JP6580310B2 - 高分解能走査顕微鏡 - Google Patents
高分解能走査顕微鏡 Download PDFInfo
- Publication number
- JP6580310B2 JP6580310B2 JP2014190341A JP2014190341A JP6580310B2 JP 6580310 B2 JP6580310 B2 JP 6580310B2 JP 2014190341 A JP2014190341 A JP 2014190341A JP 2014190341 A JP2014190341 A JP 2014190341A JP 6580310 B2 JP6580310 B2 JP 6580310B2
- Authority
- JP
- Japan
- Prior art keywords
- detection
- phase
- single image
- sample
- phase mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
- G02B21/025—Objectives with variable magnification
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/008—Details of detection or image processing, including general computer control
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
- G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
- G02B6/06—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres the relative position of the fibres being the same at both ends, e.g. for transporting images
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Engineering & Computer Science (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019155893A JP6967560B2 (ja) | 2013-09-19 | 2019-08-28 | 高分解能走査顕微鏡 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE201310015933 DE102013015933A1 (de) | 2013-09-19 | 2013-09-19 | Hochauflösende Scanning-Mikroskopie |
| DE102013015933.4 | 2013-09-19 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019155893A Division JP6967560B2 (ja) | 2013-09-19 | 2019-08-28 | 高分解能走査顕微鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015060230A JP2015060230A (ja) | 2015-03-30 |
| JP2015060230A5 JP2015060230A5 (enExample) | 2015-05-07 |
| JP6580310B2 true JP6580310B2 (ja) | 2019-09-25 |
Family
ID=51570344
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014190341A Active JP6580310B2 (ja) | 2013-09-19 | 2014-09-18 | 高分解能走査顕微鏡 |
| JP2019155893A Active JP6967560B2 (ja) | 2013-09-19 | 2019-08-28 | 高分解能走査顕微鏡 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019155893A Active JP6967560B2 (ja) | 2013-09-19 | 2019-08-28 | 高分解能走査顕微鏡 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9864182B2 (enExample) |
| EP (1) | EP2860566B1 (enExample) |
| JP (2) | JP6580310B2 (enExample) |
| DE (1) | DE102013015933A1 (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012204128B4 (de) * | 2012-03-15 | 2023-11-16 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie |
| DE102013015932A1 (de) * | 2013-09-19 | 2015-03-19 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie |
| US9500586B2 (en) * | 2014-07-24 | 2016-11-22 | Nxgen Partners Ip, Llc | System and method using OAM spectroscopy leveraging fractional orbital angular momentum as signature to detect materials |
| JP6408796B2 (ja) * | 2014-06-11 | 2018-10-17 | オリンパス株式会社 | レーザ顕微鏡装置 |
| DE102014111167A1 (de) | 2014-08-06 | 2016-02-11 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie mit der Unterscheidung mindestens zweier Wellenlängenbereiche |
| WO2016096338A1 (en) * | 2014-12-17 | 2016-06-23 | Asml Netherlands B.V. | Method and apparatus for using patterning device topography induced phase |
| US10341640B2 (en) * | 2015-04-10 | 2019-07-02 | The Board Of Trustees Of The Leland Stanford Junior University | Multi-wavelength phase mask |
| DE102015111702A1 (de) | 2015-07-20 | 2017-01-26 | Carl Zeiss Microscopy Gmbh | Hochauflösende, spektral selektive Scanning-Mikroskopie einer Probe |
| DE102015116435A1 (de) | 2015-09-29 | 2017-03-30 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie mit der Unterscheidung mindestens zweier Spektralbereiche |
| US10161870B2 (en) | 2015-10-05 | 2018-12-25 | Nxgen Partners Ip, Llc | System and method for multi-parameter spectroscopy |
| WO2017090210A1 (ja) * | 2015-11-27 | 2017-06-01 | 株式会社ニコン | 顕微鏡、観察方法、及び画像処理プログラム |
| US11157072B1 (en) * | 2016-02-24 | 2021-10-26 | Apple Inc. | Direct retinal projector |
| JP7290907B2 (ja) * | 2016-03-10 | 2023-06-14 | シスメックス株式会社 | 光学機器および像の形成方法 |
| US10876970B2 (en) * | 2016-04-12 | 2020-12-29 | The Board Of Regents Of The University Of Texas System | Light-sheet microscope with parallelized 3D image acquisition |
| WO2018187419A1 (en) | 2017-04-04 | 2018-10-11 | University Of Utah Research Foundation | Phase plate for high precision wavelength extraction in a microscope |
