TWI410599B - Heat treatment apparatus - Google Patents
Heat treatment apparatus Download PDFInfo
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- TWI410599B TWI410599B TW095127678A TW95127678A TWI410599B TW I410599 B TWI410599 B TW I410599B TW 095127678 A TW095127678 A TW 095127678A TW 95127678 A TW95127678 A TW 95127678A TW I410599 B TWI410599 B TW I410599B
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 95
- 239000000463 material Substances 0.000 claims abstract description 89
- 239000002184 metal Substances 0.000 claims abstract description 40
- 238000009826 distribution Methods 0.000 abstract description 7
- 238000010030 laminating Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000012774 insulation material Substances 0.000 description 3
- 238000005304 joining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011490 mineral wool Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
- C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
- C03B29/025—Glass sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B27/00—Tempering or quenching glass products
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- General Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Control Of Resistance Heating (AREA)
Abstract
Description
本發明關於一種加熱裝置，使用於對在電漿顯示器或液晶顯示器等平板顯示器裡所使用的玻璃基板等板狀被處理物加熱處理之際。The present invention relates to a heating device for heating a plate-shaped object to be processed such as a glass substrate used in a flat panel display such as a plasma display or a liquid crystal display.
平板顯示器用之玻璃基板的製造步驟中包含以220℃~230℃程度之處理溫度對作為被處理物之玻璃基板加熱的處理。此加熱處理使用具備有加熱槽之多層板片式加熱裝置。複數片板狀被處理物隔著間隔疊層收納在加熱槽裡。In the manufacturing step of the glass substrate for a flat panel display, the process of heating the glass substrate as a to-be-processed object with the process temperature of 220-230 degreeC is contained. This heat treatment uses a multilayer plate type heating device equipped with a heating tank. A plurality of sheet-like objects are stacked and stacked in a heating bath at intervals.
該加熱裝置之加熱槽的內壁面由金屬板構成，其前面形成有開口部。於金屬板之外側處，除開口部外之全面配置有絕熱材料。開口部由爐口門開閉。被處理物經由開口部相對於加熱處理時保持在既定處理溫度之加熱槽內部而1片1片地被搬進搬出(例如，參照專利文獻1)。The inner wall surface of the heating tank of the heating device is made of a metal plate, and an opening is formed in the front surface thereof. At the outer side of the metal plate, a heat insulating material is disposed in all but the opening. The opening is opened and closed by the furnace door. The material to be processed is carried in and out of one piece at a time in the heating tank which is held at a predetermined processing temperature during the heat treatment (see, for example, Patent Document 1).
(專利文獻1)日本專利特開2000－169169號公報(Patent Document 1) Japanese Patent Laid-Open Publication No. 2000-169169
在加熱槽內壁面之中的前面形成有開口部，在被處理物搬進搬出時開口部開放，使內壁面之前面暴露於外界空氣而溫度降低。當結束被處理物之搬進搬出後封閉開口部，則內壁面之前面因加熱槽內之熱而再度升溫至處理溫度。此時，構成內壁面之前面的金屬板內面側與外面側之間在金屬板的厚度方向上產生溫度梯度(temperaturegradient)。An opening is formed in the front surface of the inner wall surface of the heating tank, and the opening is opened when the workpiece is carried in and out, and the front surface of the inner wall surface is exposed to the outside air to lower the temperature. When the opening of the workpiece is closed and the opening is closed, the front surface of the inner wall surface is again heated to the processing temperature by the heat in the heating bath. At this time, a temperature gradient is generated in the thickness direction of the metal plate between the inner surface side and the outer surface side of the metal plate constituting the front surface of the inner wall surface.
