JP6518513B2 - 水素検出彩色センサー - Google Patents
水素検出彩色センサー Download PDFInfo
- Publication number
- JP6518513B2 JP6518513B2 JP2015107847A JP2015107847A JP6518513B2 JP 6518513 B2 JP6518513 B2 JP 6518513B2 JP 2015107847 A JP2015107847 A JP 2015107847A JP 2015107847 A JP2015107847 A JP 2015107847A JP 6518513 B2 JP6518513 B2 JP 6518513B2
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen
- hydrogen detection
- substrate
- metal catalyst
- sulfide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims description 94
- 239000001257 hydrogen Substances 0.000 title claims description 82
- 229910052739 hydrogen Inorganic materials 0.000 title claims description 82
- 238000001514 detection method Methods 0.000 title claims description 57
- 238000004040 coloring Methods 0.000 title claims description 31
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 41
- 239000003054 catalyst Substances 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 27
- 239000000126 substance Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 238000002845 discoloration Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 6
- 238000001027 hydrothermal synthesis Methods 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229920002457 flexible plastic Polymers 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910000365 copper sulfate Inorganic materials 0.000 claims description 3
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 claims description 3
- 235000019345 sodium thiosulphate Nutrition 0.000 claims description 3
- 150000004763 sulfides Chemical class 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 2
- 239000002041 carbon nanotube Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000000469 dry deposition Methods 0.000 claims description 2
- 239000005350 fused silica glass Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000002923 metal particle Substances 0.000 claims description 2
- 239000010445 mica Substances 0.000 claims description 2
- 229910052618 mica group Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 239000000037 vitreous enamel Substances 0.000 claims description 2
- 238000005566 electron beam evaporation Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 49
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 229910052955 covellite Inorganic materials 0.000 description 9
- 150000002431 hydrogen Chemical class 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 7
- 239000000446 fuel Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000006722 reduction reaction Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 238000000724 energy-dispersive X-ray spectrum Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 101150003085 Pdcl gene Proteins 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000000441 X-ray spectroscopy Methods 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000004042 decolorization Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/10—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using catalysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
- G01N21/783—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour for analysing gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/0444—Concentration; Density
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M2250/00—Fuel cells for particular applications; Specific features of fuel cell system
- H01M2250/20—Fuel cells in motive systems, e.g. vehicle, ship, plane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02T90/40—Application of hydrogen technology to transportation, e.g. using fuel cells
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Molecular Biology (AREA)
- Sustainable Energy (AREA)
- General Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Biophysics (AREA)
- Plasma & Fusion (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Hydrogen, Water And Hydrids (AREA)
- Catalysts (AREA)
Description
基板、
前記基板上に形成され、水素に露出されると化学的変色が起こる硫化物層、及び
前記硫化物層上に形成される金属触媒層を含む水素検出彩色センサーを提供する。
a. 密封されたガスチャンバーを用いて100%の水素に対する水素検出彩色センサーの変色/脱色反応を行った。
b. 排出口のある開放チャンバーを用いて、窒素、酸素及び水蒸気の混合物の雰囲気下で1%の水素(99%の窒素含有)の変色反応を調査した。
c. 全てのガス彩色実験は室温で行われており、サンプル上に2L/minの流量を維持した。
d. 蒸着された薄膜表面のモルフォロジー及び構造的特徴は、日立S4800(日本)走査電子顕微鏡(SEM)及びJEOL、JEM−2100F(USA)透過型電子顕微鏡(TEM)を利用して測定した。
e. EDS(Energy dispersed X-ray spectroscopy)は、TEMに付属された装備を利用して測定しており、このようなデータ資料を介して試料に含まれている元素の種類と質量%の割合を確認することができる。
ビーカーに硫酸銅(0.5M)及びチオ硫酸ナトリウム(0.5M)含有水溶液(100ml)を入れた後、一定の大きさに切断した可撓性プラスチック基板(ポリエチレンテレフタレート)が前記水溶液中に浸るようにビーカーの壁面に斜めに立てておいた。基板の一側面にのみ硫化物層が蒸着されるよう、基板の他側面は3Mテープを用いてマーキングした。化学的湿式蒸着工程は65℃の温度条件を維持しながら、135分間行われた。その結果、基板上に50nmの厚さの硫化物層が蒸着された。
実験例1.
