JP6568716B2 - Laser processing apparatus and laser processing method - Google Patents

Description

  The present invention relates to a laser processing apparatus and a laser processing method for processing a material with a laser.

  Laser processing apparatuses that process, for example, a metal plate material with a laser are widely used.

International Publication No. 2014/174659

  When a material is cut by a laser processing apparatus, an appropriate process that does not result in an inappropriate process of unnecessarily melting other than the cut part of the material is required. In addition, machining as fast as possible is required.

  An object of this invention is to provide the laser processing apparatus and laser processing method which can process material appropriately at high speed.

The present invention includes a laser oscillator for oscillating a laser of the first plurality of wavelengths, the laser of the first plurality of wavelengths, from the laser, respectively, 1 or said first plurality less than a second plurality of wavelengths A dichroic mirror that is divided into a plurality of groups, and a variable curvature reflecting surface that can be a concave surface or a convex surface, and a first group that is a part of the plurality of groups divided by the dichroic mirror . the laser is reflected by the reflecting surface, and a first curvature variable mirror that converts the state of convergence or divergence of the laser group, reflected the variable curvature mirror state of convergence or divergence is converted The laser of the first group is incident on the dichroic mirror again, and the laser of the second group that is another part of the plurality of groups divided by the dichroic mirror is a mirror. By Isa again incident on the dichroic mirror, the dichroic mirror combines both generates a composite laser during injection of a laser of the laser and the second group of the first group, providing further comprises record over the processing device a condensing lens to irradiate the combined laser material.

The present invention provides a laser oscillator that oscillates a first plurality of wavelengths of laser and a plurality of lasers of a plurality of second wavelengths that are less than the first plurality of wavelengths, respectively. A first dichroic mirror that is divided into a plurality of groups, and a reflective surface having a variable curvature that can be a concave surface or a convex surface, and is a part of the plurality of groups divided by the first dichroic mirror. A plurality of laser beams divided by a first variable-curvature mirror that reflects a state of convergence or divergence of the first group of lasers by reflecting one group of lasers by the reflecting surface, and the plurality of first dichroic mirrors; A second dichroic that divides each of the lasers of the second group, which is another part of the group of laser diodes, into a plurality of groups each consisting of one or a plurality of lasers having a plurality of wavelengths less than the second plurality mirror And a third group of lasers, which are a part of the plurality of groups divided by the second dichroic mirror, by the reflective surface. A second curvature variable mirror that reflects and converts a state of convergence or divergence of the laser of the third group, and the state of convergence or divergence is converted to reflect the first curvature variable mirror A first group of lasers re-enters the first dichroic mirror, and a fourth group of lasers, which is another part of the plurality of groups divided by the second dichroic mirror, When the first dichroic mirror reenters the first dichroic mirror, the first dichroic mirror synthesizes the first group laser and the fourth group laser when emitting the first group laser and the fourth group laser. A second combined laser is generated by combining the third group of lasers that have been generated and the state of convergence or divergence is converted and reflected by the second variable curvature mirror and the first combined laser. And a condensing lens for irradiating the material with the second synthetic laser.

  In the above laser processing apparatus, the curvature of the reflecting surface of the curvature variable mirror is determined by changing the thickness of the material, the material material, the type of assist gas, the pressure of the assist gas, and the focal point of the condenser lens. It is preferable to further include a curvature setting control unit that is set according to at least one of the distances.

The present invention, by Les chromatography The oscillator oscillating the laser of the first plurality of wavelengths, said first laser of the plurality of wavelengths is incident on the dichroic mirror, respectively, 1 or 1 less than the plurality second A plurality of groups of lasers of a plurality of wavelengths, using a variable curvature mirror having a variable curvature reflecting surface that can be concave or convex, and a part of the plurality of groups divided by the dichroic mirror The first group of lasers, which are a group , are reflected by the reflecting surface to convert the state of convergence or divergence of the lasers of the first group, and the state of convergence or divergence is converted to reflect the variable curvature mirror The laser of the second group which is another part of the plurality of groups divided by the dichroic mirror by re-entering the laser of the first group incident on the dichroic mirror Is reflected by the mirror is incident again on the dichroic mirror, the dichroic mirror, by combining the two to produce a combined laser and a laser of the laser and the second group of the first group during the injection, the combined laser, provides a record over the processing method for processing the material by irradiating the material through the condensing lens.