在習知之加熱裝置中，加熱槽之內壁面因為由單一材料之金屬板構成，所以構成內壁面之前面的金屬板之內面側與外面側因溫度梯度而產生膨脹量之差，於是加熱槽之前面在厚度方向上產生熱變形。當形成有開口部之前面在厚度方向上產生熱變形，則開口部與爐口門之間會產生間隙。經由此間隙，加熱槽之熱氣漏出於外部，外界空氣流入至加熱槽內，因而產生加熱槽內之溫度分佈不均且熱損失增大之問題。配置在開口部之內周面的金屬板及配置在爐口門的金屬板亦可能產生同樣之熱變形，因該等之熱變形亦產生同樣之問題。In the conventional heating device, since the inner wall surface of the heating groove is made of a metal plate of a single material, the difference between the inner surface side and the outer side side of the metal plate on the front surface of the inner wall surface due to the temperature gradient is generated, and the heating groove is formed. The front surface is thermally deformed in the thickness direction. When the surface is formed in the thickness direction before the opening portion is formed, a gap is formed between the opening portion and the furnace door. Through this gap, the hot air of the heating tank leaks to the outside, and the outside air flows into the heating tank, thereby causing a problem that temperature distribution in the heating tank is uneven and heat loss is increased. The metal plate disposed on the inner circumferential surface of the opening portion and the metal plate disposed on the furnace door may also undergo the same thermal deformation, and the same problem occurs due to the thermal deformation.
為解決此問題而對開口部配置補強材料，則招致裝置之大型化和成本之高漲。又，亦可考慮預先配合加熱處理時變形之加熱槽前面的形狀而對爐口門予以變形，然爐口門之設計和調整作業會趨於複雜。In order to solve this problem, the reinforcing material is disposed in the opening portion, which causes an increase in size and cost of the device. Further, it is also conceivable to deform the furnace door in advance in conjunction with the shape of the front surface of the heating groove which is deformed during the heat treatment, and the design and adjustment work of the furnace door tend to be complicated.
本發明之目的在於提供一種藉對構成加熱槽之內壁面中至少前面的金屬板採用雙金屬，不造成裝置之大型化或成本之高漲及設計或調整作業之複雜化，即可防止加熱槽之前面在厚度方向的熱變形，進而能實現加熱槽內之溫度分佈的均勻化且降低熱損失的加熱裝置。It is an object of the present invention to provide a bimetal by using at least a metal plate constituting at least the front wall surface of the heating tank, which does not cause an increase in size or cost of the device, and complicates design or adjustment work, thereby preventing the heating tank from being entangled. The front side is thermally deformed in the thickness direction, thereby further achieving a uniform heating of the temperature distribution in the heating tank and reducing the heat loss.
為解決上述課題，本發明加熱裝置具備有第1金屬板。第1金屬板配置於加熱槽之內周面中至少具有開口部之面，並為將線膨脹率互異之外面側材料與內面側材料接合而成的雙金屬。於第1金屬板之中，外面側材料之線膨脹率大於內面側材料之線膨脹率。In order to solve the above problems, the heating device of the present invention includes a first metal plate. The first metal plate is disposed on a surface of the inner circumferential surface of the heating groove having at least an opening, and is a bimetal in which the surface side material and the inner surface side material are bonded to each other. Among the first metal plates, the linear expansion ratio of the outer side material is larger than the linear expansion ratio of the inner side material.
加熱槽之內部保持於既定處理溫度，板狀被處理物經由開口部1片1片地被搬進搬出。在形成有此開口部之內壁面中，內面側與外面側之間會產生溫度差。形成有開口部之內壁面由外面側材料與內面側材料接合而成的雙金屬構成，比內面側材料低溫的外面側材料之線膨脹率大於內面側材料之線膨脹率。The inside of the heating tank is held at a predetermined processing temperature, and the plate-shaped workpiece is carried in and out through the opening 1 piece. In the inner wall surface on which the opening portion is formed, a temperature difference occurs between the inner surface side and the outer surface side. The inner wall surface on which the opening is formed is made of a bimetal in which the outer side material and the inner surface side material are joined together, and the linear expansion ratio of the outer side material which is lower than the inner surface side material is larger than the linear expansion ratio of the inner surface side material.
