JP6561878B2 - １軸回転アクチュエーター - Google Patents

１軸回転アクチュエーター Download PDF

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Publication number
JP6561878B2
JP6561878B2 JP2016043467A JP2016043467A JP6561878B2 JP 6561878 B2 JP6561878 B2 JP 6561878B2 JP 2016043467 A JP2016043467 A JP 2016043467A JP 2016043467 A JP2016043467 A JP 2016043467A JP 6561878 B2 JP6561878 B2 JP 6561878B2
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JP
Japan
Prior art keywords
holder
rotation
diffraction grating
fixed
actuator according
Prior art date
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Expired - Fee Related
Application number
JP2016043467A
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English (en)
Japanese (ja)
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JP2016206653A5 (https=
JP2016206653A (ja
Inventor
政大 齊藤
政大 齊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsumi Electric Co Ltd
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Mitsumi Electric Co Ltd
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Priority to JP2016043467A priority Critical patent/JP6561878B2/ja
Publication of JP2016206653A publication Critical patent/JP2016206653A/ja
Publication of JP2016206653A5 publication Critical patent/JP2016206653A5/ja
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Publication of JP6561878B2 publication Critical patent/JP6561878B2/ja
Expired - Fee Related legal-status Critical Current
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  • Spectrometry And Color Measurement (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)
JP2016043467A 2016-03-07 2016-03-07 １軸回転アクチュエーター Expired - Fee Related JP6561878B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016043467A JP6561878B2 (ja) 2016-03-07 2016-03-07 １軸回転アクチュエーター

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016043467A JP6561878B2 (ja) 2016-03-07 2016-03-07 １軸回転アクチュエーター

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2015085056A Division JP5900682B1 (ja) 2015-04-17 2015-04-17 １軸回転アクチュエーター

Publications (3)

Publication Number Publication Date
JP2016206653A JP2016206653A (ja) 2016-12-08
JP2016206653A5 JP2016206653A5 (https=) 2018-07-26
JP6561878B2 true JP6561878B2 (ja) 2019-08-21

Family

ID=57487164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016043467A Expired - Fee Related JP6561878B2 (ja) 2016-03-07 2016-03-07 １軸回転アクチュエーター

Country Status (1)

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JP (1) JP6561878B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024098772A (ja) * 2023-01-11 2024-07-24 ミツミ電機株式会社 揺動アクチュエータ

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Publication number Publication date
JP2016206653A (ja) 2016-12-08

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