  In the above laser processing method, the curvature of the reflecting surface of the variable curvature mirror, the thickness of the material, the material material, the type of assist gas, the pressure of the assist gas, and the focal point of the condenser lens It is preferable to set according to at least one of the distances.

  According to the laser processing apparatus and the laser processing method of the present invention, a material can be processed at high speed and appropriately.

It is a block diagram which shows notionally the laser processing apparatus of 1st Embodiment. It is a block diagram which shows the application example when operating the laser processing apparatus of 1st Embodiment. It is a figure which shows the distribution state of the wavelength of the laser in the surface of the board | plate material in FIG. It is a block diagram which shows notionally the laser processing apparatus of 2nd Embodiment.

  Hereinafter, a laser processing apparatus and a laser processing method of each embodiment will be described with reference to the accompanying drawings.

<First Embodiment>
In FIG. 1, a laser oscillator 1 oscillates lasers having a plurality of wavelengths, for example, wavelengths λ1 to λ4. The laser oscillator 1 is a direct diode laser (DDL) oscillator as an example. The wavelengths λ1 to λ4 are, for example, 910, 920, 930, and 940 nm.

  Lasers of a plurality of wavelengths emitted from the laser oscillator 1 are incident on the dichroic mirror 2. The dichroic mirror 2 reflects, for example, lasers with wavelengths λ1 and λ2, and transmits lasers with wavelengths λ3 and λ4. The lasers having the wavelengths λ 1 and λ 2 reflected by the dichroic mirror 2 enter the total reflection mirror 4. Lasers with wavelengths λ 3 and λ 4 that have passed through the dichroic mirror 2 are incident on the variable curvature mirror 3.

  The dichroic mirror 2 may transmit only one wavelength laser, or may reflect only one wavelength laser.

  Assuming that the lasers having the wavelengths λ1 to λ4 are the lasers having the first plurality of wavelengths, the dichroic mirror 2 converts the lasers having the first plurality of wavelengths into the first plurality of wavelengths or the second plurality of wavelengths less than the first plurality, respectively. What is necessary is just to divide | segment into the several group which consists of a laser. The dichroic mirror 2 functions as a laser dividing unit. The group includes the case of only one wavelength laser.

  The variable curvature mirror 3 has a variable curvature reflecting surface. Specifically, the curvature variable mirror 3 can make the curvature of the reflecting surface concave or convex by controlling the pressure of the fluid inside the mirror, and can change the curvature of the concave or convex surface. The curvature setting control unit 10 sets the curvature of the reflecting surface of the variable curvature mirror 3 to an appropriate value.

  In FIG. 1, the reflection surface of the variable curvature mirror 3 is set to a concave surface having a predetermined curvature based on the control by the curvature setting control unit 10. The variable curvature mirror 3 reflects a part of a plurality of groups of lasers by a reflecting surface. That is, the lasers with wavelengths λ 3 and λ 4 are reflected by the reflecting surface of the variable curvature mirror 3 and enter the dichroic mirror 2.

  Lasers with wavelengths λ 1 and λ 2 are reflected by the total reflection mirror 4 and enter the dichroic mirror 2. The dichroic mirror 2 transmits lasers with wavelengths λ3 and λ4 and reflects lasers with wavelengths λ1 and λ2. Therefore, the dichroic mirror 2 combines and emits lasers with wavelengths λ1 and λ2 and lasers with wavelengths λ3 and λ4.