外面側材料之線膨脹率及內面側材料之線膨脹率，根據加熱處理被處理物時配置在具有開口部之內壁面的金屬板之外面側與內面側之間產生的溫度梯度而決定，藉以使外面側材料之膨脹量與內面側材料之膨脹量略為一致。因此，在被處理物之加熱處理中，內壁面不會在厚度方向發生變形。The linear expansion ratio of the outer side material and the linear expansion ratio of the inner surface side material are determined according to the temperature gradient generated between the outer surface side and the inner surface side of the metal plate having the inner wall surface of the opening when the workpiece is heated. Therefore, the amount of expansion of the material on the outer side is slightly the same as the amount of expansion of the material on the inner side. Therefore, in the heat treatment of the workpiece, the inner wall surface is not deformed in the thickness direction.
構成開口部之內周面的金屬板亦可由雙金屬構成，其外面側材料之線膨脹率大於內面側材料之線膨脹率。The metal plate constituting the inner circumferential surface of the opening portion may be made of a bimetal, and the material expansion ratio of the outer side material is larger than the linear expansion ratio of the inner surface side material.
外面側材料之線膨脹率及內面側材料之線膨脹率，根據加熱處理被處理物時配置在開口部之內周面的金屬板之外面側與內面側之間產生的溫度梯度而決定，藉以使外面側材料之膨脹量與內面側材料之膨脹量略為一致。因此，在被處理物之加熱處理時，開口部之內周面不會在內壁面之厚度方向發生變形。The linear expansion ratio of the outer side material and the linear expansion ratio of the inner surface side material are determined according to the temperature gradient generated between the outer surface side and the inner surface side of the metal plate disposed on the inner circumferential surface of the opening when the workpiece is heated. Therefore, the amount of expansion of the material on the outer side is slightly the same as the amount of expansion of the material on the inner side. Therefore, during the heat treatment of the workpiece, the inner peripheral surface of the opening does not deform in the thickness direction of the inner wall surface.
開閉開口部的爐口門之內側面亦可由雙金屬構成，其外面側材料之線膨脹率大於內面側材料之線膨脹率。The inner side surface of the furnace opening door of the opening and closing opening portion may be made of bimetal, and the linear expansion ratio of the material on the outer side is larger than the linear expansion ratio of the material on the inner surface side.
外面側材料之線膨脹率及內面側材料之線膨脹率，根據加熱處理被處理物時配置在爐口門之內側面的金屬板之外面側與內面側之間產生的溫度梯度而決定，藉以使外面側材料之膨脹量與內面側材料之膨脹量略為一致。因此，在被處理物之加熱處理中，爐口門不會在厚度方向發生變形。The linear expansion ratio of the outer side material and the linear expansion ratio of the inner surface side material are determined according to the temperature gradient generated between the outer surface side and the inner surface side of the metal plate disposed on the inner side surface of the furnace door when heat-treating the workpiece. Therefore, the amount of expansion of the material on the outer side is slightly the same as the amount of expansion of the material on the inner side. Therefore, in the heat treatment of the workpiece, the furnace door is not deformed in the thickness direction.
根據本發明之加熱裝置，藉對構成加熱槽之內壁面中至少形成有開口部之面的金屬板，採用外面側材料之線膨脹率大於內面側材料之線膨脹率的雙金屬，不造成裝置之大型化或成本之高漲及設計或調整作業之複雜化，即可防止加熱槽之前面在厚度方向的熱變形。因此，本發明之加熱裝置能實現加熱槽內之溫度分佈之均勻化、熱損失之降低化。According to the heating device of the present invention, the metal plate constituting at least the opening portion of the inner wall surface of the heating groove is made of a bimetal having a linear expansion ratio of the outer side material larger than the inner surface side material, and does not cause The increase in size or cost of the device and the complication of design or adjustment operations can prevent thermal deformation of the front surface of the heating bath in the thickness direction. Therefore, the heating device of the present invention can achieve uniformization of the temperature distribution in the heating tank and reduction in heat loss.
