JP6475260B2 - 物体を洗浄するための装置 - Google Patents
物体を洗浄するための装置 Download PDFInfo
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- JP6475260B2 JP6475260B2 JP2016559391A JP2016559391A JP6475260B2 JP 6475260 B2 JP6475260 B2 JP 6475260B2 JP 2016559391 A JP2016559391 A JP 2016559391A JP 2016559391 A JP2016559391 A JP 2016559391A JP 6475260 B2 JP6475260 B2 JP 6475260B2
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- 238000004140 cleaning Methods 0.000 title claims description 27
- 238000001459 lithography Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000004891 communication Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 166
- 230000005855 radiation Effects 0.000 description 49
- 239000002245 particle Substances 0.000 description 24
- 238000000059 patterning Methods 0.000 description 11
- 238000005286 illumination Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000005684 electric field Effects 0.000 description 8
- 230000009467 reduction Effects 0.000 description 8
- 238000000926 separation method Methods 0.000 description 7
- 238000007689 inspection Methods 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 239000000446 fuel Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- 230000005670 electromagnetic radiation Effects 0.000 description 4
- 230000005686 electrostatic field Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 210000001747 pupil Anatomy 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
- G03F7/70708—Chucks, e.g. chucking or un-chucking operations or structural details being electrostatic; Electrostatically deformable vacuum chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Plasma & Fusion (AREA)
- Environmental & Geological Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
[0001] 本願は、2014年4月9日に出願した欧州特許出願第14164043.3号の優先権を主張し、その全体を本願に参考として組み込む。
Claims (15)
- 物体を洗浄するための装置であって、前記装置は、
前記物体を支持するための物体サポートと、
前記物体が前記物体サポート上に配置されているときに前記物体の第1表面を低圧にさらすための低圧チャンバと、
前記物体が前記物体サポート上に配置されているときに前記物体の前記第1表面に近接すると共に前記第1表面から切り離されて配置された電極であって、前記物体の前記第1表面に近接した前記物体サポートの表面と電気通信している、電極と、
前記電極と前記物体との間に電圧を印加し、それによって前記物体と前記電極との間に放電を発生させる電源とを備え、
前記電極には、前記物体の前記第1表面に近接した前記物体サポートの前記表面上で抵抗層が設けられている、装置。 - 前記物体サポートは、前記物体を前記チャンバ内で支持する、請求項1に記載の装置。
- 前記抵抗層は、約105Ωより大きい抵抗を有する、請求項1又は2に記載の装置。
- 前記抵抗層は、約1012Ωより小さい抵抗を有する、請求項1〜3のいずれかに記載の装置。
- 前記抵抗層は、約106Ω・mより大きい抵抗率を有する、請求項1〜4のいずれかに記載の装置。
- 前記抵抗層は、約1014Ω・mより小さい抵抗率を有する、請求項1〜5のいずれかに記載の装置。
- 前記電圧の大きさは、約200Vより大きい、請求項1〜6のいずれかに記載の装置。
- 前記電圧の大きさは、約1000Vより小さい、請求項1〜7のいずれかに記載の装置。
- 前記物体が前記物体サポート上に配置されているときの前記物体サポートと前記物体の前記第1表面との間の離隔距離は、約5mmより大きい、請求項1〜8のいずれかに記載の装置。
- 第2電極をさらに含み、電源は、前記第1電極と前記物体との間に第1電圧を印加し、前記第2電極と前記物体との間に第2電圧を印加する、請求項1〜9のいずれかに記載の装置。
- 前記第2電圧は、前記第1電圧とは反対の符号を有する、請求項10に記載の装置。
- 前記第2電圧は、前記第1電圧と実質的に等しい大きさを有する、請求項11に記載の装置。
- 請求項1〜12のいずれかに記載の物体を洗浄するための装置を含む、リソグラフィツール。
- 前記低圧チャンバはリソグラフィツールのロードロックである、請求項13に記載のリソグラフィツール。
- 物体を洗浄する方法であって、前記方法は、
洗浄される物体を提供することと、
前記物体を支持することと、
前記洗浄される物体の第1表面を低圧にさらすことと、
前記物体の前記第1表面に近接すると共に前記第1表面から切り離された電極を提供することと、
前記電極に、前記物体の前記第1表面に近接した前記物体サポートの前記表面上で抵抗層を提供することと、
前記物体と前記電極との間に放電を発生させるように前記電極と前記物体との間に電圧を印加することと、
前記電極と前記物体の前記第1表面との間に電流路を提供することとを含む、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14164043 | 2014-04-09 | ||
EP14164043.3 | 2014-04-09 | ||
PCT/EP2015/054277 WO2015154917A1 (en) | 2014-04-09 | 2015-03-02 | Apparatus for cleaning an object |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017518523A JP2017518523A (ja) | 2017-07-06 |
JP6475260B2 true JP6475260B2 (ja) | 2019-02-27 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016559391A Active JP6475260B2 (ja) | 2014-04-09 | 2015-03-02 | 物体を洗浄するための装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10133196B2 (ja) |
EP (1) | EP3129833B1 (ja) |
JP (1) | JP6475260B2 (ja) |
KR (1) | KR102408173B1 (ja) |
CN (1) | CN106164776B (ja) |
TW (1) | TWI659270B (ja) |
WO (1) | WO2015154917A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7001715B2 (ja) * | 2017-06-01 | 2022-01-20 | エーエスエムエル ネザーランズ ビー.ブイ. | パーティクル除去装置および関連システム |
US11048175B2 (en) * | 2017-08-28 | 2021-06-29 | Asml Holding N.V. | Apparatus for and method cleaning a support inside a lithography apparatus |
JP7250803B2 (ja) * | 2018-03-02 | 2023-04-03 | エーエスエムエル ネザーランズ ビー.ブイ. | 材料のパターン付き層を形成するための方法及び装置 |
NL2022780A (en) * | 2018-04-12 | 2019-10-22 | Asml Netherlands Bv | Apparatus and method |
KR102614546B1 (ko) * | 2018-11-09 | 2023-12-14 | 에이에스엠엘 홀딩 엔.브이. | 리소그래피 장치 내의 지지부를 청결하게 하는 장치 및 방법 |
