JP6546524B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus for heating, drying and heat treating a web, a substrate and the like.

  Heretofore, a heat treatment apparatus has been proposed for heating, drying or heat treatment while running a long web. The heat treatment apparatus carries the web from the loading port while maintaining the heat treatment chamber having thermal insulation at a high temperature, applies hot air from the nozzle to the web to perform heat treatment, and then carries it out from the unloading port (e.g. 1).

JP, 2014-202464, A

  In the heat treatment apparatus as described above, an opening is provided on the side surface of the heat treatment chamber in order to inspect the inside of the heat treatment chamber or to remove the nozzle, and a door is provided openably in this opening. However, since the door frame of the opening portion is made of metal, the heat from the heat treatment chamber is transferred and the temperature is high, and there is a problem that an operator may touch the door frame to cause a burn or the like.

  Then, an object of this invention is to provide the heat processing apparatus which keeps the metal door frame of a heat processing room from becoming high temperature in view of the said problem.

  The present invention comprises a heat treatment chamber, a rectangular opening opened to the side surface of the heat treatment chamber, and a door provided openably and closably in the opening, the heat treatment chamber having a metal inner wall, and a metal An outer wall made of aluminum and a heat insulating material provided between the inner wall and the outer wall, and an edge portion of the opening is provided with a door frame which is frame-shaped and made of metal; A plurality of frame holes are provided in the thickness portion at predetermined intervals, and a frame closing plate for closing the frame holes is provided.

  According to the present invention, the metal door frame of the heat treatment chamber does not become hot.

It is a perspective view of the heat treatment apparatus which shows one Embodiment of this invention. It is the longitudinal cross-sectional view seen from the left side of the heat processing chamber. It is the longitudinal cross-sectional view which looked at the heat processing chamber from the front. It is the cross-sectional view seen from the heat processing room, the door frame, and the door top. It is a perspective view of the door frame of a heat treatment room. It is a side view of a door.

  A heat treatment apparatus 10 according to an embodiment of the present invention will be described based on FIGS. 1 to 6. The heat treatment apparatus 10 of the present embodiment dries the web W having the coating liquid applied to the upper and lower surfaces by the floating method. The web W is, for example, a film, a fabric, a metal foil, a paper, a metal mesh.

(1) Configuration of Heat Treatment Apparatus 10 The configuration of the heat treatment apparatus 10 will be described based on FIGS. 1 to 3. The heat treatment apparatus 10 has a rectangular heat treatment chamber 12. An inlet 14 for the web W is opened at the front of the heat treatment chamber 12, and an outlet 16 is opened at the rear. Further, a rectangular opening 36 is provided on the right side surface of the heat treatment apparatus 10, and a door 38 is provided in the opening 36 so as to be openable and closable. The door 38 has a frame-like door main body 40, a window 42 provided at the center of the door main body 40, and a heat insulating glass 44 fitted in the window 42.

  As shown in FIG. 2, an upper duct 18 is installed on the upper inside of the heat treatment chamber 12 so as to extend from the rear to the front, and a lower duct 20 extends in the lower direction inside the heat treatment chamber 12 from the rear to the front As installed.

  A plurality of upper nozzles 22 extending in the left-right direction (the width direction of the web W) are provided at predetermined intervals in the front-rear direction of the lower surface of the upper duct 18. A slit-like outlet 22 a for blowing hot air is provided on the lower surface of the upper nozzle 22 in the width direction of the web W. In the front-rear direction of the upper surface of the lower duct 20, a plurality of lower nozzles 24 extending in the left-right direction are provided at predetermined intervals. A slit-like outlet 24 a for blowing hot air is provided in the width direction of the web W on the upper surface of the lower nozzle 22. The upper nozzles 22 and the lower nozzles 24 are disposed in a staggered manner, and in the front-rear direction between the upper nozzles 22 and the lower nozzles 24, transport paths for the web W are provided.