圖1為表示本發明加熱裝置實施形態之板片式加熱裝置10之構成的外觀示意圖。又，圖2為板片式加熱裝置10之側視剖視圖。枚葉式加熱裝置10具備有呈中空長方體形狀之加熱槽1。加熱槽1之前面側形成有開口部2。開口部2可由爐口門3開閉自如。爐口門3由上下分割成複數之長方形的構件構成。複數片玻璃基板等之板狀被處理物20之間分別隔著間隔疊層收納於加熱槽1之內部。爐口門3與加熱槽1前面之間配置有密封構件7。密封構件7沿加熱槽1前面之開口部2的周緣部安裝。Fig. 1 is a perspective view showing the configuration of a plate type heating apparatus 10 according to an embodiment of the heating apparatus of the present invention. 2 is a side cross-sectional view of the plate type heating device 10. The leaf type heating device 10 is provided with a heating tank 1 having a hollow rectangular parallelepiped shape. An opening 2 is formed on the front side of the heating tank 1. The opening 2 can be opened and closed by the furnace door 3. The furnace door 3 is composed of a member that is divided into a plurality of rectangular shapes up and down. The plate-shaped objects 20 to be processed, such as a plurality of glass substrates, are stacked and housed inside the heating tank 1 at intervals. A sealing member 7 is disposed between the furnace door 3 and the front surface of the heating tank 1. The sealing member 7 is attached along the peripheral portion of the opening 2 in front of the heating tank 1.
加熱槽1之內部在被處理物20之加熱處理中，保持在例如220℃~230℃程度之既定處理溫度。被處理物20經由開口部2搬進搬出於加熱槽1內。當被處理物20搬進搬出時，在爐口門3之複數構件中，使被加熱槽1中相對向於被處理物20被搬進搬出的上下方向之位置的構件，及其上方之構件往上方移動。藉由縮小開口部2之開放面積，抑制加熱槽1內部溫度之變動。The inside of the heating tank 1 is maintained at a predetermined processing temperature of, for example, about 220 ° C to 230 ° C in the heat treatment of the workpiece 20 . The workpiece 20 is carried in and out of the heating tank 1 through the opening 2 . When the workpiece 20 is carried in and out, the member in the vertical direction of the object to be processed 20 is moved in and out of the plurality of members of the furnace door 3, and the member above and above Move up. By reducing the open area of the opening 2, the temperature fluctuation inside the heating tank 1 is suppressed.
另外，圖1所示之例中，爐口門3由5個構件構成，但不限定在此個數。Further, in the example shown in Fig. 1, the furnace door 3 is composed of five members, but the number is not limited thereto.
板片式加熱裝置10中構成6面體之內壁面的前面構件41、上面構件42、底面構件43、左側面構件44、右側面構件45(圖2未表示)及背面構件46於外側配置有絕熱材料5。前面構件41、上面構件42、底面構件43、左側面構件44、右側面構件45及背面構件46分別由金屬板構成。上面構件42、底面構件43、左側面構件44、右側面構件45及背面構件46分別例如由SUS430或SUS304等單一組成之板材構成。絕熱材料5之外側進而配置有金屬板構成之外壁6。前面構件41在與開口部2相對向之位置處形成有開口47。開口部2未配置有絕熱材料5。The front member 41, the upper member 42, the bottom member 43, the left side member 44, the right side member 45 (not shown in FIG. 2), and the back member 46 which constitute the inner wall surface of the hexahedron in the plate type heating device 10 are disposed outside. Thermal insulation material 5. The front member 41, the upper member 42, the bottom member 43, the left side member 44, the right side member 45, and the back member 46 are each formed of a metal plate. The upper member 42, the bottom member 43, the left side member 44, the right side member 45, and the back member 46 are each formed of a single plate material such as SUS430 or SUS304. On the outer side of the heat insulating material 5, a metal plate is further disposed to constitute the outer wall 6. The front member 41 is formed with an opening 47 at a position opposed to the opening portion 2. The heat insulating material 5 is not disposed in the opening portion 2.
矩形狀開口部2之內周面配置有上面構件21、下面構件22、左側面構件23、右側面構件24(圖2中未表示)。上面構件21、下面構件22、左側面構件23及右側面構件24分別由金屬板構成。位在開口部2外側之爐口門3內面側配置有以金屬板構成之內面構件31。The upper surface 21, the lower surface member 22, the left side surface member 23, and the right side surface member 24 (not shown in FIG. 2) are disposed on the inner circumferential surface of the rectangular opening portion 2. The upper member 21, the lower member 22, the left side member 23, and the right side member 24 are each formed of a metal plate. An inner surface member 31 made of a metal plate is disposed on the inner surface side of the furnace door 3 outside the opening 2.
