position” to the “first position” with the substrate holding part 11 positioned at the work position, the lower surface of the work target area of the substrate 2 is supported by the upper surface 14S of the backup stage 14. Is done.

  As described above, the ACF adhering device 1 according to the first embodiment includes the linear motion cam 21 (intervening member) interposed between the base 13 and the backup stage 14, and the tool lifting / lowering cylinder 34a (pressing tool lifting / lowering means). ) Has a drive shaft 43a extending in a direction (horizontal direction) different from the drive direction (vertical direction) of the pressing tool 34b, and the linear motion cam 21 is driven by the drive shaft 43a to move the backup stage 14 to the lower surface of the substrate 2. A drive cylinder 43 (intervening member drive actuator) that moves up and down between a “first position” that supports the first position and a “second position” that is a position below the “first position”; It has become.

  Next, the execution procedure of the ACF sticking work by the ACF sticking apparatus 1 will be described. As shown in FIG. 7, the ACF sticking apparatus 1 includes a control device 50 that controls the operation of each part such as the substrate holding part 11, the board holding part moving mechanism 12, the ACF sticking mechanism 15, and the drive cylinder 43. The ACF sticking work proceeds as follows by controlling the operation of each part according to a program stored in advance by the control device 50.

  The ACF attaching operation starts when the substrate holding unit 11 located at the substrate transfer position holds the substrate 2 transferred (loaded) from another apparatus on the upstream process side by a substrate carry-in mechanism (not shown). At this time, the backup stage 14 is located at the “second position”, and the height of the upper surface 14S thereof is H2 (FIG. 8A).

  When the substrate holding unit 11 holds the substrate 2, the substrate holding unit moving mechanism 12 adjusts the height of the substrate 2. In the height adjustment of the substrate 2, the substrate holding unit moving mechanism 12 operates the lifting / lowering rotary table 12 c to move the substrate holding unit 11 in the vertical direction, and the height of the lower surface of the substrate 2 held by the substrate holding unit 11 is increased. The height is set to the same height as H1, which is the height of the upper surface 14S of the backup stage 14 positioned at the “first position” (FIG. 8A). The substrate holding part moving mechanism 12 moves the substrate holding part 11 to the working position after adjusting the height of the lower surface of the substrate 2 (FIG. 8B, arrow A shown in the figure).

  The substrate holding part moving mechanism 12 positions the substrate 2 with respect to the pressing tool 34b by moving the substrate holding part 11 in the left-right direction after the substrate holding part 11 is positioned at the working position (substrate positioning step). In this substrate positioning step, the substrate holding part moving mechanism 12 causes the left end of the electrode 2d (hereinafter referred to as “electrode 2d to be ACF attached”) from which the ACF 3 is to be attached to be below the left end of the pressing tool 34b. The substrate holding part 11 is moved so as to be positioned.

  When the substrate holding part moving mechanism 12 positions the substrate 2, the drive cylinder 43 moves the linear cam 21 to raise the backup stage 14 from the “second position” to the “first position” (FIG. 8). (C) Arrow B shown in FIG. As a result, the height of the upper surface 14S of the backup stage 14 becomes H1, and the backup stage 14 supports the work target area of the substrate 2 from below (FIG. 8C).

  When the backup stage 14 supports the work target area of the substrate 2, the ACF adhering mechanism 15 cuts the ACF 3 at a predetermined interval by the cutter unit 33 c while conveying the tape member TB by the tape conveying unit 33 to a predetermined length. A strip-shaped ACF3 having the structure is formed on the separator SP. Then, the tape transport unit 33 is operated so that the rear end (left end) in the traveling direction of the strip-shaped ACF 3 formed on the separator SP is positioned above the left end of the electrode 2d, and the strip-shaped ACF 3 is strip-shaped with respect to the substrate 2. The ACF 3 is positioned (FIG. 9A. ACF positioning step).

  When the ACF adhering mechanism 15 positions the ACF 3 with respect to the substrate 2, the tool elevating cylinder 34a lowers the pressing tool 34b and presses it against the substrate 2 (arrow C1 shown in FIG. 9B). The electrode is pressed against the electrode 2d to be ACF-attached (FIG. 9B. Pressing process). As a result, the ACF 3 is pressed against the substrate 2 together with the separator SP and adhered to the electrode 2d. When the pressing tool 34b is pressed against the substrate 2, the tool lifting cylinder 34a raises the pressing tool 34b (arrow C2 shown in FIG. 9C).