  As shown in FIG. 3, on the left side of the rear of the upper duct 18 and the lower duct 20, a connecting duct 26 for connecting the upper duct 18 and the lower duct 20 is provided. A fan device 28 and an air heating device 30 comprising steam, oil as a heat medium, or an electric heater are provided on the upper side of the connection duct 26 and outside the left side surface of the heat treatment chamber 12. Further, a suction port 32 is provided on the front upper side of the left side surface of the front portion of the heat treatment chamber 12. From the suction port 32 toward the heating device 30, a suction duct 34 is provided in the front-rear direction at the upper left side of the heat treatment chamber 12.

(2) Heat insulation structure of heat treatment chamber 12 The heat insulation structure of the heat treatment chamber 12 will be described based on FIGS. 4 to 6. The front, rear, left and right sides, ceiling, and bottom of the heat treatment chamber 12 have a double structure of the metal inner wall 46 and the metal outer wall 48, and between the inner wall 46 and the outer wall 48, glass wool Insulating material 56 is housed.

  At the upper, lower, left, and right edges of the rectangular opening 36 on the right side surface of the heat treatment chamber 12, a frame-like stainless steel door frame 50 is provided. As shown in FIG. 4, the door frame 50 has a thick portion 50a, an inner flange 50b provided at an inner end of the thick portion 50b, and an outer flange 50c provided at an outer end of the thick portion 50a. In the thickness portion 50a covering the thickness portion of the opening portion 36, a rectangular frame hole 52 is opened at predetermined intervals. The frame holes 52 are rectangular, and a rectangular frame closing plate 54 for closing the frame holes 52 is welded to the inside. The frame closing plate 54 is made of stainless steel, and the thickness of the stainless steel plate constituting the frame closing plate 54 is thinner than the thickness of the stainless steel plate constituting the thickness portion 50 a of the door frame 50. The inner flange 50 b is welded to the inner wall 46. The outer flange 50 c is welded in a state of covering the edge of the outer wall 48.

  Between the inner wall 46 and the outer wall 48 of the front surface, the rear surface, the left and right side surfaces, the ceiling surface, and the bottom surface of the heat treatment chamber 12, metal reinforcing members 58 are provided longitudinally or laterally at predetermined intervals. The inner wall 46 side of the reinforcing member 58 is bent and welded to the inner wall 46, and the outer wall 48 side is bent and fixed via the outer wall 48 and the heat resistant tape 60. The heat-resistant tape 60 is a glass tape having both low cost and heat resistance, and in addition to this, a ribbon tape woven using a silica tape using high purity silica fiber and an alumina fiber or ceramic fiber may be used. .

  Next, the heat insulation structure of the door 38 will be described. The frame-like door body 40 is composed of an outer wall 62 and an inner wall 64. A stainless steel peripheral portion 66 is provided on a thickness portion between the outer wall 62 and the inner wall 64, which is a member constituting the upper, lower, left, and right outer peripheral portions of the door main body 40. In the peripheral portion 66, door holes 68 are opened at predetermined intervals. The door hole 68 is rectangular as shown in FIG. 6 and is closed from the inside by a door closing plate 70. The thickness of the stainless steel plate constituting the door closing plate 70 is formed thinner than the thickness of the stainless steel plate constituting the peripheral portion 66 of the door main body 40.

  Rectangular window holes 74 are also opened at predetermined intervals in the thickness portion of the window frame 72 that constitutes the upper, lower, left, and right inner circumferences of the window 42 provided at the center of the door main body 40, and the rectangular window closing plate 76 It is closed from the inside. The thickness of the stainless steel plate constituting the window closing plate 76 is thinner than the thickness of the stainless steel plate constituting the window frame 72.

  In the door main body 40, the heat insulating material 80 is also stored in a space surrounded by the outer wall 62, the inner wall 64, the peripheral portion 66, and the window frame 72. As described above, the heat insulating glass 44 is fitted into the window 42 provided at the center of the door main body 40. In addition, a seal member 78 is provided in the shape of a frame at the inner edge of the door main body 40, that is, in the vicinity of the peripheral portion 66. The seal member 78 contacts the inner flange 50b of the door frame 50 with the door 38 closed, and seals the heat from flowing out.

