JP6560953B2 - 3次元の構造を製作する方法 - Google Patents
3次元の構造を製作する方法 Download PDFInfo
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- JP6560953B2 JP6560953B2 JP2015204644A JP2015204644A JP6560953B2 JP 6560953 B2 JP6560953 B2 JP 6560953B2 JP 2015204644 A JP2015204644 A JP 2015204644A JP 2015204644 A JP2015204644 A JP 2015204644A JP 6560953 B2 JP6560953 B2 JP 6560953B2
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- 239000000463 material Substances 0.000 claims description 64
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- 238000004519 manufacturing process Methods 0.000 claims description 20
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- 238000006116 polymerization reaction Methods 0.000 claims description 9
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- 238000003848 UV Light-Curing Methods 0.000 description 1
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- 239000003795 chemical substances by application Substances 0.000 description 1
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Description
12 基板表面
12 表面
14 基板
16 外套壁
18 容積区域
20 部分領域
20, 部分領域
20a、20b、20c、20d、20e、20f、20g 部分領域
22 部分壁
22a、22b、22c、22d、22e、22f、22g 部分壁
24 リソグラフィ材料
26 書込領域
28 容積
30 支持構造
32 支持要素
34 部分区域
Claims (9)
- エネルギー注入方式により重合可能かつ固化可能なリソグラフィ材料(24)で3次元の構造(10)を製作する方法において、
最初に、作製されるべき構造(10)の外套壁(16)を空間的分解能を有する第1のエネルギー注入方式によって重合し、それにより、未重合のリソグラフィ材料の容積(28)が閉じ込められるようにし、
中間現像ステップで、重合した前記外套壁(16)を包囲するリソグラフィ材料(24)を除去し、
次いで、第2のエネルギー注入方式によって、前記外套壁(16)により閉じ込められているリソグラフィ材料の容積(28)を重合する方法であって、
前記空間的分解能を有する第1のエネルギー注入方式によって、外套壁(16)の各区域の間に延びる支持要素を有する、前記外套壁(16)の内部に位置する支持構造(30)をさらに画定することを特徴とする
方法。 - 第2のエネルギー注入方式は第1のエネルギー注入方式と相違しており、空間的分解能を有さず、前記外套壁(16)により閉じ込められている未重合のリソグラフィ材料に対して全体的に作用することを特徴とする、請求項1に記載の方法。
- 空間的分解能を有する第1のエネルギー注入方式によるリソグラフィ材料の重合は、放射源の書込ビームの空間的に変位可能な焦点領域で行われることを特徴とする、請求項1または2に記載の方法。
- リソグラフィ材料の重合は2光子吸収または多光子吸収によって書込ビームの焦点領域で行われることを特徴とする、請求項1〜3のいずれか1項に記載の方法。
- リソグラフィ材料が基板(14)の上に塗布され、未重合のリソグラフィ材料の容積(28)は、前記基板(14)の表面(12)の1区域と前記外套壁(16)とによって閉じ込められることを特徴とする、請求項1〜4のいずれか1項に記載の方法。
- 前記中間現像ステップは前記外套壁(16)により閉じ込められた未重合のリソグラフィ材料の容積(28)に影響をおよぼさないことを特徴とする、請求項1〜5のいずれか1項に記載の方法。
- 光重合可能および/または熱重合可能であるリソグラフィ材料(24)が使用されることを特徴とする、請求項1〜6のいずれか1項に記載の方法。
- 前記外套壁(16)はそれぞれ異なる壁厚を備える複数の壁区域(22a−22g)を有していることを特徴とする、請求項1〜7のいずれか1項に記載の方法。
- 作製されるべき構造(10)の前記外套壁(16)は、前記外套壁(16)の一部をなす複数の部分壁(22,22’;22a−22g)を逐次形成することにより画成され、ここで、各部分壁(22,22’;22a−22g)は書込領域(26)において画成されることを特徴とする、請求項1〜8のいずれか1項に記載の方法。
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DE102015121748A1 (de) * | 2015-12-14 | 2017-06-14 | Cl Schutzrechtsverwaltungs Gmbh | Vorrichtung zur generativen Herstellung eines dreidimensionalen Objekts |
US10780599B2 (en) | 2016-06-28 | 2020-09-22 | The Gillette Company Llc | Polymeric cutting edge structures and method of manufacturing polymeric cutting edge structures |
US10562200B2 (en) * | 2016-06-28 | 2020-02-18 | The Gillette Company Llc | Polymeric cutting edge structures and method of manufacturing polymeric cutting edge structures |
DE102016014229A1 (de) | 2016-11-30 | 2018-05-30 | Giesecke+Devrient Currency Technology Gmbh | Herstellverfahren für Druckplatten für den Stichtiefdruck sowie Druckplatte für den Stichtiefdruck |
US10413167B2 (en) | 2017-05-30 | 2019-09-17 | Synaptive Medical (Barbados) Inc. | Micro-optical surgical probes and micro-optical probe tips and methods of manufacture therefor |
EP3698968A1 (en) | 2019-02-22 | 2020-08-26 | Essilor International | Method and system for manufacturing an optical volume element from a hardenable material using an additive manufacturing technology |
LT3702132T (lt) | 2019-02-26 | 2023-02-27 | Upnano Gmbh | Įrenginys ir būdas, skirti trimačio komponento generatyvinei gamybai litografijos pagrindu |
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