JP6505420B2 - プローブ及びプローブカード - Google Patents
プローブ及びプローブカード Download PDFInfo
- Publication number
- JP6505420B2 JP6505420B2 JP2014232355A JP2014232355A JP6505420B2 JP 6505420 B2 JP6505420 B2 JP 6505420B2 JP 2014232355 A JP2014232355 A JP 2014232355A JP 2014232355 A JP2014232355 A JP 2014232355A JP 6505420 B2 JP6505420 B2 JP 6505420B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- spring arm
- connection portion
- main body
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000523 sample Substances 0.000 title claims description 239
- 239000000758 substrate Substances 0.000 claims description 77
- 238000013461 design Methods 0.000 description 32
- 239000004065 semiconductor Substances 0.000 description 20
- 238000012986 modification Methods 0.000 description 16
- 230000004048 modification Effects 0.000 description 16
- 230000003014 reinforcing effect Effects 0.000 description 10
- 125000006850 spacer group Chemical group 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- 238000005259 measurement Methods 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000005489 elastic deformation Effects 0.000 description 3
- 230000002787 reinforcement Effects 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Images
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014232355A JP6505420B2 (ja) | 2014-11-17 | 2014-11-17 | プローブ及びプローブカード |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014232355A JP6505420B2 (ja) | 2014-11-17 | 2014-11-17 | プローブ及びプローブカード |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2016095255A JP2016095255A (ja) | 2016-05-26 |
JP2016095255A5 JP2016095255A5 (enrdf_load_stackoverflow) | 2018-01-25 |
JP6505420B2 true JP6505420B2 (ja) | 2019-04-24 |
Family
ID=56069941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014232355A Active JP6505420B2 (ja) | 2014-11-17 | 2014-11-17 | プローブ及びプローブカード |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6505420B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201700046645A1 (it) | 2017-04-28 | 2018-10-28 | Technoprobe Spa | Scheda di misura per un’apparecchiatura di test di dispositivi elettronici |
CN113376413B (zh) * | 2020-03-10 | 2023-12-19 | 台湾中华精测科技股份有限公司 | 垂直式探针头及其双臂式探针 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011232313A (ja) * | 2010-04-30 | 2011-11-17 | Nhk Spring Co Ltd | コンタクトプローブおよびプローブユニット |
JP5530312B2 (ja) * | 2010-09-03 | 2014-06-25 | 株式会社エンプラス | 電気部品用ソケット |
JP5673366B2 (ja) * | 2011-06-03 | 2015-02-18 | 山一電機株式会社 | 半導体素子用ソケット |
-
2014
- 2014-11-17 JP JP2014232355A patent/JP6505420B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2016095255A (ja) | 2016-05-26 |
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