  The pressing force by which the pressing tool 34b presses the ACF 3 against the substrate 2 (electrode 2d) is transmitted from the roller 14R of the backup stage 14 to the base 13 through the linear motion cam 21. The drive shaft 43a of the drive cylinder 43 is connected to the linear cam 21, but the drive shaft 43a of the drive cylinder 43 is different from the vertical direction (here, the drive direction of the pressing tool 34b by the tool elevating cylinder 34a). The horizontal direction extends in a direction perpendicular to the driving direction of the pressing tool 34b. For this reason, most of the pressing force of the pressing tool 34 b is transmitted as it is from the linear motion cam 21 to the base 13, and the pressing force of the pressing tool 34 b is hardly transmitted to the drive shaft 43 a of the drive cylinder 43.

  When the tool elevating cylinder 34a raises the pressing tool 34b, the peeling cylinder 35b moves the peeling member 35a in the X-axis direction (arrow D shown in FIG. 9D). As a result, the peeling member 35a moves in the horizontal direction between the ACF 3 adhered to the substrate 2 and the separator SP, and the separator SP peels from the ACF 3 (peeling step). If ACF3 peels from separator SP, peeling cylinder 35b will return peeling member 35a to an original position.

  When the peeling portion 35 returns to the original position, the drive cylinder 43 moves the linear cam 21 to lower the backup stage 14 from the “first position” to the “second position”. As a result, the height of the upper surface 14S of the backup stage 14 becomes H2, and the backup stage 14 is separated downward from the lower surface of the substrate 2 to release the support of the substrate 2 (substrate support releasing step).

  A series of operations including the above-described substrate positioning step, substrate supporting step, ACF positioning step, pressing step, peeling step, and substrate supporting releasing step is performed by attaching an ACF to an electrode 2d to be attached to one ACF provided on the substrate 2. Is the action. Therefore, when the substrate 2 includes a plurality of electrodes 2d to be ACF-attached, the ACF attaching operation is repeatedly executed to attach ACF3 to all the electrodes 2d to which ACF3 is to be attached. When the ACF attaching operation for all the electrodes 2d to be ACF attached to the substrate 2 is completed, the substrate holding unit moving mechanism 12 returns the substrate holding unit 11 to the substrate transfer position. And if the board | substrate carrying-out mechanism which is not illustrated transfers the board | substrate 2 on the board | substrate holding | maintenance part 11 to the other apparatus of a downstream process side, the ACF sticking operation | work per board | substrate 2 will be complete | finished.

  As explained so far, in the ACF adhering apparatus 1 according to the first embodiment, the linear motion cam 21 interposed between the base 13 and the backup stage 14 is moved by the drive cylinder 43 to thereby move the backup stage 14. Is moved up and down between a “first position” that supports the lower surface of the substrate 2 and a “second position” that is a position below the “first position”. Here, the drive shaft 43a of the drive cylinder 43 that drives the linear cam 21 is a direction different from the vertical direction that is the drive direction of the pressing tool 34b by the tool elevating cylinder 34a (the horizontal direction, the driving direction of the pressing tool 34b). Most of the pressing force acting on the backup stage 14 from the pressing tool 34b is directly transmitted from the linear motion cam 21 to the base 13, so that the driving shaft 43a of the driving cylinder 43 is pressed. It is hardly affected by the pressing force of the tool 34b. Accordingly, the drive cylinder 43 only needs to have an output sufficient to move the linear cam 21 in the horizontal direction against the weight of the backup stage 14, and resists the pressing force of the pressing tool 34b on the driving cylinder 43 in the design. There is no need to consider the output, and the size of the drive cylinder 43 can be reduced. In addition, since the drive cylinder 43 is not arranged in the vertical direction, which is the drive direction of the pressing tool 34b by the tool lifting cylinder 34a, the stroke of the drive shaft 43a of the drive cylinder 43 with respect to the vertical size of the ACF sticking device 1 is set. There is no need to consider. For this reason, the entire size of the ACF sticking apparatus 1 can be reduced while the backup stage 14 can be moved up and down.

(Second Embodiment)
FIG. 10 shows an ACF sticking apparatus 101 in the second embodiment of the present invention. Among each part which comprises the ACF sticking apparatus 101 in 2nd Embodiment, the part which has the same function as the ACF sticking apparatus 1 in 1st Embodiment is attached | subjected the same code | symbol. As shown in FIG. 10, in the ACF adhering apparatus 101 in the second embodiment, the substrate holding unit 11 holds a plurality (here, two) of substrates 2 and a plurality (two) of ACF adhering mechanisms 15 Along with this, a plurality (two) of backup stages 14 are also arranged in parallel in the X-axis direction.