在將被處理物20搬進搬出加熱槽1內部之際當開口部呈現開放時，加熱槽1之開口部2附近暴露於外界空氣。因此，接近開口部之前面構件41整體的溫度下降。When the opening 20 is opened while the workpiece 20 is being carried into and out of the heating tank 1, the vicinity of the opening 2 of the heating tank 1 is exposed to the outside air. Therefore, the temperature of the entire front surface member 41 close to the opening portion is lowered.
當被處理物20搬進搬出之後，開口部2呈現封閉時，前面構件41由其內面側起升溫至加熱溫度。此時，從內面側至外面側之整體並非同時升溫，而在前面構件41之內面側和外面側之間產生溫度梯度，內面側比外面側高溫。When the object to be processed 20 is carried in and out, the opening portion 2 is closed, and the front member 41 is heated from the inner surface side to the heating temperature. At this time, the entire temperature from the inner surface side to the outer surface side is not simultaneously heated, but a temperature gradient is generated between the inner surface side and the outer surface side of the front surface member 41, and the inner surface side is higher than the outer surface side.
圖3(A)為板片式加熱裝置10之加熱槽1的前面構件41中主要部分之放大剖視圖。加熱槽1之內壁面的前面構件41為1.2mm~1.5mm程度之厚度，以接合高熱膨脹材料之外面側材料411與低熱膨脹材料之內面側材料412而成的雙金屬構成。作為其中一例子，外面側材料411為SUS304，內面側材料412為SUS430。前面構件41為本發明之第1金屬板。Fig. 3(A) is an enlarged cross-sectional view showing the main part of the front member 41 of the heating tank 1 of the plate type heating device 10. The front member 41 of the inner wall surface of the heating tank 1 has a thickness of about 1.2 mm to 1.5 mm, and is formed by joining a bimetal made of the outer surface side material 411 of the high thermal expansion material and the inner surface side material 412 of the low thermal expansion material. As an example, the outer side material 411 is SUS304, and the inner side material 412 is SUS430. The front member 41 is the first metal plate of the present invention.
絕熱材料5例如由岩絨(rock wool)或陶瓷纖維構成。外壁6例如由SUS430之板材構成。The heat insulating material 5 is composed of, for example, rock wool or ceramic fibers. The outer wall 6 is made of, for example, a plate material of SUS430.
如圖3(B)所示般，在取代上述前面構件41而具備有由單一材料之金屬板構成的前面構件41A時，因內面側與外面側之間的溫度梯度而使內面側之膨脹量和外面側之膨脹量產生很大的落差。前面構件41A如圖中二點鏈線所示般往厚度方向發生變形。此變形使開口部2之周緣部與爐口門3之間產生間隙，因此即使在爐口門3封閉開口部2的狀態，加熱槽1內之熱氣亦會漏出，外界空氣亦會流入加熱槽1內。As shown in Fig. 3(B), when the front member 41A made of a single metal plate is provided instead of the front member 41, the inner surface side is caused by the temperature gradient between the inner surface side and the outer surface side. The amount of expansion and the amount of expansion on the outer side produce a large drop. The front member 41A is deformed in the thickness direction as shown by the two-dot chain line. This deformation causes a gap between the peripheral edge portion of the opening portion 2 and the furnace door 3, so that even when the furnace door 3 closes the opening portion 2, the hot air in the heating tank 1 leaks, and the outside air also flows into the heating tank. 1 inside.
相對於此，前面構件41以在低溫之外面側配置有高熱膨脹材料之雙金屬構成。在內面側為高溫側與外面側之間產生溫度梯度之情況下，內面側之膨脹量和外面側之膨脹量亦不會產生很大的落差，因而前面構件41不會往厚度方向產生很大的變形。On the other hand, the front member 41 is made of a bimetal in which a high thermal expansion material is disposed on the outer surface side at a low temperature. In the case where a temperature gradient is generated between the high temperature side and the outer side on the inner surface side, the amount of expansion on the inner surface side and the expansion amount on the outer surface side do not cause a large drop, and thus the front member 41 does not generate in the thickness direction. Great deformation.