  The dichroic mirror 2 also functions as a laser combining unit that generates a combined laser by combining another part of the plurality of lasers reflected by the total reflection mirror 4 and the laser reflected by the variable curvature mirror 3. To do.

  The condensing lens 5 condenses and irradiates the synthetic laser at a predetermined position of the plate material 61. The synthetic laser is focused on a predetermined position of the plate material 61, and the assist gas is supplied onto the plate material 61 by the assist gas supply device 7, whereby the plate material 61 is cut.

  In the example shown in FIG. 1, lasers with wavelengths λ 1 and λ 2 are focused on the bottom surface of the plate material 61, and lasers with wavelengths λ 3 and λ 4 are focused on the surface of the plate material 61.

  Since a plurality of groups of laser beams having different incident angles and incident diameters are incident on the plate material 61, the laser power and the beam spot position are set to appropriate positions according to the plate thickness and material of the plate material 61. The plate material 61 can be processed at high speed and appropriately.

  By the way, the curvature setting control unit 10 determines the curvature of the reflecting surface of the variable curvature mirror 3 with respect to the thickness of the material to be cut (here, the plate material 61), the material material, the type of assist gas, and the assist gas. Is preferably set according to at least one of the pressure and the focal length of the condenser lens 5.

  It is further preferable that the curvature setting control unit 10 sets the curvature of the reflecting surface of the curvature variable mirror 3 by combining two or more of the plurality of elements according to the combined condition.

  The curvature setting control unit 10 may automatically set the curvature of the reflecting surface of the variable curvature mirror 3 based on the plurality of elements described above, or may be manually set by an operator.

Second Embodiment
In the second embodiment shown in FIG. 2, the same parts as those in the first embodiment shown in FIG.

  In FIG. 2, a laser oscillator 1 oscillates lasers having a plurality of wavelengths, for example, wavelengths λ1 to λ5. The wavelengths λ1 to λ5 are, for example, 910, 920, 930, 940, and 950 nm.

  The dichroic mirror 2 reflects, for example, lasers with wavelengths λ1 and λ2 and transmits lasers with wavelengths λ3 to λ5. The variable curvature mirror 3 reflects a laser having wavelengths λ3 to λ5. The dichroic mirror 2 generates and emits a synthetic laser obtained by synthesizing lasers with wavelengths λ1 and λ2 and lasers with wavelengths λ3 to λ5.

  The condensing lens 5 condenses and irradiates the synthetic laser at a predetermined position of a plate material 62 having a thickness greater than that of the plate material 61 shown in FIG. In the example shown in FIG. 2, lasers with wavelengths λ 1 and λ 2 are focused on the bottom surface of the plate material 62, and lasers with wavelengths λ 3 to λ 5 are focused on the middle portion of the plate thickness of the plate material 62.

  On the surface of the plate 62, as shown in FIG. 3A, the circular distribution range of lasers with wavelengths λ3 to λ5 is located in the circular distribution range of lasers with wavelengths λ1 and λ2. On the bottom surface of the plate 62, as shown in FIG. 3B, the circular distribution ranges of the lasers having the wavelengths λ1 and λ2 are located in the circular distribution ranges of the lasers having the wavelengths λ3 to λ5.

  As described above, depending on the thickness of the material to be cut (here, the plate material 62), the laser beam spot position may be an intermediate portion between the surface and the bottom surface of the material. In this way, the material can be processed at high speed and appropriately even if the plate thickness is relatively large.

<Third Embodiment>
In the third embodiment shown in FIG. 4, the same parts as those in the first embodiment shown in FIG.

  In FIG. 4, a dichroic mirror 21 reflects, for example, lasers with wavelengths λ1 and λ2, and transmits lasers with wavelengths λ3 and λ4. The dichroic mirror 21 is substantially the same as the dichroic mirror 2 of FIG.

  The lasers having the wavelengths λ 1 and λ 2 reflected by the dichroic mirror 21 enter the dichroic mirror 22. For example, the dichroic mirror 22 reflects a laser having a wavelength λ2 and transmits a laser having a wavelength λ1.