  Moreover, in the ACF sticking apparatus 101 in 2nd Embodiment, as shown to Fig.11 (a), (b), the linear motion cam 21 of the ACF sticking apparatus 1 in 1st Embodiment is set to the number of the backup stages 14 ( Here, only two) are provided with linear motion cams (reference numeral 121) connected in the X-axis direction. In the ACF sticking apparatus 101 in the second embodiment, the linear cam 121 is moved in the X-axis direction by the drive cylinder 43 that is an interposed member drive actuator, similarly to the ACF sticking apparatus 1 in the first embodiment. Also in the ACF sticking apparatus 101 in the second embodiment, the drive shaft 43a of the drive cylinder 43 is different from the vertical direction (horizontal direction) that is the driving direction of the pressing tool 34b by the tool lifting cylinder 34a of each ACF sticking mechanism 15. The linear cam 121 is connected to the end of the drive shaft 43 a of the drive cylinder 43.

  The drive cylinder 43 moves the two backup stages 14 up and down simultaneously by moving the linear cam 121 in the horizontal direction (left-right direction). Then, the two backup stages 14 have the “first position” (FIG. 11A) where the height of the upper surface 14S is the height H1, or the “second position” where the height of the upper surface 14S is H2 (<H1). Position ”(FIG. 11B). The two backup stages 14 each support the lower surface of the substrate 2 in the state of“ first position ”and are positioned at“ second position ”. In the state, they are separated from the lower surface of the substrate 2 downward.

  In the ACF sticking apparatus 101 of the second embodiment, the drive shaft 43a of the drive cylinder 43 extends in a direction different from the vertical direction, which is the drive direction of the pressing tool 34b by the tool lifting cylinder 34a, and is backed up from the pressing tool 34b. Since most of the pressing force acting on the stage 14 is directly transmitted from the linear cam 121 to the base 13, the drive shaft 43a of the drive cylinder 43 is hardly affected by the pressing force of the pressing tool 34b. Therefore, the same effect as the ACF sticking apparatus 1 in the first embodiment can be obtained. In addition, since the plurality of backup stages 14 can be moved up and down simultaneously with one drive cylinder 43, the overall configuration can be made simpler than the configuration in which the plurality of backup stages 14 are moved up and down with separate drive cylinders 43, respectively. it can.

(Third embodiment)
FIG. 12 shows an ACF sticking apparatus 201 in the third embodiment of the present invention. Among each part which comprises the ACF sticking apparatus 201 in 3rd Embodiment, the part which has the same function as the ACF sticking apparatus 1 in 1st Embodiment is attached | subjected the same code | symbol. As shown in FIG. 12, in the ACF sticking apparatus 201 in the third embodiment, unlike the ACF sticking apparatus 1 in the first embodiment, the interposition member is composed of a link mechanism 221.

  As shown in FIGS. 13A and 13B, the link mechanism 221 includes a lower member L1 whose lower end is pivotally supported by a member on the base 13 side (base side member 13G), and an upper end on the backup stage 14 side. The upper member L2 pivotally supported by (the lower part 14K of the backup stage 14) is provided, and the upper end of the lower member L1 and the lower end of the upper member L2 are pivotally supported by the pivot pin P. The ACF sticking apparatus 201 in the third embodiment includes a drive cylinder 43 similar to the ACF sticking apparatus 1 in the first embodiment.

  The drive cylinder 43 is swingably held (pivotally supported) in the XZ plane by the cylinder holding portion 42, and the drive shaft 43 a of the drive cylinder 43 is connected to the pressing tool 34 b by the tool lifting cylinder 34 a of the ACF sticking mechanism 15. It extends in a direction (substantially horizontal direction) different from the vertical direction that is the driving direction. The pivot pin P of the link mechanism 221 is connected to the end of the drive shaft 43 a of the drive cylinder 43. Therefore, when the drive cylinder 43 drives the pivot pin P of the link mechanism 221 in the horizontal direction by the drive shaft 43a, the link mechanism 221 bends and extends in the vertical direction.

