JP6538243B6 - 真空測定装置 - Google Patents
真空測定装置 Download PDFInfo
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- JP6538243B6 JP6538243B6 JP2018123356A JP2018123356A JP6538243B6 JP 6538243 B6 JP6538243 B6 JP 6538243B6 JP 2018123356 A JP2018123356 A JP 2018123356A JP 2018123356 A JP2018123356 A JP 2018123356A JP 6538243 B6 JP6538243 B6 JP 6538243B6
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- Prior art keywords
- vacuum
- diaphragm
- vacuum gauge
- measurement
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000005259 measurement Methods 0.000 claims abstract description 62
- 230000005540 biological transmission Effects 0.000 claims abstract description 20
- 238000012546 transfer Methods 0.000 claims abstract description 18
- 239000012530 fluid Substances 0.000 claims abstract description 8
- 239000007788 liquid Substances 0.000 claims description 20
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 6
- 235000011187 glycerol Nutrition 0.000 claims description 5
- 230000017525 heat dissipation Effects 0.000 claims description 5
- 229920002545 silicone oil Polymers 0.000 claims description 5
- 238000001514 detection method Methods 0.000 abstract description 15
- 239000000126 substance Substances 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 5
- 230000007797 corrosion Effects 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 21
- 239000000463 material Substances 0.000 description 11
- 230000001771 impaired effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 206010035148 Plague Diseases 0.000 description 1
- 241000607479 Yersinia pestis Species 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/02—Vacuum gauges having a compression chamber in which gas, whose pressure is to be measured, is compressed
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0026—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means
- G01L9/003—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
【解決手段】圧力伝達方向に沿って順に設けられた前段チャンバー1および真空計2を備え、前段チャンバーは真空計に連通し、内部に前段ダイアフラム11が設けられ、真空計内に測定用ダイアフラム21が設けられ、前段ダイアフラムと測定用ダイアフラムとの間に圧力伝達室が形成され、圧力伝達室内に圧力伝達液8が充填されている。圧力伝達液は、腐食性ガスが存在する真空環境に用いることができ、真空計の測定用ダイアフラムが腐食してしまう問題を回避すると同時に、真空環境における堆積しやすい物質が真空計の内壁および測定用ダイアフラムに堆積して、測定用ダイアフラムの変形を引き起こし、真空度の検出精度を損なう問題を回避する。
【選択図】図1
Description
前記真空測定装置では、前記管路は、螺旋状管路と、直線状管路とを含む。
前記真空測定装置では、前記放熱素子は、均一に分布する放熱フィンである。
前記真空測定装置では、前記前段チャンバーを、500℃以下の加熱温度で加熱するためのヒータをさらに備える。
Claims (7)
- 圧力伝達方向に沿って順に設けられた前段チャンバーおよび真空計を備え、
前記前段チャンバーは、前記真空計に連通し、内部に前段ダイアフラムが設けられ、
前記真空計内に測定用ダイアフラムが設けられ、
前記前段ダイアフラムと前記測定用ダイアフラムとの間に圧力伝達室が形成され、前記圧力伝達室内に圧力伝達液が充填され、
前記前段チャンバーと前記真空計とが管路を介して連通し、前記管路上に放熱素子が設けられ、前記管路は、1つの螺旋状管路と、2つの直線状管路とを含み、1つの前記螺旋状管路が2つの前記直線状管路間に設けられ、2つの前記直線状管路に前記前段チャンバーおよび前記真空計がそれぞれ接続され、2つの前記直線状管路のそれぞれに前記放熱素子が設けられ、前記真空計は、前記管路との連通箇所に断熱板が設けられていることを特徴とする真空測定装置。 - 前記放熱素子は、均一に分布する放熱フィンである、ことを特徴とする請求項1に記載の真空測定装置。
- 前記前段チャンバーに前記圧力伝達液の充填口が設けられている、ことを特徴とする請求項1に記載の真空測定装置。
- 前記真空計内に容量素子、容量分析素子および入出力ユニットがさらに設けられ、
前記容量素子と前記圧力伝達液がそれぞれ前記測定用ダイアフラムの両側に位置し、
前記容量分析素子が前記容量素子に接続され、かつ電極を介して前記入出力ユニットに接続されている、ことを特徴とする請求項1に記載の真空測定装置。 - 前記真空計内に設けられたゲッターをさらに備える、ことを特徴とする請求項1に記載の真空測定装置。
- 前記前段チャンバーを、500℃以下の加熱温度で加熱するためのヒータをさらに備える、ことを特徴とする請求項1に記載の真空測定装置。
- 前記圧力伝達液がグリセリンまたはシリコーンオイルである、ことを特徴とする請求項1乃至6のいずれか一項に記載の真空測定装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711353301.2A CN107976279A (zh) | 2017-12-15 | 2017-12-15 | 一种真空测量装置 |
CN201711353301.2 | 2017-12-15 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP6538243B1 JP6538243B1 (ja) | 2019-07-03 |
JP2019109216A JP2019109216A (ja) | 2019-07-04 |
JP6538243B6 true JP6538243B6 (ja) | 2019-07-31 |
Family
ID=62006484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018123356A Expired - Fee Related JP6538243B6 (ja) | 2017-12-15 | 2018-06-28 | 真空測定装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20190187018A1 (ja) |
JP (1) | JP6538243B6 (ja) |
KR (1) | KR20190072388A (ja) |
CN (1) | CN107976279A (ja) |
WO (1) | WO2019114243A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107976279A (zh) * | 2017-12-15 | 2018-05-01 | 北京创昱科技有限公司 | 一种真空测量装置 |
CN111044602A (zh) * | 2019-12-31 | 2020-04-21 | 中国科学院微电子研究所 | 检测膜片式真空压力计沉积物的方法 |
CN111473805B (zh) * | 2020-04-17 | 2021-09-21 | 江苏多维科技有限公司 | 一种微机电环境传感器及其制备方法 |
CN111766013B (zh) * | 2020-07-09 | 2021-11-30 | 苏州大观信息技术有限公司 | 智能真空表、真空压力智能监控系统和监控方法 |
CN114812925B (zh) * | 2022-05-05 | 2023-08-22 | 国电内蒙古东胜热电有限公司 | 一种电厂凝汽器真空识别计算检测装置及方法 |
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-
2017
- 2017-12-15 CN CN201711353301.2A patent/CN107976279A/zh active Pending
-
2018
- 2018-06-26 WO PCT/CN2018/092739 patent/WO2019114243A1/zh active Application Filing
- 2018-06-28 JP JP2018123356A patent/JP6538243B6/ja not_active Expired - Fee Related
- 2018-06-29 KR KR1020180075130A patent/KR20190072388A/ko not_active Application Discontinuation
- 2018-08-21 US US16/106,014 patent/US20190187018A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2019109216A (ja) | 2019-07-04 |
US20190187018A1 (en) | 2019-06-20 |
JP6538243B1 (ja) | 2019-07-03 |
CN107976279A (zh) | 2018-05-01 |
WO2019114243A1 (zh) | 2019-06-20 |
KR20190072388A (ko) | 2019-06-25 |
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