  Lasers with wavelengths λ 3 and λ 4 that have passed through the dichroic mirror 21 are incident on the variable curvature mirror 31. The laser having the wavelength λ 1 that has passed through the dichroic mirror 22 is incident on the variable curvature mirror 32. The variable curvature mirrors 31 and 32 are substantially the same as the variable curvature mirror 3 of FIG.

  The variable curvature mirror 31 reflects the laser with the wavelengths λ3 and λ4, and the variable curvature mirror 32 reflects the laser with the wavelength λ1.

  The dichroic mirror 21 transmits lasers with wavelengths λ3 and λ4 and reflects the laser with wavelength λ2. Therefore, the dichroic mirror 21 generates and emits a first combined laser that combines the laser with the wavelength λ2 and the lasers with the wavelengths λ3 and λ4.

  The first synthetic laser is incident on the dichroic mirror 23. The laser having the wavelength λ 1 reflected by the variable curvature mirror 32 enters the dichroic mirror 23. The dichroic mirror 23 transmits the first synthetic laser and reflects the laser having the wavelength λ1. Therefore, the dichroic mirror 23 generates and emits a second synthetic laser obtained by synthesizing the laser having the wavelength λ1 and the first synthetic laser.

  The condensing lens 5 condenses and irradiates the second synthetic laser on a predetermined position of the plate 63. The laser with the wavelength λ1 is focused on the surface of the plate 63, the laser with the wavelengths λ3 and λ4 is focused on the middle portion of the plate 63, and the laser with the wavelength λ2 is focused on the bottom surface of the plate 63.

  In the third embodiment, since three groups of lasers having different incident angles and incident diameters are incident on the plate member 63, the plate member 63 can be processed at high speed and appropriately.

  In the third embodiment, the dichroic mirrors 21 and 22 function as laser splitting units, and the dichroic mirrors 21 and 23 function as laser combining units.

  In each embodiment, the dichroic mirror that performs the functions of the laser dividing unit and the laser combining unit may share two functions, and the function dedicated to the laser dividing unit and the function dedicated to the laser combining unit may be used. You may comprise by the plurality which has a function separately.

  When the split light is coupled again using mirrors of the same specification, it is more advantageous to share the function of the laser splitting unit and the function of the laser combining unit with a single mirror than to split into a plurality of mirrors. . However, when the distance between the dividing portion and the coupling portion is large, it is more advantageous to divide a single mirror into a plurality of parts rather than enlarging it. An appropriate configuration may be adopted in consideration of the processing convenience of the mirror and the ease of manufacturing the entire laser processing apparatus.

  The same function can be achieved even if the dichroic mirror that performs the functions of the laser splitting unit and the laser combining unit is replaced with a grating (diffraction grating). That is, an optical element that can reflect or transmit a specific wavelength can be substituted.

  As described above, according to the laser processing apparatus and the laser processing method of each embodiment, the material can be processed at high speed and appropriately.

  The present invention is not limited to the embodiment described above, and various modifications can be made without departing from the scope of the present invention.

1 Laser oscillator 2, 21-23 Dichroic mirror (laser splitting unit, laser combining unit)
3, 31, 32 Curvature variable mirror 4 Total reflection mirror 5 Condensing lens 7 Assist gas supply device 10 Curvature setting control unit 61-63 Plate material (material)

Claims (6)