尤其，藉由選擇外面側材料411及內面側材料412之材質，在因開口部2之開閉而於前面構件41之前面側和背面側之間產生溫度梯度之下，使外面側材料411之膨脹量與內面側材料412之膨脹量略同，因而可完全防止前面構件41在厚度方向之變形。在爐口門3封閉開口部2之狀態下，加熱槽1內之熱氣不會漏出，外界空氣也不會流入加熱槽1內。可使加熱槽1內之溫度分佈維持均勻，可實現熱損失之降低。In particular, by selecting the material of the outer side material 411 and the inner surface side material 412, the outer side material 411 is formed under the temperature gradient between the front side surface and the back side side of the front surface member 41 due to the opening and closing of the opening portion 2. The amount of expansion is slightly the same as the amount of expansion of the inner side material 412, so that the deformation of the front member 41 in the thickness direction can be completely prevented. In a state where the opening 3 is closed by the furnace door 3, the hot air in the heating tank 1 does not leak, and the outside air does not flow into the heating tank 1. The temperature distribution in the heating tank 1 can be kept uniform, and the heat loss can be reduced.
圖4為加熱槽1中開口部2之下面部份的放大剖視圖。開口部2內周面之下面構件22由接合高熱膨脹材料之外面側材料221與低熱膨脹材料之內面側材料222而成之雙金屬構成。作為其中一例子，外面側材料221為SUS304，內面側材料222為SUS430。前面構件41以於低溫側之外面側配置有高熱膨脹材料之雙金屬構成。4 is an enlarged cross-sectional view showing a lower portion of the opening portion 2 in the heating tank 1. The lower surface member 22 of the inner peripheral surface of the opening portion 2 is composed of a bimetal formed by joining the outer surface side material 221 of the high thermal expansion material and the inner surface side material 222 of the low thermal expansion material. As an example, the outer side material 221 is SUS304, and the inner side material 222 is SUS430. The front member 41 is formed of a bimetal in which a high thermal expansion material is disposed on the outer surface side of the low temperature side.
由於開口部2之開閉，內面側為高溫側而在與外面側之間產生溫度梯度之情況下，下面構件22之內面側的膨脹量和外面側的膨脹量亦不會產生很大的落差，因此不會往開口部2之前後方向產生很大的變形。When the opening portion 2 is opened and closed, the inner surface side is on the high temperature side, and the temperature gradient is generated between the inner surface side and the outer surface side, the amount of expansion on the inner surface side of the lower member 22 and the amount of expansion on the outer surface side do not greatly increase. Since there is a drop, it does not cause a large deformation in the front and rear directions of the opening portion 2.
開口部2內周面之上面構件21、左側面構件23及右側面構件24亦採取與下面構件22同樣之構成。上面構件21、下面構件22、左側面構件23及右側面構件24為本發明之第2金屬板。由於開口部2之開閉，內面側為高溫側而在與外面側之間產生溫度梯度之情況下，此等金屬板於開口部2內周面之整體亦不會產生很大的變形。在爐口門3封閉開口部2之狀態下，加熱槽1內之熱氣不會漏出，外界空氣也不會流入加熱槽1內。可使加熱槽1內之溫度分佈維持均勻，從而可實現熱損失之降低。The upper member 21, the left side member 23, and the right side member 24 of the inner peripheral surface of the opening 2 are also configured similarly to the lower member 22. The upper member 21, the lower member 22, the left side member 23, and the right side member 24 are the second metal plates of the present invention. When the opening portion 2 is opened and closed, the inner surface side is on the high temperature side, and a temperature gradient occurs between the inner surface side and the outer surface side, the metal sheets are not greatly deformed as a whole in the inner circumferential surface of the opening portion 2. In a state where the opening 3 is closed by the furnace door 3, the hot air in the heating tank 1 does not leak, and the outside air does not flow into the heating tank 1. The temperature distribution in the heating tank 1 can be kept uniform, so that the heat loss can be reduced.