排出口のある開放チャンバー内に前記実施例1で製造された水素検出彩色センサーを取り付けた後、窒素、酸素及び水蒸気が混合された空気雰囲気下で1%の水素(99%の窒素含有)ガスを通過させながら、水素検出彩色センサーの変色反応を肉眼で検査した。
水素ガスによる硫化物層の還元は、800から3000nmの波長範囲の赤外線領域で、水素検出彩色センサーの透過率と吸収率の変化を誘導する。すなわち、図5では、300から3000nmの波長範囲で、100%水素の存在下の水素検出彩色センサーの吸収スペクトルを示しており、図6では、300から3000nmの波長範囲で、100%水素の存在下の水素検出センサーの透過度スペクトルを示している。つまり、図5を検討してみると、1100から2500nmの波長範囲で、水素ガスへの露出前に比べて水素ガスへの露出後に吸収度の減少が観察された。さらに、図6では、1100から2500nmの波長範囲で、水素ガスへの露出前に比べて水素ガスへの露出後に透過度の増加が観察された。このような変化は、水素ガスに対する本発明の水素検出彩色センサーの感度を見せる。
Claims (10)
- 基板、前記基板上に形成され、水素に露出されると化学的変色が起こる硫化物層、及び前記硫化物層上に蒸着された金属触媒層を含み、前記硫化物層は、酸素を含まないサルファイド、CdS、CuS、SnS、MoS、ZnS、SeS、FeS、PdS及びCuSからなる群より選択される1種の単一物または2種以上の硫化物を含むことを特徴とする水素検出彩色センサー。
- 前記基板は、硝子、可撓性プラスチック、シリコン、石英、融合シリカ、ステンレス鋼、マイカ、カーボン、炭素ナノチューブ、ポリマー、セラミック及び磁器エナメルからなる群より選択されることを特徴とする請求項1に記載の水素検出彩色センサー。
- 前記硫化物層は、化学的湿式蒸着方法または乾式蒸着方法を利用して基板上に蒸着することを特徴とする請求項1または2に記載の水素検出彩色センサー。
- 前記硫化物層は、硫酸銅とチオ硫酸ナトリウムを1:5モルで反応させて湿式蒸着した薄膜であることを特徴とする請求項1〜3のいずれか1項に記載の水素検出彩色センサー。
- 前記硫化物層の厚さは、40から50nmであることを特徴とする請求項1に記載の水素検出彩色センサー。
- 前記硫化物層は、基板が露出されないように基板の全体領域に蒸着することを特徴とする請求項1に記載の水素検出彩色センサー。
- 前記金属触媒層は、Pd、Pt、Ru、Mg、Ni、Au及びこれらからなる群より選択される1種の単一物または2種以上の金属粒子を含むことを特徴とする請求項1に記載の水素検出彩色センサー。
- 前記金属触媒層は、水熱合成法または電子ビーム蒸着法を利用して形成することを特徴とする請求項1に記載の水素検出彩色センサー。
- 前記金属触媒層の厚さは、4から5nmであることを特徴とする請求項1に記載の水素検出彩色センサー。
- 前記金属触媒層は、前記硫化物層の一部領域に形成することを特徴とする請求項1に記載の水素検出彩色センサー。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2014-0136138 | 2014-10-08 | ||
KR1020140136138A KR101704122B1 (ko) | 2014-10-08 | 2014-10-08 | 수소 검출 채색 센서 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016075661A JP2016075661A (ja) | 2016-05-12 |
JP6518513B2 true JP6518513B2 (ja) | 2019-05-22 |
Family
ID=55644328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015107847A Active JP6518513B2 (ja) | 2014-10-08 | 2015-05-27 | 水素検出彩色センサー |
Country Status (5)
Country | Link |
---|---|
US (1) | US9846146B2 (ja) |
JP (1) | JP6518513B2 (ja) |
KR (1) | KR101704122B1 (ja) |
CN (1) | CN105510311B (ja) |
DE (1) | DE102015211888B4 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106064093B (zh) * | 2016-05-20 | 2018-09-07 | 辽宁石油化工大学 | 一种原位合成CuS/WO3异质结光催化剂的制备方法 |
CN110312826A (zh) * | 2017-02-17 | 2019-10-08 | 日东电工株式会社 | 气体传感元件及其制造方法 |
KR102452469B1 (ko) * | 2017-08-28 | 2022-10-12 | 현대자동차주식회사 | 연료전지의 수소퍼지 제어방법 및 시스템 |
CN107941787B (zh) | 2017-11-02 | 2020-06-09 | 中山大学 | 氢气传感器及其制备方法、实现氢气检测的方法 |
CN107870635A (zh) * | 2017-11-06 | 2018-04-03 | 龚土婷 | 氢气使用车间用的安全用氢控制装置 |
CN111662650A (zh) * | 2020-05-07 | 2020-09-15 | 北京航天试验技术研究所 | 一种氢敏变色检测胶带及其制备方法和应用 |
KR102485785B1 (ko) * | 2020-07-02 | 2023-01-09 | 한국화학연구원 | 황화수소 가스 검출 센서 |
CN112649161A (zh) * | 2020-11-27 | 2021-04-13 | 宝武清洁能源有限公司 | 气敏色变传感器及基于气敏色变传感的加氢站安全盾系统 |
CN112881475B (zh) * | 2021-01-08 | 2023-04-07 | 温州大学 | 一种多孔SiCO-MoO3高温氢气传感器及其制备方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6039536A (ja) * | 1983-08-12 | 1985-03-01 | Hochiki Corp | ガスセンサ |
JPH01121836U (ja) * | 1988-02-12 | 1989-08-18 | ||
US6596236B2 (en) * | 1999-01-15 | 2003-07-22 | Advanced Technology Materials, Inc. | Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same |
US6800499B2 (en) * | 1999-05-28 | 2004-10-05 | National Science Council | Process for preparing a hydrogen sensor |