US20220308465A1 (en) * | 2021-03-26 | 2022-09-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for removing contamination |
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US2383469A (en) | 1943-12-15 | 1945-08-28 | Libbey Owens Ford Glass Co | Method of cleaning and coating glass, plastics, and other surfaces |
US3868271A (en) | 1973-06-13 | 1975-02-25 | Ibm | Method of cleaning a glass substrate by ionic bombardment in a wet active gas |
BE1001027A3 (nl) | 1987-10-21 | 1989-06-13 | Bekaert Sa Nv | Werkwijze en inrichting voor het reinigen van een langwerpig metalen substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde substraten en met dergelijke substraten versterkte voorwerpen uit polymeermateriaal. |
US4883437A (en) | 1988-06-29 | 1989-11-28 | Rca Licensing Corp. | Method for spot-knocking an electron gun mount assembly of a crt utilizing a magnetic field |
US5393575A (en) | 1992-03-03 | 1995-02-28 | Esterlis; Moisei | Method for carrying out surface processes |
US5938854A (en) * | 1993-05-28 | 1999-08-17 | The University Of Tennessee Research Corporation | Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure |
JP3162272B2 (ja) * | 1995-08-22 | 2001-04-25 | 東京エレクトロン株式会社 | プラズマ処理方法 |
US5948294A (en) | 1996-08-30 | 1999-09-07 | Mcdermott Technology, Inc. | Device for cathodic cleaning of wire |
US5779807A (en) | 1996-10-29 | 1998-07-14 | Applied Materials, Inc. | Method and apparatus for removing particulates from semiconductor substrates in plasma processing chambers |
JPH1157632A (ja) * | 1997-08-28 | 1999-03-02 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
US5880924A (en) | 1997-12-01 | 1999-03-09 | Applied Materials, Inc. | Electrostatic chuck capable of rapidly dechucking a substrate |
JP3644246B2 (ja) | 1998-04-10 | 2005-04-27 | 三菱電機株式会社 | X線露光方法 |
DE19907911C2 (de) | 1999-02-24 | 2003-02-27 | Mag Maschinen Und Appbau Ag Gr | Vorrichtung und Verfahren zur Behandlung von elektrisch leitfähigem Endlosmaterial |
JP3398936B2 (ja) * | 1999-04-09 | 2003-04-21 | 日本エー・エス・エム株式会社 | 半導体処理装置 |
EP1329773A3 (en) | 2002-01-18 | 2006-08-30 | ASML Netherlands B.V. | Lithographic apparatus, apparatus cleaning method, and device manufacturing method |
JP2003257949A (ja) * | 2002-03-06 | 2003-09-12 | Matsushita Electric Ind Co Ltd | 液晶表示素子の製造方法 |
US7092231B2 (en) | 2002-08-23 | 2006-08-15 | Asml Netherlands B.V. | Chuck, lithographic apparatus and device manufacturing method |
JP2007115839A (ja) * | 2005-10-19 | 2007-05-10 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法及びプラズマ処理装置 |
US7894037B2 (en) * | 2007-07-30 | 2011-02-22 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20110049100A1 (en) * | 2008-01-16 | 2011-03-03 | Charm Engineering Co., Ltd. | Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the same |
NL1036769A1 (nl) * | 2008-04-23 | 2009-10-26 | Asml Netherlands Bv | Lithographic apparatus, device manufacturing method, cleaning system and method for cleaning a patterning device. |
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JP2010174325A (ja) * | 2009-01-29 | 2010-08-12 | Kyocera Corp | 放電用電極体、放電用電極アセンブリおよび放電処理装置 |
US20130087287A1 (en) * | 2011-10-10 | 2013-04-11 | Korea Institute Of Machinery & Materials | Plasma reactor for removal of contaminants |
EP3550364A1 (en) | 2012-02-03 | 2019-10-09 | ASML Netherlands B.V. | Substrate holder, lithographic apparatus and method of manufacturing a substrate holder |
-
2015
- 2015-03-02 US US15/302,146 patent/US10133196B2/en active Active
- 2015-03-02 KR KR1020167031250A patent/KR102408173B1/ko active IP Right Grant
- 2015-03-02 EP EP15709638.9A patent/EP3129833B1/en active Active
- 2015-03-02 WO PCT/EP2015/054277 patent/WO2015154917A1/en active Application Filing
- 2015-03-02 JP JP2016559391A patent/JP6475260B2/ja active Active
- 2015-03-02 CN CN201580018680.2A patent/CN106164776B/zh active Active
- 2015-03-26 TW TW104109817A patent/TWI659270B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI659270B (zh) | 2019-05-11 |
TW201541197A (zh) | 2015-11-01 |
CN106164776A (zh) | 2016-11-23 |
CN106164776B (zh) | 2019-04-23 |
US20170205717A1 (en) | 2017-07-20 |
KR20160144438A (ko) | 2016-12-16 |
WO2015154917A1 (en) | 2015-10-15 |
US10133196B2 (en) | 2018-11-20 |
EP3129833A1 (en) | 2017-02-15 |
EP3129833B1 (en) | 2018-05-02 |
KR102408173B1 (ko) | 2022-06-13 |
JP2017518523A (ja) | 2017-07-06 |
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