配置在爐口門3靠加熱槽1側之面的內部構件31，作為本發明之第3金屬板，亦可採取由高熱膨脹材料之外面側材料311與低熱膨脹材料之內面側材料312接合而成之雙金屬的構成。於被處理物20搬進搬出時，開閉開口部2之際於內面側構件31之外面側與內面側產生溫度梯度時，亦可防止內面構件31及爐口門3在厚度方向發生變形。可維持密封構件7之密封性，因此可使加熱槽1內之溫度分佈維持均勻，進而可實現熱損失之降低。The inner member 31 disposed on the surface of the furnace door 3 on the side of the heating tank 1 is used as the third metal plate of the present invention, and the outer surface material 311 of the high thermal expansion material may be joined to the inner surface side material 312 of the low thermal expansion material. The composition of the bimetal. When the workpiece 20 is moved in and out, when the temperature gradient is generated on the outer surface side and the inner surface side of the inner surface side member 31 when the opening 2 is opened and closed, the inner surface member 31 and the furnace door 3 can be prevented from occurring in the thickness direction. Deformation. Since the sealing property of the sealing member 7 can be maintained, the temperature distribution in the heating tank 1 can be maintained uniform, and the heat loss can be reduced.
又，構成加熱槽1之內壁面的上面構件42、底面構件43、左側面構件44、右側面構件45及背面構件46之一部份或全部亦可採取與前面構件41同樣之雙金屬的構成。Further, part or all of the upper member 42, the bottom member 43, the left side member 44, the right side member 45, and the back member 46 constituting the inner wall surface of the heating tank 1 may be formed of the same bimetal as the front member 41. .
1．．．加熱槽1. . . Heating tank
2．．．開口部2. . . Opening
3．．．爐口門3. . . Furnace gate
5．．．絕熱材料5. . . Thermal insulation material
6．．．外壁6. . . Outer wall
7．．．密封構件7. . . Sealing member
10．．．板片式加熱裝置10. . . Plate heating device
20．．．被處理物20. . . Treated object
21．．．上面構件twenty one. . . Upper member
22．．．下面構件twenty two. . . Component below
23．．．左側面構件twenty three. . . Left side member
31．．．內面構件31. . . Inner member
41．．．前面構件41. . . Front member
41A．．．前面構件41A. . . Front member
42．．．上面構件42. . . Upper member
43．．．底面構件43. . . Bottom member
44．．．左側面構件44. . . Left side member
46．．．背面構件46. . . Back member
47．．．開口47. . . Opening
221．．．外面側材料221. . . Outer side material
222．．．內面側材料222. . . Inner side material
311．．．外面側材料311. . . Outer side material
312．．．內面側材料312. . . Inner side material
411．．．外面側材料411. . . Outer side material
412．．．內面側材料412. . . Inner side material
圖1為表示本發明加熱裝置之實施形態的板片式加熱裝置之構成的外觀示意圖。Fig. 1 is a perspective view showing the configuration of a plate type heating apparatus according to an embodiment of the heating apparatus of the present invention.
圖2為上述板片式加熱裝置之側視剖視圖。Figure 2 is a side cross-sectional view of the above-described plate type heating device.
圖3(A)為上述板片式加熱裝置之加熱槽的前面構件中主要部分之放大剖視圖。Fig. 3(A) is an enlarged cross-sectional view showing the main part of the front member of the heating tank of the above-described plate type heating device.
圖3(B)說明用單一材料構成同前面構件時的變形狀態。Fig. 3(B) illustrates a state of deformation when the same member is formed of a single material.
圖4為上述加熱槽中開口部之下面部份的放大剖視圖。Fig. 4 is an enlarged cross-sectional view showing a lower portion of the opening in the heating tank.