  In a state where the link mechanism 221 driven by the drive cylinder 43 extends in a straight line in the vertical direction, the backup stage 14 is supported by the link mechanism 221 and positioned at the “first position”, and the upper surface 14S of the backup stage 14 is high. The height is H1 (FIG. 14A). On the other hand, in a state in which the link mechanism 221 is bent (a state in which the link mechanism 221 is not in a straight line extending vertically), the backup stage 14 is supported by the pair of stoppers ST and is positioned at the “second position”. The height of the upper surface 14S is H2 (<H1) (FIG. 14B).

  As described above, in the ACF adhering apparatus 201 according to the third embodiment, the interposed member is configured by the link mechanism 221 that can be bent and extended in the vertical direction, and the drive cylinder 43 as the interposed member drive actuator drives the link mechanism 221. Then, by bending in the vertical direction, the “first position” (FIGS. 13A and 14A) for supporting the lower surface of the backup stage 14 from the lower surface of the substrate 2 and the “first position”. It is configured to move up and down between the “second position” (FIGS. 13B and 14B), which is the lower position.

  Also in the ACF sticking apparatus 201 of the third embodiment, the drive shaft 43a of the drive cylinder 43 extends in a direction (substantially horizontal direction) different from the drive direction (vertical direction) of the pressing tool 34b by the tool lifting cylinder 34a. . Therefore, most of the pressing force acting on the backup stage 14 from the pressing tool 34 b is directly transmitted to the base 13 from the link mechanism 221, and the pressing force of the pressing tool 34 b hardly acts on the drive shaft 43 a of the drive cylinder 43. Therefore, the size of the drive cylinder 43 can be reduced, and the entire ACF adhering apparatus 201 can be reduced in size while the backup stage 14 can be moved up and down.

  Provided is an ACF adhering apparatus that is downsized as a whole while moving the backup stage up and down.

1,101,201 ACF sticking device 2 Substrate 3 ACF
13 Base 14 Backup stage 21 Linear motion cam (intervening member)
34a Tool lifting cylinder (pressing tool lifting means)
34b Pressing tool 43 Drive cylinder (intervening member drive actuator)
43a Drive shaft 121 Direct acting cam (intervening member)
221 Link mechanism (intervening member)

Claims (4)

A base, a backup stage provided on the base and supporting the lower surface of the substrate, a pressing tool disposed above the backup stage, and driving the pressing tool downward; An ACF adhering device comprising a pressing tool lifting and lowering means for pressing and adhering the ACF to the supported substrate;
An interposed member interposed between the base and the backup stage;
A driving shaft extending in a direction different from a driving direction of the pressing tool by the pressing tool lifting and lowering means; and a first support member that drives the interposition member by the driving shaft to support the backup stage on the lower surface of the substrate. An intervening member drive actuator that moves up and down between the first position and a second position that is lower than the first position,
The interposed member is composed of a linear motion cam having a first horizontal surface and a surface lower than the first horizontal surface on an upper surface thereof,
The backup stage includes a cam follower,
The intervention member drive actuator moves the backup stage up and down by moving the linear cam in a horizontal direction with the cam follower in contact with the upper surface,
When the intermediate member drive actuator was positioned the backup stage to said first position, said backup stage, indirectly supported by the linear cam by abutting said cam follower to said first horizontal plane And
When the intermediate member drive actuator was positioned the backup stage to the second position, the backup stage, the translation cam by abutting the cam follower to lower the surface than the first horizontal plane An ACF sticking device characterized in that it is indirectly supported by.   The ACF adhering apparatus according to claim 1, wherein the drive shaft of the intervention member drive actuator extends in a direction orthogonal to a direction in which the pressing tool is driven by the pressing tool lifting and lowering unit.   A plurality of the backup stages, a single interposed member drive actuator, and the single interposed member drive actuator move up and down the plurality of backup stages simultaneously by moving the interposed member in the horizontal direction. The ACF sticking apparatus according to claim 1. A base, a backup stage provided on the base and supporting the lower surface of the substrate, a pressing tool disposed above the backup stage, and driving the pressing tool downward; An ACF adhering device comprising a pressing tool lifting and lowering means for pressing and adhering the ACF to the supported substrate;
An interposed member interposed between the base and the backup stage;
A driving shaft extending in a direction different from a driving direction of the pressing tool by the pressing tool lifting and lowering means; and a first support member that drives the interposition member by the driving shaft to support the backup stage on the lower surface of the substrate. An intervening member drive actuator that moves up and down between the first position and a second position that is lower than the first position,
The interposition member comprises a link mechanism that can bend and stretch in the vertical direction, and the interposition member drive actuator moves the backup stage up and down by bending and stretching the interposition member in the vertical direction. apparatus.

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