JP6556725B2 - 走査型顕微鏡検査方法および走査型顕微鏡 - Google Patents

走査型顕微鏡検査方法および走査型顕微鏡 Download PDF

Info

Publication number
JP6556725B2
JP6556725B2 JP2016540646A JP2016540646A JP6556725B2 JP 6556725 B2 JP6556725 B2 JP 6556725B2 JP 2016540646 A JP2016540646 A JP 2016540646A JP 2016540646 A JP2016540646 A JP 2016540646A JP 6556725 B2 JP6556725 B2 JP 6556725B2
Authority
JP
Japan
Prior art keywords
sample
irradiation
scanning
spot
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016540646A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017502341A5 (OSRAM
JP2017502341A (ja
Inventor
エッゲルト、ヘルゲ
ヒルベルト、ミヒャエル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microscopy GmbH
Original Assignee
Carl Zeiss Microscopy GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Microscopy GmbH filed Critical Carl Zeiss Microscopy GmbH
Publication of JP2017502341A publication Critical patent/JP2017502341A/ja
Publication of JP2017502341A5 publication Critical patent/JP2017502341A5/ja
Application granted granted Critical
Publication of JP6556725B2 publication Critical patent/JP6556725B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/004—Scanning details, e.g. scanning stages fixed arrays, e.g. switchable aperture arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • General Engineering & Computer Science (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2016540646A 2013-12-17 2014-12-17 走査型顕微鏡検査方法および走査型顕微鏡 Active JP6556725B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013021482.3A DE102013021482A1 (de) 2013-12-17 2013-12-17 Verfahren zur Scanning-Mikroskopie und Scanning-Mikroskop
DE102013021482.3 2013-12-17
PCT/EP2014/078202 WO2015091634A1 (de) 2013-12-17 2014-12-17 Verfahren zur scanning-mikroskopie und scanning-mikroskop

Publications (3)

Publication Number Publication Date
JP2017502341A JP2017502341A (ja) 2017-01-19
JP2017502341A5 JP2017502341A5 (OSRAM) 2018-01-18
JP6556725B2 true JP6556725B2 (ja) 2019-08-07

Family

ID=52278608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016540646A Active JP6556725B2 (ja) 2013-12-17 2014-12-17 走査型顕微鏡検査方法および走査型顕微鏡

Country Status (5)

Country Link
US (2) US10884226B2 (OSRAM)
EP (1) EP3084500B1 (OSRAM)
JP (1) JP6556725B2 (OSRAM)
DE (1) DE102013021482A1 (OSRAM)
WO (1) WO2015091634A1 (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016215177B4 (de) * 2016-08-15 2024-07-04 Carl Zeiss Microscopy Gmbh Verfahren und Anordnung zur Erfassung von Bilddaten
EP3538941B1 (en) 2016-11-10 2025-04-23 The Trustees of Columbia University in the City of New York Rapid high-resolution imaging methods for large samples
WO2018232521A1 (en) * 2017-06-22 2018-12-27 Arthur Edward Dixon Msia scanning instrument with increased dynamic range
CN108827920B (zh) * 2018-03-21 2022-05-27 苏州国科医工科技发展(集团)有限公司 一种低荧光漂白共聚焦成像方法及系统
DE102018123381A1 (de) * 2018-09-24 2020-03-26 Leica Microsystems Cms Gmbh Verfahren und Vorrichtung zum Abrastern einer Probe
US11650513B2 (en) 2018-09-27 2023-05-16 Asml Netherlands B.V. Apparatus and method for measuring a position of a mark
DE102023101782B3 (de) 2023-01-25 2024-06-13 Leica Microsystems Cms Gmbh Vorrichtung und Verfahren zum Erzeugen eines zusammengesetzten Bildes einer Probe
DE102023210980A1 (de) * 2023-11-07 2025-05-08 Carl Zeiss Microscopy Gmbh Verfahren und Vorrichtung zur Korrektur von Bilddaten