5．．．絕熱材料5. . . Thermal insulation material
6．．．外壁6. . . Outer wall
41．．．前面構件41. . . Front member
41A．．．前面構件41A. . . Front member
411．．．外面側材料411. . . Outer side material
412．．．內面側材料412. . . Inner side material
Claims (3)
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| JP2006147227A JP5074707B2 (en) | 2006-05-26 | 2006-05-26 | Heating device |
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| TW200743772A TW200743772A (en) | 2007-12-01 |
| TWI410599B true TWI410599B (en) | 2013-10-01 |
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| KR (1) | KR101285358B1 (en) |
| TW (1) | TWI410599B (en) |
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| JP5301816B2 (en) * | 2007-11-21 | 2013-09-25 | 光洋サーモシステム株式会社 | Heat resistant vacuum insulation |
| JP5272486B2 (en) * | 2008-04-09 | 2013-08-28 | 株式会社Ｉｈｉ | Heat treatment furnace |
| JP5567812B2 (en) * | 2009-10-09 | 2014-08-06 | 光洋サーモシステム株式会社 | Heat treatment equipment |
| CN106971020B (en) * | 2017-02-22 | 2020-05-05 | 天津博迈科海洋工程有限公司 | Method for optimizing thickness of fireproof coating of column inside closed module |
Citations (5)
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|---|---|---|---|---|
| JPH10206033A (en) * | 1997-01-20 | 1998-08-07 | Tokyo Yogyo Co Ltd | Method of execution refractories for lining induction furnace |
| JP2000169169A (en) * | 1998-12-01 | 2000-06-20 | Koyo Thermo System Kk | Heat treatment apparatus |
| TW533301B (en) * | 2002-04-10 | 2003-05-21 | Koyo Thermo Sys Co Ltd | Heating device |
| TW200600718A (en) * | 2004-05-28 | 2006-01-01 | Dai Ichi High Frequency Co Ltd | Boiler panel heating device and production method of alloy-coated boiler panel |
| JP2006073671A (en) * | 2004-08-31 | 2006-03-16 | Kyocera Kinseki Corp | Package for electronic part |
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| JPS63165596U (en) * | 1987-04-20 | 1988-10-27 | ||
| JPS6478697A (en) * | 1987-09-21 | 1989-03-24 | Ishikawajima Harima Heavy Ind | Vacuum brazing method for aluminum |
| JPH08200956A (en) * | 1995-01-23 | 1996-08-09 | Sumitomo Electric Ind Ltd | Sealing device |
| JPH10141864A (en) * | 1996-11-05 | 1998-05-29 | Kobe Steel Ltd | Heat insulating device is not isotropic pressurizer |
| JPH1194471A (en) * | 1997-09-22 | 1999-04-09 | Kakunenryo Cycle Kaihatsu Kiko | Inner heating sintering furnace |
| JP3590356B2 (en) * | 2001-02-08 | 2004-11-17 | 株式会社不二越 | Continuous vacuum carburizing furnace partition door |
| JP2005114299A (en) * | 2003-10-10 | 2005-04-28 | Matsushita Electric Ind Co Ltd | Microwave kiln |
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- 2006-05-26 JP JP2006147227A patent/JP5074707B2/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10206033A (en) * | 1997-01-20 | 1998-08-07 | Tokyo Yogyo Co Ltd | Method of execution refractories for lining induction furnace |
| JP2000169169A (en) * | 1998-12-01 | 2000-06-20 | Koyo Thermo System Kk | Heat treatment apparatus |
| TW533301B (en) * | 2002-04-10 | 2003-05-21 | Koyo Thermo Sys Co Ltd | Heating device |
| TW200600718A (en) * | 2004-05-28 | 2006-01-01 | Dai Ichi High Frequency Co Ltd | Boiler panel heating device and production method of alloy-coated boiler panel |
| JP2006073671A (en) * | 2004-08-31 | 2006-03-16 | Kyocera Kinseki Corp | Package for electronic part |
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| KR101285358B1 (en) | 2013-07-11 |
| JP5074707B2 (en) | 2012-11-14 |
| KR20070113942A (en) | 2007-11-29 |
| JP2007315707A (en) | 2007-12-06 |
| TW200743772A (en) | 2007-12-01 |
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