A laser oscillator for oscillating a laser having a plurality of first wavelengths;
The laser of the first plurality of wavelengths, respectively, a dichroic mirror for dividing the first or the first plurality of the group consisting of laser plurality fewer second plurality of wavelengths,
Has a variable curvature of the reflective surface can be a concave or convex, by reflecting laser of the first group which is part the group of one of the dichroic divided plurality of groups in dichroic mirror by the reflecting surface, the a curvature variable mirror that converts the laser state of convergence or divergence of the first group,
With
The first group of lasers that have been converted into a convergent or divergent state and reflected from the variable curvature mirror are incident on the dichroic mirror again, and the other part of the plurality of groups divided by the dichroic mirror. When the second group of lasers is reflected by a mirror and reenters the dichroic mirror, the dichroic mirror emits the first group of lasers and the second group of lasers. Combining both to produce a synthetic laser,
A condenser lens for irradiating the material with the synthetic laser;
Les over The processing equipment. The dichroic mirror transmits the laser of the first group and reflects the laser of the second group;
The variable curvature mirror converts a state of convergence or divergence of the first group of lasers transmitted through the dichroic mirror.
The laser processing apparatus according to claim 1 . The curvature of the reflective surface of the variable curvature mirror is at least one of the thickness of the material, the material of the material, the type of assist gas, the pressure of the assist gas, and the focal length of the condenser lens. the laser processing apparatus according to claim 1 or 2 Ru further comprising a curvature setting control unit that sets in accordance with the One. Oscillating a first laser having a plurality of wavelengths by a laser oscillator;
The first plurality of wavelengths of lasers are incident on a dichroic mirror, and each is divided into a plurality of groups of lasers of a plurality of second wavelengths that are less than one or a plurality of first,
A variable curvature mirror having a variable curvature reflecting surface that can be a concave surface or a convex surface is used, and a first group of lasers that are a part of the plurality of groups divided by the dichroic mirror is reflected by the reflection surface. Converting the state of convergence or divergence of the first group of lasers ;
Refocusing the first group of lasers that have been converted to a convergent or divergent state and reflected from the variable curvature mirror into the dichroic mirror;
A second group of lasers, which is another part of the plurality of groups divided by the dichroic mirror, is reflected by a mirror and incident again on the dichroic mirror;
When the dichroic mirror emits the first group of lasers and the second group of lasers, both are combined to generate a combined laser;
The material is processed by irradiating the material with the synthetic laser through a condenser lens.
Les over The processing method. The curvature of the reflective surface of the variable curvature mirror is at least one of the thickness of the material, the material of the material, the type of assist gas, the pressure of the assist gas, and the focal length of the condenser lens. laser processing method according to 請 Motomeko 4 to set depending on One. A laser oscillator for oscillating a laser having a plurality of first wavelengths;
A first dichroic mirror that divides each of the first plurality of wavelengths of lasers into a plurality of groups of second plurality of wavelengths of lasers less than the first plurality of wavelengths;
A reflective surface having a variable curvature that can be a concave surface or a convex surface, and a first group of lasers that are a part of the plurality of groups divided by the first dichroic mirror is reflected by the reflective surface. A first variable curvature mirror for converting a state of convergence or divergence of the first group of lasers;
A second group of lasers that are another part of the plurality of groups divided by the first dichroic mirror is replaced with one or a plurality of third plurality of wavelengths less than the second plurality of lasers. A second dichroic mirror divided into a plurality of groups,
A reflective surface having a variable curvature that can be a concave surface or a convex surface, and a third group of lasers that are a part of the plurality of groups divided by the second dichroic mirror is reflected by the reflective surface. A second variable-curvature mirror for converting a state of convergence or divergence of the third group of lasers;
With
The plurality of laser beams that are converted by the first dichroic mirror after the first group of lasers, which have been converted from the state of convergence or divergence and reflected by the first variable curvature mirror, are incident on the first dichroic mirror. When the laser of the fourth group, which is another part of the first group, is incident on the first dichroic mirror again, the first dichroic mirror has the laser of the first group and the fourth A first combined laser is produced by combining the two when emitting the lasers of
A third dichroic that generates a second synthesized laser by synthesizing the third group of lasers that have been converted into a convergent or divergent state and reflected by the second variable curvature mirror and the first synthesized laser. Mirror,
A condenser lens for irradiating the material with the second synthetic laser;
Laser processing equipment.

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