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3816632B2 (ja) 1997-05-14 2006-08-30 オリンパス株式会社 走査型顕微鏡
NL1023440C2 (nl) 2003-05-16 2004-11-17 Univ Amsterdam Werkwijze en inrichting voor het vormen van een afbeelding van een object.
US7253950B2 (en) * 2003-07-17 2007-08-07 Olympus Corporation Scanning laser microscope
DE10344060A1 (de) * 2003-09-23 2005-05-04 Zeiss Carl Jena Gmbh Konfokales Laser-Scanning-Mikroskop
DE102008034137A1 (de) 2007-09-28 2009-04-02 Carl Zeiss Microlmaging Gmbh Mikroskop und Verfahren zum Betreiben eines Mikroskops
JP5259154B2 (ja) 2007-10-24 2013-08-07 オリンパス株式会社 走査型レーザ顕微鏡
JP2010262104A (ja) * 2009-05-01 2010-11-18 Nikon Corp 走査型共焦点顕微鏡
DE102009043746A1 (de) * 2009-09-30 2011-03-31 Carl Zeiss Microimaging Gmbh Verfahren zum Erzeugen von Bildern mit erweitertem Dynamikumfang und optisches Gerät zur Durchführung eines solchen Verfahrens, insbesondere Laser-Scanning-Mikroskop
CN102985809B (zh) * 2010-05-12 2016-11-09 利康股份有限公司 具有减少的通道串扰的高动态范围扫描
EP2694932B1 (en) * 2011-04-07 2018-02-21 The UWM Research Foundation, Inc High speed microscope with spectral resolution
DE102012019121A1 (de) * 2011-09-29 2013-04-04 Carl Zeiss Microscopy Gmbh Verfahren zur Variation des Scanfeldes eines Laser-Scanning-Mikroskops
WO2013126999A1 (en) * 2012-03-02 2013-09-06 Huron Technologies International Inc. Scanner with increased dynamic range

Also Published As

Publication number Publication date
US20160299326A1 (en) 2016-10-13
WO2015091634A1 (de) 2015-06-25
US20210116691A1 (en) 2021-04-22
EP3084500B1 (de) 2019-10-30
DE102013021482A1 (de) 2015-06-18
US11487093B2 (en) 2022-11-01
US10884226B2 (en) 2021-01-05
EP3084500A1 (de) 2016-10-26
JP2017502341A (ja) 2017-01-19

Similar Documents

Publication Publication Date Title
JP6556725B2 (ja) 走査型顕微鏡検査方法および走査型顕微鏡
JP5623278B2 (ja) 顕微鏡および顕微鏡の操作方法
JP5485289B2 (ja) 分解能増進顕微鏡法
JP6282706B2 (ja) 物体の２次元または３次元の位置調整のための高解像度顕微鏡および方法
JP5392406B2 (ja) 顕微鏡装置、観察方法
US11143854B2 (en) Method for imaging a sample using a fluorescence microscope with stimulated emission depletion
EP3033610B1 (en) Stimulated emission-depletion (sted) microscopy based on time gating of excitation beam and synchronous detection of fluorescence emission
US20130126755A1 (en) Method and device for simultaneous multi-channel and multi-method acquisition of synchronized parameters in cross-system fluorescence lifetime applications
US12146832B2 (en) Microscope and method of microscopy for providing illumination light and generating an illumination pattern
CN116391143A (zh) 通过自适应扫描定位单个荧光染料分子的方法和荧光显微镜
US7394063B2 (en) Microscope for investigating the lifetime of excited states in a sample
US20120229815A1 (en) Laser scanning microscope and method for operation thereof
US7645971B2 (en) Image scanning apparatus and method
JP2024523517A (ja) 試料の輝度情報を取得するための方法及び装置
JP4798990B2 (ja) 走査顕微鏡において複数の異なる放射波長を分離するための方法及び装置
JP2016534395A (ja) 高解像度の３ｄ蛍光顕微鏡検査
WO2025180543A1 (zh) 一种受激辐射损耗超分辨荧光寿命成像方法
US20220019067A1 (en) Light microscope and microscopy method
US20240053594A1 (en) Method and Device for Microscopy
JP2017151416A (ja) 高速高分解能の顕微鏡検査方法、および高速高分解能の顕微鏡
JP2017003700A (ja) レーザ顕微鏡
CH705318B1 (en) Apparatus and method for time-resolved fluorescence detection.
JP2006189468A (ja) １光子励起型蛍光観察装置および方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171204

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20171204

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20181128

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20181204

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190215

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190611

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190710

R150 Certificate of patent or registration of utility model

Ref document number: 6556725

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250