(3) Usage of Heat Treatment Apparatus 10 The usage of the heat treatment apparatus 10 will be described based on FIGS. 2 and 3. An operator operates a control device (not shown) to drive the fan device 28 to heat the air from the fan device 28 with the heating device 30 to form hot air, pass through the connecting duct 26, and the upper duct 18 and the lower duct Blow on 20. The hot air sent to the upper duct 18 blows downward from the blowout port 22a of the upper nozzle 22, and the hot wind sent to the lower duct 20 blows upward from the blowout port 24a of the lower nozzle 24. Then, the inside of the heat treatment apparatus 10 is raised to a predetermined temperature (for example, 100 ° C.). Next, the web W coated with the coating liquid on the upper and lower surfaces is carried in from the carry-in port 14 and is carried out from the carry-out port 16 through the carry-in path. At this time, the web W is in a floating state, and the hot air from the upper nozzles 22 and the lower nozzles 24 arranged in a zigzag form waves in a triangular wave shape to heat-treat (dry) the upper and lower surfaces of the web W. The hot air blown out from the upper nozzle 22 and the lower nozzle 24 is sucked from the suction port 32 and circulated to the heating device 30 through the suction duct 34.

  Further, the operator observes the heat treatment state of the web W inside the heat treatment chamber 12 through the heat insulating glass 44 of the window 42 provided in the door 38 while the heat treatment apparatus 10 is heat treatment.

  Furthermore, when the worker replaces the upper nozzle 22 and the lower nozzle 24 inside the heat treatment chamber 12, the heat treatment apparatus 10 is stopped, the inside of the heat treatment chamber 12 is sufficiently cooled, and then the door 38 is opened and opened. Perform replacement work from part 36.

(4) Effects According to the present embodiment, a plurality of frame holes 52 are opened in the thickness portion 50a of the stainless steel door frame 50, and the surface area is small, so the heat in the heat treatment chamber 12 is not easily transmitted. The door frame 50 does not easily get hot (for example, 50 ° C. or more). In particular, since the thickness of the stainless steel plate constituting the frame closing plate 54 is thinner than the thickness of the stainless steel plate constituting the thickness portion 50 a of the door frame 50, the heat is less likely to be transmitted. Therefore, there is no fear of a worker being burned.

  Further, the heat insulating material 56 stored in the heat treatment chamber 12 does not go outside by the frame closing plate 54 closing the frame hole 52 opened in the door frame 50.

  In addition, since the reinforcing members 58 are provided at predetermined intervals between the inner wall 46 and the outer wall 48 of each surface of the heat treatment chamber 12, each wall of the heat treatment chamber 12 does not bend. Since the reinforcing material 58 is fixed to the outer wall 48 through the heat resistant tape 60, the heat in the heat treatment chamber 12 is difficult to be transmitted, and the outer wall 48 does not easily get hot.

  Further, since a plurality of door openings 68 are opened in the peripheral portion 66 in the thick portion of the door main body 40 and the surface area is small, the heat in the heat treatment chamber 12 is hardly transmitted, and the outer wall 62 of the door main body 40 is It is hard to become high temperature. In particular, since the thickness of the stainless steel plate constituting the door closing plate 70 is thinner than the thickness of the stainless steel plate constituting the peripheral portion 66, heat is less likely to be transmitted.

  In addition, a plurality of window holes 74 are also opened in the thick portion of the window frame 72 of the window 42 and the surface area is small, so the heat in the heat treatment chamber 12 is difficult to be transmitted, and the outer wall 62 of the door main body 40 becomes hot. Hateful. In particular, since the thickness of the stainless steel plate constituting the window closing plate 76 is thinner than the thickness of the stainless steel plate constituting the window frame 72, heat is more difficult to be transmitted.

  Further, since the door hole 68 is closed by the door closing plate 70 and the window hole 74 is closed by the window closing plate 76, the heat insulating material 80 stored in the door main body 40 does not go out.

(5) Modifications In the above embodiment, the window hole 74 is provided in the window frame 72, but instead, the window frame 72 may be fixed to the outer wall 62 of the door main body 40 via a heat resistant tape. Also in this case, heat is not easily transmitted from the window frame 72.

  Moreover, although the window 42 was provided in the door 38 in the said embodiment, the door 38 which does not provide the window 42 may be sufficient.