| DE102017113683A1 (de) | 2017-06-21 | 2018-12-27 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie mit der Unterscheidung mindestens zweier Wellenlängenbereiche |
| DE102017119531A1 (de) | 2017-08-25 | 2019-02-28 | Carl Zeiss Microscopy Gmbh | Hochauflösende 2D-Mikroskopie mit verbesserter Schnittdicke |
| DE102017122858A1 (de) * | 2017-10-02 | 2019-04-04 | Carl Zeiss Microscopy Gmbh | Konfokalmikroskop mit hoher Auflösung |
| DE102017128773A1 (de) | 2017-12-04 | 2019-06-06 | Leica Microsystems Cms Gmbh | Detektoranordnung für die Mikroskopie |
| EP3518017B1 (de) * | 2018-01-24 | 2020-06-17 | Technische Universität Dresden | Verfahren und faseroptisches system zur beleuchtung und detektion eines objekts mit licht |
| IT201800001891A1 (it) * | 2018-01-25 | 2019-07-25 | Fondazione St Italiano Tecnologia | Metodo di imaging risolto nel tempo ad alta risoluzione spaziale. |
| DE102018104693B4 (de) | 2018-03-01 | 2024-11-07 | Carl Zeiss Microscopy Gmbh | Verfahren zur beschleunigten, hochauflösenden Scanning-Mikroskopie |
| DE102020201808A1 (de) | 2020-02-13 | 2021-08-19 | Carl Zeiss Microscopy Gmbh | Verfahren und Vorrichtung zum Ausrichten eines optischen Elements in einem Strahlengang |
| US11300524B1 (en) * | 2021-01-06 | 2022-04-12 | Kla Corporation | Pupil-plane beam scanning for metrology |
| WO2023283742A1 (en) * | 2021-07-14 | 2023-01-19 | Westboro Photonics Inc. | Imager and spot sampler with translatable stage |
| CN115774327B (zh) * | 2022-11-22 | 2024-09-27 | 中国科学院光电技术研究所 | 一种集成照明调制和瞳孔调制的定量差分相衬显微镜 |
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| US4346295A (en) * | 1978-12-26 | 1982-08-24 | Fuji Photo Film Co., Ltd. | Radiation image read out device |
| JPS59214818A (ja) * | 1983-05-21 | 1984-12-04 | Fuji Photo Film Co Ltd | 撮像装置 |
| JPS62218823A (ja) * | 1986-03-20 | 1987-09-26 | Fujitsu Ltd | 赤外線撮像装置 |
| US5093563A (en) * | 1987-02-05 | 1992-03-03 | Hughes Aircraft Company | Electronically phased detector arrays for optical imaging |
| DE69231596T2 (de) | 1991-10-31 | 2001-06-28 | Yokogawa Electric Corp Musashi | Konfokaler optischer Scanner |
| US5952668A (en) | 1994-07-15 | 1999-09-14 | Baer; Stephen C. | Resolution in microscopy and microlithography |
| US7071477B2 (en) | 1994-07-15 | 2006-07-04 | Baer Stephen C | Superresolution in microlithography and fluorescence microscopy |
| US5866911A (en) | 1994-07-15 | 1999-02-02 | Baer; Stephen C. | Method and apparatus for improving resolution in scanned optical system |
| US20050111089A1 (en) | 1994-07-15 | 2005-05-26 | Baer Stephen C. | Superresolving microscopy apparatus |
| DE19908883A1 (de) | 1999-03-02 | 2000-09-07 | Rainer Heintzmann | Verfahren zur Erhöhung der Auflösung optischer Abbildung |
| US6621079B1 (en) * | 1999-07-02 | 2003-09-16 | University Of Virginia Patent Foundation | Apparatus and method for a near field scanning optical microscope in aqueous solution |
| GB0006330D0 (en) * | 2000-03-17 | 2000-05-03 | Kemp Malcolm H D | Superresolving/high numerical aperture imaging devices |
| EP1295179B1 (en) * | 2000-06-15 | 2013-05-22 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
| JP2002062261A (ja) * | 2000-08-21 | 2002-02-28 | Olympus Optical Co Ltd | 光学装置および顕微鏡 |
| JP2003283906A (ja) * | 2002-03-20 | 2003-10-03 | Nippon Telegr & Teleph Corp <Ntt> | 高解像度撮像装置 |
| WO2005019811A2 (en) * | 2003-08-26 | 2005-03-03 | Blueshift Biotechnologies, Inc. | Time dependent fluorescence measurements |
| US7242468B1 (en) * | 2004-06-30 | 2007-07-10 | Chemimage Corporation | Method and apparatus for microlens array/fiber optics imaging |
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| EP3203235A1 (en) | 2005-05-23 | 2017-08-09 | Harald F. Hess | Optical microscopy with phototransformable optical labels |
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| DE102006021317B3 (de) | 2006-05-06 | 2007-10-11 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren und Fluoreszenzlichtmikroskop zum räumlich hochauflösenden Abbilden einer Struktur einer Probe |
| DE102006026204A1 (de) | 2006-05-31 | 2007-12-06 | Carl Zeiss Microimaging Gmbh | Mikroskop mit erhöhter Auflösung |