US7025138B2 (en) * | 2000-12-08 | 2006-04-11 | Schlumberger Technology Corporation | Method and apparatus for hydrogen sulfide monitoring |
JP3657535B2 (ja) * | 2001-05-29 | 2005-06-08 | 株式会社日本トリム | 水素ラジカルの検出方法及び定量分析方法 |
WO2003046536A1 (en) * | 2001-11-26 | 2003-06-05 | Sony International (Europe) Gmbh | The use of 1d semiconductor materials as chemical sensing materials, produced and operated close to room temperature |
JP3707053B2 (ja) * | 2002-05-08 | 2005-10-19 | 慎司 岡崎 | ガスセンサ用の膜の製造方法 |
US20070251822A1 (en) | 2005-09-02 | 2007-11-01 | William Hoagland | Visual hydrogen sensors using nanoparticles |
JP2007248424A (ja) | 2006-03-20 | 2007-09-27 | Atsumi Tec:Kk | 水素センサ |
US20100059375A1 (en) * | 2006-11-08 | 2010-03-11 | Weiller Bruce H | Metal salt hydrogen sulfide sensor |
JP4919228B2 (ja) * | 2007-05-15 | 2012-04-18 | 独立行政法人日本原子力研究開発機構 | 水素ガス検知膜 |
US8293178B2 (en) | 2007-11-06 | 2012-10-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Chemochromic detector for sensing gas leakage and process for producing the same |
US8574917B2 (en) * | 2007-11-26 | 2013-11-05 | Element One, Inc. | Hydrogen sulfide indicating pigments |
JP2009265072A (ja) * | 2008-03-31 | 2009-11-12 | Jfe Steel Corp | 水素マイクロプリント法 |
KR100987324B1 (ko) | 2008-05-02 | 2010-10-12 | 서강대학교산학협력단 | 내구성이 개선된 수소센서용 가스채색 박막 및 이를포함하는 수소센서 |
JP5671527B2 (ja) * | 2009-05-25 | 2015-02-18 | インスプリオン エービー | 局在表面プラズモン共鳴(lspr)を使用するセンサ |
KR101130084B1 (ko) | 2010-04-28 | 2012-03-28 | 연세대학교 산학협력단 | 수소 센서 및 그 제조방법 |
KR101282768B1 (ko) * | 2010-12-21 | 2013-07-05 | 서강대학교산학협력단 | 수소 검출 장치 및 이를 위한 센서 제조 방법 |
WO2013129473A1 (ja) | 2012-02-29 | 2013-09-06 | 日油技研工業株式会社 | 過酸化物検知インジケータ |
KR20140136138A (ko) | 2013-05-20 | 2014-11-28 | 삼성전자주식회사 | 가중치를 두어 블러링을 수행하는 전자 장치 및 방법 |
-
2014
- 2014-10-08 KR KR1020140136138A patent/KR101704122B1/ko active IP Right Grant
-
2015
- 2015-05-27 JP JP2015107847A patent/JP6518513B2/ja active Active
- 2015-06-26 DE DE102015211888.6A patent/DE102015211888B4/de active Active
- 2015-06-28 US US14/752,960 patent/US9846146B2/en active Active
- 2015-07-17 CN CN201510422731.XA patent/CN105510311B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JP2016075661A (ja) | 2016-05-12 |
US20160103107A1 (en) | 2016-04-14 |
KR101704122B1 (ko) | 2017-02-07 |
CN105510311B (zh) | 2022-05-06 |
DE102015211888B4 (de) | 2022-06-30 |
DE102015211888A1 (de) | 2016-04-14 |
CN105510311A (zh) | 2016-04-20 |
US9846146B2 (en) | 2017-12-19 |
KR20160041690A (ko) | 2016-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6518513B2 (ja) | 水素検出彩色センサー | |
Pargoletti et al. | Engineering of SnO2–graphene oxide nanoheterojunctions for selective room-temperature chemical sensing and optoelectronic devices | |
Tsai et al. | High sensitivity of NO gas sensors based on novel Ag-doped ZnO nanoflowers enhanced with a UV light-emitting diode | |
Arul et al. | Temperature modulated Cu-MOF based gas sensor with dual selectivity to acetone and NO2 at low operating temperatures | |
Ahmadi et al. | Comparison between electrochemical and photoelectrochemical detection of dopamine based on titania-ceria-graphene quantum dots nanocomposite | |
Rai et al. | Role of Pd nanoparticles in gas sensing behaviour of Pd@ In 2 O 3 yolk–shell nanoreactors | |