  Moreover, although the one window 42 was provided in the door 38 in the said embodiment, you may provide several windows 42. As shown in FIG.

  Moreover, the door frame 50 and the peripheral part 66 of the door 38 may be formed with metals other than stainless steel.

  Moreover, although the said embodiment demonstrated the case where the web W in which the coating liquid was coated by the upper and lower surfaces was heat-processed in a floating state, as a method of heat-processing the web W, you may be methods other than this. . For example, the upper nozzles are disposed in the heat treatment chamber 12 along the front-back direction at predetermined intervals, and the web W coated with the coating liquid is allowed to run on the roller only on the upper surface. A method of heat treating only the upper surface of W may be used. Alternatively, both ears of the web W may be fixed by a tenter chain, and the web W may be spread and traveled in the heat treatment chamber 12.

  Moreover, in the said embodiment, although the web W was made to drive | work a horizontal direction, not only this but this embodiment is applicable also to the heat processing apparatus 10 made to drive | work to a perpendicular direction and a diagonal direction.

  Further, although the long web W is heat-treated in the above embodiment, it may be replaced by a heat treatment apparatus for heat-treating a plate-like object such as a substrate.

  Although one embodiment of the present invention has been described above, this embodiment is presented as an example and is not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and the gist of the invention, and are included in the invention described in the claims and the equivalent scope thereof.

DESCRIPTION OF SYMBOLS 10 ... Heat processing apparatus, 12 ... Heat processing room, 36 ... Opening part, 38 ... Door, 40 ... Door main body, 42 ... Window, 44 ... Heat insulation glass, 46 .. -Inner wall, 48-Outer wall, 50-Door frame, 52-Hole for frame, 54-Block closing plate for frame, 56-Thermal insulation, 58-Reinforcement, 60- · Heat resistant tape, 62 · · · Outer wall, 64 · · · inner wall, 66 · · · peripheral portion

Claims (10)

Heat treatment room,
A rectangular opening at the side of the heat treatment chamber,
A door provided openably and closably at the opening;
Have
The heat treatment chamber has a metal inner wall, a metal outer wall, and a heat insulating material provided between the inner wall and the outer wall.
At the edge of the opening, a frame-shaped metal door frame is provided.
A plurality of frame holes are provided at predetermined intervals in the thickness portion of the door frame,
A closing plate for the frame is provided for closing the hole for the frame;
Heat treatment equipment. An outer flange is formed from the outer end of the thick portion,
An inner flange is formed from the inner end of the thick portion,
The outer flange is fixed to the edge of the opening in the outer wall,
The inner flange is fixed to the edge of the opening in the inner wall,
The heat treatment apparatus according to claim 1. The door includes a door main body, a window provided in the door main body, and a heat-resistant glass disposed in the window.
Thermal insulation is provided inside the door body,
A metal peripheral portion is provided on the outer periphery of the door body,
A plurality of door holes are provided at predetermined intervals in the thickness portion of the peripheral portion,
A door closing plate for closing the door hole is provided.
The heat treatment apparatus according to claim 1. The door frame and the surrounding portion are made of stainless steel,
The heat processing apparatus of Claim 3. The thickness of the metal plate constituting the closing plate for frame is thinner than the thickness of the metal plate constituting the thick portion of the door frame,
The heat treatment apparatus according to claim 1. The thickness of the metal plate constituting the door closing plate is thinner than the thickness of the metal plate constituting the peripheral portion of the door body,
The heat processing apparatus of Claim 3. A reinforcing material is disposed between the inner wall and the outer wall of the heat treatment chamber,
A heat resistant tape is provided between the outer wall and the reinforcing material,
The heat treatment apparatus according to claim 1. The heat insulating material is glass wool, and the heat resistant tape is a glass tape.
The heat treatment apparatus according to claim 7. An inlet for the web opens at the front of the heat treatment chamber,
An outlet for the web is open at the rear surface of the heat treatment chamber,
The heat treatment apparatus according to claim 1. A plurality of upper nozzles are disposed at predetermined intervals above the transport path in the heat treatment chamber,
A plurality of lower nozzles are disposed at predetermined intervals below the transport path.
The heat treatment apparatus according to claim 8.

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