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| CN101210969A (zh) * | 2006-12-31 | 2008-07-02 | 中国科学院西安光学精密机械研究所 | 凝视型高分辨率三维成像探测器 |
| JP5536650B2 (ja) * | 2007-08-31 | 2014-07-02 | ザ ジェネラル ホスピタル コーポレイション | 自己干渉蛍光顕微鏡検査のためのシステムと方法、及び、それに関連するコンピュータがアクセス可能な媒体 |
| US20090147269A1 (en) * | 2007-11-05 | 2009-06-11 | Moore Wayne E | Interferometric nanoimaging system |
| US8537461B2 (en) * | 2007-11-26 | 2013-09-17 | Carl Zeiss Microimaging Gmbh | Method and configuration for the optical detection of an illuminated specimen |
| CN101918816B (zh) | 2007-12-21 | 2015-12-02 | 哈佛大学 | 三维中的亚衍射极限图像分辨率 |
| JP5532193B2 (ja) * | 2008-04-10 | 2014-06-25 | 株式会社ニコン | 共焦点顕微鏡 |
| GB0812712D0 (en) * | 2008-07-10 | 2008-08-20 | Imp Innovations Ltd | Improved endoscope |
| DE102008049886B4 (de) * | 2008-09-30 | 2021-11-04 | Carl Zeiss Microscopy Gmbh | Vorrichtung, insbesondere ein Mikroskop, zur Untersuchung von Proben |
| DE102008059328A1 (de) | 2008-11-27 | 2010-06-02 | Carl Zeiss Microimaging Gmbh | Auflösungsgesteigerte Mikroskopie |
| US8275226B2 (en) * | 2008-12-09 | 2012-09-25 | Spectral Applied Research Ltd. | Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope |
| JP5340799B2 (ja) * | 2009-05-08 | 2013-11-13 | オリンパス株式会社 | レーザ走査型顕微鏡 |
| EP2317362B1 (de) | 2009-10-28 | 2020-01-15 | Carl Zeiss Microscopy GmbH | Mikroskopisches Verfahren und Mikroskop mit gesteigerter Auflösung |
| JP2011133580A (ja) * | 2009-12-22 | 2011-07-07 | Olympus Corp | ホログラム像投影方法およびホログラム像投影装置 |
| DE102009055216A1 (de) * | 2009-12-22 | 2011-06-30 | Carl Zeiss Microlmaging GmbH, 07745 | Lumineszenzmikroskopie |
| JP5701573B2 (ja) * | 2010-06-15 | 2015-04-15 | オリンパス株式会社 | スキャナ、走査型照明装置および走査型観察装置 |
| JP2013539074A (ja) * | 2010-09-24 | 2013-10-17 | カール・ツァイス・マイクロスコピー・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 3d局在顕微鏡法並びに4d局在顕微鏡法及び追跡方法並びに追跡システム |
| GB201107556D0 (en) | 2011-05-06 | 2011-06-22 | Sheblee Jafer | Spatial resolution enhancements in multibeam confocal scanning systems |
| US9256202B2 (en) * | 2011-05-20 | 2016-02-09 | Massachusetts Institute Of Technology | System, method and apparatus for phase-coded multi-plane microscopy |
| WO2013010151A1 (en) * | 2011-07-14 | 2013-01-17 | Howard Hughes Medical Institute | Microscopy with adaptive optics |
| TWI467226B (zh) * | 2011-11-15 | 2015-01-01 | Ind Tech Res Inst | 相位物體顯微系統 |
| DE102012204128B4 (de) * | 2012-03-15 | 2023-11-16 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie |
| US9201008B2 (en) * | 2012-06-26 | 2015-12-01 | Universite Laval | Method and system for obtaining an extended-depth-of-field volumetric image using laser scanning imaging |
| DE102013019348A1 (de) * | 2013-08-15 | 2015-02-19 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie |
| DE102013019347A1 (de) * | 2013-08-15 | 2015-02-19 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie |
| DE102013015932A1 (de) * | 2013-09-19 | 2015-03-19 | Carl Zeiss Microscopy Gmbh | Hochauflösende Scanning-Mikroskopie |
| DE102013218795A1 (de) * | 2013-09-19 | 2015-03-19 | Carl Zeiss Microscopy Gmbh | Laserscanningmikroskop und Verfahren zur Korrektur von Abbildungsfehlern insbesondere in der hochauflösenden Scanning-Mikroskopie |
| DE102013015931B4 (de) * | 2013-09-19 | 2024-05-08 | Carl Zeiss Microscopy Gmbh | Mikroskop und Verfahren zur hochauflösenden Scanning-Mikroskope |
-
2013
- 2013-09-19 DE DE201310015933 patent/DE102013015933A1/de not_active Ceased
-
2014
- 2014-09-18 US US14/489,885 patent/US9864182B2/en active Active
- 2014-09-18 JP JP2014190341A patent/JP6580310B2/ja active Active
- 2014-09-18 EP EP14185414.1A patent/EP2860566B1/de active Active
-
2019
- 2019-08-28 JP JP2019155893A patent/JP6967560B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015060230A (ja) | 2015-03-30 |
| EP2860566A3 (de) | 2015-07-22 |
| DE102013015933A1 (de) | 2015-03-19 |
| EP2860566B1 (de) | 2022-01-26 |
| US9864182B2 (en) | 2018-01-09 |
| US20150077842A1 (en) | 2015-03-19 |
| JP2019211788A (ja) | 2019-12-12 |
| EP2860566A2 (de) | 2015-04-15 |
| JP6967560B2 (ja) | 2021-11-17 |
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