Annanouch et al. | Aerosol-assisted CVD-grown WO3 nanoneedles decorated with copper oxide nanoparticles for the selective and humidity-resilient detection of H2S | |
Rahman et al. | Carbon black co-adsorbed ZnO nanocomposites for selective benzaldehyde sensor development by electrochemical approach for environmental safety | |
Rahman et al. | Ethanol sensor development based on ternary-doped metal oxides (CdO/ZnO/Yb 2 O 3) nanosheets for environmental safety | |
Joshi et al. | One-step approach for preparing ozone gas sensors based on hierarchical NiCo 2 O 4 structures | |
Mani et al. | Novel and facile synthesis of randomly interconnected ZnO nanoplatelets using spray pyrolysis and their room temperature sensing characteristics | |
Mani et al. | A highly selective and wide range ammonia sensor—Nanostructured ZnO: Co thin film | |
Thangamani et al. | Titanium dioxide (TiO2) nanoparticles reinforced polyvinyl formal (PVF) nanocomposites as chemiresistive gas sensor for sulfur dioxide (SO2) monitoring | |
Li et al. | UV light activated SnO2/ZnO nanofibers for gas sensing at room temperature | |
Grigorieva et al. | Synthesis, structure, and sensor properties of vanadium pentoxide nanorods | |
Chang et al. | Heterostructural (Sr0. 6Bi0. 305) 2Bi2O7/ZnO for novel high-performance H2S sensor operating at low temperature | |
US20230003676A1 (en) | Graphene-based gas sensing platform | |
Kumar et al. | Surface modification of ZnO nanopillars to enhance the sensitivity towards methane: The studies of experimental and first-principle simulation | |
Park et al. | Tuning the sensing responses towards room-temperature hypersensitive methanol gas sensor using exfoliated graphene-enhanced ZnO quantum dot nanostructures | |
Rahman et al. | Potential application of mixed metal oxide nanoparticle-embedded glassy carbon electrode as a selective 1, 4-dioxane chemical sensor probe by an electrochemical approach | |
Mokrushin et al. | Gas-sensitive nanostructured ZnO films praseodymium and europium doped: Electrical conductivity, selectivity, influence of UV irradiation and humidity | |
Pauporté et al. | Al‐Doped ZnO nanowires by electrochemical deposition for selective VOC nanosensor and nanophotodetector | |
Liang et al. | Practical room temperature formaldehyde sensing based on a combination of visible-light activation and dipole modification | |
Xia et al. | Enhanced Free‐Radical Generation on MoS2/Pt by Light and Water Vapor Co‐Activation for Selective CO Detection with High Sensitivity | |
Santhosam et al. | Donated free electrons induced enhancement in the NH3 sensing ability of ZnO thin films-Effect of terbium loading |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20161130 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180316 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180802 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180914 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181109 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190329 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190422 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6518513 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |